Sealing device and sensor for vacuum furnace

Abstract

The utility model relates to the technical field of sealing devices, in particular to a sealing device and a sensor for a vacuum furnace, and the sealing device is provided with a first sealing assembly and a second sealing element, through tight sealing between a first sealing piece and a first sealing cavity, the outer wall of a second connecting piece and a first pressing piece, tight sealing between a second sealing piece and the inner walls of a second sealing cavity and a third sealing cavity and tight sealing between a second sealing piece and the end portion, arranged in the third sealing cavity, of a fifth connecting piece, it is guaranteed that when a protection tube of the sensor is broken, the vacuum degree of a vacuum furnace is not distorted, and the service life of the sensor is prolonged. Therefore, a heating body and a product in the hearth of the vacuum furnace are prevented from being damaged or scrapped; and the whole sealing structure is simple, is locked and fixed through threads, and is convenient to install.

Description

Technical Field

[0001] The utility model relates to the technical field of sealing devices, in particular to a sealing device and a sensor for a vacuum furnace. Background Art

[0002] The statements in this section merely provide background information related to the present disclosure and may not constitute prior art.

[0003] At present, detection sensors are widely used in fields including photovoltaic, semiconductor, steel and other industries. When installing the detection sensor on equipment with large internal and external pressure difference, in order to ensure the accuracy of detection, a part of the detection sensor needs to be inserted into the cavity of the equipment for detection, which places very high requirements on the sealing of the detection sensor. Especially for equipment with high precision requirements, the sealing of the detection sensor is directly related to the product quality.

[0004] At present, many detection sensors (such as temperature sensors, etc.) are used in ultra-high vacuum sintering furnaces, calibration furnaces and other equipment to detect parameters in the furnace and ensure the quality of processed products. However, the current problems with detection sensors are as follows: when the protection tube of the sensor is damaged during use, the general seal can be easily punctured due to the large pressure difference between the inside and outside of the vacuum furnace, causing the vacuum degree of the vacuum furnace to fail, and then causing the heating element and products in the vacuum furnace to be damaged or scrapped; and the sealing design of some manufacturers is relatively complicated, which is not only troublesome to install but also fails to meet the vacuum degree requirements of the vacuum sintering furnace;

[0005] Secondly, in order to ensure the accuracy of measurement, there is a certain proportional relationship between the part of the detection sensor extending into the furnace body (hereinafter referred to as the hot end) and the part arranged outside the furnace body (hereinafter referred to as the cold end). For the same type of detection sensors, the lengths of the cold end and the hot end are basically the same. However, in order to facilitate the pressure of protective gas into the protection tube of the detection sensor and seal it (the seal here is a simple glue seal, and when the protection tube is broken, it is easily damaged), the protection tube needs to be extended to the first sealing end of the first connecting piece connected to the measuring body, and in order to meet the proportional relationship between the cold end and the hot end, the current first connecting piece connecting the detection sensor to the measuring body needs to be relatively long, which greatly increases the length of the protection tube. When it is necessary to use a precious metal protection tube such as platinum, the cost is greatly increased. Utility Model Content

[0006] In order to solve the above problems, the utility model provides a sealing device, wherein a first pressing member and a first sealing member are arranged, the first pressing member is arranged in the first sealing cavity, and the first pressing member is arranged in the first connecting cavity at the same time, by adjusting the third connecting member or / and the first connecting member, the first pressing member is driven to press the first sealing member, and the first sealing member is pressed by the first pressing member to deform the first sealing member, so that the first sealing member is tightly sealed with the first sealing cavity, the outer wall of the second connecting member, and the first pressing member, thereby isolating the inside and the outside; a second sealing member is arranged, and by adjusting the fourth connecting member or / and the third connecting member, the fifth connecting member is gradually approached to the third connecting member, and the second sealing member is pressed by the cooperation of the fifth connecting member, the fourth connecting member and the third connecting member, so that the second sealing member is tightly sealed with the second sealing cavity, the inner wall of the third sealing cavity, and the end of the fifth connecting member arranged in the third sealing cavity, and due to the deformation of the second sealing member, the first through hole inside the second sealing member is in contact with the detection unit (such as the thermoelectrode of the thermocouple, or the resistor of the thermistor) Tight sealing ensures the overall sealing of the device. When the protection tube of the sensor is intact, the negative pressure inside and outside the furnace is mainly concentrated on the protection tube. When the protection tube of the sensor is broken, the pressure difference between the inside and outside is mainly concentrated on the first seal and the second seal. Through the tight sealing of the first seal and the first sealing cavity, the outer wall of the second connecting piece, and the first pressing piece, the second seal and the second sealing cavity, the inner wall of the third sealing cavity, and the end of the fifth connecting piece arranged in the third sealing cavity are tightly sealed, so that when the protection tube of the sensor is broken, the vacuum degree of the vacuum furnace is not distorted, thereby ensuring that the heating element and the product in the furnace of the vacuum furnace will not be damaged or scrapped; and the overall sealing structure is single-piece and fixed by threaded locking, which is easy to install; by setting the first sealing assembly and the second sealing piece, that is, two seals, under the premise that the length of the cold end remains unchanged, one more seal occupies part of the length of the first connecting piece, that is, the length of the first connecting piece connected to the measuring device is shortened, thereby shortening the length of the protection tube, thereby greatly reducing the cost of the entire equipment.

