Positioning jig and target changing device
By designing positioning fixtures and target replacement devices, the multi-stage positioning of the first and second-stage positioning parts and the locking and unlocking mechanism of the limiting parts, combined with the telescopic structure of the support rod, the traditional target replacement method is solved inefficient and insufficient safety. The problem of precise positioning and efficient target replacement can be achieved.
Patent Information
- Application Number
- CN202421313403.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-07
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-06-07
AI Technical Summary
The traditional target replacement method relies on bulky forklifts, which leads to the cumbersome alignment process and low efficiency. The modern robotic arms introduced are costly and difficult to popularize.
A positioning fixture and target replacement device are designed, including a primary positioning member and a secondary positioning member. The precise positioning of the object to be positioned is achieved through the locking and unlocking state of the limiting member, and combined with the telescopic structure of the support rod, ensuring replacement. Safety of the target process.
Accurate positioning of objects to be located is achieved, the efficiency and safety of the target replacement process is improved, the labor intensity of workers is reduced, and the risk of equipment damage is reduced.
Smart Images
Figure CN222499350U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of magnetron sputtering of semiconductor physical vapor deposition, in particular to a positioning fixture and a target changing device. Background Art
[0002] In the field of modern science and technology, thin film deposition technology plays a vital role, especially in vacuum coating industries such as semiconductors and photovoltaics. These industries have extremely high requirements for the quality and performance of thin films. Therefore, it is particularly important to choose an efficient and reliable thin film deposition technology. Magnetron sputtering coating technology is a widely used process for thin film preparation. It is favored by the industry for its excellent film quality, high deposition rate and good controllability.
[0003] Reference Figure 1 and Figure 2 , the target material 16 of the magnetron sputtering coating device 10 is connected to the upper cavity 12, the substrate 13 is arranged on the substrate 13 stage of the lower cavity 15, and the magnetron 11 is arranged on the side of the target material 16 away from the substrate 13. The basic principle of the magnetron sputtering coating device 10 is to use the interaction between the electric field and the magnetic field to accelerate the electrons to fly to the substrate 13 under the action of the electric field, and collide with the argon atoms in the process, thereby ionizing a large number of argon ions and electrons. These electrons further fly to the substrate 13, and the argon ions are accelerated to bombard the target material 16 under the action of the electric field, sputtering a large number of target material 16 atoms. Finally, these neutral target atoms (or molecules) are deposited on the substrate 13 to form the desired film. However, in actual applications, since the target material 16 will continue to be bombarded by argon ions during the coating process, its surface material will gradually be consumed, so it must be replaced regularly to ensure the normal operation of the equipment and the quality of the film.
[0004] At present, the traditional target changing method mainly relies on a forklift to lift the target material 16, and then align it and tighten the screws. During the alignment process, a small displacement of the forklift is required, but because the forklift is relatively heavy, the alignment process is very laborious and inefficient, which not only increases the labor intensity of the workers, but also may cause damage to the target material 16 or equipment failure, thereby affecting production quality and efficiency. Modern target changing equipment also introduces a robotic arm or position sensor to change targets to improve the accuracy and efficiency of target changing. However, the manufacturing cost of the robotic arm is high, the maintenance is difficult, and it is difficult to popularize. Utility Model Content
[0005] The main purpose of the utility model is to provide a positioning fixture and a target changing device, which have a simple structure, strong controllability, can accurately position the object to be positioned, and can ensure the safety of the target changing process.
[0006] To achieve the above objectives, some embodiments of the first aspect of the present invention provide a positioning fixture, including:
[0007] A primary positioning member, configured to be able to slide relative to the ground, the primary positioning member comprising a mounting portion;
[0008] A secondary positioning member is slidably connected to the mounting portion, the secondary positioning member is configured to be able to slide horizontally relative to the mounting portion, and the secondary positioning member includes a bearing portion, and the bearing portion is used to fix the object to be positioned;
[0009] The limit member has a locked state and an unlocked state. In the locked state, the limit member fixes the relative positions of the primary positioning member and the secondary positioning member. In the unlocked state, the limit member releases the lock on the primary positioning member and the secondary positioning member so that the secondary positioning member can slide horizontally relative to the mounting portion.
[0010] In some embodiments, the secondary positioning member includes a universal ball, the universal ball abuts the mounting portion, and the secondary positioning member slides relative to the primary positioning member with the position of the universal ball abutting the mounting portion as a fulcrum.
[0011] In some embodiments, the primary positioning member includes a plurality of mounting portions, and the plurality of mounting portions are arranged around an edge of the primary positioning member, and the secondary positioning member includes a plurality of universal balls, and the plurality of universal balls correspond one-to-one to the plurality of mounting portions.
