Germanium single crystal preparation furnace

Abstract

The utility model relates to a germanium single crystal preparation furnace, belongs to the technical field of germanium production, and solves the technical problem that the seeding angle is inconvenient to adjust during seeding during production of germanium single crystals at present. The germanium single crystal preparation furnace comprises a furnace body, a material taking assembly, a connecting rod, a mounting disc and an adjusting rod, wherein the furnace body is provided with a cavity for preparing germanium single crystals; the material taking assembly is mounted above the furnace body, one end of the connecting rod is mounted on the material taking assembly, the other end of the connecting rod extends towards the cavity, the mounting disc is rotationally mounted at the end, away from the material taking assembly, of the connecting rod, and a seed crystal piece used for generating germanium single crystals is mounted at the end, away from the connecting rod, of the mounting disc. One end of the adjusting rod is rotatably mounted on one side, close to the connecting rod, of the mounting disc, the other end is mounted on the connecting rod, and one end, away from the mounting disc, of the adjusting rod moves along the connecting rod to adjust the angle of the mounting disc. Therefore, the germanium single crystal preparation furnace can adjust the angle of the seed crystal piece, so that the seed crystal can grow better.

Description

Technical Field

[0001] The utility model belongs to the technical field of germanium production, and particularly relates to a germanium single crystal preparation furnace. Background Art

[0002] In the field of semiconductor material manufacturing, germanium single crystals are widely used in various electronic and optical devices due to their unique physical and chemical properties. As one of the main technologies for producing germanium single crystals, the Czochralski method can produce high-quality, large-diameter germanium single crystals by precisely controlling the crystallization process of molten germanium. However, in the process of preparing germanium single crystals by the Czochralski method, the seeding step is a crucial link, which directly determines the initial growth direction and crystal quality of the single crystal.

[0003] In the existing equipment for preparing germanium single crystals by the Czochralski method, it is not convenient to adjust the angle of the seeding. Utility Model Content

[0004] The utility model provides a germanium single crystal preparation furnace, which is used to solve the technical problem that the crystal seeding angle is not convenient to adjust during crystal seeding in the current germanium single crystal production.

[0005] The utility model is realized by the following technical scheme: a germanium single crystal preparation furnace, comprising:

[0006] A furnace body having a cavity for preparing germanium single crystals;

[0007] A material taking component is installed above the furnace body to take out the prepared germanium single crystal;

[0008] A connecting rod, one end of which is mounted on the material taking assembly and the other end of which extends toward the cavity;

[0009] A mounting plate is rotatably mounted on one end of the connecting rod away from the material taking assembly, and a seed crystal member for generating a germanium single crystal is mounted on one end of the mounting plate away from the connecting rod;

[0010] An adjusting rod has one end rotatably mounted on a side of the mounting plate close to the connecting rod and the other end mounted on the connecting rod. An end of the adjusting rod away from the mounting plate moves along the connecting rod to adjust the angle of the mounting plate.

[0011] Optionally, the adjusting rod comprises:

[0012] A mounting block, mounted on the connecting rod;

[0013] One end of the rod body is rotatably mounted on the mounting block, and the other end is rotatably mounted on a side of the mounting plate close to the connecting rod. The connecting rod moves axially to drive the rod body to push the mounting plate to rotate, thereby adjusting the angle of the mounting plate.

[0014] Optionally, it also includes:

[0015] The first driving motor is installed on the material picking assembly, and the end of the connecting rod away from the mounting plate is transmission-connected to the driving motor. The connecting rod is a screw rod. The driving motor rotates to drive the connecting rod to move axially, thereby driving the rod body to push the mounting plate to rotate, so as to adjust the angle of the mounting plate.

[0016] Optionally, the material taking component comprises:

[0017] A bracket, mounted on the furnace body;

[0018] A material taking piece, comprising a material taking cavity, the material taking cavity being in communication with the cavity body, the connecting rod being mounted on the material taking piece and being located in the material taking cavity;

[0019] A screw rod has one end rotatably mounted on the bracket and the other end mounted on the material taking piece. The screw rod rotates to drive the material taking piece to move.

