Carbon deposition tail gas treatment device
By designing a carbon deposition exhaust gas treatment device including a condensing tank, filter can and oil membrane dust collector, the blockage and failure problems caused by tar and solid particles in the exhaust gas are solved, and efficient removal and treatment effects are achieved.
Patent Information
- Application Number
- CN202421676891.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-16
- Publication Date
- 2025-02-21
- Estimated Expiration
- 2034-07-16
AI Technical Summary
In the chemical vapor deposition process of carbon/carbon composite materials, the tar and solid particles formed in the exhaust gas can easily lead to blockage of exhaust pipes and failure of the vacuum system, and an effective treatment device is required.
A carbon deposition exhaust gas treatment device is designed, including a condensing tank, a filter can and an oil film dust collector, which removes tar and solid particles from the exhaust gas through a process of condensing, filtration and dust removal.
Effectively remove tar and solid particles in carbon deposition exhaust gas, prevent exhaust pipe blockage and vacuum system failure, and improve processing efficiency and system reliability.
Smart Images
Figure CN222510687U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical vapor deposition, in particular to a carbon deposition tail gas treatment device. Background Art
[0002] Compared with traditional graphite materials, carbon / carbon composite materials have higher fracture toughness, higher strength and stronger impact resistance. Therefore, they are widely used in crystal growth equipment in the photovoltaic field. They have a high permeability in thermal field crucibles, guide tubes and insulation tube products, and have become the mainstream material for single crystal thermal field systems. The main preparation method is a chemical vapor deposition process, which uses hydrocarbon gas as a gas source and performs pyrolysis and deposition under certain temperature and airflow conditions. A part of the high molecular weight pyrolysis products adheres to the carbon fiber and dehydrogenates to form pyrolytic carbon, and the other part of the pyrolysis products are discharged as exhaust gas. Tar, solid particles and other by-products will be formed during the exhaust gas discharge process. These by-products are easy to adhere to the exhaust pipe to form a blockage, and even enter the vacuum pump, causing the vacuum system to malfunction. Therefore, a carbon deposition exhaust gas treatment device that can treat the exhaust gas is needed. The carbon deposition exhaust gas treatment device is used to condense, filter and remove dust from the carbon deposition exhaust gas, thereby removing tar and solid particles from the carbon deposition exhaust gas. Utility Model Content
[0003] The utility model aims to solve the technical problem of providing a carbon deposition tail gas treatment device which can help remove tar and solid particles in the carbon deposition tail gas.
[0004] In order to solve the above technical problems, the technical solution of a carbon deposition tail gas treatment device of the utility model is:
[0005] The carbon deposition furnace is provided with an air outlet, and also includes a condensing tank, a filtering tank, an oil film dust collector and a vacuum pump; the condensing tank, the filtering tank, the oil film dust collector and the vacuum pump are all provided with an air inlet and an air outlet; the air inlet of the condensing tank is provided below the condensing tank, and the air outlet of the condensing tank is provided above the condensing tank; the air inlet of the filtering tank is provided below the filtering tank, and the air outlet of the filtering tank is provided above the filtering tank; the air inlet of the oil film dust collector is provided below the oil film dust collector, and the air outlet of the oil film dust collector is provided above the oil film dust collector. Above; the air outlet of the carbon deposition furnace is connected to the air inlet of the condensing tank through a pipeline; the air outlet of the condensing tank is connected to the air inlet of the filtering tank through a pipeline; the air outlet of the filtering tank is connected to the air inlet of the oil film dust collector through a pipeline; the air outlet of the oil film dust collector is connected to the vacuum pump through a pipeline; the carbon deposition tail gas generated by the carbon deposition furnace is sequentially condensed by the condensing tank, filtered by the filtering tank and dusted by the oil film dust collector, and then enters the vacuum pump; a circulating water cooling device is connected to the condensing tank; a filter mesh is arranged in the filtering tank.
[0006] A tar discharge port is provided at the bottom of the condensation tank; a valve is installed on the tar discharge port.
[0007] The bottom of the filter tank and the oil film dust collector are both provided with solid dust discharge ports; valves are installed on the solid dust discharge ports.
