Liner tube

Abstract

The liner tube disclosed by the utility model is arranged in a quartz tube of a heat treatment tube furnace, a plurality of hollow parts are arranged on the liner tube, and each hollow part at least penetrates through the inner wall of the liner tube. According to the liner tube disclosed by the utility model, sediments can be deposited to different areas of the quartz tube through the liner tube due to the arrangement of the hollow part, so that the stress is reduced; or the liner tube can prevent the sediments from being deposited on the quartz tube, so that the sediments are deposited on the liner tube, the occurrence of fragmentation of the quartz tube caused by stress increase due to deposition of the sediments is reduced, and the service life of the quartz tube can be prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of heat treatment equipment, and more specifically, to a liner pipe. Background Art

[0002] The heat treatment process is usually carried out in a quartz tube of a tubular furnace. The deposits (including the products of the reaction process) are deposited on the surface of the substrate and on the wall of the quartz tube of the heat treatment tubular furnace. The quartz tube and the deposits have different thermal expansion coefficients, resulting in different thermal stresses. The quartz tube is easily broken under the stress of the deposits and needs to be replaced in time.

[0003] Therefore, how to extend the service life of the quartz tube has become a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0004] In view of this, an object of the utility model is to provide a liner tube to extend the service life of the quartz tube.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A liner tube is arranged in a quartz tube of a heat treatment tube furnace. The liner tube is provided with a plurality of hollow parts, and each hollow part at least passes through the inner wall of the liner tube.

[0007] Optionally, in the above-mentioned liner, each hollow portion passes through the inner wall and the outer wall of the liner, and any two adjacent hollow portions are not connected.

[0008] Optionally, in the above-mentioned liner, the wall thickness of the liner is uniformly or unevenly set.

[0009] Optionally, in the above-mentioned liner, a sedimentation portion is provided on the inner wall of the liner so that the sediment adheres to the sedimentation portion.

[0010] Optionally, in the above-mentioned liner, a reinforcement member is provided in the liner.

[0011] Optionally, in the above-mentioned liner tube, a first flange and a second flange are respectively provided at both ends of the quartz tube, the quartz tube is sealedly connected to the first flange and the second flange, and both ends of the liner tube extend outside the quartz tube and are respectively sealedly connected to the first flange and the second flange.

[0012] Optionally, in the above-mentioned liner, a support is provided on the quartz tube, and the liner is provided on the support.

[0013] Optionally, in the above-mentioned liner, each hollow portion only passes through the inner wall of the liner, and the outer wall of the liner is continuously arranged so that the sediment is deposited on the liner.

[0014] Optionally, in the above-mentioned liner, the hollow portion includes a protrusion protruding toward the outer wall of the liner.

[0015] Optionally, in the above-mentioned liner, the material of the liner is quartz material, metal material or ceramic material.

[0016] The liner provided by the utility model is arranged in a quartz tube of a heat treatment tubular furnace. A plurality of hollow portions are arranged on the liner. The arrangement of the hollow portions can allow sediments to be deposited on different areas of the quartz tube through the liner, thereby reducing stress; or the liner can block sediments from being deposited on the quartz tube, allowing sediments to be deposited on the liner, thereby reducing the occurrence of fragmentation of the quartz tube caused by increased stress due to sediment deposition, thereby extending the service life of the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a structural schematic diagram of a liner disclosed in an embodiment of the utility model;

[0019] Figure 2 It is a segmented expansion diagram of the liner disclosed in the embodiment of the utility model;

[0020] Figure 3 A schematic diagram of a cross section of a liner disclosed in an embodiment of the utility model Figure 1 ;

[0021] Figure 4 A schematic diagram of a cross section of a liner disclosed in an embodiment of the utility model Figure 2 ;

[0022] Figure 5 A schematic diagram of a cross section of a liner disclosed in an embodiment of the utility model Figure 3 ;

[0023] Figure 6 A cross-sectional view of a heat treatment tube furnace disclosed in an embodiment of the utility model;

[0024] Among them, 10 is a liner, 11 is a hollow portion, 20 is a quartz tube, 30 is a reinforcement member, 40 is a first flange, 50 is a second flange, and 60 is a support member. DETAILED DESCRIPTION

[0025] The core of the utility model is to disclose a liner tube to extend the service life of a quartz tube.

[0026] The following is an explanation of the embodiments with reference to the accompanying drawings. In addition, the embodiments shown below do not limit the contents of the utility model described in the claims. In addition, the entire contents of the structures represented by the following embodiments are not limited to those necessary as solutions of the utility model described in the claims. It should be noted that, for ease of description, only the parts related to the utility model are shown in the accompanying drawings. In the absence of conflict, the embodiments in the utility model and the features in the embodiments can be combined with each other.