[0012] In some embodiments, the mounting portion includes a baffle and a base plate, the baffle surrounds an edge of the base plate and protrudes from the base plate toward the secondary positioning member, and the universal ball abuts against the base plate.
[0013] In some embodiments, the limiting member includes a limiting pin, the primary positioning member includes a first limiting hole, and the secondary positioning member includes a second limiting hole. In the locked state, the limiting pin passes through the first limiting hole and is connected to the second limiting hole to limit the sliding of the secondary positioning member relative to the primary positioning member.
[0014] In some embodiments, the positioning fixture also includes a latch plate. In the locked state, one end of the limit pin away from the second limit hole abuts against the latch plate to connect the limit pin to the first limit hole and the second limit hole. In the unlocked state, the limit pin and the latch plate are separated to allow the limit pin to fall off from the first limit hole and / or the second limit hole, so that the secondary positioning member is suitable for moving with the primary positioning member.
[0015] In some embodiments, the positioning fixture includes a first lifting portion, the first lifting portion is connected to the primary positioning member, and the first lifting portion is configured to adjust the height of the primary positioning member; and / or,
[0016] The positioning fixture includes a second lifting portion, the second lifting portion is connected to the secondary positioning piece, and the second lifting portion is configured to adjust the height of the secondary positioning piece.
[0017] In some embodiments, the bearing portion includes a first clamp body and a second clamp body, at least a portion of the object to be positioned is located between the first clamp body and the second clamp body, and the surface of the first clamp body facing the second clamp body and the surface of the second clamp body facing the first clamp body both abut against the object to be positioned, so that the bearing portion fixes the object to be positioned.
[0018] The embodiment of the second aspect of the utility model provides a target changing device, the target changing device comprises the positioning fixture of any one of the above embodiments, the target changing device also comprises a support rod, the support rod comprises a telescopic structure, a first rod body and a second rod body, the axes of the telescopic structure, the first rod body and the second rod body are all collinear, the telescopic structure connects the first rod body and the second rod body, the telescopic structure is configured to adjust the first rod body and the second rod body to be closer to or farther from each other along the axis, so that the support rod is extended or shortened along the axis;
[0019] Wherein, the telescopic structure includes a limiting shaft, and the support rod is configured to have an extreme position. In the extreme position, the distance between the first rod body and the second rod body along the axis is the farthest, and the limiting shaft connects the first rod body and the second rod body.
[0020] In some embodiments, the telescopic structure includes a positive and negative screw rod, the positive and negative screw rod includes a first external thread and a second external thread, and the limit shaft includes a smooth shaft segment, and the smooth shaft segment is located at opposite ends of the positive and negative screw rod;
[0021] The first rod body includes a first internal thread, the second rod body includes a second internal thread, the first internal thread cooperates with the first external thread, and the second internal thread cooperates with the second external thread, so that the first rod body and the second rod body are close to or far away from each other.
[0022] According to the above embodiments, the beneficial effects of the utility model are:
[0023] The positioning fixture of the utility model includes a primary positioning member and a secondary positioning member. The primary positioning member roughly positions the object to be positioned, and the secondary positioning member precisely positions the object to be positioned. Specifically, the primary positioning member can slide relative to the ground, the primary positioning member includes a mounting portion, the secondary positioning member is slidably connected to the mounting portion, and the bearing portion of the secondary positioning member is used to fix the object to be positioned. Therefore, the secondary positioning member can slide relative to the primary positioning member, so that the secondary positioning member further adjusts the position of the object to be positioned on the basis of the primary positioning member. Therefore, the positioning fixture of the utility model realizes fine adjustment of the position of the object to be positioned through multi-level positioning in which the secondary positioning member cooperates with the primary positioning member.
[0024] The positioning jig of the utility model also includes a limiting member, which has a locked state and an unlocked state. In the locked state, the limiting member fixes the positions of the primary positioning member and the secondary positioning member to prevent the secondary positioning member from sliding uncontrollably relative to the primary positioning member. In the unlocked state, the limiting member releases the lock on the primary positioning member and the secondary positioning member, allowing the secondary positioning member to slide relative to the primary positioning member. The limiting member improves the stability and manipulability of the positioning jig. The primary positioning member, the secondary positioning member and the limiting member cooperate together, so that the positioning jig of the utility model has a simple structure, is easy to produce, has strong manipulability, and can accurately position the object to be positioned.