[0007] To achieve the above purpose, the utility model provides the following technical solution: a sealing device, comprising

[0008] A first connecting member, the first connecting member comprising a first sealing end and a connecting end connected to the measuring body, the first sealing end being provided with a first sealing cavity, the connecting end being provided with a placement cavity, the first sealing cavity being in communication with the placement cavity;

[0009] A first sealing component, the first sealing component comprising a first pressing member and a first sealing member, the first sealing member being disposed in the first sealing cavity;

[0010] A third connecting member, wherein a first connecting cavity is provided at a first end of the third connecting member, the first pressing member is provided in the first connecting cavity, a second sealing cavity is provided at a second end of the third connecting member, a first fixing cavity is built in the third connecting member, and the first connecting cavity is communicated with the second sealing cavity through the first fixing cavity; the first connecting cavity of the third connecting member is adjustably connected to the first sealing end of the first connecting member;

[0011] a second connecting member, the second connecting member sequentially passing through the first connecting member, the first sealing member and the first pressing member, and being fixedly connected to the first fixing cavity of the third connecting member; by adjusting the third connecting member or / and the first connecting member, the first pressing member and the first sealing member are close to press the first sealing member, so that the first sealing member is sealed and connected to the first sealing cavity, the outer wall of the second connecting member, and the first pressing member;

[0012] a second seal;

[0013] a fifth connecting member;

[0014] A fourth connecting piece, wherein the fourth connecting piece has a third sealed cavity built therein, the first end of the fourth connecting piece is adjustably connected to the third connecting piece through the third sealed cavity, the second end of the fourth connecting piece is connected to the fifth connecting piece through the third sealed cavity, the second seal is arranged in the third sealed cavity, and by adjusting the fourth connecting piece and / or the third connecting piece, the fifth connecting piece and the third connecting piece are brought close to press the second seal to seal the second seal with the second sealed cavity, the inner wall of the third sealed cavity, and the fifth connecting piece.

[0015] The utility model provides a sealing device, wherein the second connecting member comprises a limiting end and a supporting portion, the first end of the supporting portion is fixedly connected to the limiting end, the second end of the supporting portion passes through the first connecting member, the first sealing member and the first holding member in sequence, and is fixedly connected to the first fixed cavity of the third connecting member; the limiting end is arranged in the placement cavity to limit the displacement of the supporting portion entering the first fixed cavity, thereby preventing the supporting portion from entering the second sealing cavity and supporting the second sealing member, resulting in a poor sealing effect of the second sealing member.

[0016] The utility model provides a sealing device, wherein the cross section of the first sealing member is a hollow circular ring structure;

[0017] The first pressing member comprises a first driving part and a first pressing part, wherein the first end of the first pressing part is fixedly connected to the first pressing part, and the second end of the first pressing part is provided with a pressing cavity, wherein the cross-sectional diameter of the pressing cavity gradually increases from the inside to the second end of the first pressing part, and the first driving part is in contact with and connected to the bottom of the first connecting cavity;

[0018] By adjusting the third connecting member or / and the first connecting member, the first driving part is pressed by the third connecting member, and the first pressing part is driven to press and hold the first sealing member to seal and connect the first sealing member with the first sealing cavity, the outer wall of the second connecting member, and the pressing cavity. That is, the pressing cavity is a conical cavity, and the first sealing member is squeezed by designing it as a cone. The first sealing member is deformed by force. First, a part of the first sealing member is subjected to a force parallel to the axial direction of the first sealing member, so that the first sealing member is compressed and expanded, and the first sealing member 32 is tightly sealed with the first sealing cavity and the supporting part of the second connecting member. Secondly, as the second end of the first pressing part enters the first sealing member, another part of the first sealing member is squeezed into the pressing cavity, filling the pressing cavity, and the first sealing member is tightly sealed with the pressing cavity, and the second tight sealing between the first sealing member and the second connecting member is achieved; the sealing effect is better.

[0019] The utility model provides a sealing device, wherein the outer diameter of the first pressing portion is equal to the outer diameter of the first sealing member, so as to ensure that the first pressing portion can completely press a part of the first sealing member into the pressing cavity, thereby ensuring better sealing.

[0020] The utility model provides a sealing device, wherein the second sealing member comprises a body, a first end seal and a second end seal, wherein the first end seal and the second end seal are connected to two ends of the body, and the body is a cylinder, the first end seal and the second end seal are conical bodies, and the second sealing member is provided with a first through hole of a detection unit such as a thermoelectrode of a fixedly sealed thermocouple or a resistor of a thermal resistor in an axial direction;

[0021] The second sealed cavity is a tapered opening that is sealed and matched with the first end;

[0022] The first end of the fifth connecting member is arranged in the third sealing cavity, and the first end of the fifth connecting member is provided with a tapered cavity which is sealed and matched with the second end;

[0023] The first end seal is sealed and connected to the second sealing cavity, the second end seal is sealed and connected to the conical cavity of the fifth connecting piece, and the outer side surface of the main body is sealed and connected to the side wall of the third sealing cavity; by designing the first end seal and the second end seal as conical bodies, the first end seal and the second sealing cavity are surface-fitted, the second end seal and the conical cavity of the fifth connecting piece are surface-fitted, and the main body is designed as a cylinder, the outer wall of the main body is surface-fitted with the inner wall of the third sealing cavity, and after the seal is deformed by force, three-sided sealing is achieved, and they fit tightly with each other, and the sealing effect is better.

