Liquid supplementing and pressure extracting device and system and wet process equipment

Abstract

The utility model relates to the technical field of fluid infusion, and provides a fluid infusion pressure pumping device, a fluid infusion pressure pumping system and wet process equipment. The liquid supplementing and pressure extracting device comprises a controller, an inductor, an emergency stop valve and a pressure extracting module, the controller is electrically connected with the inductor, the emergency stop valve and the pressure extracting module, the inductor and the emergency stop valve are arranged on the liquid supplementing pipe, and the inductor is located on the upstream of the emergency stop valve according to the flowing direction of liquid of the liquid supplementing pipe; the sensor is used for monitoring a gas signal in the liquid supplementing pipe; and the controller is used for controlling the emergency stop valve to be closed so as to disconnect the liquid supplementing pipe when receiving the gas signal transmitted by the sensor, and controlling the pressure pumping module to work so as to pump the gas in the liquid supplementing pipe. Therefore, the gas is automatically extracted when the gas is monitored in the liquid supplementing process, manual exhaust or liquid replacement is not needed, operation is simplified, the solution is saved, and the labor cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of fluid infusion, and in particular to a fluid infusion pumping device, a system and wet process equipment. Background Art

[0002] Wet process equipment refers to equipment used in the semiconductor manufacturing process. It uses chemical solutions to clean, etch, and de-glue silicon wafers. In the process of replenishing the solution in the wet process equipment, air will be introduced into the refill tube. In this way, the sensor will alarm when it cannot detect the liquid, resulting in the interruption of refilling. In this case, the operator usually manually exhausts the air, or exhausts the liquid and refills the liquid through liquid replacement operations. However, these methods are cumbersome to operate, and will lead to waste of solution and high labor costs. Utility Model Content

[0003] The utility model aims to provide a fluid replenishment pressure extraction device, system and wet process equipment, which can effectively solve the problem of complicated exhaust operation during the fluid replenishment process.

[0004] The embodiment of the utility model is achieved as follows:

[0005] In a first aspect, the utility model provides a fluid infusion pumping device, comprising a controller, a sensor, an emergency stop valve and a pumping module, wherein the controller is electrically connected to the sensor, the emergency stop valve and the pumping module respectively, the sensor and the emergency stop valve are arranged on a fluid infusion pipe and the sensor is located upstream of the emergency stop valve according to the liquid flow direction of the fluid infusion pipe;

[0006] The sensor is used to monitor the gas signal in the fluid infusion tube;

[0007] The controller is used to control the emergency stop valve to close so as to disconnect the infusion tube when receiving the gas signal transmitted by the sensor, and control the extraction and pressure module to operate so as to extract the gas in the infusion tube.

[0008] In an optional embodiment, the controller is further configured to control the emergency stop valve to open so that the liquid infusion tube is conductive when receiving a liquid signal transmitted by the sensor.

[0009] In an optional embodiment, the fluid infusion pumping device further includes a three-way valve electrically connected to the controller, the three-way valve is disposed on the fluid infusion tube and the three-way valve is located upstream of the sensor according to the liquid flow direction of the fluid infusion tube;

[0010] The input port of the three-way valve is communicated with the input end of the infusion tube, the output port of the three-way valve is communicated with the output end of the infusion tube, and the bypass port of the three-way valve is communicated with the pressure extraction module;

[0011] The controller is also used to control the input port to close and the output port to connect with the bypass port when receiving the gas signal transmitted by the sensor, so that the liquid infusion pipe section between the output port and the emergency stop valve is connected with the pressure extraction module.

[0012] In an optional embodiment, the controller is also used to control the bypass port to close and the input port to connect with the output port when receiving the liquid signal transmitted by the sensor, so that the liquid infusion pipe section between the output port and the emergency stop valve is disconnected from the pressure extraction module.

[0013] In an optional embodiment, the fluid infusion pumping device further includes a fluid infusion valve electrically connected to the controller, the fluid infusion valve is disposed on the fluid infusion tube and the fluid infusion valve is located upstream of the sensor according to the liquid flow direction of the fluid infusion tube;

[0014] The controller is also used to control the liquid replenishing valve to close when receiving the gas signal transmitted by the sensor, so that the liquid replenishing pipe section between the liquid replenishing valve and the emergency stop valve is connected to the pressure extraction module.