[0025] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
[0027] Figure 1 It is a schematic diagram of the top view of the structure of a magnetron sputtering coating device in the related art;
[0028] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure of the magnetron sputtering coating equipment at AA;
[0029] Figure 3 This is a structural schematic diagram of a positioning fixture in one embodiment of the utility model;
[0030] Figure 4 It is a schematic diagram of the exploded structure of a positioning fixture in one embodiment of the utility model, wherein the positioning fixture is located near the magnetron sputtering coating equipment;
[0031] Figure 5 for Figure 4 Enlarged view of point A in the middle;
[0032] Figure 6 is a schematic diagram of the structure of the target;
[0033] Figure 7 This is a schematic diagram of the top view of the positioning fixture of one embodiment of the utility model;
[0034] Figure 8 This is a schematic diagram of the structure in which the target material is installed on the secondary positioning member in one embodiment of the utility model;
[0035] Fig. 9 To observe from another perspective Figure 8 Schematic diagram of the structure in which the middle target is installed on the secondary positioning piece;
[0036] Fig.10 for Figure 8 Schematic diagram of the cross-sectional structure of the middle structure at BB;
[0037] Fig.11 for Fig.10 Enlarged view of point B in the middle;
[0038] Fig.12 It is a side view structural schematic diagram of a target material installed on a positioning fixture in one embodiment of the utility model;
[0039] Fig.13 for Fig.12 The enlarged view at point C in the middle includes a schematic cross-sectional view of the universal ball and the limit pin;
[0040] Fig.14 To look in the other direction Fig.12 Schematic diagram of the structure of the target material installed on the positioning fixture;
[0041] Fig.15 for Fig.14 Enlarged view of point D in the middle;
[0042] Fig.16 This is a schematic diagram of the structure of the support rod supporting the upper cavity in one embodiment of the utility model;
[0043] Fig.17 for Fig.16 Schematic diagram of the structure of the middle support rod and the cross-sectional structure diagram at CC;
[0044] Fig.18 for Fig.17 Enlarged view of point E in the middle.
[0045] Description of Figure Numbers:
[0046] Magnetron sputtering coating equipment 10; magnetron 11; upper cavity 12; substrate 13; substrate stage 14; lower cavity 15; target material 16; target surface 1601; target back plate surface 1602; mounting screw holes 1603;
[0047] Primary positioning member 100; mounting portion 110; enclosure 111; bottom plate 112;
[0048] Secondary positioning member 200; bearing portion 210; first clamp body 211; second clamp body 212; universal ball 220;
[0049] Limiting member 300; limiting pin 310;
[0050] Latch card plate 400;
[0051] A first lifting part 500;
[0052] Support rod 600; telescopic structure 610; positive and negative thread rod 611; first external thread 612; second external thread 613; limit shaft 614; smooth shaft section 6141; first rod body 620; second rod body 630; caster 640; foot brake 650.
[0053] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION
[0054] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0055] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.
[0056] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or", "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.
[0057] In the related art, the traditional target changing method mainly relies on a forklift to lift the target material 16, and then align it and tighten the screws. The alignment process requires a small displacement of the forklift, but because the forklift is relatively heavy, the alignment process is very laborious and inefficient, which not only increases the labor intensity of the workers, but also may cause damage to the target material 16 or equipment failure, thereby affecting production quality and efficiency. Modern target changing equipment also introduces a robotic arm or position sensor to change targets to improve the accuracy and efficiency of target changing. However, the manufacturing cost of the robotic arm is high, the maintenance is difficult, and it is difficult to popularize.
[0058] Reference below Figures 3 to 18 To describe a positioning fixture and a target changing device according to an embodiment of the utility model. Figure 3 , Figure 4 and Fig.12 The positioning fixture of the utility model includes a primary positioning member 100 and a secondary positioning member 200. The primary positioning member 100 roughly positions the object to be positioned, and the secondary positioning member 200 precisely positions the object to be positioned. Specifically, the primary positioning member 100 can slide relative to the ground, the primary positioning member 100 includes a mounting portion 110, the secondary positioning member 200 is slidably connected to the mounting portion 110, and the bearing portion 210 of the secondary positioning member 200 is used to fix the object to be positioned. Therefore, the secondary positioning member 200 can slide relative to the primary positioning member 100, so that the secondary positioning member 200 further adjusts the position of the object to be positioned on the basis of the primary positioning member 100. Therefore, the positioning fixture of the utility model realizes fine adjustment of the position of the object to be positioned through multi-level positioning of the secondary positioning member 200 and the primary positioning member 100.
[0059] The positioning jig of the utility model also includes a limit member 300, and the limit member 300 has a locked state and an unlocked state. In the locked state, the limit member 300 fixes the positions of the primary positioning member 100 and the secondary positioning member 200 to prevent the secondary positioning member 200 from sliding uncontrollably relative to the primary positioning member 100. In the unlocked state, the limit member 300 releases the lock on the primary positioning member 100 and the secondary positioning member 200, allowing the secondary positioning member 200 to slide relative to the primary positioning member 100. The limit member 300 improves the stability and manipulability of the positioning jig. The primary positioning member 100, the secondary positioning member 200 and the limit member 300 work together to make the positioning jig of the utility model simple in structure, easy to produce, and highly manipulable, and can accurately position the object to be positioned.
