Vacuum coating equipment and spraying assembly thereof

Abstract

The utility model provides vacuum coating equipment and a spraying assembly thereof, and the spraying assembly comprises a gas distribution structure and a spraying structure, the spraying electrode plate is arranged below the gas distribution structure; the upper end of the connecting assembly is connected to the gas distribution structure, the lower end of the connecting assembly is connected to the spraying electrode plate, and a rolling structure is arranged on the contact surface of the lower end of the connecting assembly and the spraying electrode plate. According to the structure, the friction force between the spraying electrode plate and the connecting assembly can be reduced, and the friction form is rolling friction. When the spraying electrode plate is heated to deform, the spraying electrode plate is easier to slide relative to the connecting assembly, so that thermal deformation is released, and the spraying electrode plate is not easy to damage.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic equipment, in particular to a vacuum coating device and a spray component thereof. Background Art

[0002] In semiconductor vacuum coating equipment, a spray electrode plate is set under the top cover. The spray electrode plate is used to spray process gas into the vacuum chamber. The spray electrode plate is suspended and fastened under the gas distributor plate by equal height screws. However, the friction between the spray electrode plate and the equal height screws is large after being fastened. After the spray electrode plate is deformed by heat, the friction makes it difficult for the spray electrode plate to slide. The thermal deformation cannot be released, which easily leads to damage to the spray electrode plate. Utility Model Content

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the spray plate in the vacuum coating equipment in the prior art is easily damaged after being heated, thereby providing a vacuum coating equipment and a spray assembly thereof.

[0004] In order to solve the above problems, the utility model provides a spray assembly of a vacuum coating equipment, including: an air separation structure; a spray electrode plate, arranged below the air separation structure; a connecting assembly, the upper end of the connecting assembly is connected to the air separation structure, and the lower end of the connecting assembly is connected to the spray electrode plate, and a rolling structure is arranged on the contact surface between the lower end of the connecting assembly and the spray electrode plate.

[0005] Optionally, a mounting groove is provided on the connecting component, the rolling structure is arranged in the mounting groove, a limit plate is provided on the upper cover of the mounting groove, an avoidance opening is provided on the limit plate, and the rolling structure protrudes from the limit plate through the avoidance opening.

[0006] Optionally, the rolling structure includes spherical rollers or cylindrical rollers.

[0007] Optionally, there are multiple rolling structures, and the multiple rolling structures are arranged at intervals along the circumferential direction.

[0008] Optionally, a mounting hole is provided on the spray electrode plate, and the connecting assembly includes: a metal connector, the upper end of which is connected to the gas distribution structure; an insulating connector, which is connected to the metal connector and is located above the spray electrode plate; a connecting screw, which is connected to the insulating connector after passing through the mounting hole, and the rolling structure is arranged on the surface of the screw head of the connecting screw facing the insulating connector.

[0009] Optionally, a first opening is provided on the upper surface of the insulating connector, and a connecting hole is provided on the lower surface of the insulating connector. The first opening is connected to the connecting hole, and the connecting screw passes through the connecting hole and extends into the first opening. The connecting assembly also includes a fastening bolt, which is located in the first opening and is sleeved outside the connecting screw.

[0010] Optionally, a second opening is provided on the lower surface of the metal connector, and the metal connector is sleeved outside the insulating connector through the second opening.

[0011] Optionally, a limiting convex edge is provided on the outer side wall of the insulating connector, and the lower end of the metal connector abuts against the limiting convex edge.

[0012] Optionally, the connection assembly further includes an insulating sleeve, which is disposed outside the metal connection piece.

[0013] The utility model also provides a vacuum coating device, comprising a top cover and a spray assembly arranged below the top cover, wherein the spray assembly is the above-mentioned spray assembly.

