High-stability silicon wafer bearing operation structure

Abstract

The utility model relates to a high-stability silicon wafer bearing operation structure which comprises a high-stability silicon wafer bearing device and an operation plate. The high-stability silicon wafer bearing device comprises two end plates which are oppositely arranged, and the two end plates are connected through a frame rod. Upper sliding grooves are symmetrically formed in the upper portion of the end plate, lower sliding grooves are symmetrically formed in the lower portion of the end plate, the two sides of the upper clamping rod slide in the upper sliding grooves, the two sides of the lower supporting rod slide in the lower sliding grooves, and the clamp is characterized in that each upper sliding groove comprises an upper-section inward-retracting groove and a lower-section maintaining groove, and each lower sliding groove comprises an upper-section outward-expanding groove and a lower-section anti-loosening groove; and a support rod touch plate is arranged on the operation plate. According to the utility model, silicon wafers are effectively prevented from falling off in the carrying process; and a certain degree of left-right impact can be borne, and operation is convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer production equipment and relates to a high-stability silicon wafer bearing operation structure. Background Art

[0002] In the production process of silicon wafers, the cut silicon wafers need to be transferred between various processes.

[0003] In the prior art, the wafers are usually transported by a silicon wafer transfer device, which has the problems of unstable clamping, easy falling off of the silicon wafers, and inconvenient operation. Summary of the invention

[0004] The purpose of the utility model is to provide a high-stability silicon chip bearing operation structure, which can solve the above-mentioned problems and has high stability.

[0005] According to the technical solution provided by the utility model: a high-stability silicon wafer carrying and operating structure, including a high-stability silicon wafer carrying device and an operating panel; the high-stability silicon wafer carrying device includes two end plates arranged opposite to each other, and the two end plates are connected by a frame rod; the upper part of the end plate is provided with a symmetrically arranged upper slide groove, and the lower part of the end plate is provided with a symmetrically arranged lower slide groove, the two sides of the upper clamping rod slide in the upper slide groove, and the two sides of the lower support rod slide in the lower slide groove, characterized in that the upper slide groove includes an inner receiving groove of the upper section and a retaining groove of the lower section, and the lower slide groove includes an outer expanding groove of the upper section and an anti-loosening groove of the lower section; a support rod touch plate is provided on the operating panel.

[0006] As a further improvement of the present invention, the retaining groove is arranged vertically.

[0007] As a further improvement of the utility model, the anti-loosening groove is arranged inwardly.

[0008] As a further improvement of the utility model, carrying hanging points are symmetrically installed on the upper part of the end plate.

[0009] As a further improvement of the utility model, an upper slide plate is detachably mounted on the end plate.

[0010] As a further improvement of the utility model, a lower slide plate is detachably mounted on the end plate.

[0011] As a further improvement of the utility model, a hanging groove is provided on the operating panel, and the hanging groove is located above the supporting rod touch plate.

[0012] As a further improvement of the utility model, the support rod touch plate is arranged in an "eight" shape.

[0013] The positive effects of this application are:

[0014] The utility model effectively prevents silicon wafers from falling off during transportation, can withstand left and right impacts to a certain extent, and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model.

[0016] Figure 2 It is a schematic diagram of the structure of the high-stability silicon wafer supporting device of the utility model.

[0017] Figure 3 It is a front view of the high-stability silicon wafer supporting device of the utility model.

[0018] Figure 4 It is a front view of the operating panel of the utility model.

[0019] Figure 1-Figure 4 It includes an upper clamping rod 1, a lower supporting rod 2, a carrying hanging point 3, a lower sliding groove 4, an upper sliding groove 5, an inner receiving groove 5-1, a retaining groove 5-2, an end plate 6, a frame rod 7, an operating panel 8, a hanging groove 8-1, a supporting rod touch panel 8-2, etc. DETAILED DESCRIPTION

[0020] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0021] In order to enable those skilled in the art to better understand the solution of the utility model, the following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0022] It should be noted that the terms "first", "second", etc. in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so as to describe the embodiments of the utility model described herein. In addition, similar terms such as "including" and "having" mean that in addition to those contents already listed in "including" and "having", other contents that have not been listed can also be "included" and "having"; for example, a process, method, system, product or device that can include a series of steps or units is not necessarily limited to those steps or units that have been clearly listed, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0023] Due to the angle of the drawing, some components may not be drawn, but their positions and connection relationships can be partially understood based on the text expression.

[0024] like Figure 1 As shown, the utility model is a high-stability silicon wafer carrying and operating structure, comprising a high-stability silicon wafer carrying device and an operating panel 8.

[0025] like Figure 2-Figure 3 The high-stability silicon wafer carrying device shown comprises two end plates 6 arranged opposite to each other, and the two end plates 6 are connected by a frame rod 7. The upper part of the end plate 6 is provided with a symmetrical upper slide groove 5, and the lower part of the end plate 6 is provided with a symmetrical lower slide groove 4, and the upper clamping rod 1 slides on both sides in the upper slide groove 5, and the lower supporting rod 2 slides on both sides in the lower slide groove 4.

