Semiconductor processing jig

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a semiconductor processing jig which comprises a jig body. A plurality of placing hole sites used for placing products are formed in the jig body in a penetrating mode in the first direction, supporting pieces are arranged on the inner walls of the placing hole sites, the supporting pieces are at least arranged on the opposite side walls in the placing hole sites in the second direction, and the second direction is perpendicular to the first direction. The side, in the first direction, of the jig body is a first end face, the supporting piece is located in the containing hole position, and a set distance is formed between the supporting piece and the first end face. The semiconductor processing jig is provided with a plurality of hollowed-out placing hole sites which are used for installing a plurality of products to be thinned at the same time, feeding and discharging are facilitated at the same time, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a semiconductor processing jig. Background Art

[0002] After wafer packaging, the module usually needs to be thinned. For example, DSC products need to be thinned on both sides by grinding wheel or CNC. One side is the plastic package body, and by thinning the plastic package body, the internal heat dissipation surface is exposed to ensure a better heat dissipation effect. The other side is the metal surface, and by thinning the metal surface, the weight and thickness are reduced and the heat dissipation effect is improved.

[0003] In the existing thinning process, a plurality of processing positions are arranged on the workbench, each processing position is equipped with a vacuum adsorption structure, each processing position is used to place a product to be thinned, and each processing position has a positioning terminal for positioning the product. In the thinning process, each product is manually loaded separately. For example, if there are 12 processing positions on the workbench, each processing requires 12 manual loadings, and the unloading also requires 12 operations. This operation mode is inefficient and easily leads to omissions and failure to turn over, affecting the processing yield.

[0004] To this end, the utility model provides a semiconductor processing jig to improve the efficiency of the operation. Utility Model Content

[0005] The utility model aims to provide a semiconductor processing jig, which has a plurality of hollowed-out mounting positions for simultaneously mounting a plurality of products to be thinned, thereby facilitating simultaneous loading and unloading of materials and helping to improve operating efficiency.

[0006] The utility model provides a semiconductor processing jig, comprising: a jig body;

[0007] The jig body is provided with a plurality of placement holes for placing products along a first direction, the inner walls of the placement holes are provided with support members, the support members are provided at least on opposite side walls of the placement holes along a second direction, the second direction is perpendicular to the first direction, one side of the jig body along the first direction is a first end face, the support member is located in the placement hole and has a set distance from the first end face.

[0008] Optionally, the fixture body is symmetrical along the second direction, the symmetry plane of the fixture body along the second direction is a first symmetry plane, and the placement holes are symmetrically arranged with the first symmetry plane as the center plane;

[0009] And / or; the fixture body is symmetrical along the third direction, the third direction is perpendicular to the first direction and the second direction, the symmetry plane of the fixture body along the third direction is the second symmetry plane, and each of the placement holes is symmetrically arranged with the second symmetry plane as the center plane.

[0010] Optionally, the set distance is less than or equal to half of the thickness of the product.

[0011] Optionally, a pick-up and placement groove is provided on the opposite side walls along the second direction and / or the third direction in the placement hole, and the pick-up and placement groove at least passes through the first end surface.

[0012] Optionally, the adjacent picking and placing grooves corresponding to two adjacent placement hole positions along the second direction are arranged through; and / or; the adjacent picking and placing grooves corresponding to two adjacent placement hole positions along the third direction are arranged through.

[0013] Optionally, the fixture body is provided with a marking structure;

[0014] The identification structure is arranged on the same side wall of each of the placement holes; and / or, the identification structure is arranged on a supporting piece corresponding to the same side wall of each of the placement holes.

[0015] Optionally, a positioning hole is formed on the fixture body along the first direction.

[0016] Optionally, a plurality of positioning holes are provided, and the apertures of some of the positioning holes are larger than the apertures of other positioning holes.

[0017] Optionally, a connecting hole is formed through the fixture body along the first direction, and the connecting holes are symmetrically arranged with the first symmetry plane and / or the second symmetry plane as the center plane.

