Waste liquid collecting device for silicon wafer cleaning machine

Abstract

The utility model relates to the technical field of silicon wafer cleaning machines, and discloses a waste liquid collecting device for a silicon wafer cleaning machine, which comprises a cleaning machine, and a liquid outlet hopper is fixedly mounted on the left side of the cleaning machine; the extraction assembly is fixedly mounted on the left side of the liquid outlet hopper; wherein the extraction assembly comprises an extraction part and a conveying part; the collecting assembly is arranged on the left side of the liquid outlet hopper; wherein the collecting assembly comprises a connecting part and a moving part. According to the utility model, the connecting part is arranged, the clamping seat is rotated, the connecting pipe and the conveying hose rotate relatively, and the clamping seat is not clamped with the liquid inlet hopper any more, so that the short pipe can be taken out of the liquid inlet hopper, and the short pipe can be inserted into the liquid inlet hopper only by rotating the clamping seat; the clamping seat and the liquid inlet hopper are fixedly clamped, so that waste liquid can be input into the collecting tank, and the effects that the connecting mode between the collecting tank and the conveying pipeline is simple, and waste liquid collection is facilitated are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning machines, in particular to a waste liquid collecting device for silicon wafer cleaning machines. Background Art

[0002] Wafer cleaning machine is an indispensable equipment in the semiconductor manufacturing process. It is mainly used to remove stains, dust and residues on the surface of silicon wafers to ensure the cleanliness of silicon wafers. Its working principle is mainly to remove impurities on the surface of silicon wafers through various cleaning methods (such as chemical cleaning, physical cleaning, etc.).

[0003] At present, in the actual application of the waste liquid collection device for silicon wafer cleaning machines, each time the waste liquid collection is completed, the staff always needs to disassemble the conveying pipeline and the collection tank. After the waste liquid inside the collection tank is cleaned, it is necessary to install the collection tank and the conveying pipeline again. The operation is troublesome, which makes the waste liquid collection process waste time. Utility Model Content

[0004] The utility model aims to provide a waste liquid collection device for a silicon wafer cleaning machine, so as to achieve the purpose of solving the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a waste liquid collection device for a silicon wafer cleaning machine, comprising a cleaning machine, a liquid outlet hopper being fixedly installed on the left side of the cleaning machine;

[0006] An extraction component, the extraction component is fixedly installed on the left side of the liquid discharge hopper;

[0007] Wherein, the extraction component includes an extraction part and a conveying part;

[0008] A collecting assembly, the collecting assembly is arranged on the left side of the liquid outlet hopper;

[0009] Wherein, the collecting component includes a connecting part and a moving part.

[0010] Preferably, the extraction part includes a water pump, a fixing frame is arranged on the left side of the liquid discharge bucket, a support rod is arranged on the left side of the fixing frame, a support plate is fixedly installed on the top of the support rod, and a base is fixedly installed on the bottom of the support rod.

[0011] Preferably, the water pump is fixedly installed between the liquid discharge hopper, the water pump is fixedly installed inside the fixing frame, the fixing frame is fixedly installed on the top of the base, and a semicircular groove is opened inside the supporting plate.

[0012] Preferably, the conveying part includes a conveying hose, a sealing ring is fixedly installed on one end of the conveying hose, a connecting pipe is movably installed on one end of the conveying hose, the other end of the conveying hose is fixedly installed on the water pump, the conveying hose is arranged on the top of the base, the conveying hose is adapted to the semicircular groove, and the conveying hose is movably installed on the top of the support plate.

[0013] Preferably, the connecting portion includes a socket, a short tube is fixedly installed at the bottom of the socket, a liquid inlet hopper is arranged on the left side of the liquid outlet hopper, a tank cover is fixedly installed at the bottom of the liquid inlet hopper, and a collection tank is fixedly installed at the bottom of the tank cover.

[0014] Preferably, the holder is fixedly installed on the connecting pipe, the inner circumference of the holder is fixedly installed with a first block equidistantly, the top circumference of the liquid inlet hopper is fixedly installed with a second block equidistantly, the first block and the second block are installed in an offset manner, the holder and the liquid inlet hopper are fixedly installed by a snap connection, the short tube is movably installed inside the liquid inlet hopper, and the liquid inlet hopper is connected to the inside of the collecting tank.