[0015] In an optional embodiment, the controller is further used to control the liquid replenishing valve to open when receiving the liquid signal transmitted by the sensor, so that the liquid replenishing pipe section between the liquid replenishing valve and the emergency stop valve is disconnected from the pressure extraction module.

[0016] In an optional embodiment, the pressure extraction module includes a shell, a pressure extraction plug and a motor, the shell is cylindrical and has a cavity inside, the pressure extraction plug is connected to the motor through a rotating shaft, and the motor is electrically connected to the controller;

[0017] The controller is also used to control the motor to be in a first working state when receiving a gas signal transmitted by the sensor;

[0018] The motor is used to drive the rotating shaft to drive the extraction and pressure plug to move and form negative pressure in the cavity in the first working state, so as to extract gas from the fluid infusion tube.

[0019] In an optional embodiment, the controller is further used to control the motor to be in a second working state when receiving the liquid signal transmitted by the sensor;

[0020] The motor is used to drive the rotating shaft to drive the pressure extraction plug to move and form a positive pressure in the cavity in the second working state to discharge the gas in the fluid infusion tube.

[0021] In a second aspect, the utility model provides a system, comprising an exhaust device, a one-way valve and the liquid replenishment and pressure extraction device according to any one of the aforementioned embodiments, wherein the inlet end of the one-way valve is connected to the pressure extraction module in the liquid replenishment and pressure extraction device, and the outlet end of the one-way valve is connected to the exhaust device;

[0022] The pressure extraction module is used to discharge the gas in the liquid infusion tube into the exhaust device.

[0023] In a third aspect, the utility model provides a wet process equipment, which includes the fluid infusion and pressure extraction device described in any one of the aforementioned embodiments.

[0024] The utility model provides a fluid infusion pumping device, system and wet process equipment, wherein the fluid infusion pumping device includes a controller, a sensor, an emergency stop valve and a pumping module, and the controller is electrically connected to the sensor, the emergency stop valve and the pumping module respectively, the sensor and the emergency stop valve are arranged on the fluid infusion tube and the sensor is located upstream of the emergency stop valve according to the liquid flow direction of the fluid infusion tube; the sensor is used to monitor the gas signal in the fluid infusion tube; the controller is used to control the emergency stop valve to close to disconnect the fluid infusion tube when receiving the gas signal transmitted by the sensor, and control the pumping module to work to extract the gas in the fluid infusion tube. The beneficial effects of the utility model include: realizing automatic gas extraction when gas is detected during the fluid infusion process, without manual exhaust or liquid replacement, simplifying the operation, saving solution and reducing labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 One of the circuit connection diagrams of the fluid infusion and pressure pumping device provided in an embodiment of the utility model;

[0027] Figure 2 One of the structural example diagrams of the fluid infusion and pressure pumping device provided in an embodiment of the utility model;

[0028] Figure 3 The second structural example diagram of the fluid infusion and pressure pumping device provided in the embodiment of the utility model;

[0029] Figure 4 The second circuit connection diagram of the fluid infusion and pressure pumping device provided in the embodiment of the utility model;

[0030] Figure 5The third structural example diagram of the fluid infusion and pressure pumping device provided in the embodiment of the utility model;

[0031] Figure 6 The third circuit connection diagram of the fluid infusion and pressure pumping device provided in the embodiment of the utility model;

[0032] Figure 7 A fourth structural example diagram of the fluid infusion and pressure pumping device provided in an embodiment of the utility model;

[0033] Figure 8 A fifth structural example diagram of the fluid infusion and pressure pumping device provided in an embodiment of the utility model;

[0034] Fig. 9 Figure 6 of the structure example of the fluid infusion and pressure pumping device provided in the embodiment of the utility model;

[0035] Fig.10 A connection diagram of a system provided by an embodiment of the utility model;

[0036] Fig.11 A structural example diagram of a system provided in an embodiment of the utility model.