[0014] The utility model has the following advantages:

[0015] By using the technical solution of the utility model, a rolling structure is provided on the contact surface between the lower end of the connection assembly and the spray electrode plate, thereby reducing the friction between the spray electrode plate and the connection assembly, and making the friction form rolling friction. When the spray electrode plate is deformed by heat, the spray electrode plate is more likely to slide relative to the connection assembly, thereby releasing the thermal deformation, making the spray electrode plate less likely to be damaged. Therefore, the technical solution of the utility model solves the defect that the spray plate in the vacuum coating equipment in the prior art is easily damaged after being heated. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 The schematic diagram of the structure of the spray assembly of the utility model is shown;

[0018] Figure 2 Shows Figure 1 A magnified schematic diagram of the middle part; and

[0019] Figure 3 Shows Figure 1 Schematic diagram of the structure of the connecting screws of the middle spray assembly.

[0020] Description of reference numerals:

[0021] 10. Gas distribution structure; 20. Spray electrode plate; 21. Mounting hole; 30. Connecting assembly; 31. Metal connector; 311. Second opening; 32. Insulating connector; 321. First opening; 322. Connecting hole; 323. Limiting convex edge; 33. Connecting screw; 34. Fastening bolt; 35. Insulating sleeve; 40. Rolling structure; 50. Limiting plate; 51. Avoidance; 100. Top cover. DETAILED DESCRIPTION

[0022] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0026] like Figure 1 and Figure 2As shown, according to an embodiment of the spray assembly of the vacuum coating equipment of the present application, the spray assembly includes a gas separation structure 10, a spray electrode plate 20 and a connection assembly 30. The spray electrode plate 20 is arranged below the gas separation structure 10. The upper end of the connection assembly 30 is connected to the gas separation structure 10, the lower end of the connection assembly 30 is connected to the spray electrode plate 20, and a rolling structure 40 is arranged on the contact surface between the lower end of the connection assembly 30 and the spray electrode plate 20.

[0027] By using the technical solution of this embodiment, a rolling structure 40 is provided on the contact surface between the lower end of the connection assembly 30 and the spray electrode plate 20, so that the friction between the spray electrode plate 20 and the connection assembly 30 can be reduced, and the friction form is rolling friction. When the spray electrode plate 20 is deformed by heat, the spray electrode plate 20 is more likely to slide relative to the connection assembly 30, thereby releasing the thermal deformation, making the spray electrode plate 20 less likely to be damaged. Therefore, the technical solution of this embodiment solves the defect that the spray plate in the vacuum coating equipment in the prior art is easily damaged after being heated.

[0028] like Figure 1 As shown, the gas distribution structure 10 is a plate-shaped structure, and its function is to distribute the process gas to the spray electrode plate 20 below.

[0029] like Figure 1 and Figure 2 As shown, the spray electrode plate 20 is connected to the lower part of the gas separation structure 10 through the connecting assembly 30. The upper part of the connecting assembly 30 is connected to the gas separation structure 10, and the lower part of the connecting assembly 30 is connected to the spray electrode plate 20, so the spray electrode plate 20 is suspended at the lower part of the gas separation structure 10 through the connecting assembly 30.

[0030] like Figure 3 As shown, in the technical solution of this embodiment, a mounting groove is provided on the connecting component 30, and the rolling structure 40 is arranged in the mounting groove. A limit plate 50 is provided on the upper cover of the mounting groove, and an avoidance opening 51 is provided on the limit plate 50. The rolling structure 40 protrudes from the limit plate 50 through the avoidance opening 51.

[0031] Specifically, when the rolling structure 40 needs to be assembled, the limit plate 50 is opened, and the rolling structure 40 can be assembled in the installation groove. Then the limit plate 50 is covered at the opening of the installation groove and fixed. The limit plate 50 can be fixed by fasteners, adhesive fixation, etc.

[0032] Furthermore, the end of the rolling structure 40 should protrude from the opening of the installation slot, and when the limit plate 50 is covered on the installation slot, the end of the rolling structure 40 protrudes from the avoidance opening 51 on the limit plate 50. In this way, when the connection component 30 is connected to the spray electrode plate 20, the end of the rolling structure 40 contacts the spray electrode plate 20, thereby reducing the friction between the connection component 30 and the spray electrode plate 20. When the spray electrode plate 20 is heated, the spray electrode plate 20 can slide more easily relative to the connection component 30, thereby releasing thermal stress, so that the spray electrode plate 20 is less likely to be damaged.