[0015] Preferably, the moving part includes a push rod, a bottom plate is fixedly installed at the bottom of the push rod, a moving wheel is fixedly installed at the bottom of the bottom plate, a frame is fixedly installed at the top of the bottom plate, a pump body is arranged at the top of the bottom plate, and a water outlet bucket is fixedly installed on the right side of the pump body.

[0016] Preferably, the bottom plate is arranged on the left side of the liquid outlet hopper, a collecting tank is arranged on the top of the bottom plate, the collecting tank is fixedly installed inside the frame, a through hole is opened inside the frame, the pump body is fixedly installed inside the collecting tank, the right end of the water outlet hopper passes through the collecting tank and the through hole in sequence, and the right end of the water outlet hopper extends to the outside of the through hole, and the top of the collecting tank passes through the frame and extends to the top of the frame.

[0017] The utility model provides a waste liquid collection device for a silicon wafer cleaning machine. It has the following beneficial effects:

[0018] (1) The utility model sets a connection part and rotates the clamping seat. At the same time, the connecting pipe and the conveying hose rotate relative to each other, and the clamping seat is no longer clamped with the liquid inlet bucket. At this time, the short tube can be taken out from the inside of the liquid inlet bucket. When the short tube is inserted into the inside of the liquid inlet bucket, it is only necessary to rotate the clamping seat so that the clamping seat and the liquid inlet bucket are fixedly clamped to input the waste liquid into the collection tank, thereby achieving the effect of simple connection between the collection tank and the conveying pipeline and facilitating the collection of waste liquid.

[0019] (2) The utility model sets a moving part and pushes the push rod, so that the bottom plate moves under the action of the moving wheel. When the collection tank on the top of the bottom plate is moved to the specified position, the pump body is started, and the waste liquid in the collection tank is discharged through the water outlet bucket, thereby achieving the effect of labor-saving waste liquid cleaning and simple operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 This is a structural view of the connection part of the utility model;

[0022] Figure 3 This is a front view of the utility model;

[0023] Figure 4 For this utility model Figure 3 A partial enlarged view of the middle part.

[0024] In the figure: 1 cleaning machine, 2 liquid outlet bucket, 3 extraction component, 31 extraction part, 311 water pump, 312 fixing frame, 313 support rod, 314 support plate, 315 base, 32 delivery part, 321 delivery hose, 322 sealing ring, 323 connecting pipe, 4 collecting component, 41 connecting part, 411 card seat, 412 short pipe, 413 liquid inlet bucket, 414 tank cover, 415 collecting tank, 42 ​​moving part, 421 push rod, 422 bottom plate, 423 moving wheel, 424 frame, 425 pump body, 426 water outlet bucket. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention. Embodiment 1

[0027] The preferred embodiment of the waste liquid collection device for a silicon wafer cleaning machine provided by the utility model is as follows Figure 1-4 As shown: a waste liquid collection device for a silicon wafer cleaning machine, comprising a cleaning machine 1, a liquid outlet hopper 2 is fixedly installed on the left side of the cleaning machine 1;

[0028] The extraction component 3 is fixedly installed on the left side of the liquid discharge hopper 2;

[0029] The extraction component 3 includes an extraction part 31 and a conveying part 32;

[0030] The extraction part 31 includes a water pump 311, a fixing frame 312 is arranged on the left side of the liquid outlet bucket 2, a support rod 313 is arranged on the left side of the fixing frame 312, a support plate 314 is fixedly installed on the top of the support rod 313, a base 315 is fixedly installed on the bottom of the support rod 313, the water pump 311 is fixedly installed between the liquid outlet bucket 2, the water pump 311 is fixedly installed inside the fixing frame 312, the fixing frame 312 is fixedly installed on the top of the base 315, and a semicircular groove is opened inside the support plate 314; the support plate 314 supports the delivery hose 321, and the water pump 311 is started, and the waste liquid inside the cleaning machine 1 enters the delivery hose 321 through the liquid outlet bucket 2;