[0037] Icons: 100-fluid replenishing and pressure extraction device; 200-fluid replenishing pipe; 300-exhaust device; 400-check valve; 110-controller; 120-sensor; 130-emergency stop valve; 140-pressure extraction module; 150-three-way valve; 160-fluid replenishing valve; 141-housing; 143-pressure extraction plug; 145-motor; 147-rotating shaft. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Generally, the components of the embodiment of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0041] In the description of the present utility model, it should be understood that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present utility model.

[0042] Furthermore, the terms “first”, “second”, “third”, etc. are merely used for distinguishing descriptions and are not to be understood as indicating or implying relative importance.

[0043] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] See also Figure 1 , is a circuit connection diagram of the fluid infusion pumping device 100 of the embodiment of the utility model. The fluid infusion pumping device 100 includes a controller 110, a sensor 120, an emergency stop valve 130 and a pumping module 140, and the controller 110 is electrically connected to the sensor 120, the emergency stop valve 130 and the pumping module 140 respectively.

[0045] The controller 110 is an integrated circuit chip, which can be a central processing unit (CPU), an application specific integrated circuit (ASIC), an off-the-shelf programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The sensor 120 is a sensor that detects gas and liquid by emitting light waves or sound waves and based on reflected waves, which can be a light wave sensor, a sound wave sensor, etc. The emergency stop valve 130 can be a solenoid valve. The extraction and pressure module 140 is used to extract and press out gas.

[0046] For ease of understanding, the present invention also provides a structural diagram of a fluid infusion pumping device 100. Figure 2, wherein the sensor 120 and the emergency stop valve 130 are arranged on the infusion tube 200, and the sensor 120 is located upstream of the emergency stop valve 130 according to the liquid flow direction of the infusion tube 200, and the pressure extraction module 140 is arranged upstream of the sensor 120. Optionally, the pressure extraction module 140 can also be arranged between the sensor 120 and the emergency stop valve 130, such as Figure 3 shown.

[0047] The sensor 120 is used to monitor the gas signal in the infusion tube 200; the controller 110 is used to control the emergency stop valve 130 to close to disconnect the infusion tube 200 when receiving the gas signal transmitted by the sensor 120, and control the extraction and pressure module 140 to work to extract the gas in the infusion tube 200.

[0048] During the process of rehydration, the sensor 120 monitors the rehydration tube in real time and transmits a signal to the controller 110 based on the monitoring result. When the sensor 120 detects gas in the rehydration tube 200, it transmits a gas signal such as a high-level signal to the controller 110; when the sensor 120 does not detect gas in the rehydration tube 200, it transmits a liquid signal such as a low-level signal to the controller 110.

[0049] If air is introduced into the infusion tube 200 during the infusion process, the sensor 120 will transmit a gas signal, ie, a high-level signal, to the controller 110 when detecting gas in the infusion tube 200 .

[0050] When the controller 110 receives the gas signal, i.e., the high-level signal, transmitted by the sensor 120, it controls the emergency stop valve 130 to close, so that the infusion tube 200 is disconnected at the emergency stop valve 130, even if the infusion tube sections on both sides of the emergency stop valve 130 cannot be connected. In addition, the controller 110 transmits instructions to the extraction and pressure module 140 to control the operation of the extraction and pressure module 140, that is, the extraction and pressure module 140 starts to work upon receiving the instructions transmitted by the controller 110 to extract the gas in the infusion tube 200. Thus, when gas is detected during the infusion process, the gas is automatically extracted without manual exhaust or liquid replacement, which simplifies the operation, saves solution and reduces labor costs.

[0051] It is understandable that as the gas in the infusion tube 200 is evacuated, until there is no gas in the infusion tube 200, that is, when the sensor 120 does not detect gas in the infusion tube 200, a liquid signal, i.e., a low-level signal, is transmitted to the controller 110. When the controller 110 receives the liquid signal, i.e., the low-level signal, transmitted by the sensor 120, it controls the emergency stop valve 130 to open, so that the infusion tube sections on both sides of the emergency stop valve 130 are connected, and the infusion tube 200 is restored to conduction to continue infusion.

[0052] See also Figure 4, is another circuit connection diagram of the fluid infusion pumping device 100 of the embodiment of the utility model. The fluid infusion pumping device 100 further includes a three-way valve 150 , and the three-way valve 150 is electrically connected to the controller 110 .

