Detection device of silicon carbide wafer cleaning machine

Abstract

The embodiment of the utility model provides a detection device of a silicon carbide wafer cleaning machine, and relates to the technical field of silicon carbide equipment. The detection device of the silicon carbide wafer cleaning machine comprises a cover plate and a vibration measuring piece. The cover plate is used for covering the open end of the cleaning machine, the cover plate is provided with a matching track, the cover plate is provided with a first side and a second side which are opposite, the second side is relatively far away from the cleaning machine relative to the first side, and the vibration measuring piece is connected with the matching track and can move on the matching track. And the vibration measuring end of the vibration measuring piece extends into a liquid medicine tank of the cleaning machine. And under the action of the cover plate, the situation that the liquid medicine in the liquid medicine tank is splashed out can be reduced, and therefore the risk that a user is corroded by the liquid medicine in the liquid medicine tank can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide equipment, in particular to a detection device for a silicon carbide wafer cleaning machine. Background Art

[0002] As an emerging third-generation semiconductor core material, silicon carbide (SiC) has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability, which makes it an important substrate wafer material with wide applications, and has shown good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances. The existing cleaning machine for silicon carbide wafers is a liquid tank with a megasonic vibration plate. In order to ensure the cleaning effect of the cleaning machine on silicon carbide, the vibration conditions of various positions of the cleaning machine are generally tested.

[0003] The inventors have found that most of the existing cleaning machine inspections are performed by manually holding a vibration measuring piece and extending it into the liquid medicine tank to measure the vibration effects of various positions in the liquid medicine tank, but there is a risk of personnel being corroded by the liquid medicine. Utility Model Content

[0004] The utility model aims to provide a detection device for a silicon carbide wafer cleaning machine, which can reduce the risk of the user being corroded by the chemical solution in the chemical solution tank during the user's detection of the cleaning machine.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides a detection device for a silicon carbide wafer cleaning machine, comprising:

[0007] A cover plate, the cover plate is used to cover the opening end of the cleaning machine, the cover plate is provided with a matching track, and the cover plate has a first side and a second side opposite to each other;

[0008] The vibration measuring piece is connected to the matching track and can move on the matching track. When the cover plate is arranged on the opening end of the cleaning machine, the vibration measuring end of the vibration measuring piece extends into the liquid tank of the cleaning machine, and the second side is far away from the cleaning machine relative to the first side.

[0009] In an optional embodiment, the vibration detecting member is detachably connected to the matching track, and / or the cover plate is made of PTFE material.

[0010] In an optional embodiment, the matching track is a slide groove, which runs through the first side and the second side of the cover plate, and the vibration measuring member is detachably connected to the slide groove, and the vibration measuring member can slide relative to the slide groove along the extension direction of the slide groove.

[0011] In an optional embodiment, a slot is formed on the inner wall of the slide groove and extends in the extension direction of the slide groove. A matching piece is provided at the end of the vibration measuring piece away from the vibration measuring end. A connecting block is provided on the outer peripheral wall of the matching piece. The connecting block extends into the slot and can move in the extension direction of the slot. The connecting block is made of a deformable material and the matching piece extends out of the second side.

[0012] In an optional embodiment, the matching piece is snap-fitted or threadedly connected to the vibration measuring piece.

[0013] In an optional embodiment, the vibration measuring member includes a connecting end opposite to the vibration measuring end, the connecting end can be movably arranged in the slide groove and extend out of the second side, the detection device also includes a connecting member, the connecting member is located on the second side of the cover plate, the connecting member is detachably connected to the connecting end, the connecting member has an abutting portion abutting the second side, and the width dimension of the abutting portion is greater than the width dimension of the slide groove.

[0014] In an optional embodiment, the slide groove includes a first groove body extending along a first direction, the first groove body is in a long strip shape, and the first direction is parallel to the length direction of the cover plate.

[0015] In an optional embodiment, the first slot is located in the middle of the cover plate in the width direction.

[0016] In an optional embodiment, the slide groove further includes a plurality of second groove bodies spaced apart along the first direction, the second groove bodies extend along the second direction and are in the shape of long strips, the second direction is parallel to the width direction of the cover plate, and the second groove bodies intersect with the first groove bodies.