[0031] The conveying part 32 includes a conveying hose 321, one end of which is fixedly installed with a sealing ring 322, one end of which is movably installed with a connecting pipe 323, the other end of which is fixedly installed with the water pump 311, and the conveying hose 321 is arranged on the top of the base 315, the conveying hose 321 is adapted to the semicircular groove, and the conveying hose 321 is movably installed on the top of the support plate 314; the setting of the sealing ring 322 ensures that the connection between the conveying hose 321 and the connecting pipe 323 has good sealing performance, and the waste liquid enters the connecting pipe 323 through the conveying hose 321. Embodiment 2

[0032] Based on Example 1, a preferred embodiment of a waste liquid collection device for a silicon wafer cleaning machine provided by the utility model is as follows: Figure 1-4 As shown: a collecting assembly 4, which is arranged on the left side of the liquid outlet hopper 2;

[0033] The collecting component 4 includes a connecting portion 41 and a moving portion 42;

[0034] The connection part 41 includes a holder 411, a short tube 412 is fixedly installed at the bottom of the holder 411, a liquid inlet hopper 413 is arranged on the left side of the liquid outlet hopper 2, a tank cover 414 is fixedly installed at the bottom of the liquid inlet hopper 413, a collecting tank 415 is fixedly installed at the bottom of the tank cover 414, the holder 411 is fixedly installed with the connecting pipe 323, a first card block is fixedly installed at an equal distance on the inner circumference of the holder 411, a second card block is fixedly installed at an equal distance on the top circumference of the liquid inlet hopper 413, the first card block and the second card block are staggered, and the holder 41 1 is fixedly installed with the liquid inlet hopper 413 by clamping, and the short tube 412 is movably installed inside the liquid inlet hopper 413, and the liquid inlet hopper 413 is connected with the inside of the collecting tank 415; the waste liquid enters the short tube 412 through the connecting tube 323, and finally enters the inside of the collecting tank 415, and the waste liquid is collected. The clamping seat 411 is rotated, and the connecting tube 323 and the conveying hose 321 are relatively rotated at the same time, and the clamping seat 411 is no longer clamped with the liquid inlet hopper 413, and the short tube 412 can be taken out from the inside of the liquid inlet hopper 413;

[0035] The moving part 42 includes a push rod 421, a bottom plate 422 is fixedly installed at the bottom of the push rod 421, a moving wheel 423 is fixedly installed at the bottom of the bottom plate 422, a frame 424 is fixedly installed at the top of the bottom plate 422, a pump body 425 is arranged at the top of the bottom plate 422, a water outlet bucket 426 is fixedly installed on the right side of the pump body 425, the bottom plate 422 is arranged on the left side of the liquid outlet bucket 2, a collection tank 415 is arranged at the top of the bottom plate 422, the collection tank 415 is fixedly installed inside the frame 424, and a through hole is opened inside the frame 424. Hole, the pump body 425 is fixedly installed inside the collecting tank 415, the right end of the water outlet bucket 426 passes through the collecting tank 415 and the through hole in sequence, and the right end of the water outlet bucket 426 extends to the outside of the through hole, the top of the collecting tank 415 passes through the frame 424 and extends to the top of the frame 424; push the push rod 421, the bottom plate 422 moves under the action of the moving wheel 423, when the collecting tank 415 on the top of the bottom plate 422 is moved to the specified position, start the pump body 425, and the waste liquid inside the collecting tank 415 is discharged through the water outlet bucket 426.

[0036] When in use, the support plate 314 supports the delivery hose 321, the water pump 311 is started, and the waste liquid inside the cleaning machine 1 enters the delivery hose 321 through the liquid outlet bucket 2. The setting of the sealing ring 322 ensures that the sealing of the connection between the delivery hose 321 and the connecting pipe 323 is good, and the waste liquid enters the connecting pipe 323 through the delivery hose 321, and then enters the short tube 412 through the connecting pipe 323, and finally enters the collecting tank 415 to complete the collection of the waste liquid. The holder 411 is rotated, and the connecting pipe 323 and the delivery hose 321 rotate relative to each other, and the holder 411 is no longer engaged with the liquid inlet bucket 413. At this time, the short tube 412 can be taken out from the liquid inlet bucket 413, and the push rod 421 is pushed. The bottom plate 422 moves under the action of the moving wheel 423. When the collecting tank 415 on the top of the bottom plate 422 is moved to the specified position, the pump body 425 is started, and the waste liquid inside the collecting tank 415 is discharged through the water outlet bucket 426.