[0053] based on Figure 4 The circuit connection diagram of the fluid infusion pumping device 100 shown in FIG. 1 is a circuit connection diagram of the fluid infusion pumping device 100. The present utility model embodiment also provides another structural example diagram of the fluid infusion pumping device 100. Figure 5 , wherein the three-way valve 150 is disposed on the infusion tube 200, and the three-way valve 150 is located upstream of the sensor 120 according to the liquid flow direction of the infusion tube 200. The input port of the three-way valve 150 is connected to the input end of the infusion tube 200, the output port of the three-way valve 150 is connected to the output end of the infusion tube 200, and the bypass port of the three-way valve 150 is connected to the pressure extraction module 140.

[0054] When the controller 110 receives the gas signal, i.e., the high-level signal, transmitted by the sensor 120, it controls the emergency stop valve 130 to be closed, and controls the input port of the three-way valve 150 to be closed and the output port to be connected to the bypass port. That is, by controlling the emergency stop valve 130 and the input port of the three-way valve 150 to be closed, the infusion pipe 200 is disconnected at the emergency stop valve 130 and the three-way valve 150; and by controlling the output port of the three-way valve 150 to be connected to the bypass port, the infusion pipe section between the output port and the emergency stop valve 130 is connected to the pressure extraction module 140.

[0055] The controller 110 transmits instructions to the pressure extraction module 140 to control the operation of the pressure extraction module 140 , that is, the pressure extraction module 140 starts to work upon receiving the instructions transmitted by the controller 110 to extract the gas in the infusion pipe section between the output port and the emergency stop valve 130 .

[0056] Accordingly, when the controller 110 receives the liquid signal, i.e., the low-level signal, transmitted by the sensor 120, it controls the emergency stop valve 130 to open, and controls the bypass port of the three-way valve 150 to close and the input port to connect with the output port. That is, by controlling the bypass port of the three-way valve 150 to close, the liquid infusion pipe section between the output port and the emergency stop valve 130 is disconnected from the pressure extraction module 140; and by controlling the emergency stop valve 130 to open and the input port of the three-way valve 150 to connect with the output port, the liquid infusion pipe 200 is restored to continue the liquid infusion.

[0057] See also Figure 6 , is another circuit connection diagram of the fluid replenishment pumping device 100 of the embodiment of the utility model. The fluid replenishment pumping device 100 further includes a fluid replenishment valve 160, and the fluid replenishment valve 160 is electrically connected to the controller 110, and the fluid replenishment valve 160 can be a solenoid valve.

[0058] based on Figure 6The circuit connection diagram of the fluid infusion pumping device 100 is shown in FIG. 1 . The present utility model embodiment also provides two structural example diagrams of the fluid infusion pumping device 100 . Figure 7 and Figure 8 , wherein the liquid replenishing valve 160 is disposed on the liquid replenishing tube 200 , and the liquid replenishing valve 160 is located upstream of the sensor 120 according to the liquid flow direction of the liquid replenishing tube 200 .

[0059] When the controller 110 receives the gas signal, i.e., the high-level signal, transmitted by the sensor 120, it controls the liquid replenishment valve 160 and the emergency stop valve 130 to close, so that the liquid replenishment pipe 200 is disconnected at the liquid replenishment valve 160 and the emergency stop valve 130, and the liquid replenishment pipe section between the liquid replenishment valve 160 and the emergency stop valve 130 is connected to the pressure extraction module 140.

[0060] The controller 110 transmits instructions to the pressure extraction module 140 to control the operation of the pressure extraction module 140 , that is, the pressure extraction module 140 starts to work upon receiving the instructions transmitted by the controller 110 to extract the gas in the infusion pipe section between the infusion valve 160 and the emergency stop valve 130 .

[0061] Correspondingly, when the controller 110 receives the liquid signal, i.e., a low-level signal, transmitted by the sensor 120, it controls the liquid replenishment valve 160 and the emergency stop valve 130 to open, so that the liquid replenishment pipe section between the liquid replenishment valve 160 and the emergency stop valve 130 is disconnected from the pumping module 140, and the liquid replenishment pipe 200 is restored to conduction to continue liquid replenishment.