[0008] The oil film dust collector includes a cylinder, a circulating oil pump and multiple nozzles; the lower side wall of the cylinder is connected to the circulating oil pump through a pipeline, and the circulating oil pump is connected to multiple nozzles through pipelines; the nozzles of the multiple nozzles are all located in the cylinder and are distributed in rotation in the cylinder; the nozzles spray along the inner wall of the cylinder, and the nozzles spray the oil onto the cylinder wall tangentially to form a layer of oil film that rotates and flows downward on the inner wall of the cylinder; the air intake direction of the cylinder air inlet is introduced tangentially from the lower part of the cylinder so as to rotate and rise.
[0009] The oil film dust collector comprises four nozzles; the four nozzles are evenly distributed above the inner wall of the cylinder in a rotating manner.
[0010] The cylinder is connected to a circulating oil pump through a pipeline, and a filter is installed at the connection between the pipeline and the cylinder.
[0011] The technical effect that can be achieved by the utility model is as follows: a carbon deposition exhaust gas treatment device of the utility model is provided with a condensing tank, a filtering tank and an oil film dust collector. The carbon deposition exhaust gas generated by the carbon deposition furnace passes through the condensing tank, the filtering tank and the oil film dust collector in sequence. After the carbon deposition exhaust gas enters the condensing tank, the carbon deposition exhaust gas is heat-exchanged with the circulating water cooling device of the condensing tank, and the tar in the carbon deposition exhaust gas is condensed into liquid and drips on the bottom wall of the condensing tank by gravity, and then enters the filtering tank. After the carbon deposition exhaust gas enters the filtering tank, the filtering tank filters the solid particles of the carbon deposition exhaust gas through the filtering mesh to remove most of the solid particles in the carbon deposition exhaust gas, and then enters the oil film dust collector after the filtering is completed, and further dedusting is performed on the carbon deposition exhaust gas through the oil film dust collector to remove more tar and solid particles. The carbon deposition exhaust gas enters the vacuum pump after the above-mentioned treatment, and it is not easy to cause failure to the vacuum system of the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments:
[0013] Figure 1 It is a structural schematic diagram of a carbon deposition tail gas treatment device of the utility model;
[0014] Figure 2 This is a schematic diagram of the oil film dust collector's circulating oil pump injection direction and the cylinder air inlet direction. DETAILED DESCRIPTION
[0015] The utility model is further described in detail below in conjunction with the accompanying drawings.
[0016] See also Figure 1 to Figure 2 .
[0017] A carbon deposition tail gas treatment device, a carbon deposition furnace 1 is provided with an air outlet, and also includes a condensing tank 2, a filtering tank 3, an oil film dust collector 4 and a vacuum pump 5; the condensing tank 2, the filtering tank 3, the oil film dust collector 4 and the vacuum pump 5 are all provided with an air inlet and an air outlet; the air inlet of the condensing tank 2 is provided below the condensing tank 2, and the air outlet of the condensing tank 2 is provided above the condensing tank 2; the air inlet of the filtering tank 3 is provided below the filtering tank 3, and the air outlet of the filtering tank 3 is provided above the filtering tank 3; the air inlet of the oil film dust collector 4 is provided below the oil film dust collector 4, and the air outlet of the oil film dust collector 4 is provided above the oil film dust collector 4; the air outlet of the carbon deposition furnace 1 is connected to the air inlet of the condensing tank 2 through a pipeline, and the air outlet of the condensing tank 2 is connected to the air outlet of the The air inlet of the filter tank 3 is connected through a pipeline, the air outlet of the filter tank 3 is connected to the air inlet of the oil film dust collector 4 through a pipeline, and the air outlet of the oil film dust collector 4 is connected to the vacuum pump 5 through a pipeline; the carbon deposition tail gas generated by the carbon deposition furnace 1 is sequentially condensed by the condensation tank 2, filtered by the filter tank 3 and dusted by the oil film dust collector 4, and then enters the vacuum pump 5, the condensation tank 2 is connected with a circulating water cooling device 21, the filter tank 3 is provided with a filter screen 31, and the filter screen 31 is located above the air inlet of the filter tank 3; a tar discharge port 6 is opened at the bottom of the condensation tank 2, and a valve is installed on the tar discharge port 6; the filter tank 3 and the oil film dust collector 4 are both provided with solid dust discharge ports 7 at the bottom, and valves are installed on the solid dust discharge ports 7.