[0024] The utility model provides a sealing device, wherein the first end seal is provided with a first sealing protrusion extending along the axial direction; and the second end seal is provided with a second sealing protrusion extending along the axial direction. By designing the first sealing protrusion and the second sealing protrusion, the outer wall of the first sealing protrusion is fitted with the inner wall of the second through hole to achieve sealing, and the outer wall of the second sealing protrusion is fitted with the inner wall of the third through hole to achieve sealing, further sealing is achieved, and when the second seal is deformed by force, it is subjected to stress from the first end seal and the first sealing protrusion, and the stress at the connection between the second end seal and the second sealing protrusion, so as to avoid the second seal from deforming and entering the second through hole and the third through hole, and the first sealing protrusion and the second sealing protrusion are pressed to play a positioning role, so that installation is more convenient; and when the protective tube is broken, the pressure in the furnace will directly act on the first sealing protrusion, so that the first sealing protrusion and the second through hole are more closely fitted, and the sealing effect is better.

[0025] The utility model provides a sealing device, wherein the end of the fifth connecting member arranged in the third sealing cavity is axially extended to form a second pressing portion;

[0026] The second sealing member is a cylinder, and the second sealing member is arranged in the second sealing cavity and matched and connected with the second sealing cavity;

[0027] The second sealing component includes a first sealing end face, a second sealing end face and a sealing side face; the first sealing end face is sealedly connected to the bottom of the second sealing cavity, the second sealing end face is sealedly connected to the second pressing portion, and the sealing side face is sealedly connected to the side wall of the second sealing cavity to achieve surface sealing, which fits tightly with each other and has a better sealing effect.

[0028] The utility model provides a sealing device, wherein the first sealing end surface is provided with a third sealing protrusion extending along the axial direction; and the second sealing end surface is provided with a fourth sealing protrusion extending along the axial direction. By designing the third sealing protrusion and the fourth sealing protrusion, the outer wall of the third sealing protrusion is fitted with the inner wall of the second through hole to achieve sealing, and the outer wall of the fourth sealing protrusion is fitted with the inner wall of the third through hole to achieve sealing, further sealing is achieved, and the third sealing protrusion and the fourth sealing protrusion are pressed to play a positioning role, and the installation is more convenient; and when the protective tube is broken, the pressure in the furnace will directly act on the third sealing protrusion, so that the third sealing protrusion and the second through hole are more closely fitted, and the sealing effect is better.

[0029] The utility model provides a sealing device, wherein the first end of a third connecting member is threadedly connected to the first sealing end of the first connecting member, the second end of the third connecting member is threadedly connected to the first end of a fourth connecting member, and the first end of the fourth connecting member is threadedly connected to the fifth connecting member. The threaded connection facilitates external adjustment of the pressure of the sealing member, thereby ensuring that during the debugging process, the pressure of the sealing member can be accurately adjusted according to the vacuum degree in the vacuum furnace, thereby ensuring the best sealing effect.

[0030] A sensor for a vacuum furnace comprises a sealing device, a detection unit, a wiring terminal, and a protection tube. The detection unit is arranged in the protection tube and connected to the wiring terminal through the sealing device. The protection tube is fixedly connected to a second connecting piece.

[0031] Compared with the prior art, the beneficial effects of the utility model are:

[0032] The utility model provides a sealing device, which is provided with a first pressing member and a first sealing member, wherein the first pressing member is provided in a first sealing cavity, and the first pressing member is provided in a first connecting cavity at the same time, and the first pressing member is driven by adjusting a third connecting member or / and the first connecting member to press the first sealing member, and the first sealing member is pressed and deformed by the first pressing member on the first sealing member, so that the first sealing member is tightly sealed with the first sealing cavity, the outer wall of the second connecting member, and the first pressing member, thereby isolating the inside and the outside; a second sealing member is provided, and the fourth connecting member is adjusted to or / and the third connecting piece, so that the fifth connecting piece gradually approaches the third connecting piece, and the second sealing piece is pressed by the cooperation of the fifth connecting piece, the fourth connecting piece and the third connecting piece, so that the second sealing piece is tightly sealed with the second sealing cavity, the inner wall of the third sealing cavity, and the end of the fifth connecting piece arranged in the third sealing cavity. Due to the deformation of the second sealing piece, the first through hole inside it is tightly sealed with the detection unit (such as the thermocouple's hot electrode, or the resistor of the thermal resistor), thereby ensuring the overall sealing of the device. When the protection tube of the sensor is intact, the negative pressure inside and outside the furnace is mainly concentrated on the protection tube. On the protective tube, when the protective tube of the sensor is broken, the internal and external pressure difference is mainly concentrated on the first seal and the second seal; through the tight sealing of the first seal and the first sealing cavity, the outer wall of the second connector, and the first pressing member, the second seal and the second sealing cavity, the inner wall of the third sealing cavity, and the end of the fifth connector set in the third sealing cavity are tightly sealed, ensuring that when the protective tube of the sensor is broken, the vacuum degree of the vacuum furnace is not distorted, thereby ensuring that the heating element and the product in the furnace of the vacuum furnace will not be damaged or scrapped; and the overall sealing structure is single-piece and fixed by thread locking, which is easy to install; by setting the first sealing assembly and the second sealing member, that is, two seals, under the premise that the length of the cold end remains unchanged, one more seal occupies part of the length of the first connector, that is, the length of the first connector connected to the measuring device is shortened, thereby shortening the length of the protective tube, thereby greatly reducing the cost of the entire equipment, and adding one seal at the cold end, the role includes reducing the use length of the protective tube, reducing costs, and secondly playing a sealing role; after the sensor of the present design is reliably connected to the vacuum furnace, even if the vacuum degree in the vacuum furnace reaches -10Pa.m3 / s, when the sensor protective tube is damaged, the sensor measurement value will not be distorted; the second connecting piece is first used to support the first sealing piece, because the first sealing piece is made of hard materials such as graphene, and the deformation of hard materials such as graphene is not large when pressed, which requires a lot of force to squeeze and deform it. Not only the hardness requirements of the first pressing piece, the first connecting piece, and the third connecting piece are very high, but also if the force is too large, the deformation of the first sealing piece is too large, and it is easy to damage the detection unit by directly squeezing the detection unit. If the force is too small, when pressing the first sealing piece, the detection unit and the first sealing piece cannot be tightly sealed. That is, the role of the second connecting piece is not only to protect the detection unit, but also to achieve a relatively small deformation of the first sealing piece to meet a good sealing, and also reduce the material requirements for the first pressing piece, the first connecting piece, and the third connecting piece, and reduce the cost. . BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a first structural schematic diagram of a sealing device of the utility model;