[0020] Optionally, it also includes:

[0021] The furnace body has a feed port, the cover plate is connected to the screw rod in a transmission manner, and the screw rod rotates to drive the cover plate to rotate, thereby driving the cover plate to open and close the feed port.

[0022] Optionally, it also includes:

[0023] The second driving motor is installed on the bracket and is connected to the screw rod. The second driving motor rotates to drive the screw rod to rotate, thereby driving the material picking piece to move and the cover plate to rotate to open and close the feed port.

[0024] Compared with the prior art, the utility model has the following beneficial effects:

[0025] The utility model provides a germanium single crystal preparation furnace comprising a furnace body, a material taking component, a connecting rod, a mounting plate and an adjusting rod. The furnace body has a cavity for preparing germanium single crystals. The material taking component is installed above the furnace body to take out the prepared germanium single crystals. One end of the connecting rod is installed on the material taking component, and the other end extends toward the cavity. The mounting plate is rotatably installed on one end of the connecting rod away from the material taking component. A seed crystal piece for generating germanium single crystals is installed on one end of the mounting plate away from the connecting rod. One end of the adjusting rod is rotatably installed on a side of the mounting plate close to the connecting rod, and the other end is installed on the connecting rod. The end of the adjusting rod away from the mounting plate moves along the connecting rod to adjust the angle of the mounting plate.

[0026] Through the above structure, when preparing germanium single crystal, the utility model provides a germanium single crystal preparation furnace. First, raw materials are put into the furnace body for melting, and then the seed crystal is introduced into the furnace body to make the seed crystal grow, and the seed crystal is pulled out from the molten raw materials by the material taking component. When moving the seed crystal, the end of the adjustment rod away from the mounting plate is moved along the axial direction of the connecting rod, so that the adjustment rod pushes the mounting plate to rotate, thereby adjusting the angle of the seed crystal. Therefore, the germanium single crystal preparation furnace can adjust the angle of the seed crystal, so that the seed crystal grows better. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 This is a structural schematic diagram of a germanium single crystal preparation furnace provided by the utility model;

[0029] Figure 2 This is another structural schematic diagram of a germanium single crystal preparation furnace provided by the utility model.

[0030] In the figure:

[0031] 1-furnace body; 2-feeding assembly; 21-bracket; 22-feeding piece; 23-screw; 3-connecting rod; 4-mounting plate; 5-adjusting rod; 51-mounting block; 52-rod body; 6-first drive motor; 7-cover plate; 8-second drive motor; 9-seed crystal piece. DETAILED DESCRIPTION

[0032] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0033] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0034] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention. Example

[0036] The utility model provides a germanium single crystal preparation furnace, which is used to solve the technical problem that the seeding angle is not easy to adjust during seeding in the current production of germanium single crystals. The utility model provides a germanium single crystal preparation furnace comprising a furnace body 1, a material taking component 2, a connecting rod 3, a mounting plate 4 and an adjusting rod 5, wherein:

[0037] The furnace body 1 is used for melting germanium raw materials, and a cavity is provided in the furnace body 1 to accommodate the raw materials.

[0038] The material taking component 2 is installed on the furnace body 1, and the material taking component 2 is used to take out the prepared germanium crystal. Specifically, when preparing the germanium crystal, the seed crystal piece 9 is pulled by the material taking component 2, so that the germanium single crystal grows along the seed crystal piece 9 and is pulled out of the furnace body 1 through the material taking component 2.

[0039] One end of the connecting rod 3 is mounted on the material taking assembly 2 , and the other end extends toward the cavity of the furnace body 1 . The connecting rod 3 is used to pull the seed crystal piece 9 to move, thereby facilitating the movement of the seed crystal piece 9 .

[0040] The mounting disk 4 is rotatably mounted on one end of the connecting rod 3 away from the material removal assembly 2. The mounting disk 4 is used to mount a seed crystal piece 9 for growing a germanium single crystal. The seed crystal piece 9 is mounted on one end of the mounting disk 4 away from the connecting rod 3. The generated germanium single crystal is located on a side of the mounting disk 4 away from the connecting rod 3.