[0027] like Figure 1-Figure 3 As shown, the embodiment of the utility model discloses a liner tube, which is arranged in a quartz tube 20 of a heat treatment tube furnace. Specifically, the liner tube 10 can be sleeved in the quartz tube 20, and a plurality of hollow parts 11 are arranged on the liner tube 10, and each hollow part 11 at least penetrates the inner wall of the liner tube 10. It should be noted that each hollow part 11 can penetrate the inner wall and the outer wall of the liner tube 10. At this time, the sediment can be deposited on the quartz tube 20 through each hollow part 11. Due to the arrangement of the hollow part 11, the sediment is unevenly distributed on the quartz tube 20, which can reduce the stress generated by the sediment on the quartz tube 20, thereby extending the service life of the quartz tube 20.

[0028] The hollow portion 11 may also only penetrate the inner wall of the liner 10, and the outer wall of the liner 10 is continuously provided. In this case, the hollow portion 11 may form a deposition hole on the liner 10, and the sediment is only deposited on the inner wall and the deposition hole of the liner 10, which can prevent the sediment from being deposited on the quartz tube 20, thereby extending the service life of the quartz tube 20. It can be understood by those skilled in the art that the specific shape of the hollow portion 11 is not limited, and the material of the liner 10 needs to be a material that is resistant to high temperatures and has a low thermal expansion coefficient.

[0029] The liner tube disclosed in the embodiment of the utility model, when in use, is installed in the liner tube 10 in the quartz tube 20, and a specific gas is introduced into the liner tube 10 for process production. During the production process, the sediment can be deposited on the quartz tube 20 through the hollow portion 11, so that the sediment is unevenly distributed on the quartz tube 20, distributed in different areas of the quartz tube 20, thereby reducing the stress generated by the sediment on the quartz tube 20, thereby extending the service life of the quartz tube 20. Alternatively, the sediment can be deposited on the liner tube 10, and the liner tube 10 can prevent the sediment from being deposited on the quartz tube 20, thereby reducing the occurrence of the quartz tube 20 being broken under the stress of the sediment, thereby extending the service life of the quartz tube 20.

[0030] like Figure 2-Figure 3As shown, in a specific embodiment of the utility model, each hollow portion 11 penetrates the inner wall and the outer wall of the liner 10, and any two adjacent hollow portions 11 are not connected. Preferably, the length of the liner 10 is less than or equal to the length of the quartz tube 20. The shape of the hollow portion 11 shown in the figure is a triangle. It can be understood by those skilled in the art that the specific shape of the hollow portion 11 can be specifically set according to actual needs, and is not limited to the triangle shown in the figure, and can also be a rectangle, a circle or other shapes. Multiple hollow portions 11 can be arranged evenly or unevenly. In order to prevent the sediment from being deposited more in individual areas on the quartz tube 20, causing large local stress, the hollow portion 11 can be reduced in size and increased in number when it is set. In this embodiment, the sediment can be deposited on the quartz tube 20 through the hollow portion 11. Due to the setting of the hollow portion 11, the sediment is distributed in different areas on the quartz tube 20, and the distribution is uneven, which can reduce the stress generated by the sediment on the quartz tube 20, reduce the occurrence of the quartz tube 20 fragmentation phenomenon, and extend the service life of the quartz tube 20.

[0031] On the basis of the above embodiment, the wall thickness of the liner 10 can be set uniformly or unevenly, that is, the wall thickness of the liner 10 in each direction is equal, or the wall thickness of the liner 10 above the gravity direction can be thinned, such as Figure 4 As shown, this method can reduce the weight of the liner 10.

[0032] In order to increase the adhesion between the sediment and the liner 10 and reduce particle contamination, in a specific embodiment of the utility model, a sediment portion is provided on the inner wall of the liner 10 so that the sediment adheres to the sediment portion. Specifically, the sediment portion can be formed by providing an irregular surface on the inner wall of the liner 10, for example, a recessed portion can be provided on the inner wall surface of the liner 10 so that the sediment is deposited in the recessed portion. The irregular surface can also disperse the stress of the sediment in all directions, which can further reduce the stress effect on the quartz tube 20 and extend the service life of the quartz tube 20.

[0033] like Figure 5 As shown, in a specific embodiment of the present invention, in order to increase the firmness of the liner 10, the liner 10 includes a reinforcing member 30. Specifically, the reinforcing member 30 can be arranged between the inner wall and the outer wall of the liner 10, or can be arranged through the inner wall of the liner 10. The reinforcing member 30 shown in the figure is a reinforcing rib structure, and the number of the reinforcing ribs is four, and the four reinforcing ribs are arranged along the circumference of the liner 10.