[0034] Figure 2 for Figure 1 Schematic diagram of the decomposition structure;

[0035] Figure 3 It is a second structural schematic diagram of a sealing device of the utility model;

[0036] Figure 4 for Figure 3 Schematic diagram of the decomposition structure;

[0037] Figure 5 It is a structural schematic diagram of the first sealing component in the utility model;

[0038] Figure 6 It is a first structural schematic diagram of the second sealing member in the utility model;

[0039] Figure 7 It is a second structural schematic diagram of the second sealing member in the utility model;

[0040] Figure 8 The utility model is a schematic diagram of the structure of a sensor for a vacuum furnace.

[0041] In the figure: first connecting member 10; first sealing end 11; connecting end 12; first sealing cavity 13; placing cavity 14; second connecting member 20; limiting end 21; supporting portion 22; first sealing assembly 30; first pressing member 31; first driving portion 311; first pressing portion 312; pressing cavity 313; first sealing member 32; fourth through hole 33; fifth through hole 34; third connecting member 40; first connecting cavity 41; first fixing cavity 42; second sealing cavity 43; Second sealing member 50; main body 51; first end seal 52; second end seal 53; first sealing protrusion 54; second sealing protrusion 55; first through hole 56; first sealing end face 57; third sealing protrusion 571; second sealing end face 58; fourth sealing protrusion 581; sealing side face 59; fourth connecting member 60; third sealing cavity 61; fifth connecting member 70; third through hole 71; second pressing portion 72; tapered cavity 73; terminal 80; protective tube 90. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0043] In the description of the utility model, it is necessary to understand that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0044] In the description of the utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "set" should be understood in a broad sense, for example, they can be fixedly connected or set, or detachably connected or set, or integrally connected or set. For ordinary technicians in this field, the specific meanings of the above terms in the utility model can be understood according to specific circumstances.

[0045] At present, the sensors used in domestic ultra-high vacuum sintering furnaces generally have a vacuum degree of (10-5Pa) when the protection tube 90 is damaged, and the sealing effect is not good. When the sensor protection tube 90 is broken, the vacuum furnace will be distorted, and the overall structure of the current sensor sealing mechanism is complex, and installation and disassembly are inconvenient. In order to ensure the ratio of the cold end and the hot end of the sensor, the first connecting piece 10 currently connected to the measuring equipment will be very long. The protection tube 90 needs to extend from the connecting end 12 of the first connecting piece 10 to the first sealing end 11 of the first connecting piece 10 connected to the measuring body to facilitate the addition of protective gas into the protection tube 90 and the sealing of the protection tube. This requires a longer protection tube 90. When it is necessary to use a precious metal protection tube 90 such as platinum, the overall cost is greatly increased. The technical solution in the embodiment of the present application is to solve the above problems. The overall idea is as follows: Figure 1 and Figure 3As shown, the embodiment of the present application provides a sealing device, sets a first pressing member 31 and a first sealing member 32, sets the first pressing member in the first sealing cavity 13, and sets the first pressing member 31 in the first connecting cavity 41. By adjusting the third connecting member 40 and / or the first connecting member 10, the first pressing member 31 is driven to press the first sealing member 32. The first pressing member 31 presses the first sealing member 32, so that the first sealing member 32 is squeezed and deformed, thereby achieving a tight seal between the first sealing member 32 and the first sealing cavity 13, the outer wall of the second connecting member 20, and the first pressing member 31. , thereby isolating the inside and the outside; a second sealing member 50 is provided, and the fifth connecting member 70 is gradually brought close to the third connecting member 40 by adjusting the fourth connecting member 60 or / and the third connecting member 40, and the second sealing member 50 is pressed by the cooperation of the fifth connecting member 70, the fourth connecting member 60 and the third connecting member 40, so that the second sealing member 50 is tightly sealed with the second sealing cavity 43, the inner wall of the third sealing cavity 61, and the end of the fifth connecting member arranged in the third sealing cavity, and due to the deformation of the second sealing member 50, the first through hole 56 inside thereof is in contact with the detection unit (such as the thermocouple's thermoelectrode, or the resistor of the thermal resistor) Tightly seal, thereby ensuring the overall sealing of the device. When the protection tube 90 of the sensor is intact, the negative pressure inside and outside the furnace is mainly concentrated on the protection tube 90. When the protection tube 90 of the sensor is broken, the internal and external pressure difference is mainly concentrated on the first seal 32 and the second seal 50. Through the tight sealing of the first seal 32 and the first sealed cavity 13, the outer wall of the second connecting member 20, and the first pressing member 31, the second seal and the second sealed cavity, the inner wall of the third sealed cavity, and the end of the fifth connecting member set in the third sealed cavity are tightly sealed, it is ensured that when the protection tube of the sensor is broken, the vacuum degree of the vacuum furnace is not Distortion, thereby ensuring that the heating element and products in the furnace of the vacuum furnace will not be damaged or scrapped; and the overall sealing structure is single-piece and fixed by threaded locking, which is easy to install; by setting the first sealing assembly and the second sealing member, that is, two seals, under the premise that the length of the cold end remains unchanged, one more seal occupies part of the length of the first connecting member, that is, the length of the first connecting member connected to the measuring device is shortened, thereby shortening the length of the protective tube, thereby greatly reducing the cost of the entire equipment, and adding one seal at the cold end, the functions of which include reducing the use length of the protective tube and reducing costs, and secondly playing a sealing role.