[0018] Optionally, the semiconductor processing jig further comprises a handle, wherein the handle is disposed at least on an opposite side of the jig body, and the handle is symmetrically disposed with the first symmetry plane and / or the second symmetry plane as a center plane.

[0019] With such configuration, the semiconductor processing jig has multiple hollow placement holes for simultaneously installing multiple products to be thinned, which is conducive to loading and unloading at the same time and helps to improve work efficiency. In addition, each placement hole is suitable for a part of the product to be inserted, and the product can be positioned in all directions. In addition, the product located in the placement hole is supported by the support member to form a vertical positioning to ensure the stability of the product.

[0020] The semiconductor processing jig has a symmetrical structure and a symmetrical placement hole distribution structure, so that two semiconductor processing jigs can be used in conjunction to clamp the product. At this time, all products can be turned over at one time, further improving the operating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of a semiconductor processing fixture according to an embodiment of the utility model;

[0022] Figure 2 A schematic diagram of a top view of a semiconductor processing fixture according to an embodiment of the present utility model;

[0023] Figure 3 It is a schematic structural diagram of a semiconductor processing jig according to an embodiment of the present invention after being matched with another semiconductor processing jig.

[0024] The reference numerals are as follows:

[0025] 10- fixture body; 10′- first fixture body; 10″- first fixture body; 101- first end surface; 11- placement hole; 11′- first placement hole; 11″- second placement hole; 12- support member; 13- placement groove; 13′- notch; 14- identification structure; 15- connection hole; 16- positioning hole; 17- stud;

[0026] 20-handle;

[0027] a-first direction; b-second direction; c-third direction;

[0028] A-first symmetry plane; B-second symmetry plane. DETAILED DESCRIPTION

[0029] The semiconductor processing jig proposed by the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer according to the following description. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0030] As used in the present invention, the singular forms "one", "an", and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the terms "at least two" or "a plurality" are usually used to include the meaning of "two or more". In addition, the terms "first", "second", and "third" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0031] The present invention provides a semiconductor processing tool, including: a tool body 10 .

[0032] like Figure 1 As shown, the fixture body 10 is a rectangular plate structure, and one side of the fixture body 10 along the first direction a is a first end surface 101. The first direction a is perpendicular to the fixture body 10, so the first direction a is also the normal direction of the first end surface 101. In this embodiment, Figure 1 The upper end surface of the middle fixture body 10 serves as the first end surface 101 .

[0033] The fixture body 10 is provided with a plurality of placement holes 11 for placing products along a first direction a, wherein the products are wafer-packaged modules, such as vehicle-mounted DSC products. The inner wall of the placement hole 11 is provided with a support member 12, and the support member 12 is at least provided on the opposite side wall of the placement hole 11 along a second direction b, and the second direction b is perpendicular to the first direction a.

[0034] Please continue to refer to Figure 1As shown, the second direction b is perpendicular to the first direction a, so the second direction b is parallel to the fixture body 10 and also parallel to the first end surface 101. In this embodiment, the length direction of the fixture body 10 is defined as the second direction b, so the support members 12 are provided on at least two side walls along the length direction of the fixture body 10 in the placement hole 11.

[0035] Please continue to refer to Figure 1 As shown, in this embodiment, the placement hole 11 is adapted to the shape of the product to be processed and is formed as a rectangular hole, and the opening size of the placement hole 11 is adapted to the size of the product to be processed, so that the product is placed in the placement hole 11 in a conformable manner. Figure 1 In the figure, support members 12 are arranged at the four sides of the inner wall of the placement hole 11. The support members 12 are long strip structures. The four sides of the bottom of the product located in the placement hole 11 are supported on the support members 12 to position and support the product along the first direction a.

[0036] In other alternative embodiments, the fixture body 10 may be in other shapes, such as a disc, a cylinder, or other special-shaped structures that can be used with a workbench. Based on the shape of the fixture body 10, the second direction b can be adaptively adjusted, and it is only necessary to ensure that the second direction b is perpendicular to the opening direction of the placement hole 11.

[0037] In other alternative embodiments, the opening shape of the placement hole 11 can be adjusted based on the shape adaptability of the product. For example, the placement hole 11 can be a circular hole, a triangular hole, or other special-shaped holes.