[0037] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A waste liquid collection device for a silicon wafer cleaning machine, characterized in that: It comprises a cleaning machine (1), wherein a liquid discharge hopper (2) is fixedly mounted on the left side of the cleaning machine (1); An extraction component (3), the extraction component (3) being fixedly mounted on the left side of the liquid outlet hopper (2); Wherein, the extraction component (3) comprises an extraction portion (31) and a conveying portion (32); A collecting component (4), wherein the collecting component (4) is arranged on the left side of the liquid outlet hopper (2); Wherein, the collecting component (4) comprises a connecting portion (41) and a moving portion (42).

2. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: The extraction portion (31) comprises a water pump (311), a fixing frame (312) is arranged on the left side of the liquid outlet bucket (2), a support rod (313) is arranged on the left side of the fixing frame (312), a support plate (314) is fixedly mounted on the top of the support rod (313), and a base (315) is fixedly mounted on the bottom of the support rod (313).

3. The waste liquid collection device for a silicon wafer cleaning machine according to claim 2, characterized in that: The water pump (311) is fixedly installed between the liquid outlet bucket (2), the water pump (311) is fixedly installed inside the fixing frame (312), the fixing frame (312) is fixedly installed on the top of the base (315), and a semicircular groove is opened inside the support plate (314).

4. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: The delivery portion (32) comprises a delivery hose (321), one end of the delivery hose (321) is fixedly mounted with a sealing ring (322), one end of the delivery hose (321) is movably mounted with a connecting pipe (323), the other end of the delivery hose (321) is fixedly mounted to a water pump (311), the delivery hose (321) is arranged on the top of a base (315), the delivery hose (321) is adapted to fit between the semicircular groove, and the delivery hose (321) is movably mounted on the top of a support plate (314).

5. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: The connecting portion (41) comprises a holder (411), a short tube (412) is fixedly mounted on the bottom of the holder (411), a liquid inlet hopper (413) is arranged on the left side of the liquid outlet hopper (2), a tank cover (414) is fixedly mounted on the bottom of the liquid inlet hopper (413), and a collection tank (415) is fixedly mounted on the bottom of the tank cover (414).

6. The waste liquid collection device for a silicon wafer cleaning machine according to claim 5, characterized in that: The clamping seat (411) is fixedly mounted on the connecting pipe (323); clamping blocks 1 are fixedly mounted at equal intervals on the inner circumference of the clamping seat (411); clamping blocks 2 are fixedly mounted at equal intervals on the top circumference of the liquid inlet hopper (413); the clamping blocks 1 and 2 are installed in an offset manner; the clamping seat (411) and the liquid inlet hopper (413) are fixedly mounted by clamping; the short tube (412) is movably mounted inside the liquid inlet hopper (413); and the liquid inlet hopper (413) is connected to the inside of a collecting tank (415).

7. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: The moving part (42) comprises a push rod (421), a bottom plate (422) is fixedly mounted on the bottom of the push rod (421), a moving wheel (423) is fixedly mounted on the bottom of the bottom plate (422), a frame (424) is fixedly mounted on the top of the bottom plate (422), a pump body (425) is arranged on the top of the bottom plate (422), and a water outlet bucket (426) is fixedly mounted on the right side of the pump body (425).

8. The waste liquid collection device for a silicon wafer cleaning machine according to claim 7, characterized in that: The bottom plate (422) is arranged on the left side of the liquid outlet hopper (2); a collecting tank (415) is arranged on the top of the bottom plate (422); the collecting tank (415) is fixedly mounted inside the frame (424); a through hole is provided inside the frame (424); the pump body (425) is fixedly mounted inside the collecting tank (415); the right end of the water outlet hopper (426) passes through the collecting tank (415) and the through hole in sequence; the right end of the water outlet hopper (426) extends to the outside of the through hole; and the top of the collecting tank (415) passes through the frame (424) and extends to the top of the frame (424).

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