[0034] like Figure 6As shown, in a specific embodiment of the utility model, the two ends of the quartz tube 20 are respectively provided with a first flange 40 and a second flange 50, and the quartz tube 20 is sealed and connected with the first flange 40 and the second flange 50. Specifically, a first sealing ring can be provided, and the first sealing ring abuts against the outer periphery of the quartz tube 20. The two ends of the liner tube 10 extend outside the quartz tube 20 and are respectively sealed and connected with the first flange 40 and the second flange 50. The sealing can be achieved by providing a second sealing ring, and the second sealing ring abuts against the outer periphery of the liner tube 10. Specifically, the connection between the two can be achieved by providing an inner angle edge on the inner ring of the first flange 40 and providing the liner tube 10 with a connecting portion connected to the inner angle edge.

[0035] like Figure 6 As shown, in a specific embodiment of the present invention, a support member 60 is disposed inside the quartz tube 20 , and the liner tube 10 is disposed on the support member 60 . The arrangement of the support member 60 can support and fix the liner tube 10 .

[0036] In a specific embodiment of the utility model, each hollow portion 11 only passes through the inner wall of the liner 10, and the outer wall of the liner 10 is continuously arranged. At this time, the sediment is deposited on the liner 10, which can prevent the sediment from being deposited on the quartz tube 20. In this embodiment, the liner 10 can be replaced to protect the quartz tube 20 to extend the service life of the quartz tube 20. It should be noted that the liner 10 can be an integrated structure or a split structure. For example, the liner 10 can include a first tube and a second tube, the second tube is arranged outside the first tube, the first tube is provided with a hollow portion 11, and the wall of the second tube is continuous. Or the first tube can be a skeleton structure or a microporous structure, and the second tube is wrapped outside the first tube.

[0037] On the basis of the above embodiment, the hollow portion 11 includes a protrusion protruding toward the outer wall of the liner 10 to form a groove on the inner wall of the liner 10, and the sediment is deposited in the groove.

[0038] In a specific embodiment of the present invention, some of the plurality of hollow portions 11 penetrate the inner wall and the outer wall of the liner 10 , and the remaining hollow portions 11 only penetrate the inner wall of the liner 10 .

[0039] The liner tube disclosed in the embodiment of the utility model can be made of quartz, metal, ceramic, or other materials.

[0040] The liner pipe disclosed in the embodiment of the utility model further includes a water cooling pipe, which is arranged on the first flange 40 and the second flange 50 and is used to cool the first flange 40 and the second flange 50 .

[0041] The above description of the disclosed embodiments enables professionals and technicians in the field to implement or use the utility model. Various modifications to these embodiments will be obvious to professionals and technicians in the field, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model. The specific technical means in some embodiments can be combined in part or in whole into another embodiment without being explicitly excluded by another embodiment. Therefore, the utility model will not be limited to the embodiments shown in this article, but will conform to the widest range consistent with the principles and novel features disclosed herein.

Claims

1. A liner tube, arranged in a quartz tube (20) of a heat treatment tube furnace, characterized in that: The liner tube (10) is provided with a plurality of hollow portions (11), and each of the hollow portions (11) at least passes through the inner wall of the liner tube (10).

2. The liner according to claim 1, characterized in that Each of the hollow portions (11) passes through the inner wall and the outer wall of the liner (10), and any two adjacent hollow portions (11) are not connected.

3. The liner according to claim 2, characterized in that The wall thickness of the liner (10) is uniformly or unevenly set.

4. The liner according to claim 1 or 2, characterized in that: The inner wall of the liner (10) is provided with a sedimentation portion so that sediment adheres to the sedimentation portion.

5. The liner according to claim 1 or 2, characterized in that: The liner (10) is provided with a reinforcement member (30).

6. The liner according to claim 1, characterized in that A first flange (40) and a second flange (50) are respectively provided at both ends of the quartz tube (20), and the quartz tube (20) is sealedly connected to the first flange (40) and the second flange (50). Both ends of the liner tube (10) extend outside the quartz tube (20) and are respectively sealedly connected to the first flange (40) and the second flange (50).

7. The liner according to claim 6, characterized in that A support member (60) is arranged on the quartz tube (20), and the liner tube (10) is arranged on the support member (60).

8. The liner according to claim 1 or 6, characterized in that Each of the hollow portions (11) only passes through the inner wall of the liner (10), and the outer wall of the liner (10) is continuously arranged so that sediment is deposited on the liner (10).

9. The liner according to claim 8, characterized in that The hollow portion (11) comprises a protrusion protruding toward the outer wall of the liner (10).

10. The liner according to claim 1, wherein The liner tube (10) is made of quartz, metal or ceramic.

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