[0038] In other alternative embodiments, the support member 12 may also be configured as a block-shaped structure, a rod-shaped structure, etc.

[0039] The support member 12 is located in the placement hole 11 and has a set distance from the first end surface 101. The set distance here refers to the distance between the side of the support member 12 close to the first end surface 101 and the first end surface 101, corresponding to Figure 1 In the embodiment, the distance is set to be the distance between the upper surface of the support member 12 and the first end surface 101. The upper surface of the support member 12 is also the surface in contact with the product and is the side that supports the product.

[0040] If the positions of the product supported on the support members 12 are coplanar, the distances between each support member 12 and the first end face 101 are kept consistent, that is, Figure 1 The upper surfaces of the support members 12 are coplanar. The proposed distance setting is mainly to ensure Figure 1 The upper end surface of the middle support member 12 is lower than the first end surface 101 , that is, one end of the product contacts the support member 12 only after being inserted into the placement hole 11 .

[0041] The set distance can be adjusted based on actual use requirements and the adaptability of the specific structure of the product. For example, when the position where the product contacts the support member 12 is uneven, each support member 12 can adjust its setting position based on the matching relationship with the product, and at this time, the set distance between each support member 12 and the first end surface 101 may be different.

[0042] In this embodiment, the upper surface of the support member 12 is set as a planar structure, and the upper surface of the support member 12 can also be adaptively adjusted based on the matching relationship with the product. For example, the upper surface of the support member 12 can be set as a curved surface or a stepped surface.

[0043] The fixture body 10 is symmetrical along the second direction b, and the symmetric plane of the fixture body 10 along the second direction b is the first symmetric plane A. Each of the placement holes 11 is symmetrically arranged with the first symmetric plane A as the center plane. Figure 2 As shown, the second direction b is the left-right direction, the first symmetry plane A is perpendicular to the second direction b, and the first symmetry plane A is located along the jig body 10 Figure 2 In the middle position of the left and right directions, the fixture body 10 is a bilaterally symmetrical structure. Similarly, each of the placement holes 11 is also distributed bilaterally symmetrically. In this embodiment, there are 12 placement holes 11, which are three rows and four columns. Figure 2 In the figure, there are two rows of placement holes 11 on the left side of the first symmetry plane A, and two rows of placement holes 11 on the right side of the first symmetry plane A. Through this structural setting, when the fixture body 10 is turned left and right, the shape and position of each placement hole 11 and the fixture body 10 remain unchanged.

[0044] In other alternative embodiments, the number of placement holes 11 may also be adaptively adjusted based on actual usage requirements.

[0045] The effect of the above symmetrical structure is that the fixture body can be used in conjunction with another fixture body, where the two fixture bodies are respectively referred to as the first fixture body 10 ′ and the second fixture body 10 ″. Figure 3 As shown, the first end faces 101 of the first fixture body 10' and the second fixture body 10" are relatively fitted, their outer contours are aligned, and the placement holes 11 are vertically aligned. The upper and lower placement holes 11 are opposite to each other, clamping and positioning the product in the vertical direction.

[0046] When loading materials, only the first jig body 10' can be used. At this time, the first end face 101 of the first jig body 10' faces upward, and each product is placed in the corresponding placement hole 11. Place the first jig body 10' horizontally on the workbench, and each placement hole 11 matches each processing position on the workbench. When the upward side of the product is processed, the second jig body 10" is used. The first end face 101 of the second jig body 10" is buckled downward on the first jig body 10', and the placement holes of the two are vertically opposite to each other, so that the product is clamped vertically in place. At this time, the first jig body 10' and the second jig body 10" can be flipped as a whole, and the placement holes after flipping cooperate with the various processing positions on the workbench to complete the flipping of all products at one time.