[0033] Furthermore, if Figure 3 As shown, the limiting groove in this embodiment is a fan-shaped structure, and one rolling structure 40 or multiple rolling structures 40 can be placed in the limiting groove. Preferably, multiple rolling structures 40 are placed in the limiting groove in this embodiment. And the shape of the limiting plate 50 is adapted to the shape of the limiting groove, that is, the limiting plate 50 in this embodiment is a fan-shaped structure.

[0034] Furthermore, in this embodiment, there are multiple limit grooves, which are distributed along the circumference. Specifically, there are four limit grooves in this embodiment, which are evenly distributed in the circumference, and each limit groove is covered with a limit plate 50.

[0035] Optionally, the rolling structure 40 includes a spherical roller or a cylindrical roller.

[0036] In some embodiments not shown, the limiting groove may also be a complete annular structure, in which case the limiting plate 50 can be adaptively an annular plate.

[0037] like Figure 3 As shown, in this embodiment, there are multiple rolling structures 40, and the multiple rolling structures 40 are arranged at intervals along the circumferential direction. Specifically, multiple rolling structures 40 are arranged in each limiting groove, and the four limiting grooves extend along the circumferential direction, so the multiple rolling structures 40 are distributed along the circumferential direction. Such an arrangement can reduce friction between the spray electrode plate 20 and the connecting assembly 30 in all directions.

[0038] like Figure 2 As shown, in the technical solution of this embodiment, a mounting hole 21 is provided on the spray electrode plate 20. The connecting assembly 30 includes a metal connector 31, an insulating connector 32 and a connecting screw 33. Among them, the upper end of the metal connector 31 is connected to the gas separation structure 10. The insulating connector 32 is connected to the metal connector 31 and is located above the spray electrode plate 20. The connecting screw 33 is connected to the insulating connector 32 after passing through the mounting hole 21, and the rolling structure 40 is arranged on the surface of the screw head of the connecting screw 33 facing the insulating connector 32.

[0039] Specifically, in this embodiment, the spray electrode plate 20 is a charged structure and the gas separation structure 10 is a grounded structure. In order to ensure the normal operation of the spray electrode plate 20, the connection assembly 30 needs to be divided into a metal connector 31 and an insulating connector 32.

[0040] from Figure 2 It can be seen that a threaded hole is provided on the lower surface of the gas separation structure 10, and a screw is provided on the upper end of the metal connector 31. By screwing the screw into the threaded hole, the metal connector 31 is fixed to the gas separation structure.

[0041] Of course, in some embodiments not shown, the metal connector 31 may be connected to the bottom of the gas separation structure 10 by fastener connection, bonding or welding.

[0042] Furthermore, the insulating connector 32 can be made of plastic or other materials as long as it can provide insulation. The upper end of the insulating connector 32 is connected to the metal connector 31, and the lower end is connected to the spray electrode plate 20 via a connecting screw 33, so that the insulating connector 32 can electrically isolate the gas separation structure 10 from the spray electrode plate 20.

[0043] like Figure 2 As shown, the connecting screw 33 passes through the mounting hole 21 from bottom to top and is screwed into the insulating connector 32. The screw head of the connecting screw 33 abuts against the lower end surface of the mounting hole 21, thereby fixing the spray electrode plate 20 on the insulating connector 32. Therefore, the "contact surface between the lower end of the connecting component 30 and the spray electrode plate 20" in this embodiment refers to the contact between the screw head of the connecting screw 33 and the lower end surface of the mounting hole 21.

[0044] It should be noted that the mounting hole 21 in this embodiment is a long hole, so Figure 2 The mounting hole 21 shown has a longer cross-sectional dimension.

[0045] like Figure 3 As shown, the above-mentioned limiting grooves are arranged on the surface (ie, the inner surface) of the screw head of the connecting screw 33 facing the insulating connector 32. The four limiting grooves extend circumferentially and surround the outer side of the screw rod of the connecting screw 33.

[0046] Combination Figure 2 and Figure 3 Those skilled in the art can understand that when the connecting screw 33 is fastened to the insulating connector 32, the end of the rolling structure 40 protruding from the avoidance opening 51 of the limit plate 50 abuts against the lower end surface of the mounting hole 21, thereby reducing friction. When the spray electrode plate 20 is deformed by heat during operation, the spray electrode plate 20 is easily displaced relative to the connecting screw 33, thereby releasing thermal stress.