[0060] It is understandable that, in some embodiments, the primary positioning member 100 is configured as a trolley provided with a mounting portion 110, and the trolley slides relative to the ground through wheels to achieve rough adjustment of the position of the object to be positioned. The rough adjustment of the position of the object to be positioned by the trolley can quickly adjust the object to be positioned to the target position, thereby saving the time used in the intermediate process and making the positioning fixture more efficient in adjusting the position of the object to be positioned. The secondary positioning member 200 is connected to the primary positioning member 100 through the mounting portion 110, and the secondary positioning member 200 can slide relative to the primary positioning member 100. The secondary positioning member 200 can adjust the position of the object to be positioned slightly compared to the primary positioning member 100, that is, the secondary positioning member 200 further finely adjusts the position of the object to be positioned on the basis of the positioning of the object to be positioned by the primary positioning member 100, so that the position of the object to be positioned is more accurate. It should be noted that the primary positioning member 100 performs rough positioning of the object to be positioned, and rough positioning means adjusting the object to be positioned to the vicinity of the target position; the secondary positioning member 200 performs fine positioning of the object to be positioned, and fine positioning means adjusting the object to be positioned to the target position.
[0061] Reference Figure 5 , Fig.11 and Fig.13 In some embodiments, the secondary positioning member 200 includes a universal ball 220, which is mounted on the secondary positioning member 200. The universal ball 220 abuts against the mounting portion 110 toward one side of the primary positioning member 100, so that the primary positioning member 100 carries the secondary positioning member 200, and the secondary positioning member 200 completes the connection with the primary positioning member 100. The secondary positioning member 200 can move synchronously with the primary positioning member 100 to change the position relative to the ground. The secondary positioning member 200 uses the position where the universal ball 220 abuts against the mounting portion 110 as a fulcrum, and can slide or roll relative to the primary positioning member 100, so the secondary positioning member 200 can further adjust the position of the object to be positioned at the position of the primary positioning member 100. Specifically, the primary positioning member 100 is used to move the object to be positioned to the vicinity of the target position, and the operator moves the secondary positioning member 200 so that the secondary positioning member 200 moves relative to the primary positioning member 100 with the position where the universal ball 220 abuts against the mounting portion 110 as a fulcrum, that is, the operator manually adjusts the position of the secondary positioning member 200 so that the secondary positioning member 200 moves slightly, thereby transporting the object to be positioned to the target position. Such a configuration has a simple structure and high positioning efficiency.
[0062] Of course, it can be understood that in some embodiments, the primary positioning member 100 is a trolley, the upper end of the trolley is a platform parallel to the ground, and the platform is configured as a mounting portion 110. The secondary positioning member 200 rolls on the platform of the trolley through a universal ball 220 to achieve precise adjustment of the position of the object to be positioned. In some embodiments, the mounting portion 110 is a structure separately provided on the platform of the trolley, so that the secondary positioning member 200 rolls in the area of a specific structure.
[0063] It can be understood that the structure of the secondary positioning member 200 connecting the primary positioning member 100 includes but is not limited to a universal ball 220, a universal wheel, a universal ball 220 head structure, a slide rail, etc. It only needs to ensure that the secondary positioning member 200 can move relative to the primary positioning member 100 to finely adjust the position of the object to be positioned in a small range.
[0064] Reference Figures 7 to 9 In some embodiments, the primary positioning member 100 includes a plurality of mounting portions 110, and the plurality of mounting portions 110 surround the edge of the primary positioning member 100, and the secondary positioning member 200 includes a plurality of universal balls 220, and the plurality of universal balls 220 are installed one-to-one with the plurality of mounting portions 110. In this configuration, the primary positioning member 100 can be configured as a hollow frame, and the secondary positioning member 200 can be configured as a hollow frame, wherein the mounting portion 110 surrounds the primary positioning member 100, the universal ball 220 surrounds the secondary positioning member 200, the universal ball 220 is installed on the secondary positioning member 200, and abuts against the mounting portion 110 toward one side of the primary positioning member 100, so as to realize the connection between the secondary positioning member 200 and the primary positioning member 100. Both the primary positioning member 100 and the secondary positioning member 200 are configured as hollow frames, which can adapt to objects to be positioned in more shapes, so as to expand the application scope of the positioning fixture of the utility model. Furthermore, through the universal ball 220 and the corresponding mounting portion 110 arranged around the primary positioning member 100, the fulcrums of the secondary positioning member 200 when rolling relative to the primary positioning member 100 are distributed more evenly, making the connection and relative movement between the secondary positioning member 200 and the primary positioning member 100 more stable.