[0046] This design can be used in other sealing detection equipment and sealing equipment.

[0047] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0048] like Figure 1-4As shown, a sealing device includes a first connecting member 10, a second connecting member 20, a first sealing assembly 30, a second sealing member 50, a fourth connecting member 60 and a fifth connecting member 70; the first connecting member 10 includes a first sealing end 11 and a connecting end 12 connected to a measuring body, the first sealing end 11 is provided with a first sealing cavity 13, the connecting end 12 is provided with a placement cavity 14, and the first sealing cavity 13 is communicated with the placement cavity 14; the first sealing assembly 30 includes a first pressing member 31 and a first sealing member 32, the first sealing member 32 is placed in the first sealing cavity 13, and the outer wall of the first sealing member 32 is in contact with the inner wall of the first sealing cavity 13, and is connected by The bottom of the first sealing cavity 13 supports the first sealing member 32, and the first sealing member 32 is provided with a fourth through hole 33 in the axial direction, and the first holding member 31 is provided with a fifth through hole 34 in the axial direction, and the cross-sectional diameters of the fourth through hole 33 and the fifth through hole 34 match the cross-sectional outer diameter of the second connecting member 20, and the second connecting member 20 passes through the first sealing member 32 and the first holding member 31 in sequence through the fourth through hole 33 and the fifth through hole 34; the first end of the third connecting member 40 is provided with a first connecting cavity 41, the first holding member 31 is provided in the first connecting cavity 41, the second end of the third connecting member 40 is provided with a second sealing cavity 43, and the third connecting member 40 has a built-in first fixing cavity 42, The first connecting cavity 41 is connected to the second sealing cavity 43 through the first fixed cavity 42; the first connecting cavity 41 of the third connecting piece 40 is provided with an internal thread, and the first sealing end 11 of the first connecting piece 10 is provided with an external thread, and the third connecting piece 40 is threadedly connected to the first sealing end 11 of the first connecting piece 10 through the first connecting cavity 41; the second connecting piece 20 is a hollow structure, the inner diameter of the second connecting piece 20 matches the outer diameter of the protective tube 90, and the outer diameter of the second connecting piece 20 matches the diameter of the first fixed cavity 42, and the matching here is to achieve the required connection relationship between each other, and pass through the first connecting piece 10, the first sealing 32 and the first pressing piece in sequence. 31, and is fixedly connected to the first fixing cavity 42 of the third connecting member 40; by adjusting the third connecting member 40 or the first connecting member 10, and adjusting the third connecting member 40 and the first connecting member 10 at the same time, that is, realizing that the first sealing end 11 of the first connecting member 10 gradually approaches the bottom of the first connecting cavity 41 of the third connecting member 40, so that the first pressing member 31 and the first sealing member 32 are close to each other, so that the first pressing member 31 presses the first sealing member 32 to tightly seal the first sealing cavity 13, the first sealing member 32 and the outer wall of the second connecting member 20 are tightly sealed, and the first sealing member 32 and the first pressing member 31 are tightly sealed;A third sealing cavity 61 is provided in the fourth connecting member 60, an inner thread is provided on the inner wall of the third sealing cavity 61 on the first end of the fourth connecting member 60, an outer thread is provided on the outer wall of the second end of the third connecting member 40, the first end of the fourth connecting member 60 is threadedly connected to the second end of the third connecting member 40 through the third sealing cavity 61, the second end of the fourth connecting member 60 is threadedly connected or fixedly connected to the fifth connecting member 70 through the third sealing cavity 61, the second sealing member 50 is provided in the third sealing cavity 61, the fourth connecting member 60 or the third connecting member 40 is adjusted, or the fourth connecting member 60 and the third connecting member 40 are adjusted at the same time, so that the fifth connecting member 70 and the third connecting member 40 are close to and press the second sealing member 50 to tightly seal the second sealing member 50 and the second sealing cavity 43, the second sealing member 50 and the inner wall of the third sealing cavity 61 are tightly sealed, and the second sealing member 50 and the fifth connecting member 70 are tightly sealed. When the third sealing cavity 61 and the fifth connecting member 70 are threadedly connected, the second sealing member 50 can also be pressed and sealed by adjusting the fifth connecting member 70. The fourth connecting member 60 has the functions of sealing and adjusting. ;

[0049] like Figure 2 and 4 As shown, a sealing device is shown, wherein the second connecting member 20 includes a limiting end 21 and a supporting portion 22, the first end of the supporting portion 22 is fixedly connected to the limiting end 21, the second end of the supporting portion 22 passes through the first connecting member 10, the first sealing member 32 and the first holding member 31 in sequence, and is fixedly connected to the first fixed cavity 42 of the third connecting member 40; the limiting end 21 is arranged in the placement cavity 14 to limit the displacement of the supporting portion 22 into the first fixed cavity 42, and prevents the supporting portion 22 from entering the second sealing cavity 43 to support the second sealing member 50, resulting in a poor sealing effect of the second sealing member 50.