[0047] like Figure 3 As shown, in the technical solution of this embodiment, the upper surface of the insulating connector 32 is provided with a first opening 321, and the lower surface of the insulating connector 32 is provided with a connecting hole 322. The first opening 321 is communicated with the connecting hole 322, and the connecting screw 33 passes through the connecting hole 322 and extends into the first opening 321. The connecting assembly 30 also includes a fastening bolt 34, which is located in the first opening 321 and sleeved outside the connecting screw 33.

[0048] Specifically, the insulating connector 32 is generally a sleeve structure. Figure 2 The insulating connector 32 includes a bottom wall and an annular side wall. The connecting hole 322 is formed on the bottom wall. The space enclosed by the bottom wall and the annular side wall forms a first opening 321 .

[0049] like Figure 2 As shown, during assembly, the connecting screw 33 passes through the mounting hole 21 and the connecting hole 322 from bottom to top, and then the end of the connecting screw 33 extends into the first opening 321 .

[0050] Furthermore, in this embodiment, since the material of the insulating connector 32 (usually plastic material) is lower than that of metal, in this embodiment, the connecting screw 33 is fixed to the insulating connector 32 by a fastening bolt 34. Figure 3 It can be seen that the connecting screw 33 includes a polished rod section and a threaded section, the polished rod section is located in the mounting hole 21 and the connecting hole 322, and the threaded section is located in the first opening 321. The fastening bolt 34 is sleeved and tightened on the threaded section.

[0051] In some embodiments not shown, if the strength of the insulating connector 32 is relatively high, the connecting hole 322 may be directly set as a threaded hole. In this case, the connecting screw 33 passes through the mounting hole and is directly screwed into the connecting hole 322 .

[0052] Furthermore, in this embodiment, the first opening 321 is filled with an insulating material, such as an insulating block, which may be a hard material or a soft material. The insulating material can further isolate the gas separation structure 10 and the spray electrode plate 20, thereby preventing a short circuit.

[0053] like Figure 2 As shown, in the technical solution of this embodiment, a second opening 311 is provided on the lower surface of the metal connector 31 , and the metal connector 31 is sleeved outside the insulating connector 32 through the second opening 311 .

[0054] Specifically, the metal connector 31 is also roughly a sleeve structure. Figure 2The metal connector 31 includes a top wall and an annular side wall, and a threaded column is provided on the outer surface of the top wall, which can be screwed into the threaded hole of the gas separation structure 10, so as to fix the metal connector 31 on the gas separation structure 10. The space enclosed by the top wall and the side wall of the metal connector 31 forms a second opening 311.

[0055] Combination Figure 2 It can be seen that the inner diameter of the second opening 311 matches the outer diameter of the insulating connector 32 , so the metal connector 31 is sleeved outside the insulating connector 32 through the second opening.

[0056] In this embodiment, since the insulating connector 32 has a better deformation performance than the metal connector 31 in terms of structural strength, in this embodiment, the side wall of the metal connector 31 and the side wall of the insulating connector 32 are connected by interference fit. That is, during assembly, the insulating connector 32 is inserted into the second opening 311 of the metal connector 31 from bottom to top and connected by friction. This assembly method also facilitates the installation and disassembly between the insulating connector 32 and the metal connector 31, and facilitates the replacement or maintenance of the spray electrode plate 20.

[0057] In some embodiments not shown, if the strength of the insulating connector 32 is sufficient, the metal connector 31 and the insulating connector 32 may be connected by threads. In this embodiment, the inner wall of the metal connector 31 is provided with an internal thread, and the outer wall of the insulating connector 32 is provided with an external thread. When assembling, the internal thread and the external thread are screwed together.

[0058] like Figure 2 As shown, in the technical solution of this embodiment, a limiting convex edge 323 is provided on the outer side wall of the insulating connector 32 , and the lower end of the metal connector 31 abuts against the limiting convex edge 323 .