[0017] In an optional embodiment, a first side of the cover plate is provided with an annular positioning notch, the positioning notch having a side wall and an overlapping wall facing the first side, when the cover plate is installed on the cleaning machine, the side wall is at least partially located inside the cleaning machine, and the overlapping wall overlaps the opening end of the cleaning machine.

[0018] The beneficial effect of the embodiment of the utility model is as follows: the detection device of a silicon carbide wafer cleaning machine provided by the embodiment of the utility model includes a cover plate and a vibration measuring member. The cover plate is used to cover the opening end of the cleaning machine, the cover plate is provided with a matching track, the cover plate has a first side and a second side opposite to each other, the second side is relatively far away from the cleaning machine relative to the first side, the vibration measuring member is connected to the matching track and can move on the matching track, when the cover plate is covered on the opening end of the cleaning machine, the vibration measuring end of the vibration measuring member extends into the liquid tank of the cleaning machine. Under the action of the cover plate, the splashing of the liquid in the liquid tank can be reduced, thereby reducing the risk of the user being corroded by the liquid in the liquid tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A schematic diagram of the structure of the cover plate provided in the embodiment of the utility model;

[0021] Figure 2 for Figure 1 A cross-sectional schematic diagram of

[0022] Figure 3 An exploded schematic diagram of a vibration measuring member and a matching member provided in an embodiment of the utility model;

[0023] Figure 4 An exploded schematic diagram of a vibration measuring member and a connecting member provided in an embodiment of the utility model.

[0024] Icons: 100-cover plate; 110-first side; 120-second side; 130-slide groove; 131-first groove body; 132-second groove body; 140-positioning notch; 141-side wall; 142-lap wall; 200-vibration measuring piece; 210-vibration measuring end; 220-connecting end; 230-matching piece; 231-connecting block; 300-connecting piece; 310-abutting part. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The specific structure of a detection device for a silicon carbide wafer cleaning machine provided by an embodiment of the utility model and the corresponding technical effects it brings are described in detail below in conjunction with the patent drawings.

[0032] Please refer to Figure 1-Figure 4 A detection device for a silicon carbide wafer cleaning machine provided by an embodiment of the utility model includes a cover plate 100 and a vibration measuring member 200 .

[0033] It should be noted that the vibration measuring member 200 is a vibration measuring rod, which is a conventional device in the art, and its working principle will not be described in detail here.

[0034] The cover 100 is used to cover the opening end of the cleaning machine. The cover 100 is provided with a matching track. The cover 100 has a first side 110 and a second side 120 relative to each other. The second side 120 is relatively far away from the cleaning machine relative to the first side 110. That is to say, the first side 110 of the cover 100 is used to cover the opening end of the cleaning machine. It can be understood that the opening end of the cleaning machine can be understood as the opening end of the medicine solution tank.

[0035] The vibration detecting member 200 is connected to the matching track and can move on the matching track. When the cover plate 100 is covered on the opening end of the cleaning machine, the vibration detecting end 210 of the vibration detecting member 200 extends into the liquid medicine tank of the cleaning machine. That is to say, when the cover plate 100 is covered on the opening end of the cleaning machine, the vibration detecting end 210 of the vibration detecting member 200 can penetrate into the liquid medicine tank of the cleaning machine to detect the vibration conditions in the liquid medicine tank. Therefore, when the operator can move the vibration detecting member 200 on the matching track to detect the vibration conditions at different positions in the cleaning machine, the splashing of the liquid medicine in the liquid medicine tank can be reduced under the action of the cover plate 100, thereby reducing the risk of the user being corroded by the liquid medicine in the liquid medicine tank.

[0036] Optionally, the vibration detecting member 200 is detachably connected to the matching track, so that when the vibration detecting member 200 needs to be replaced due to some reasons, such as damage, it is convenient for the user to replace the vibration detecting member 200 in time.

[0037] Optionally, in some optional embodiments, the mating track is a slide groove 130, the slide groove 130 passes through the first side 110 and the second side 120 of the cover 100, the vibration detecting member 200 is detachably connected to the slide groove 130, and the vibration detecting member 200 can move relative to the slide groove 130 along the extension direction of the slide groove 130.