[0041] One end of the adjusting rod 5 is rotatably mounted on a side of the mounting disk 4 close to the connecting rod 3. Specifically, one end of the adjusting rod 5 close to the mounting disk 4 is mounted on a side of the mounting disk 4 close to the peripheral side of the mounting disk 4, so that the mounting disk 4 can be driven to rotate by the adjusting rod 5 to adjust the angle of the mounting disk 4. The other end of the adjusting rod 5 is mounted on the connecting rod 3. One end of the adjusting rod 5 mounting disk 4 moves along the connecting rod 3 to adjust the angle of the mounting disk 4, thereby adjusting the angle of the seed crystal piece 9, and further adjusting the angle of the generated seed crystal piece 9, so as to facilitate the growth of the germanium single crystal along the seed crystal piece 9.

[0042] Through the above structure, when preparing germanium single crystal, the germanium single crystal preparation furnace provided by the utility model first puts the raw material into the furnace body 1 to melt, then introduces the seed crystal piece 9 into the furnace body 1 to make the seed crystal grow, and pulls the seed crystal out of the molten raw material through the material taking component 2. When moving the seed crystal piece 9, the end of the adjusting rod 5 away from the mounting plate 4 is moved along the axial direction of the connecting rod 3, so that the adjusting rod 5 pushes the mounting plate 4 to rotate, thereby adjusting the angle of the seed crystal piece 9. Therefore, the germanium single crystal preparation furnace can adjust the angle of the seed crystal piece 9, so that the seed crystal grows better.

[0043] An optional implementation of this embodiment is as follows: the adjusting rod 5 includes a mounting block 51 and a rod body 52, wherein the mounting block 51 is mounted on the connecting rod 3, one end of the rod body 52 is rotatably mounted on the mounting block 51, and the other end of the rod body 52 is rotatably mounted on a side of the mounting disk 4 close to the connecting rod 3, and the mounting block 51 moves axially along the connecting rod 3 to drive the rod body 52 to push or pull the mounting disk 4 to rotate, thereby adjusting the angle of the mounting disk 4.

[0044] An optional implementation of this embodiment is as follows: In order to drive the mounting block 51 to move, the germanium single crystal preparation furnace also includes a first drive motor 6, which is installed on the material taking component 2, and the end of the connecting rod 3 away from the mounting disk 4 is transmission-connected to the drive motor, and the connecting rod 3 is provided with threads. The drive motor rotates to drive the connecting rod 3 to move axially, and then drives the rod body 52 to push the mounting disk 4 to rotate to adjust the angle of the mounting disk 4. Specifically, a fixed block can be installed on the material taking component 2, and the fixed block is provided with threads. The drive motor drives the fixed block to rotate, thereby causing the connecting rod 3 to rotate, and at least one side of the mounting block 51 abuts against the inner wall of the furnace body 1, so that when the connecting rod 3 rotates, the mounting block 51 can move the connecting rod 3 axially.

[0045] An optional implementation of this embodiment is as follows: the material picking component 2 includes a bracket 21, a material picking piece 22 and a screw 23, wherein the bracket 21 is installed on the furnace body 1, the material picking piece 22 has a material picking cavity, the material picking cavity is connected to the cavity, the connecting rod 3 is installed on the material picking piece 22 and is located in the material picking cavity, one end of the screw 23 is rotatably installed on the bracket 21, and the other end of the screw 23 is installed on the material picking piece 22, the screw 23 rotates to drive the material picking piece 22 to move, specifically, the screw 23 drives the material picking piece 22 to move in a direction close to the furnace body 1, so that the seed crystal piece 9 moves into the furnace body 1, and the screw 23 rotates to drive the material picking piece 22 to move in a direction away from the furnace body 1, so as to gradually drive the seed crystal piece 9 to move out of the furnace body 1.

[0046] An optional implementation of the present embodiment is as follows: In order to reduce heat loss in the furnace body 1, the germanium single crystal preparation furnace also includes a cover plate 7. The furnace body 1 has a feed port. The cover plate 7 is transmission-connected to the screw 23. The screw 23 rotates, thereby driving the cover plate 7 to rotate, and then driving the cover plate 7 to open and close the feed port. Specifically, when the screw 23 drives the material taking part 22 to move toward the furnace body 1, the cover plate 7 gradually opens the feed port. When the screw 23 drives the material taking part 22 to move away from the furnace body 1, the cover plate 7 gradually closes the feed port.