[0047] Similarly, in this embodiment, the fixture body 10 is symmetrical along the third direction c, the third direction c is perpendicular to the first direction a and the second direction b, the symmetry plane of the fixture body 10 along the third direction c is the second symmetry plane B, and each of the placement holes 11 is symmetrically arranged with the second symmetry plane B as the center plane. Please refer to Figure 2 As shown, the third direction c is Figure 2 In the up-down direction, the second symmetry plane B is perpendicular to the third direction c, and the second symmetry plane B is located along the jig body 10 Figure 2 The middle position in the up-down direction, Figure 2 The middle fixture body 10 is a vertically symmetrical structure, and similarly, the placement holes 11 are also vertically symmetrically distributed. Figure 2 In the jig, there is a row of placement holes 11 above the first symmetry plane A, a row of placement holes 11 below the first symmetry plane A, and another row of placement holes 11 passes through the first symmetry plane A. With this structural setting, when the jig body 10 is turned upside down, the shapes and positions of the placement holes 11 and the jig body 10 remain unchanged. Similarly, two jig bodies can also be used in combination.

[0048] In other alternative embodiments, the fixture body 10 may be symmetrical only along the first symmetry plane A, or the fixture body 10 may be symmetrical only along the second symmetry plane B.

[0049] In this embodiment, since two fixture bodies 10 can be used in conjunction with each other, the set distance is less than or equal to half of the thickness of the product.

[0050] The distance is preferably set to be half of the thickness of the product. When the first fixture body 10 ′ and the second fixture body 10 ″ are attached to each other, the corresponding support members 12 are clamped on both sides of the product to ensure the stability of the product when it is turned over.

[0051] Furthermore, a taking-and-placing groove 13 is provided on the opposite side walls of the placement hole 11 along the second direction b and / or the third direction c, and the taking-and-placing groove 13 at least passes through the first end surface 101 .

[0052] Please refer to Figure 1 As shown, in this embodiment, the placement hole 11 is provided with a pick-up and placement groove 13 on two side walls along the third direction c. The pick-up and placement groove 13 is a semicircular groove, and the pick-up and placement groove 13 passes through the fixture body 10 along the first direction a. The pick-up and placement groove 13 serves as an avoidance function, and the pick-up and placement groove 13 reserves a space for fingers or a mechanical arm to extend into, so as to facilitate hand-held or mechanical clamping of the product. At this time, the clamped product can be placed in the placement hole 11, or the product in the placement hole 11 can be taken out manually or by mechanical clamping.

[0053] In other alternative embodiments, the taking and placing grooves 13 may be formed on two opposite side walls of the placement hole 11 along the second direction b, or the taking and placing grooves 13 may be formed on opposite side walls in both the second direction b and the third direction c.

[0054] In other alternative embodiments, the pick-and-place slot 13 may only penetrate the first end surface 101 , as long as the pick-and-place slot 13 reserves space for a handheld device or a robotic arm to extend therein.

[0055] Further, such as Figure 1 As shown, the adjacent taking and placing grooves 13 corresponding to two adjacent placement holes 11 along the third direction c are arranged through.

[0056] In this embodiment, Figure 1 The first placement hole position 11′ and the second placement hole position 11″ are illustrated. The first placement hole position 11′ and the second placement hole position 11″ are adjacent to each other along the third direction c, and the two pick-and-place grooves 13 on the adjacent side walls are connected along the third direction to form a through gap 13′, which provides the first placement hole position 11′ and the second placement hole position 11″ with space for fingers or robotic arms to extend into. This arrangement is conducive to reducing the row spacing between the first placement hole position 11′ and the second placement hole position 11″ along the third direction c, and is conducive to arranging more rows of placement holes in a unit space.

[0057] In other alternative embodiments, the pick-and-place slot 13 may also be arranged at Figure 1 On the left and right side walls in the middle placement hole 11, at this time, the adjacent taking and placing grooves 13 corresponding to the two adjacent placement holes 11 along the second direction b are set through.

[0058] Furthermore, the fixture body 10 is provided with a marking structure 14;

[0059] The identification structure 14 is arranged on the support member 12 corresponding to the same side wall of each placement hole 11. The same side wall here should be understood as the side wall facing the same direction of each placement hole 11, for example, the left side wall of each placement hole 11, or the right side wall of each placement hole 11.