[0038] It can be understood that, since the slide groove 130 passes through the first side 110 and the second side 120 of the cover plate 100 , the vibration detecting member 200 can be exposed from the cover plate 100 through the slide groove 130 , thereby facilitating the user to move the vibration detecting member 200 .

[0039] Of course, in some other embodiments, the mating track is not limited to the slide groove 130, and the mating track can also be a guide rail with a preset path. The guide rail is arranged on the first side 110 of the cover plate 100, and the vibration detecting member 200 is connected to the guide rail. The guide rail can drive the vibration detecting member 200 to move on the preset path to detect the vibration conditions of different positions of the cleaning member. The guide rail can be a guide rail in the prior art.

[0040] Optionally, refer to Figure 3 The inner wall of the slide groove 130 is provided with a slot (not shown in the figure) extending along the extension direction of the slide groove 130, and a matching piece 230 is provided at the end of the vibration measuring piece 200 away from the vibration measuring end 210. The outer peripheral wall of the matching piece 230 is provided with a connecting block 231, which extends into the slot and can move in the extension direction of the slot. The connecting block 231 is made of a deformable material, and the matching piece 230 extends out of the second side 120.

[0041] It can be understood that, in the process of installing the matching piece 230 into the slide groove 130, the connecting block 231 can be inserted into the slide groove 130 from the first side 110 of the cover plate 100 toward the second side 120, until the connecting block 231 is deformed and enters the slide groove 130, and when the connecting block 231 enters the slot, the deformation is restored, so that the connecting block 231 extends into the slide groove 130. In addition, the matching piece 230 extends out of the second side 120, which is convenient for the user to move the matching piece 230, thereby driving the vibration measuring piece 200 to move in the slide groove 130, so that the vibration measuring piece 200 can test the vibration conditions of different positions in the liquid tank in the cleaning piece.

[0042] The matching piece 230 is connected to the vibration measuring piece 200 by snap-fitting or threading. That is, in some embodiments, the matching piece 230 is provided with a snap-fitting portion, and the vibration measuring piece 200 is provided with a matching portion snap-fitting with the snap-fitting portion.

[0043] Alternatively, in some other embodiments, the mating piece 230 is provided with a connecting hole, one end of the vibration detecting piece 200 away from the vibration detecting end 210 extends into the connecting hole, the vibration detecting piece 200 is provided with a threaded hole, and the mating piece 230 is provided with a mounting hole corresponding to the threaded hole. Therefore, the threaded fastener can penetrate the mounting hole and the threaded hole to connect the vibration detecting piece 200 and the mating piece 230.

[0044] Alternatively, the matching piece 230 is provided with a connecting hole, the hole wall of which is provided with an internal thread, and the end of the vibration measuring piece 200 away from the vibration measuring end 210 is provided with an external thread that matches with the thread of the connecting hole.

[0045] Of course, in some other embodiments, the matching member 230 and the vibration measuring member 200 may also be non-detachably connected to form an integrated structure.

[0046] In some other optional embodiments, please refer to Figure 4 The vibration measuring member 200 includes a connecting end 220 opposite to the vibration measuring end 210, the connecting end 220 can be movably arranged in the slide groove 130 and extend out of the second side 120, the detection device also includes a connecting member 300, the connecting member 300 is located on the second side 120 of the cover plate 100, the connecting member 300 is detachably connected to the connecting end 220, the connecting member 300 has an abutting portion 310 abutting against the second side 120, and the width dimension of the abutting portion 310 is greater than the width dimension of the slide groove 130.

[0047] That is to say, since the connecting end 220 can be movably arranged in the slide groove 130 and extend out of the second side 120, after the connecting end 220 is connected to the connecting member 300, the abutting portion 310 of the connecting member 300 will abut against the second side 120 of the cover plate 100, thereby preventing the connecting member 300 from falling from the slide groove 130 into the medicine liquid tank of the cleaning machine, and the operator can move the connecting member 300 to drive the vibration measuring member 200 to move, so that the vibration measuring member 200 can test the vibration conditions at different positions of the medicine liquid tank of the cleaning machine.