[0065] Reference Fig.10 and Fig.11 In some embodiments, the mounting portion 110 is bowl-shaped. Specifically, the mounting portion 110 includes a baffle 111 and a bottom plate 112. The baffle 111 surrounds the edge of the bottom plate 112 and protrudes from the bottom plate 112 toward the secondary positioning member 200, and the universal ball 220 abuts against the bottom plate 112. In this way, the baffle 111 can limit the movement range of the universal ball 220, preventing the secondary positioning member 200 from falling off from the primary positioning member 100 due to excessive movement. Excessive movement refers to the situation where the secondary positioning member 200 moves out of the area of the mounting portion 110 used to carry the universal ball 220.
[0066] Reference Figures 12 to 15 In some embodiments, the limit member 300 includes a limit pin 310, and the limit pin 310 has a locked state and an unlocked state. Specifically, the primary positioning member 100 includes a first limit hole, and the secondary positioning member 200 includes a secondary positioning hole. The positions of the secondary positioning hole and the primary positioning hole correspond, and the axes of the secondary positioning hole and the primary positioning hole coincide. In the locked state, the limit pin 310 passes through the first limit hole and connects the second limit hole, thereby limiting the sliding of the secondary positioning member 200 relative to the primary positioning member 100. In the unlocked state, the limit pin 310 falls off from the first limit hole and / or the second limit hole to release the fixation of the primary positioning member 100 and the secondary positioning member 200, so that the secondary positioning member 200 can move relative to the primary positioning member 100. Among them, when the primary positioning member 100 roughly positions the object to be positioned, the limit pin 310 is in a locked state, so that the secondary positioning member 200 can move smoothly with the primary positioning member 100; when the secondary positioning member 200 finely positions the object to be positioned, the limit pin 310 is in an unlocked state, so that the object to be positioned moves slightly under the drive of the secondary positioning member 200, so as to move accurately to the target position.
[0067] Reference Figures 12 to 15 In some embodiments, specifically, the positioning fixture further includes a latch card plate 400, and the limit pin 310 is L-shaped. In the locked state, one end of the limit pin 310 away from the second limit hole abuts against the latch card plate 400, so that the limit pin 310 is connected to the first limit hole and the second limit hole. That is, the long end of the L-shaped limit pin 310 connects the first limit hole and the second limit hole, and the short end of the L-shaped limit pin 310 is abutted by the latch card plate 400. In the unlocked state, the limit pin 310 and the latch card plate 400 are separated, so that the limit pin 310 falls off from the first limit hole and / or the second limit hole, so that the secondary positioning member 200 is suitable for moving with the primary positioning member 100. It can be understood that the long end of the L-shaped limit pin 310 passes through the first limit hole in sequence and is inserted into the second limit hole. The end of the L-shaped stop pin 310 inserted into the second stop hole is still a certain distance from the end on the other side of the second stop hole, and the end of the first stop hole facing the insertion direction of the L-shaped stop pin 310 is still a certain distance from the turning point of the L-shaped stop pin 310, so that the L-shaped stop pin 310 can continue to move along the direction of insertion into the first stop hole. When the locked L-shaped stop pin 310 is adjusted to the unlocked state, it is only necessary to lift the L-shaped stop pin 310, that is, push the L-shaped stop pin 310 along the direction in which the L-shaped stop pin 310 is inserted into the first stop hole, and then rotate the L-shaped stop pin 310 so that the short side of the L-shaped stop pin 310 moves out from the side suitable for matching the latch card 400. Therefore, the L-shaped stop pin 310 can be pulled out from the first stop hole and the second stop hole at this time, so that the L-shaped stop pin 310 falls off from the first stop hole and / or the second stop hole, so that the secondary positioning member 200 can move relative to the primary positioning member 100.
[0068] Of course, it is understandable that, in some embodiments, the second limiting hole passes through the second positioning member along its own axial direction. In some embodiments, the second limiting hole only extends to the interior of the second positioning member, and it is only necessary to satisfy the limiting pin 310 connecting the first limiting hole and the second limiting hole.
[0069] Of course, it is understandable that in some embodiments, the limit pin 310 can be separated from the latch card 400 by adjusting the state of the latch card 400, so that the limit pin 310 falls off from the first limit hole and / or the second limit hole, thereby adjusting the limit pin 310 from the locked state to the unlocked state.