[0018] The utility model condenser 2, filter tank 3, oil film dust collector 4 all adopt the structure of lower air intake and upper air outlet. The condenser 2 adopts a circulating water cooling structure through a circulating water cooling device 21, which mainly cools the high-temperature carbon deposition tail gas and collects and removes most of the tar by-products in the carbon deposition tail gas; a filter screen 31 with a mesh number of 100-200 is arranged inside the filter tank 3, which is mainly used to remove large-sized solid dust in the carbon deposition tail gas; the oil film dust collector 4 includes a cylinder 41, a circulating oil pump 42 and a plurality of nozzles 43, specifically The oil film dust collector 4 includes four nozzles 43; the lower side wall of the cylinder 41 is connected to the circulating oil pump 42 through a pipeline, and the circulating oil pump 42 is connected to the four nozzles 43 through pipelines; the nozzles of the four nozzles 43 are all located in the cylinder 41, and are rotated and distributed in the cylinder 41. Specifically, the four nozzles 43 are evenly distributed above the inner wall of the cylinder 41; the nozzles 43 spray along the inner wall of the cylinder 41, and the nozzles 43 spray the oil onto the cylinder wall in a tangential manner so that a layer of rotating downwardly flowing oil film is formed on the inner wall of the cylinder 41 (refer to Figure 2 ), the air inlet direction of the cylinder 41 is introduced tangentially from the lower part of the cylinder 41 and then rotates upward (reference Figure 2The carbon deposition exhaust gas is introduced tangentially from the lower part of the cylinder 41 and rotates upward. The remaining small-sized dust particles and tar in the carbon deposition exhaust gas are separated by centrifugal force and thrown to the inner wall of the cylinder 41. They are adsorbed by the oil film flowing on the inner wall and flow to the bottom cone with the oil film, thereby further removing dust from the carbon deposition exhaust gas.
[0019] Preferably, the cylinder 41 is connected to the circulating oil pump 42 via a pipeline, and a filter 44 is installed at the connection between the pipeline and the cylinder 41 ; the filter 44 is provided to prevent dust in the cylinder 41 from entering the circulating oil pump 42 .
[0020] Working principle: during carbon deposition, the high-temperature carbon deposition tail gas generated by the carbon deposition furnace 1 first enters the condensation tank 2, and most of the tar in the carbon deposition tail gas is cooled from gas to liquid. The tar is collected in the condensation tank and drips on the bottom wall of the condensation tank 2 due to gravity. When it is necessary to clean the tar dripping on the bottom wall of the condensation tank 2, the valve on the tar discharge port 6 can be opened, and the tar can be discharged from the tar discharge port 6; then the carbon deposition tail gas enters the filter tank 3, and most of the large-sized solid particles are filtered out by the filter mesh 31, and some of the large-sized solid particles will also fall on the bottom wall of the filter tank 3 due to gravity. When it is necessary to clean the large-sized solid particles on the bottom wall of the filter tank 3, the valve on the solid dust discharge port 7 of the filter tank 3 is opened, and the large-sized solid particles can be discharged from the solid dust discharge port 7 of the filter tank 3; then the carbon deposition tail gas enters the oil film dust collector 4, and the remaining small-sized solid particles are removed by the oil film dust removal principle. The particles and tar are separated by centrifugal force, thrown to the inner wall of the cylinder 41, adsorbed by the oil film flowing on the inner wall, and flow to the bottom cone with the oil film, thereby achieving the purpose of improving the dust and tar removal effect. The utility model is also provided with a circulating oil pump 42. After the oil film flows to the bottom of the oil film dust collector 4, it gathers at the bottom of the oil film dust collector 4 and is sent to the circulating oil pump 42 through a pipeline, and then sent to four nozzles 43 through the circulating oil pump 42, and finally sprayed out by the nozzle 43, so as to perform circulating spraying. The filter 44 is provided to prevent the solid particles in the cylinder 41 from entering the circulating oil pump 42. When it is necessary to clean the solid particles and tar at the bottom of the oil film dust collector 4, the valve on the solid dust discharge port 7 at the bottom of the oil film dust collector 4 is opened, and the solid particles, tar and the oil forming the oil film are discharged through the solid dust discharge port 7 at the bottom of the oil film dust collector 4, and then new oil is replaced; finally, the clean carbon deposition tail gas is discharged through the vacuum pump 5.