[0048] Optionally, in some embodiments, the connecting member 300 is plugged into the connecting end 220 of the vibration measuring member 200 .

[0049] Optionally, in some other embodiments, the connecting member 300 is provided with a connecting hole, the connecting end 220 extends into the connecting hole, the connecting end 220 is provided with a threaded hole, and the connecting member 300 is provided with a mounting hole corresponding to the threaded hole. Therefore, the threaded fastener can pass through the mounting hole and the threaded hole to connect the vibration measuring member 200 with the mating member 230.

[0050] Alternatively, the connecting member 300 is provided with a connecting hole, the hole wall of the connecting hole is provided with an internal thread, and the connecting end 220 is provided with an external thread that matches the connecting hole thread.

[0051] In this embodiment, the slide groove 130 includes a first groove body 131 extending along a first direction. The first groove body 131 is in the shape of an elongated strip. The first direction is parallel to the length direction of the cover plate 100. It should be noted that the width dimension of the first groove body 131 can be understood as the width dimension in a direction perpendicular to the first direction.

[0052] The slide groove 130 also includes a plurality of second groove bodies 132 arranged at intervals along the first direction. The second groove bodies 132 extend along the second direction and are in the shape of long strips. The second direction is parallel to the width direction of the cover plate 100. The second groove bodies 132 intersect with the first groove bodies 131. It should be noted that in this embodiment, the second groove bodies 132 are connected to the first groove bodies 131.

[0053] It should be noted that the width dimension of the second slot body 132 can be understood as the width dimension in a direction perpendicular to the second direction.

[0054] In this embodiment, there are two second grooves 132, and the width direction of the cover plate 100 is perpendicular to the length direction of the cover plate 100. In addition, the first groove 131 is located in the middle of the cover plate 100 in the width direction, and the two second grooves 132 are located on both sides of the middle of the cover plate 100 in the length direction.

[0055] It should be noted that the vertical mentioned above should not be limited to the vertical in a strict sense, as long as it is approximately vertical. Similarly, the middle part mentioned above should not be limited to the middle part in a strict sense, as long as it is approximately in the middle.

[0056] Since the present embodiment has a first slot body 131 and two second slot bodies 132, it can be understood that the first slot body 131 has two endpoints in the length direction, the second slot body 132 has two endpoints in the width direction, and each second slot body 132 has an intersection point with the first slot body 131. Therefore, during the detection process, the user can use the two endpoints of the first slot body 131, the two endpoints of the second slot body 132, and the intersection point between the first slot body 131 and the second slot body 132 as detection points to detect the vibration of the liquid tank of the cleaning machine. The user can drive the vibration measuring component 200 to perform detection at the eight detection points of the first slot body 131 and the two second slot bodies 132 through the above-mentioned connecting piece 300 or matching piece 230.

[0057] In this embodiment, the first side 110 of the cover plate 100 is provided with an annular positioning notch 140, and the positioning notch 140 has a side wall 141 and a lap wall 142 facing the first side 110. When the cover plate 100 is covered on the cleaning machine, the side wall 141 is at least partially located in the cleaning machine, and the lap wall 142 overlaps the opening end of the cleaning machine.

[0058] Optionally, in this embodiment, the cover plate 100 is made of PTFE

[0059] (Polytetrafluoroethylene, polytetrafluoroethylene) material. So that the cover plate 100 has good chemical stability, heat resistance stability and extremely low friction coefficient. So that the vibration measuring piece 200 can slide in the slide groove 130 of the cover plate 100 and is not easy to chemically react with the liquid in the liquid tank.

[0060] Of course, in other embodiments, the cover plate 100 may also be made of other materials.

[0061] In summary, the detection device of a silicon carbide wafer cleaning machine provided by the embodiment of the utility model includes a cover plate 100 and a vibration measuring member 200. The cover plate 100 is used to cover the opening end of the cleaning machine. The cover plate 100 is provided with a matching track. The cover plate 100 has a first side 110 and a second side 120 opposite to each other. The second side 120 is relatively far away from the cleaning machine relative to the first side 110. The vibration measuring member 200 is connected to the matching track and can move on the matching track. When the cover plate 100 is covered on the opening end of the cleaning machine, the vibration measuring end 210 of the vibration measuring member 200 extends into the liquid tank of the cleaning machine. Under the action of the cover plate 100, the splashing of the liquid in the liquid tank can be reduced, thereby reducing the risk of the user being corroded by the liquid in the liquid tank.