[0062] Optionally, the pumping module 140 includes a housing 141, a pumping plug 143 and a motor 145. The housing 141 is cylindrical and has a cavity inside. The pumping plug 143 is connected to the motor 145 via a rotating shaft 147. The motor 145 is electrically connected to the controller 110. Figure 5 The present utility model also provides another structural example diagram of the fluid infusion and pressure pumping device 100. Fig. 9 , wherein the bypass port of the three-way valve 150 is connected to the housing 141 of the pressure extraction module 140 .

[0063] When the controller 110 receives the gas signal, i.e., the high-level signal, transmitted by the sensor 120, it controls the emergency stop valve 130 to close, and controls the input port of the three-way valve 150 to close and the output port to connect with the bypass port, so that the infusion tube 200 is disconnected, and the infusion tube section between the output port and the emergency stop valve 130 is connected with the outer shell 141.

[0064] And the controller 110 transmits a first instruction to the motor 145 to control the motor 145 to be in a first working state. When the motor 145 receives the first instruction transmitted by the controller 110, it performs the first working state, that is, the driving shaft 147 drives the pumping plug 143 to move and form a negative pressure in the cavity to extract the gas in the liquid infusion pipe section between the output port and the emergency stop valve 130.

[0065] Accordingly, when the controller 110 receives the liquid signal, i.e., the low-level signal, transmitted by the sensor 120, it controls the emergency stop valve 130 to open, and controls the bypass port of the three-way valve 150 to close and the input port to connect with the output port, so that the infusion pipe section between the output port and the emergency stop valve 130 is disconnected from the pumping module 140, and the infusion pipe 200 is restored to continue infusion.

[0066] The controller 110 transmits a second instruction to the motor 145 to control the motor 145 to be in the second working state. When the motor 145 receives the second instruction transmitted by the controller 110, it enters the second working state, that is, the driving shaft 147 drives the pumping plug 143 to move and form a positive pressure in the cavity to discharge the gas in the liquid infusion pipe section between the output port and the emergency stop valve 130.

[0067] See also Fig.10 , is a connection diagram of a system provided by an embodiment of the utility model. The system includes a liquid infusion pumping device 100, an exhaust device 300 and a one-way valve 400, and the inlet end of the one-way valve 400 is connected to the pumping module 140 in the liquid infusion pumping device 100, and the outlet end of the one-way valve 400 is connected to the exhaust device 300. The pumping module 140 is used to discharge the gas in the liquid infusion tube 200 into the exhaust device 300.

[0068] Based on the above Fig. 9 , the present utility model embodiment also provides a structural example diagram of the system. Fig.11 , wherein the inlet end of the one-way valve 400 is connected to the housing 141 of the pressure relief module 140 in the liquid replenishment pressure relief device 100 , and the outlet end of the one-way valve 400 is connected to the exhaust device 300 .

[0069] When the motor 145 of the extraction and pressure module 140 is in the second working state, the driving shaft 147 drives the extraction and pressure plug 143 to move and form a positive pressure in the cavity, so as to discharge the gas in the liquid filling pipe section between the output port and the emergency stop valve 130 into the exhaust gas device 300 through the one-way valve 400.

[0070] The embodiment of the utility model further provides a wet process equipment, which includes the fluid infusion and pressure extraction device 100 provided in the embodiment of the utility model.

[0071] In summary, the utility model provides a fluid infusion and pumping device 100, a system and a wet process equipment. The fluid infusion and pumping device 100 includes a controller 110, a sensor 120, an emergency stop valve 130 and a pumping module 140, and the controller 110 is electrically connected to the sensor 120, the emergency stop valve 130 and the pumping module 140 respectively, the sensor 120 and the emergency stop valve 130 are arranged on the fluid infusion tube 200 and the sensor 120 is located upstream of the emergency stop valve 130 according to the liquid flow direction of the fluid infusion tube 200; the sensor 120 is used to monitor the gas signal in the fluid infusion tube 200; the controller 110 is used to control the emergency stop valve 130 to close to disconnect the fluid infusion tube 200 when receiving the gas signal transmitted by the sensor 120, and control the pumping module 140 to work to extract the gas in the fluid infusion tube 200. This enables automatic gas extraction when gas is detected during the fluid replenishment process, without the need for manual exhaust or fluid replacement, thus simplifying the operation, saving solution and reducing labor costs.