[0050] like Figure 1 , 3As shown in Figure 5, a sealing device, wherein the cross section of the first sealing member 32 is a hollow circular ring structure; the first pressing member 31 includes a first driving portion 311 and a first pressing portion 312, the first end of the first pressing portion 312 is fixedly connected to the first pressing portion 312, and the second end of the first pressing portion 312 is provided with a pressing cavity 313, the cross-sectional diameter of the pressing cavity 313 gradually increases from the inside to the second end of the first pressing portion 312, that is, the pressing cavity 313 is a conical cavity, and the first sealing member 32 is squeezed by being designed as a cone, and the first sealing member 32 is deformed by force. First, a part of the first sealing member 32 is subjected to a force parallel to the axial direction of the first sealing member 32, so that the first sealing member 32 is compressed and expanded, so as to realize the first sealing member 32 and the first sealing cavity 13 and the support portion 2 of the second connecting member 20. 2 is tightly sealed, and then as the second end of the first pressing portion 312 enters the first sealing member 32, another part of the first sealing member 32 is squeezed into the pressing cavity 313, filling the pressing cavity 313, realizing the tight sealing of the first sealing member 32 and the pressing cavity 313, and realizing the second tight sealing of the first sealing member 32 and the supporting portion 22 of the second connecting member 20; the sealing effect is better; the first driving portion 311 is in contact with and connected to the bottom of the first connecting cavity 41; by adjusting the third connecting member 40 and / or the first connecting member 10, the first driving portion 311 is pressed by the third connecting member 40, driving the first pressing portion 312 to press and hold the first sealing member 32, so that the first sealing member 32 is sealed and connected with the first sealing cavity 13, the outer wall of the second connecting member 20, and the pressing cavity 313.

[0051] like Figure 2 and 4 As shown, the outer diameter of the first pressing portion 312 is equal to the outer diameter of the first sealing member 32, ensuring that the first pressing portion can completely press a portion of the first sealing member 32 into the pressing cavity 313 to ensure better sealing.

[0052] like Figure 5 As shown, a sealing device, wherein the first holding member 31 is made of hard metal, such as steel or iron, and the first sealing member 32 is made of graphene.

[0053] like Figure 1 , 2As shown in Figure 6, a sealing device, wherein the second sealing member 50 includes a body 51, a first end seal 52 and a second end seal 53, the first end seal 52 and the second end seal 53 are connected to both ends of the body 51, and the body 51 is a cylinder, the first end seal 52 and the second end seal 53 are cones, and the second sealing member 50 is provided with a first through hole 56 of a detection unit such as a thermocouple wire or a resistor wire of a thermal resistor in an axial direction, wherein the number of the first through holes 56 is the same as the number of the thermocouple wire or the resistor wire; The sealing cavity 43 is a tapered opening matched with the first end seal 52, and the cross-sectional diameter of the tapered opening gradually increases from the inside to the outside; wherein the first end of the fifth connecting member 70 is arranged in the third sealing cavity 61, and the first end of the fifth connecting member 70 is provided with a tapered cavity 73 matched with the second end seal 53, and the cross-sectional diameter of the tapered cavity 73 gradually increases from the inside to the outside; the first end seal 52 is sealedly connected to the second sealing cavity 43, the second end seal 53 is sealedly connected to the tapered cavity 73 of the fifth connecting member 70, and the outer side surface of the body 51 is sealedly connected to the side wall of the third sealing cavity 61. The second sealing member 50 is made of non-metallic material, and can be made of rubber.

[0054] like Figure 1 As shown, during installation, the third sealing cavity 61 of the fourth connecting member 60 is threadedly connected to the second end of the third connecting member 40. By adjusting the fourth connecting member 60, the second end of the fourth connecting member 60 is threadedly connected to the fifth connecting member 70 through the third sealing cavity 61. The second sealing member 50 is arranged in the third sealing cavity 61. The fourth connecting member 60 or the third connecting member 40 is adjusted, and the fourth connecting member 60 and the third connecting member 40 can also be adjusted at the same time, so that the fifth connecting member 70 and the third connecting member 40 are close to pressing the second sealing member 50 to tightly seal the second sealing member 50 and the second sealing cavity 43, and the second sealing member 50 and the inner wall of the third sealing cavity 61 are tightly sealed. The second sealing member 50 and the fifth connecting member 70 are tightly sealed. When the third sealing cavity 61 is threadedly connected to the fifth connecting member 70, the second sealing member 50 can also be pressed to seal by adjusting the fifth connecting member 70.

[0055] like Figure 1 , 2As shown in and 6, the first end seal 52 is provided with a first sealing protrusion 54 extending along the axial direction; the second end seal 53 is provided with a second sealing protrusion 55 extending along the axial direction, the first sealing protrusion 54 extends into the first fixed cavity 42 and is sealed and connected with the third connecting member 40; the fifth connecting member 70 is provided with a third through hole 71 along the axial direction, the third through hole 71 is connected with the tapered cavity 73, the second sealing protrusion 55 extends into the third through hole 71 and is sealed and connected with the fifth connecting member 70. By designing the first sealing protrusion 54 and the second sealing protrusion 55, wherein the outer wall of the first sealing protrusion 54 fits with the inner wall of the first fixed cavity 42 to achieve sealing, and the outer wall of the second sealing protrusion 55 fits with the inner wall of the third through hole 74 to achieve sealing, further sealing is achieved. When the second sealing member 50 is deformed by force, it is subjected to stress at the connection between the first end seal 52 and the first sealing protrusion 54, and the second end seal 53 and the second sealing protrusion 55, so as to prevent the second sealing member 50 from deforming and entering the first fixed cavity 42 and the third through hole 71, and the first sealing protrusion 54 and the second sealing protrusion 55 can play a positioning role when under pressure, so that installation is more convenient; and when the protective tube 90 is broken, the pressure in the furnace will directly act on the first sealing protrusion 54, so that the first sealing protrusion 54 and the first fixed cavity 42 fit more closely, and the sealing effect is better.