[0062] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A detection device for a silicon carbide wafer cleaning machine, characterized in that: include: A cover plate (100), the cover plate (100) being used to cover the opening end of the cleaning machine, the cover plate (100) being provided with a matching track, and the cover plate (100) having a first side (110) and a second side (120) opposite to each other; A vibration measuring member (200) is connected to the matching track and can move on the matching track. When the cover plate (100) is covered on the opening end of the cleaning machine, the vibration measuring end (210) of the vibration measuring member (200) extends into the liquid medicine tank of the cleaning machine, and the second side (120) is away from the cleaning machine relative to the first side (110).

2. The detection device for the silicon carbide wafer cleaning machine according to claim 1, characterized in that: The vibration measuring member (200) is detachably connected to the matching track, and / or the cover plate (100) is made of PTFE material.

3. The detection device for a silicon carbide wafer cleaning machine according to claim 1, characterized in that: The matching track is a slide groove (130), and the slide groove (130) passes through the first side (110) and the second side (120) of the cover plate (100). The vibration measuring member (200) is detachably connected to the slide groove (130), and the vibration measuring member (200) can slide relative to the slide groove (130) along the extension direction of the slide groove (130).

4. The detection device for the silicon carbide wafer cleaning machine according to claim 3, characterized in that: The inner wall of the slide groove (130) is provided with a slot extending along the extension direction of the slide groove (130); the end of the vibration measuring member (200) away from the vibration measuring end (210) is provided with a matching member (230); the outer peripheral wall of the matching member (230) is provided with a connecting block (231); the connecting block (231) extends into the slot and can move in the extension direction of the slot; the connecting block (231) is made of a deformable material; and the matching member (230) extends out of the second side (120).

5. The detection device for the silicon carbide wafer cleaning machine according to claim 4, characterized in that: The matching piece (230) is snap-fitted or threadedly connected to the vibration measuring piece (200).

6. The detection device for the silicon carbide wafer cleaning machine according to claim 3, characterized in that: The vibration measuring member (200) comprises a connecting end (220) opposite to the vibration measuring end (210), the connecting end (220) being movably disposed in the slide groove (130) and extending out of the second side (120), the detection device further comprises a connecting member (300), the connecting member (300) being located on the second side (120) of the cover plate (100), the connecting member (300) being detachably connected to the connecting end (220), the connecting member (300) having an abutting portion (310) abutting against the second side (120), the width dimension of the abutting portion (310) being greater than the width dimension of the slide groove (130).

7. The detection device for the silicon carbide wafer cleaning machine according to claim 3, characterized in that: The sliding groove (130) comprises a first groove body (131) extending along a first direction, the first groove body (131) is in the shape of an elongated strip, and the first direction is parallel to the length direction of the cover plate (100).

8. The detection device for the silicon carbide wafer cleaning machine according to claim 7, characterized in that: The first groove body (131) is located in the middle of the cover plate (100) in the width direction.

9. The detection device for a silicon carbide wafer cleaning machine according to claim 7, characterized in that: The slide groove (130) further comprises a plurality of second groove bodies (132) arranged at intervals along the first direction, the second groove bodies (132) extending along the second direction and being in the shape of long strips, the second direction being parallel to the width direction of the cover plate (100), and the second groove bodies (132) intersecting with the first groove bodies (131).

10. The detection device for a silicon carbide wafer cleaning machine according to claim 1, characterized in that: The first side (110) of the cover plate (100) is provided with an annular positioning notch (140), and the positioning notch (140) has a side wall (141) and a lap wall (142) facing the first side (110); when the cover plate (100) is covered on the cleaning machine, the side wall (141) is at least partially located inside the cleaning machine, and the lap wall (142) is lapped on the opening end of the cleaning machine.

Images