[0060] Please refer to Figure 1 As shown, in this embodiment, the identification structure 14 is arranged on the support member 12 corresponding to the left side wall of each placement hole 11 along the second direction b. The identification structure 14 is a semicircular groove structure penetrating the support member 12 along the third direction c. The penetrating structure allows the identification structure to be seen regardless of whether the fixture body 10 is arranged in the front or back. The identification structure 14 can be used to identify the direction of the fixture body 10 to achieve the purpose of foolproofing.

[0061] In other alternative embodiments, the identification structure 14 may also be arranged on Figure 1 Each of the placement holes 11 is on a support member 12 corresponding to the same side wall along three directions c.

[0062] In other alternative embodiments, the identification structure 14 can also be directly arranged on the same side wall of each of the placement holes 11, for example, Figure 1 On the left side wall or the rear side wall of each of the placement holes 11.

[0063] In other alternative embodiments, the identification structure 14 may be a color identification, a hole-shaped structure, or a protruding structure, which will not be described in detail here.

[0064] Furthermore, a positioning hole 16 is provided on the fixture body 10 along the first direction a. The positioning hole 16 is provided to position the two fixture bodies 10 when the two fixture bodies 10 are used together. In this embodiment, the positioning hole 16 is a circular hole, and the positioning hole 16 can be used in conjunction with a positioning pin for positioning. Figure 1 and Figure 2 As shown, in this embodiment, eight positioning holes 16 are provided, and the eight positioning holes 16 are grouped in pairs, and are divided into four groups in total, and the four groups of positioning holes 16 are distributed at four corners. The central axes of the four groups of positioning holes 16 are symmetrically arranged with the first symmetry plane A and the second symmetry plane B, so that when the two fixture bodies are used together, the positioning holes on one fixture body are directly opposite to the positioning holes on the other fixture body along the first direction a.

[0065] In this embodiment, the aperture of a part of the positioning holes 16 is larger than the aperture of another part of the positioning holes 16. In this embodiment, each group includes a large-diameter hole and a small-diameter hole. Therefore, among the eight positioning holes, there are four large-diameter holes and four small-diameter holes. The setting of the large-diameter holes and the small-diameter holes also facilitates the identification of the direction of the fixture body 10 to achieve the purpose of foolproofing.

[0066] In other alternative embodiments, the number and shape of the positioning holes 16 can be adaptively adjusted based on actual usage requirements, for example, four positioning holes distributed at four corners are provided.

[0067] Furthermore, a connecting hole 15 is formed through the fixture body 10 along the first direction a, and the connecting hole 15 is symmetrically arranged with the first symmetry plane A and / or the second symmetry plane B as the center plane.

[0068] like Figure 1 and Figure 2 As shown, in this embodiment, four connection holes 15 are provided, and the four connection holes 15 are symmetrically arranged with the first symmetry plane A and the second symmetry plane B as the center. Figure 3 As shown, when the first jig body 10′ and the second jig body 10″ are fitted together, the four connecting holes 15 on the first jig body 10′ are directly opposite to the four connecting holes 15 on the second jig body 10″, and the first jig body 10′ and the second jig body 10″ can be connected by bolt connectors or clamping parts passing through the connecting holes 15.

[0069] In this embodiment, one group of connecting holes 15 arranged along the diagonal can be set as a plain hole, and another group of connecting holes 15 arranged along the diagonal can be set as a threaded hole, and the inner diameter of the plain hole is larger than the diameter of the thread bottom circle of the threaded hole. Figure 3 After the first jig body 10′ and the second jig body 10″ are matched, the two threaded connection holes on the first jig body 10′ are aligned with the two light hole connection holes on the second jig body 10″. Similarly, the two light hole connection holes on the first jig body 10′ are aligned with the two threaded connection holes on the second jig body 10″. In this embodiment, a stud 17 with a plum head is selected as a connecting member, wherein the stud passes through the light hole connection hole of the second jig body 10″ and is threadedly connected with the threaded connection hole on the first jig body 10′, so as to achieve the purpose of connecting the first jig body 10′ and the second jig body 10″.

