Glue filling vacuum box

Abstract

The utility model discloses a glue filling vacuum box. Comprising a glue pouring box main body and further comprises a limiting seat which is arranged in the glue pouring box main body and used for positioning a ceramic disc and / or a substrate, and a sealing glue ring is arranged on the outer ring of the substrate; one end of the gluing pipe is inserted into the sealing glue ring and is used for injecting glue between the ceramic disc and the substrate, and the other end of the gluing pipe extends out of the glue filling box main body and is connected with an injection pump; an opening in one end of the air pipe is communicated with the inner cavity of the glue filling box main body, and the other end of the air pipe is connected with a vacuum pump and used for vacuumizing the interior of the glue filling box main body. According to the utility model, the pressure injector is adopted to fill glue, so that the efficiency can be greatly improved, the glue is filled from the bottom little by little, the air in the ESC can be effectively eliminated by vacuumizing, a helium hole does not need to be cleaned, and the labor cost is saved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor wafer etching and optical technology, in particular to a glue-filling vacuum box. Background Art

[0002] The electrostatic adsorption technology of electrostatic chuck is widely used in semiconductor wafer etching, optics and other fields. As the power used increases, the ceramic disc and glue need to be more corrosion-resistant, and the conventional glue thickness can no longer meet the needs of the existing etching process.

[0003] As the thickness of the glue increases, it becomes difficult to bond. Using a screen brush to brush glue can no longer meet the requirements. When bonding ceramic plates, the glue will also escape into the aluminum base due to extrusion. Utility Model Content

[0004] The utility model aims at the deficiencies in the prior art and provides a glue-filling vacuum box.

[0005] In order to solve the above technical problems, the utility model is solved by the following technical solutions:

[0006] The glue filling vacuum box includes a glue filling box body and a

[0007] A limit seat, which is arranged in the glue filling box body and is used to position the ceramic disk and / or the substrate, and the outer ring of the substrate is provided with a sealing glue ring;

[0008] A glue injection tube, one end of which is inserted into the sealing glue ring and used to inject glue into between the ceramic disk and the substrate, and the other end of which extends outside the glue injection box body and is connected to an injection pump; and

[0009] The air pipe has one end opening connected to the internal cavity of the glue filling box body, and the other end connected to the vacuum pump, so as to evacuate the inside of the glue filling box body.

[0010] In the above solution, preferably, each helium hole of the substrate is surrounded by a glue ring.

[0011] In the above solution, preferably, the ceramic disk is fixed on the substrate by a lift pin.

[0012] In the above scheme, preferably, the ceramic disk and the substrate stand on the limiting seat, and the ceramic disk and the substrate are positioned by a lift pin that cooperates with the limiting seat.

[0013] In the above solution, preferably, the sealing glue ring is arranged at the outermost circle of the substrate.

[0014] In the above solution, preferably, the height of the sealing glue ring is greater than or equal to the gap between the ceramic disk and the substrate.

[0015] In the above scheme, preferably, the glue is AB glue.

[0016] In the above scheme, preferably, the bottom of the glue filling box body has an air extraction hole, and the air pipe is assembled at the air extraction hole and positioned on the glue filling box body.

[0017] In the above solution, preferably, the material of the glue filling box body is transparent acrylic material.

[0018] In the above scheme, preferably, the glue filling box body has a positioning member inside for positioning or guiding the glue filling tube.

[0019] The beneficial effects of the utility model are:

[0020] The utility model adopts a pressure syringe to fill glue, which can greatly improve efficiency and allow the glue to fill up little by little from the bottom. In addition, vacuuming can effectively remove the air inside the ESC, and there is no need to clean the helium hole, saving labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the utility model.

[0022] Figure 2 It is a schematic diagram of the cooperation between the ceramic disk and the substrate of the utility model. DETAILED DESCRIPTION

[0023] The present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods:

[0024] See also Figure 1 and Figure 2 The glue pouring vacuum box comprises a glue pouring box body 1, a limit seat 2, a glue pouring tube 3 and an air tube 4.

[0025] The glue filling box body 1 has a cavity 11 inside for accommodating the limit seat 2, the ceramic disk 51, and the substrate 52. The glue filling box body 1 also has a door panel that can open and close the cavity. After the door panel is opened, it can be used to place the ceramic disk 51, the substrate 52 or take out the ESC (electrostatic suction cup) that has been filled with glue, so that the taken out ESC can be taken away for drying.

[0026] In this embodiment, the limit seat 2 can be installed on the inner bottom surface of the glue filling box body 1, and is used to position the ceramic disk 51 and / or the substrate 52. The outer circle of the substrate 52 is provided with a sealing glue ring 53. As one of the options, the sealing glue ring 53 is arranged at the outermost circle of the substrate 52, and it surrounds the entire outer circumference of the ceramic disk 51. The height of the sealing glue ring 53 is greater than or equal to the gap height between the ceramic disk 51 and the substrate 52, and the sealing glue ring 53 can be attached to the outer circumference of the ceramic disk 51.