[0070] Of course, it can be understood that in some embodiments, the limiter 300 includes a buckle, specifically, the primary positioning member 100 is provided with a buckle, and the secondary positioning member 200 is provided with a buckle matching the primary positioning member 100, and the buckle of the primary positioning member 100 and the buckle of the secondary positioning member 200 are buckled, so that the limiter 300 is in a locked state, and the buckle of the primary positioning member 100 and the buckle of the secondary positioning member 200 are separated, so that the limiter 300 is in an unlocked state. In some embodiments, the limiter 300 includes a magnet block, specifically, the primary positioning member 100 is provided with a magnet block, and the secondary positioning member 200 is correspondingly provided with a magnet block, and the magnet block of the primary positioning member 100 and the magnet block of the secondary positioning member 200 are mutually adsorbed together, so that the limiter 300 is in a locked state, and the magnet block of the primary positioning member 100 and the magnet block of the secondary positioning member 200 are separated, so that the limiter 300 is in an unlocked state.
[0071] Reference Fig.12 In some embodiments, the positioning fixture includes a first lifting portion 500, the first lifting portion 500 is connected to the primary positioning member 100, and the first lifting portion 500 can adjust the height of the primary positioning member 100 relative to the ground. The secondary positioning member 200 is carried on the primary positioning member 100, and the secondary positioning member 200 carries the object to be positioned, so the secondary positioning member 200 adjusts its height as the primary positioning member 100 adjusts its height, so that the height of the object to be positioned relative to the ground is adjusted, which further facilitates adjusting the object to be positioned to the target position. In some embodiments, the positioning fixture includes a second lifting portion, the second lifting portion is connected to the secondary positioning member 200, and the second lifting portion is configured to adjust the height of the secondary positioning member 200, thereby adjusting the height of the object to be positioned.
[0072] Of course, it is understandable that, in some embodiments, the first lifting part 500 and / or the second lifting part are folding structures. In some embodiments, the first lifting part 500 and / or the second lifting part are telescopic tubes, which only need to be able to adjust the height of the first-level positioning member 100 and / or the second-level positioning member 200 relative to the ground.
[0073] Reference Fig.11 In some embodiments, it is characterized in that the bearing portion 210 includes a first clamp body 211 and a second clamp body 212, at least a portion of the object to be positioned is located between the first clamp body 211 and the second clamp body 212, and the surface of the first clamp body 211 facing the second clamp body 212 and the surface of the second clamp body 212 facing the first clamp body 211 both abut against the object to be positioned, so that the bearing portion 210 fixes the object to be positioned.
[0074] When the object to be positioned is the target material 16, specifically, refer to Figure 6 The target material 16 includes a target surface 1601, a target back plate surface 1602 and a mounting screw hole 1603. After the mounting screw hole 1603 of the target material 16 and the mounting screw hole 1603 of the upper cavity 12 are aligned, the target material 16 and the upper cavity 12 are connected by screws. Figure 3 and Fig.12 The secondary positioning member 200 is a hollow frame, and the secondary positioning member 200 is connected to the primary positioning member 100 through a universal ball 220, so as to be suitable for moving in the water surface relative to the primary positioning member 100. The target material 16 is clamped by the secondary positioning member 200, so as to be fixed to the secondary positioning member 200. Specifically, the target surface 1601 of the target material 16 faces downward, and the target back plate surface 1602 of the target material 16 is respectively abutted by the first clamp body 211 and the second clamp body 212 on both sides along the thickness direction, so that the bearing part 210 of the secondary positioning member 200 fixes the target material 16. In some embodiments, the first clamp body 211 is located on the side of the target back plate surface 1602 facing the target surface 1601, and the second clamp body 212 is located on the side of the target back plate surface 1602 away from the target surface 1601. The second clamp body 212 includes a pressure block, which is pressed on the target back plate surface 1602. The pressure block and the first clamp body 211 are tightened by bolts, so that the secondary positioning member 200 firmly clamps the target material 16. The position of the pressure block avoids the mounting screw hole 1603 of the target material 16 to facilitate the connection between the target material 16 and the upper cavity 12. In some embodiments, the position where the first clamp body 211 and the second clamp body 212 are connected constitutes the bottom wall of the bearing part 210, and the bearing part 210 is arranged around the secondary positioning member 200, that is, the bearing part 210 is arranged around the target material 16, and the outer peripheral wall of the target material 16 abuts against the bottom wall of the bearing part 210. This arrangement is to further ensure the stability of the secondary positioning member 200 clamping the target material 16, so as to improve the efficiency of adjusting the position of the target material 16. Of course, it is understandable that in order to improve the efficiency of adjusting the position of the target material 16, the first-level positioning member 100 first moves the target material 16 to the vicinity of the target position and then fine-tunes the position of the target material 16 through the second-level positioning member 200. During the process of the first-level positioning member 100 transporting the target material 16, the limit pin 310 is used to ensure the stability of the position of the second-level positioning member 200 relative to the first positioning member. This principle has been described above and will not be repeated here.