[0072] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A fluid infusion and pressure pumping device, characterized in that: It includes a controller, a sensor, an emergency stop valve and a pumping module, wherein the controller is electrically connected to the sensor, the emergency stop valve and the pumping module respectively, the sensor and the emergency stop valve are arranged on the infusion pipe, and the sensor is located upstream of the emergency stop valve according to the liquid flow direction of the infusion pipe; The sensor is used to monitor the gas signal in the fluid infusion tube; The controller is used to control the emergency stop valve to close so as to disconnect the infusion tube when receiving the gas signal transmitted by the sensor, and control the extraction and pressure module to operate so as to extract the gas in the infusion tube.

2. The fluid infusion and pressure pumping device according to claim 1, characterized in that: The controller is also used to control the emergency stop valve to open so that the liquid infusion tube is conductive when receiving the liquid signal transmitted by the sensor.

3. The fluid infusion and pressure pumping device according to claim 1, characterized in that: The fluid infusion pumping device further comprises a three-way valve electrically connected to the controller, wherein the three-way valve is arranged on the fluid infusion tube and is located upstream of the sensor according to the liquid flow direction of the fluid infusion tube; The input port of the three-way valve is communicated with the input end of the infusion tube, the output port of the three-way valve is communicated with the output end of the infusion tube, and the bypass port of the three-way valve is communicated with the pressure extraction module; The controller is also used to control the input port to close and the output port to connect with the bypass port when receiving the gas signal transmitted by the sensor, so that the liquid infusion pipe section between the output port and the emergency stop valve is connected with the pressure extraction module.

4. The fluid infusion and pressure pumping device according to claim 3, characterized in that: The controller is also used to control the bypass port to close and the input port to connect with the output port when receiving the liquid signal transmitted by the sensor, so that the liquid infusion pipe section between the output port and the emergency stop valve is disconnected from the pressure extraction module.

5. The fluid infusion and pressure pumping device according to claim 1, characterized in that: The fluid replenishment pumping device further comprises a fluid replenishment valve electrically connected to the controller, wherein the fluid replenishment valve is arranged on the fluid replenishment tube and is located upstream of the sensor according to the liquid flow direction of the fluid replenishment tube; The controller is also used to control the liquid replenishing valve to close when receiving the gas signal transmitted by the sensor, so that the liquid replenishing pipe section between the liquid replenishing valve and the emergency stop valve is connected to the pressure extraction module.

6. The fluid infusion and pressure pumping device according to claim 5, characterized in that: The controller is also used to control the liquid replenishing valve to open when receiving the liquid signal transmitted by the sensor, so that the liquid replenishing pipe section between the liquid replenishing valve and the emergency stop valve is disconnected from the pressure extraction module.

7. The fluid infusion and pressure pumping device according to claim 1, characterized in that: The pumping and pressure module comprises a shell, a pumping and pressure plug and a motor, the shell is cylindrical and has a cavity inside, the pumping and pressure plug is connected to the motor through a rotating shaft, and the motor is electrically connected to the controller; The controller is also used to control the motor to be in a first working state when receiving a gas signal transmitted by the sensor; The motor is used to drive the rotating shaft to drive the extraction and pressure plug to move and form negative pressure in the cavity in the first working state, so as to extract gas from the fluid infusion tube.

8. The fluid infusion and pressure pumping device according to claim 7, characterized in that: The controller is also used to control the motor to be in a second working state when receiving the liquid signal transmitted by the sensor; The motor is used to drive the rotating shaft to drive the pressure extraction plug to move and form a positive pressure in the cavity in the second working state to discharge the gas in the fluid infusion tube.

9. A system, characterized in that: It comprises an exhaust device, a one-way valve and the fluid replenishment and pressure extraction device according to any one of claims 1 to 8, wherein the inlet end of the one-way valve is connected to the pressure extraction module in the fluid replenishment and pressure extraction device, and the outlet end of the one-way valve is connected to the exhaust device; The pressure extraction module is used to discharge the gas in the liquid infusion tube into the exhaust device.

10. A wet process equipment, characterized in that: The wet process equipment comprises the fluid infusion and pressure extraction device according to any one of claims 1 to 8.

Images