[0056] like Figure 3 , 4 As shown in Figure 7, a sealing device, wherein the end of the fifth connecting member 70 disposed in the third sealing cavity 61 is axially extended to provide a second pressing portion 72; the second sealing member 50 is a cylinder, or a polygonal column, and the second sealing member 50 is disposed in the second sealing cavity 43 and matched with the second sealing cavity 43, that is, the second sealing member 50 is in contact with the second sealing cavity 43; the second sealing member 50 includes a first sealing end face 57, a second sealing end face 58, and a sealing side face 59; the first sealing end face 57 is sealedly connected to the bottom of the second sealing cavity 43, the second sealing end face 58 is sealedly connected to the second pressing portion 72, and the sealing side face 59 is sealedly connected to the side wall of the second sealing cavity 43. The second sealing member 50 is axially provided with a plurality of first through holes 56, wherein the first through holes 56 are used to pass through the thermocouple's thermocouple, or the resistor of the thermal resistor and other detection units, wherein the number of the first through holes 56 is the same as the number of the thermocouple or the resistor. The second sealing member 50 is made of non-metallic materials such as rubber.

[0057] like Figure 4 and 7As shown, as a preference, the first sealing end surface 57 is provided with a third sealing protrusion 571 extending along the axial direction; the second sealing end surface 58 is provided with a fourth sealing protrusion 581 extending along the axial direction. The third sealing protrusion 571 extends into the first fixing cavity 42 and is sealedly connected to the third connecting member 40; the fifth connecting member 70 is provided with a third through hole 71 along the axial direction, and the fourth sealing protrusion 581 extends into the third through hole 71 and is sealedly connected to the fifth connecting member 70. By designing the third sealing protrusion 571 and the fourth sealing protrusion 581, wherein the outer wall 571 of the third sealing protrusion fits with the inner wall of the first fixed cavity 42 to achieve sealing, and the outer wall of the fourth sealing protrusion 581 fits with the inner wall of the third through hole 71 to achieve sealing, further sealing is achieved, and the third sealing protrusion 571 and the fourth sealing protrusion 581 can play a positioning role when under pressure, and the installation is more convenient; and when the protective tube 90 is broken, the pressure in the furnace will directly act on the third sealing protrusion 571, so that the third sealing protrusion 571 and the first fixed cavity 42 fit more closely, and the sealing effect is better.

[0058] like Figure 2 and 4 As shown, the first end of the third connecting member 40 is threadedly connected to the first sealing end 11 of the first connecting member 10, the second end of the third connecting member 40 is threadedly connected to the first end of the fourth connecting member 60, and the first end of the fourth connecting member 60 is threadedly connected to the fifth connecting member 70. The threaded connection facilitates external adjustment of the pressure of the seal, ensuring that during the debugging process, the pressure of the first seal 32 and the second seal 50 can be accurately adjusted according to the vacuum degree in the vacuum furnace to ensure the best sealing effect.

[0059] like Figure 8 As shown, a sensor for a vacuum furnace includes a sealing device, a detection unit, a terminal 80, and a protective tube 90. The detection unit is arranged in the protective tube 90 and connected to the terminal 80 through the fifth connecting member 70 of the sealing device. The protective tube 90 is fixedly connected to the supporting portion 22 of the second connecting member 20. The connecting end 12 of the first connecting member 10 is welded and sealed with a measuring device such as a vacuum furnace, a calibration furnace, etc. When testing or sealing is not good, the third connecting member 40 and the fourth connecting member 60 can be rotated to increase the pressure of the first sealing member 32 and the second sealing member 50 to improve the sealing performance; when the fifth connecting member 70 is threadedly connected to the fourth connecting member 60, the fifth connecting member 70 can be rotated to increase the pressure of the second sealing member 50 to improve the sealing performance.

[0060] The above are only specific implementation methods of the utility model, but the protection scope of the utility model is not limited to this. Any changes or replacements that are not conceived through creative work should be covered within the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope defined in the claims.