[0075] Reference Figure 4 and Fig.16In some embodiments, the embodiment of the second aspect of the utility model proposes a target changing device, which includes a positioning fixture of any of the above embodiments. The target changing device also includes a support rod 600, which is used to resist the upper cavity 12 after the upper cavity 12 is rotated out, thereby enhancing the safety of the operator. The support rod 600 includes a telescopic structure 610, a first rod body 620 and a second rod body 630. The axes of the telescopic structure 610, the first rod body 620 and the second rod body 630 are all collinear. The telescopic structure 610 connects the first rod body 620 and the second rod body 630. The telescopic structure 610 is configured to adjust the first rod body 620 and the second rod body 630 to be closer or farther from each other along the axis so that the support rod 600 is extended or shortened along the axis. The support rod 600 can be extended to match the upper cavity 12 at different heights. The telescopic structure 610 includes a limiting shaft 614, and the support rod 600 is configured to have an extreme position. In the extreme position, the distance between the first rod body 620 and the second rod body 630 along the axis is the farthest, and the limiting shaft 614 connects the first rod body 620 and the second rod body 630. The support rod 600 cannot be extended at the extreme position, that is, the first rod body 620 and the second rod body 630 cannot continue to move away from each other. At this time, the limiting shaft 614 is still connected to the first rod body 620 and the second rod body 630, so as to avoid the first rod body 620 and the second rod body 630 from falling off from the limiting rod telescopic structure 610 due to continuous moving away from each other, thereby improving the safety of the target changing device.
[0076] Reference Fig.17 and Fig.18In some embodiments, specifically, the telescopic structure 610 includes a positive and negative screw rod 611, the positive and negative screw rod 611 includes a first external thread 612 and a second external thread 613, and the limit shaft 614 includes a smooth shaft section 6141, and the smooth shaft section 6141 is located at opposite ends of the positive and negative screw rod 611. Among them, the first rod body 620 includes a first internal thread, and the second rod body 630 includes a second internal thread. The first internal thread cooperates with the first external thread 612, and the second internal thread cooperates with the second external thread 613, so that the first rod body 620 and the second rod body 630 are close to or away from each other. Considering that in actual operation, when the support rod 600 is screwed, the first rod body 620 and the second rod body 630 have opposite rotation directions, the first rod body 620 and the second rod body 630 are connected by the positive and negative screw rod 611, for example, the first external thread 612 includes a reverse thread, and the second external thread 613 includes a positive thread. The operator twists the first rod body 620 and the second rod body 630 to adjust the length of the support rod 600. At the extreme position, the internal threads of the first rod body 620 and / or the second rod body 630 will fall off from the external threads of the telescopic structure 610, but at this time the smooth shaft section 6141 is still located in the first rod body 620 and the second rod body 630, connecting the first rod body 620 and the second rod body 630, thereby preventing the first rod body 620 and the second rod body 630 from falling off, thereby preventing the upper rod body of the support rod 600 from tipping over and injuring the operator.
[0077] Of course, it is understandable that in some embodiments, in order to facilitate the movement of the support rod 600, the support rod 600 is provided with casters 640. In some embodiments, the support rod 600 is provided with a foot brake 650 to maintain the current position.
[0078] Reference Figure 3 , Figure 4 and Fig.12 , the target changing device of the utility model includes the above-mentioned positioning fixture. The positioning fixture includes a primary positioning member 100 and a secondary positioning member 200, the primary positioning member 100 roughly positions the object to be positioned, and the secondary positioning member 200 precisely positions the object to be positioned. Specifically, the primary positioning member 100 can slide relative to the ground, the primary positioning member 100 includes a mounting portion 110, the secondary positioning member 200 is slidably connected to the mounting portion 110, and the bearing portion 210 of the secondary positioning member 200 is used to fix the object to be positioned. Therefore, the secondary positioning member 200 can slide relative to the primary positioning member 100, so that the secondary positioning member 200 further adjusts the position of the object to be positioned on the basis of the primary positioning member 100. Therefore, the target changing device of the utility model realizes fine adjustment of the position of the object to be positioned through multi-level positioning of the secondary positioning member 200 and the primary positioning member 100.