[0027] The ceramic disk 51 and the base plate 52 stand on the limiting seat 2 , and are positioned by a push pin matched with the limiting seat 2 .

[0028] In this embodiment, there are two holes on the glue filling box body 1, one of which is used for the glue filling tube 3 to pass through. After the glue filling tube 3 passes through, the gap between it and the hole can be sealed by a seal; the other is used for the air pipe 4 to pass through. After the air pipe 4 passes through, the gap between it and the hole can be sealed by a seal.

[0029] One end of the glue tube 3 located outside the glue filling box body 1 is connected to the injection pump, and the injection pump can be installed on the top of the glue filling box body 1 or placed on one side of the glue filling box body 1; one end of the glue tube 3 located inside the glue filling box body 1 is inserted into the sealing glue ring 53, and the glue can flow out through the glue outlet of the glue tube 3 and enter between the ceramic disk 51 and the substrate 52.

[0030] In this embodiment, one end of the air pipe 4 is opened and communicated with the internal cavity of the glue filling box body 1 , and the other end is connected to the vacuum pump 7 for evacuating the inside of the glue filling box body 1 .

[0031] In this embodiment, a positioning member 8 for positioning or guiding the glue-filling tube 3 is provided inside the glue-filling box body 1 . The glue-filling tube 3 can be passed through the through hole on the positioning member 8 during installation.

[0032] As one of the options, the glue is AB glue, and the material of the glue filling box body 1 is transparent acrylic material.

[0033] Working principle of glue filling vacuum box:

[0034] 1. A glue ring of fixed thickness is attached to each helium hole of the aluminum base, and a sealing glue ring is made on the outermost circle;

[0035] 2. Fix the ceramic disc on the aluminum base with a top pin, stand it up, and insert the catheter into the outermost sealing ring;

[0036] 3. Use a pressure syringe to inject AB glue into the ESC while evacuating the vacuum;

[0037] 4. Open the cavity and take the ESC filled with glue to dry.

[0038] The traditional adhesive process is screen printing, and improper operation may cause the AB glue to flow into the helium channel and cause blockage;

[0039] It is troublesome to clean the glue after drying. It is time-consuming and laborious to clean the glue in the helium holes one by one with a needle. This method does not require cleaning the helium holes, saving labor costs.

[0040] Using a pressure syringe to fill glue can greatly improve efficiency, allowing the glue to fill up from the bottom little by little, and vacuuming can effectively remove the air inside the ESC.

[0041] Solve the problem that the glue thickness is too thick to assemble ESC and prevent AB glue from escaping into the helium hole.

[0042] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A glue filling vacuum box, including a glue filling box body, characterized in that: Also includes A limit seat, which is arranged in the glue filling box body and is used to position the ceramic disk and / or the substrate, and the outer ring of the substrate is provided with a sealing glue ring; A glue injection tube, one end of which is inserted into the sealing glue ring and used to inject glue into between the ceramic disk and the substrate, and the other end of which extends outside the glue injection box body and is connected to an injection pump; and The air pipe has one end opening connected to the internal cavity of the glue filling box body, and the other end connected to the vacuum pump, so as to evacuate the inside of the glue filling box body.

2. The glue pouring vacuum box according to claim 1, characterized in that: Each helium hole of the substrate is surrounded by a glue ring.

3. The glue pouring vacuum box according to claim 1 or 2, characterized in that: The ceramic disk is fixed on the base plate by means of ejector pins.

4. The glue pouring vacuum box according to claim 1 or 2, characterized in that: The ceramic disk and the substrate stand on the limiting seat, and are positioned by a lift pin matched with the limiting seat.

5. The glue pouring vacuum box according to claim 1, characterized in that: The sealing glue ring is arranged at the outermost circle of the substrate.

6. The glue pouring vacuum box according to claim 1 or 5, characterized in that: The height of the sealing glue ring is greater than or equal to the gap between the ceramic disk and the substrate.

7. The glue pouring vacuum box according to claim 1, characterized in that: The glue is AB glue.

8. The glue pouring vacuum box according to claim 1, characterized in that: The bottom of the glue filling box body is provided with an air extraction hole, and the air pipe is assembled at the air extraction hole and positioned on the glue filling box body.

9. The glue pouring vacuum box according to claim 1, characterized in that: The material of the glue filling box body is transparent acrylic material.

10. The glue pouring vacuum box according to claim 1, characterized in that: The glue filling box body has a positioning piece inside for positioning or guiding the glue filling tube.

Images