Claims

1. A sealing device, characterized in that: include A first connecting member (10), the first connecting member (10) comprising a first sealing end (11) and a connecting end (12) connected to the measuring body, the first sealing end (11) being provided with a first sealing cavity (13), the connecting end (12) being provided with a placement cavity (14), the first sealing cavity (13) being in communication with the placement cavity (14); A first sealing component (30), the first sealing component (30) comprising a first pressing member (31) and a first sealing member (32), the first sealing member (32) being disposed in the first sealing cavity (13); A third connecting member (40), wherein a first connecting cavity (41) is disposed at a first end of the third connecting member (40), the first pressing member (31) is disposed in the first connecting cavity (41), a second sealing cavity (43) is disposed at a second end of the third connecting member (40), a first fixed cavity (42) is internally disposed in the third connecting member (40), and the first connecting cavity (41) is communicated with the second sealing cavity (43) via the first fixed cavity (42); the first connecting cavity (41) of the third connecting member (40) is adjustably connected to the first sealing end (11) of the first connecting member (10); A second connecting member (20), wherein the second connecting member (20) passes through the first connecting member (10), the first sealing member (32) and the first pressing member (31) in sequence and is fixedly connected to the first fixing cavity (42) of the third connecting member (40); by adjusting the third connecting member (40) or / and the first connecting member (10), the first pressing member (31) and the first sealing member (32) are close to each other to press the first sealing member (32), so that the first sealing member (32) is sealedly connected to the first sealing cavity (13), the outer wall of the second connecting member (20), and the first pressing member (31); A second sealing member (50); A fifth connecting member (70); A fourth connecting member (60), wherein the fourth connecting member (60) has a third sealed cavity (61) built therein, wherein the first end of the fourth connecting member (60) is adjustably connected to the third connecting member (40) via the third sealed cavity (61), and the second end of the fourth connecting member (60) is connected to the fifth connecting member (70) via the third sealed cavity (61), wherein the second sealing member (50) is arranged in the third sealed cavity (61), and by adjusting the fourth connecting member (60) and / or the third connecting member (40), the fifth connecting member (70) and the third connecting member (40) are brought close to and pressed against the second sealing member (50), so that the second sealing member (50) is sealedly connected to the second sealed cavity (43), the inner wall of the third sealed cavity (61), and the fifth connecting member (70).

2. A sealing device according to claim 1, characterized in that: The second connecting member (20) comprises a limiting end (21) and a supporting portion (22); the first end of the supporting portion (22) is fixedly connected to the limiting end (21); the second end of the supporting portion (22) passes through the first connecting member (10), the first sealing member (32) and the first holding member (31) in sequence, and is fixedly connected to the first fixing cavity (42) of the third connecting member (40); the limiting end (21) is arranged in the placement cavity (14) to limit the displacement of the supporting portion (22) entering the first fixing cavity (42).

3. A sealing device according to claim 1, characterized in that: The first sealing member (32) has a hollow circular ring structure in cross section; The first pressing member (31) comprises a first driving portion (311) and a first pressing portion (312); the first end of the first pressing portion (312) is fixedly connected to the first pressing portion (312); the second end of the first pressing portion (312) is provided with a pressing cavity (313); the cross-sectional diameter of the pressing cavity (313) gradually increases from the inside to the second end of the first pressing portion (312); the first driving portion (311) is in contact with and connected to the bottom of the first connecting cavity (41); By adjusting the third connecting member (40) and / or the first connecting member (10), the first driving part (311) is pressed by the third connecting member (40), and the first pressing part (312) is driven to press and hold the first sealing member (32), so that the first sealing member (32) is sealedly connected with the first sealing cavity (13), the outer wall of the second connecting member (20), and the pressing cavity (313).

4. A sealing device according to claim 3, characterized in that: The outer diameter of the first pressing portion (312) is equal to the outer diameter of the first sealing member (32).

5. A sealing device according to claim 1, characterized in that: The second sealing member (50) comprises a body (51), a first end seal (52) and a second end seal (53), wherein the first end seal (52) and the second end seal (53) are connected to two ends of the body (51), and the body (51) is a cylinder, and the first end seal (52) and the second end seal (53) are conical bodies; The second sealing cavity (43) is a tapered opening matching the first end seal (52); The first end of the fifth connecting member (70) is arranged in the third sealing cavity (61), and the first end of the fifth connecting member (70) is provided with a tapered cavity (73) matching the second end seal (53); The first end seal (52) is sealed to the second sealed cavity (43), the second end seal (53) is sealed to the conical cavity (73) of the fifth connecting member (70), and the outer side surface of the body (51) is sealed to the side wall of the third sealed cavity (61).

6. A sealing device according to claim 5, characterized in that: The first end seal (52) is provided with a first sealing protrusion (54) extending along the axial direction; and the second end seal (53) is provided with a second sealing protrusion (55) extending along the axial direction.

7. A sealing device according to claim 1, characterized in that: The end of the fifth connecting member (70) disposed in the third sealing cavity (61) is axially extended to form a second pressing portion (72); The second sealing member (50) is a cylinder, and the second sealing member (50) is arranged in the second sealing cavity (43) and is matched and connected with the second sealing cavity (43); The second sealing member (50) comprises a first sealing end face (57), a second sealing end face (58) and a sealing side face (59); the first sealing end face (57) is sealingly connected to the bottom of the second sealing cavity (43), the second sealing end face (58) is sealingly connected to the second holding portion (72), and the sealing side face (59) is sealingly connected to the side wall of the second sealing cavity (43).

8. A sealing device according to claim 7, characterized in that: The first sealing end surface (57) is provided with a third sealing protrusion (571) extending along the axial direction; and the second sealing end surface (58) is provided with a fourth sealing protrusion (581) extending along the axial direction.

9. A sealing device according to claim 1, characterized in that: The first end of the third connecting member (40) is threadedly connected to the first sealing end (11) of the first connecting member (10), the second end of the third connecting member (40) is threadedly connected to the first end of the fourth connecting member (60), and the first end of the fourth connecting member (60) is threadedly connected to the fifth connecting member (70).

10. A sensor for a vacuum furnace, characterized in that: It comprises a sealing device, a detection unit, a terminal (80), and a protective tube (90) as described in any one of claims 1 to 9, wherein the detection unit is arranged in the protective tube (90) and connected to the terminal (80) through the sealing device, and the protective tube (90) is fixedly connected to the second connecting member (20).

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