[0079] The positioning jig of the target changing device of the utility model also includes a limiter 300, and the limiter 300 has a locked state and an unlocked state. In the locked state, the limiter 300 fixes the positions of the primary positioning member 100 and the secondary positioning member 200 to prevent the secondary positioning member 200 from sliding uncontrollably relative to the primary positioning member 100. In the unlocked state, the limiter 300 releases the lock on the primary positioning member 100 and the secondary positioning member 200, so that the secondary positioning member 200 can slide relative to the primary positioning member 100. The limiter 300 improves the stability and manipulability of the positioning jig. The primary positioning member 100, the secondary positioning member 200 and the limiter 300 cooperate together, so that the positioning jig of the target changing device of the utility model has a simple structure, is easy to produce, has strong manipulability, and can accurately position the object to be positioned.
[0080] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A positioning fixture, characterized in that: include: A primary positioning member, configured to be able to slide relative to the ground, the primary positioning member comprising a mounting portion; A secondary positioning member, slidably connected to the mounting portion, the secondary positioning member is configured to be able to slide horizontally relative to the mounting portion, the secondary positioning member includes a bearing portion, and the bearing portion is used to fix the object to be positioned; The limit member has a locked state and an unlocked state. In the locked state, the limit member fixes the relative positions of the primary positioning member and the secondary positioning member. In the unlocked state, the limit member releases the lock on the primary positioning member and the secondary positioning member to allow the secondary positioning member to slide horizontally relative to the mounting portion.
2. The positioning fixture according to claim 1, characterized in that: The secondary positioning member comprises a universal ball, the universal ball abuts against the mounting portion, and the secondary positioning member slides relative to the primary positioning member with the position where the universal ball abuts against the mounting portion as a fulcrum.
3. The positioning fixture according to claim 2, characterized in that: The primary positioning member includes a plurality of the mounting portions, and the plurality of the mounting portions are arranged around the edge of the primary positioning member. The secondary positioning member includes a plurality of the universal balls, and the plurality of the universal balls correspond one-to-one to the plurality of the mounting portions.
4. The positioning fixture according to claim 3, characterized in that: The mounting portion comprises a baffle and a bottom plate, wherein the baffle surrounds the edge of the bottom plate and protrudes from the bottom plate toward the secondary positioning member, and the universal ball abuts against the bottom plate.
5. The positioning fixture according to claim 1, characterized in that: The limiting member includes a limiting pin, the primary positioning member includes a first limiting hole, and the secondary positioning member includes a second limiting hole. In the locked state, the limiting pin passes through the first limiting hole and is connected to the second limiting hole to limit the sliding of the secondary positioning member relative to the primary positioning member.
6. The positioning fixture according to claim 5, characterized in that: The positioning fixture also includes a latch card plate. In the locked state, one end of the limit pin away from the second limit hole abuts against the latch card plate to connect the limit pin to the first limit hole and the second limit hole. In the unlocked state, the limit pin and the latch card plate are separated to make the limit pin fall off from the first limit hole and / or the second limit hole, so that the secondary positioning member is suitable for moving with the primary positioning member.
7. The positioning fixture according to claim 1, characterized in that: The positioning fixture comprises a first lifting part, the first lifting part is connected to the primary positioning member, and the first lifting part is configured to adjust the height of the primary positioning member; and / or, The positioning fixture includes a second lifting portion, the second lifting portion is connected to the secondary positioning member, and the second lifting portion is configured to adjust the height of the secondary positioning member.
8. The positioning fixture according to claim 1, characterized in that: The bearing portion includes a first clamp body and a second clamp body, at least part of the object to be positioned is located between the first clamp body and the second clamp body, and the surface of the first clamp body facing the second clamp body and the surface of the second clamp body facing the first clamp body both abut against the object to be positioned, so that the bearing portion fixes the object to be positioned.
9. A target changing device, characterized in that: The target changing device comprises the positioning fixture according to any one of claims 1 to 8, and the target changing device further comprises a support rod, the support rod comprises a telescopic structure, a first rod body and a second rod body, the axes of the telescopic structure, the first rod body and the second rod body are all collinear, the telescopic structure connects the first rod body and the second rod body, and the telescopic structure is configured to adjust the first rod body and the second rod body to move closer to or farther from each other along the axis, so that the support rod is extended or shortened along the axis; Wherein, the telescopic structure includes a limiting shaft, the support rod is configured to have an extreme position, in which the distance between the first rod body and the second rod body along the axis is the farthest, and the limiting shaft connects the first rod body and the second rod body.
10. The target changing device according to claim 9, characterized in that: The telescopic structure comprises a positive and negative screw rod, the positive and negative screw rod comprises a first external thread and a second external thread, the limiting shaft comprises a smooth shaft section, and the smooth shaft section is located at opposite ends of the positive and negative screw rod; The first rod body includes a first internal thread, the second rod body includes a second internal thread, the first internal thread cooperates with the first external thread, and the second internal thread cooperates with the second external thread, so that the first rod body and the second rod body are close to or far away from each other.