[0047] An optional implementation of this embodiment is as follows: In order to drive the screw 23 to rotate, the germanium single crystal preparation furnace has a second drive motor 8. The second drive motor 8 is installed on the bracket 21 and is connected to the screw 23. The second drive motor 8 rotates to drive the screw 23 to rotate, thereby driving the material removal piece 22 to move and the cover plate 7 to rotate to open and close the feed port.

[0048] In summary, when preparing germanium single crystal, the germanium single crystal preparation furnace provided by the utility model first puts the raw material into the furnace body 1 to melt, then the second drive motor 8 rotates, driving the screw 23 to rotate, so that the material taking part 22 introduces the seed crystal part 9 into the furnace body 1 through the connecting rod 3, so that the seed crystal grows, and then the screw 23 rotates to gradually pull the seed crystal out of the molten raw material. When moving the seed crystal part 9, the first drive motor 6 drives the connecting rod 3 to rotate, so that the mounting hole moves along the axial direction of the connecting rod 3, so that the adjusting rod 5 pushes the mounting plate 4 to rotate, so as to adjust the angle of the seed crystal part 9. When the screw 23 drives the material taking part 22 to move in the direction close to the furnace body 1, the cover plate 7 gradually opens the feed port, and when the screw 23 drives the material taking part 22 to move in the direction away from the furnace body 1, the cover plate 7 gradually closes the feed port. Therefore, the germanium single crystal preparation furnace can adjust the angle of the seed crystal part 9, so that the seed crystal grows better.

[0049] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope recorded in the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A germanium single crystal preparation furnace, characterized in that: include: A furnace body having a cavity for preparing germanium single crystals; A material taking component is installed above the furnace body to take out the prepared germanium single crystal; A connecting rod, one end of which is mounted on the material taking assembly and the other end of which extends toward the cavity; A mounting plate is rotatably mounted on one end of the connecting rod away from the material taking assembly, and a seed crystal member for generating a germanium single crystal is mounted on one end of the mounting plate away from the connecting rod; An adjusting rod has one end rotatably mounted on a side of the mounting plate close to the connecting rod and the other end mounted on the connecting rod. An end of the adjusting rod away from the mounting plate moves along the connecting rod to adjust the angle of the mounting plate.

2. A germanium single crystal preparation furnace according to claim 1, characterized in that: The adjusting rod comprises: A mounting block, mounted on the connecting rod; One end of the rod body is rotatably mounted on the mounting block, and the other end is rotatably mounted on a side of the mounting plate close to the connecting rod. The connecting rod moves axially to drive the rod body to push the mounting plate to rotate, thereby adjusting the angle of the mounting plate.

3. A germanium single crystal preparation furnace according to claim 2, characterized in that: Also includes: The first driving motor is installed on the material picking assembly, and the end of the connecting rod away from the mounting plate is transmission-connected to the driving motor. The connecting rod is a screw rod. The driving motor rotates to drive the connecting rod to move axially, thereby driving the rod body to push the mounting plate to rotate, so as to adjust the angle of the mounting plate.

4. A germanium single crystal preparation furnace according to claim 3, characterized in that: The material taking component comprises: A bracket, mounted on the furnace body; A material taking piece, comprising a material taking cavity, the material taking cavity being in communication with the cavity body, the connecting rod being mounted on the material taking piece and being located in the material taking cavity; A screw rod has one end rotatably mounted on the bracket and the other end mounted on the material taking piece. The screw rod rotates to drive the material taking piece to move.

5. A germanium single crystal preparation furnace according to claim 4, characterized in that: Also includes: The furnace body has a feed port, the cover plate is connected to the screw rod in a transmission manner, and the screw rod rotates to drive the cover plate to rotate, thereby driving the cover plate to open and close the feed port.

6. A germanium single crystal preparation furnace according to claim 5, characterized in that: Also includes: The second driving motor is installed on the bracket and is connected to the screw rod. The second driving motor rotates to drive the screw rod to rotate, thereby driving the material picking piece to move and the cover plate to rotate to open and close the feed port.

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