Claims
1. A carbon deposition tail gas treatment device, wherein a carbon deposition furnace (1) is provided with a gas outlet, characterized in that: It also includes a condensing tank (2), a filtering tank (3), an oil film dust collector (4) and a vacuum pump (5); the condensing tank (2), the filtering tank (3), the oil film dust collector (4) and the vacuum pump (5) are all provided with an air inlet and an air outlet; the air inlet of the condensing tank (2) is opened below the condensing tank (2), and the air outlet of the condensing tank (2) is opened above the condensing tank (2); the air inlet of the filtering tank (3) is opened below the filtering tank (3), and the air outlet of the filtering tank (3) is opened above the filtering tank (3); the air inlet of the oil film dust collector (4) is opened below the oil film dust collector (4), and the air outlet of the oil film dust collector (4) is opened above the oil film dust collector (4); the air outlet of the carbon deposition furnace (1) is opened below the oil film dust collector (4), and the air outlet of the oil film dust collector (4) is opened above the oil film dust collector (4); The air outlet of the condensing tank (2) is connected to the air inlet of the filtering tank (3) through a pipeline; the air outlet of the filtering tank (3) is connected to the air inlet of the oil film dust collector (4) through a pipeline; the air outlet of the oil film dust collector (4) is connected to the vacuum pump (5) through a pipeline; the carbon deposition tail gas generated by the carbon deposition furnace (1) passes through the condensation of the condensing tank (2), the filtration of the filtering tank (3) and the dust removal of the oil film dust collector (4) in sequence, and then enters the vacuum pump (5); the condensing tank (2) is connected to a circulating water cooling device (21); the filtering tank (3) is provided with a filter screen (31); the filter screen (31) is located above the air inlet of the filtering tank (3).
2. The carbon deposition tail gas treatment device according to claim 1, characterized in that: The bottom of the condensation tank (2) is provided with a tar discharge port (6); a valve is installed on the tar discharge port (6).
3. The carbon deposition tail gas treatment device according to claim 1, characterized in that: The bottoms of the filter tank (3) and the oil film dust collector (4) are both provided with solid dust discharge ports (7); and valves are installed on the solid dust discharge ports (7).
4. The carbon deposition tail gas treatment device according to claim 1, characterized in that: The oil film dust collector (4) comprises a cylinder (41), a circulating oil pump (42) and a plurality of nozzles (43); the lower side wall of the cylinder (41) is connected to the circulating oil pump (42) via a pipeline, and the circulating oil pump (42) is respectively connected to the plurality of nozzles (43) via pipelines; the nozzles of the plurality of nozzles (43) are all located in the cylinder (41) and are distributed in a rotating manner in the cylinder (41); the nozzles (43) spray along the inner wall of the cylinder (41), and the nozzles (43) spray the oil tangentially onto the cylinder wall so that a layer of oil film that rotates and flows downward is formed on the inner wall of the cylinder (41); the air intake direction of the air inlet of the cylinder (41) is to be introduced tangentially from the lower part of the cylinder (41) so as to rotate upward.
5. The carbon deposition tail gas treatment device according to claim 4, characterized in that: The oil film dust collector (4) comprises four nozzles (43); the four nozzles (43) are rotated and evenly distributed above the inner wall of the cylinder (41).
6. The carbon deposition tail gas treatment device according to claim 4, characterized in that: The cylinder (41) is connected to a circulating oil pump (42) via a pipeline, and a filter (44) is installed at the connection between the pipeline and the cylinder (41).