[0026] The upper slide groove 5 comprises an inner receiving groove 5-1 in the upper section and a retaining groove 5-2 in the lower section, and the retaining groove 5-2 is vertically arranged.

[0027] The lower sliding groove 4 includes an outward expansion groove 4-1 in the upper section and an anti-loosening groove 4-2 in the lower section, and the anti-loosening groove 4-2 is arranged to be retracted inwardly.

[0028] In order to facilitate the transfer of the silicon wafer carrying device, the carrying hanging points 3 are symmetrically installed on the upper part of the end plate 6.

[0029] In order to adapt to silicon wafers of different specifications, the upper slide plate and the lower slide plate can be detachably mounted on the end plate 6, and the upper slide groove 5 and the lower slide groove 4 are respectively arranged on the upper slide plate and the lower slide plate. The upper slide groove 5 and the lower slide groove 4 are arranged correspondingly on different upper slide plates and the lower slide plate.

[0030] like Figure 4 As shown, a hanging groove 8-1 is provided in the middle of the operating panel 8 for supporting the carrying hanging point 3. A support rod touch plate 8-2 is provided at the lower part of the operating panel 8 for driving the lower support rod 2. The support rod touch plate 8-2 is arranged at the lower part of the operating panel 8 in an "eight" shape.

[0031] The working process of the utility model is as follows:

[0032] When the silicon wafer needs to be supported, the lower support rod 2 is moved into the anti-loosening groove 4-2, and the silicon wafer is placed on the lower support rod 2. Since the anti-loosening groove 4-2 is an inward-retracting structure, the lower support rod 2 can still maintain a working state under the condition of left-right fluctuations and small up-and-down vibrations. When the silicon wafer enters the wafer insertion process, the support rod touch plate 8-2 supports the lower support rod 2 and then moves upward, driving the lower support rod 2 to move upward together through the inclined surface, so that the lower support rod 2 moves out of the anti-loosening groove 4-2. After the lower support rod 2 moves out of the anti-loosening groove 4-2, it moves to the bottom of the outward expansion groove 4-1 under the action of gravity, and the gap between the lower support rods 2 on both sides increases, and the silicon wafer is detached from the lower support rod 2.

[0033] like Figure 1As shown, when the silicon wafer carrying device is transferred, the carrying hanging point 3 is located in the hanging groove 8-1, and the carrying hanging point 3 is in contact with the bottom of the hanging groove 8-1.

[0034] When the silicon wafer needs to be clamped, the upper clamping rod 1 moves into the retaining groove 5-2. At this time, the upper clamping rod 1 is located on both sides of the silicon wafer to prevent the silicon wafer from moving left and right. The upper clamping rod 1 can remain clamped while enduring left and right fluctuations.

[0035] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A high-stability silicon wafer carrying and operating structure, comprising a high-stability silicon wafer carrying device and an operating panel (8); the high-stability silicon wafer carrying device comprises two end plates (6) arranged opposite to each other, and the two end plates (6) are connected by a frame rod (7); the upper part of the end plate (6) is provided with a symmetrical upper slide groove (5), and the lower part of the end plate (6) is provided with a symmetrical lower slide groove (4), the two sides of the upper clamping rod (1) slide in the upper slide groove (5), and the two sides of the lower supporting rod (2) slide in the lower slide groove (4), characterized in that: The upper slide groove (5) comprises an inward-receiving groove (5-1) at the upper section and a retaining groove (5-2) at the lower section, and the lower slide groove (4) comprises an outward-expanding groove (4-1) at the upper section and an anti-loosening groove (4-2) at the lower section; and a support rod touch plate (8-2) is provided on the operating panel (8).

2. The high-stability silicon wafer carrying and operating structure according to claim 1, characterized in that: The retaining groove (5-2) is arranged vertically.

3. The high-stability silicon wafer carrying and operating structure according to claim 1, characterized in that: The anti-loosening groove (4-2) is set inward.

4. The high-stability silicon wafer carrying and operating structure according to claim 1, characterized in that: The carrying hanging points (3) are symmetrically mounted on the upper part of the end plate (6).

5. The high-stability silicon wafer carrying and operating structure according to claim 1, characterized in that: The end plate (6) is detachably mounted with an upper slide plate.

6. The high-stability silicon wafer carrying and operating structure according to claim 1, characterized in that: The lower slide plate is detachably mounted on the end plate (6).

7. The high-stability silicon wafer carrying and operating structure according to claim 1, characterized in that: A hanging groove (8-1) is formed on the operating panel (8), and the hanging groove (8-1) is located above the support rod touch plate (8-2).

8. The high-stability silicon wafer carrying and operating structure according to claim 1, characterized in that: The support rod touch plate (8-2) is arranged in an eight-shaped shape.

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