[0070] In other alternative embodiments, the structure of the connection hole 15 can be adjusted based on the connection form of the connector. For example, the connection holes 15 can all be plain holes, which can be connected by bolts. Alternatively, the connection hole 15 can be configured in a shape that is adaptive to the snap connector, and the first fixture body 10' and the second fixture body 10" can be connected by the snap fit.

[0071] Furthermore, the semiconductor processing tool also includes a handle 20, such as Figure 1 As shown, the handle 20 is disposed on the opposite side of the fixture body 10 along the second direction b, and the handle 20 is in a U-shaped structure, with a handle 20 disposed on each side. The handle 20 passes through the second symmetry plane B, so the handle 20 itself is symmetrically disposed with the second symmetry plane B as the center plane. Figure 3 As shown, when the first fixture body 10 ′ and the second fixture body 10 ″ are matched, the two handles 20 of the first fixture body 10 ′ and the two handles of the second fixture body 10 ″ are directly opposite along the third direction c, which is convenient for hand-held operation.

[0072] In other alternative embodiments, multiple handles may be provided on each side, for example, two handles 20 are provided. In this case, the handles 20 do not pass through the second symmetry plane B, and the two handles 20 on each side are symmetrically distributed along the second symmetry plane B.

[0073] In other alternative embodiments, the handle 20 may be disposed on the opposite side of the fixture body 10 along the third direction c, in which case the handle is disposed symmetrically with the first symmetry plane A as the center plane. Alternatively, the handle 20 may be disposed on both the opposite side of the second direction b and the opposite side of the third direction c.

[0074] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0075] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A semiconductor processing jig, characterized in that: include: Fixture body; The jig body is provided with a plurality of placement holes for placing products along a first direction, the inner walls of the placement holes are provided with support members, the support members are provided at least on opposite side walls of the placement holes along a second direction, the second direction is perpendicular to the first direction, one side of the jig body along the first direction is a first end face, the support member is located in the placement hole and has a set distance from the first end face.

2. The semiconductor processing tool according to claim 1, characterized in that: The fixture body is symmetrical along the second direction, the symmetry plane of the fixture body along the second direction is a first symmetry plane, and the placement holes are symmetrically arranged with the first symmetry plane as the center plane; And / or; the fixture body is symmetrical along a third direction, the third direction is perpendicular to the first direction and the second direction, the symmetry plane of the fixture body along the third direction is a second symmetry plane, and each of the placement holes is symmetrically arranged with the second symmetry plane as the center plane.

3. The semiconductor processing tool according to claim 1, wherein: The set distance is less than or equal to half of the thickness of the product.

4. The semiconductor processing tool according to claim 1, wherein: A pick-and-place groove is provided on the opposite side walls along the second direction and / or the third direction in the placement hole, and the pick-and-place groove at least passes through the first end surface. The third direction is perpendicular to the first direction and the second direction.

5. The semiconductor processing tool according to claim 4, characterized in that: The adjacent taking and placing grooves corresponding to two adjacent placement holes along the second direction are arranged in a through-going manner; and / or the adjacent taking and placing grooves corresponding to two adjacent placement holes along the third direction are arranged in a through-going manner.

6. The semiconductor processing tool according to claim 1, wherein: The fixture body is provided with a marking structure; The identification structure is arranged on the same side wall of each of the placement holes; and / or, the identification structure is arranged on a supporting piece corresponding to the same side wall of each of the placement holes.

7. The semiconductor processing tool according to claim 1, wherein: The fixture body is provided with a positioning hole extending through the first direction.

8. The semiconductor processing tool according to claim 7, characterized in that: A plurality of positioning holes are provided, and the apertures of some of the positioning holes are larger than the apertures of other positioning holes.

9. The semiconductor processing tool according to claim 2, wherein: The fixture body is provided with connecting holes extending through it along the first direction, and the connecting holes are symmetrically arranged with the first symmetric plane and / or the second symmetric plane as the center plane.

10. The semiconductor processing tool according to claim 2, wherein: The semiconductor processing jig further includes a handle, which is disposed at least on an opposite side of the jig body, and is symmetrically disposed with the first symmetry plane and / or the second symmetry plane as a center plane.

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