[0059] Specifically, the limiting convex edge 323 is an annular convex edge, which is arranged at the lower position of the outer side wall of the insulating connector 32. When the insulating connector 32 and the metal connector 31 are nested and assembled, the end of the metal connector 31 will abut against the limiting convex edge 323, thereby fixing the relative position between the metal connector 31 and the insulating connector 32 along the axial direction.

[0060] like Figure 2 As shown, in the technical solution of this embodiment, the connection assembly 30 also includes an insulating sleeve 35, and the insulating sleeve 35 is sleeved outside the metal connection piece 31. Figure 2It can be seen that the insulating sleeve 35 covers the outer side of the top wall and the outer side wall of the metal connector 31, so the outer side of the metal connector 31 is electrically isolated by the insulating sleeve 35, and the inner side of the metal connector 31 is electrically isolated by the insulating connector 32, thereby achieving complete electrical isolation between the metal connector 31 and the spray electrode plate 20.

[0061] Optionally, the insulating sleeve 35 may be made of plastic or silicone.

[0062] The application also provides a vacuum coating device, such as Figure 1 As shown, an embodiment of the vacuum coating equipment according to the present application includes a top cover 100 and a spray assembly arranged below the top cover 100, and the spray assembly is the above-mentioned spray assembly.

[0063] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A spray assembly of a vacuum coating device, characterized in that: include: Gas distribution structure (10); A spray electrode plate (20) is arranged below the gas separation structure (10); A connecting component (30), wherein the upper end of the connecting component (30) is connected to the gas separation structure (10), the lower end of the connecting component (30) is connected to the spray electrode plate (20), and a rolling structure (40) is provided on the contact surface between the lower end of the connecting component (30) and the spray electrode plate (20).

2. The spray assembly according to claim 1, characterized in that: The connection assembly (30) is provided with a mounting groove, the rolling structure (40) is arranged in the mounting groove, the mounting groove is covered with a limit plate (50), the limit plate (50) is provided with an avoidance opening (51), and the rolling structure (40) protrudes from the limit plate (50) through the avoidance opening (51).

3. The spray assembly according to claim 1, characterized in that: The rolling structure (40) includes a spherical roller or a cylindrical roller.

4. The spray assembly according to claim 1, characterized in that: There are a plurality of rolling structures (40), and the plurality of rolling structures (40) are arranged at intervals along the circumferential direction.

5. The spray assembly according to any one of claims 1 to 4, characterized in that: The spray electrode plate (20) is provided with a mounting hole (21), and the connecting assembly (30) comprises: A metal connecting piece (31), the upper end of the metal connecting piece (31) being connected to the gas separation structure (10); An insulating connector (32), the insulating connector (32) being connected to the metal connector (31) and being located above the spray electrode plate (20); A connecting screw (33) is connected to the insulating connecting piece (32) after passing through the mounting hole (21), and the rolling structure (40) is arranged on the surface of the screw head of the connecting screw (33) facing the insulating connecting piece (32).

6. The spray assembly according to claim 5, characterized in that: The upper surface of the insulating connector (32) is provided with a first opening (321), and the lower surface of the insulating connector (32) is provided with a connecting hole (322), the first opening (321) is communicated with the connecting hole (322), the connecting screw (33) passes through the connecting hole (322) and extends into the first opening (321), and the connecting assembly (30) further comprises a fastening bolt (34), the fastening bolt (34) is located in the first opening (321) and is sleeved outside the connecting screw (33).

7. The spray assembly according to claim 5, characterized in that: The lower surface of the metal connecting piece (31) is provided with a second opening (311), and the metal connecting piece (31) is sleeved outside the insulating connecting piece (32) through the second opening (311).

8. The spray assembly according to claim 7, characterized in that: A limiting convex edge (323) is provided on the outer side wall of the insulating connecting piece (32), and the lower end of the metal connecting piece (31) abuts against the limiting convex edge (323).

9. The spray assembly according to claim 5, characterized in that: The connection assembly (30) further comprises an insulating sleeve (35), wherein the insulating sleeve (35) is sleeved outside the metal connection piece (31).

10. A vacuum coating device, characterized in that: It comprises a top cover (100) and a spray assembly arranged below the top cover (100), wherein the spray assembly is the spray assembly according to any one of claims 1 to 9.

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