Silicon rod detection mechanism

Abstract

The utility model relates to the field of automatic silicon rod detection equipment, and particularly discloses a silicon rod detection mechanism. The silicon rod detection mechanism comprises a rack, the rack is connected with a vertical mounting plate, and one side of the mounting plate is provided with a through hole for a silicon rod to move and pass through along the axial direction; eight camera detection assemblies are distributed on the periphery of the through hole in the circumferential direction, four camera detection assemblies are used for conducting optical image collection on the four side faces of the silicon rod respectively, and the other four camera detection assemblies are used for conducting optical image collection on the four chamfered slopes of the silicon rod respectively; and the image acquisition positions of the camera detection assemblies are staggered along the central axis direction of the through hole. According to the silicon rod detection mechanism, the silicon rod moving axially can be detected in all directions, and the detection precision is high.

Description

Technical Field

[0001] The utility model relates to the field of silicon rod automatic detection equipment, in particular to a silicon rod detection mechanism. Background Art

[0002] Before bonding the silicon rod to the wafer tray and slicing it, the silicon rod needs to be inspected for surface defects and appearance dimensions.

[0003] In the prior art, two rollers are used to support the silicon rod, and the rotation of the two rollers drives the silicon rod to rotate, so as to cooperate with the detection mechanism located above to realize silicon rod detection; the detection mechanism is generally provided with at least one, including a camera and a driving component that drives the camera to move in three-dimensional space. However, this detection method is suitable for detecting cylindrical silicon rods, but cannot perform all-round detection on square silicon rods. There are also trays that support silicon rods, and drive the trays to move in a straight line to cooperate with the detection mechanisms located above and / or on both sides and / or at both ends to detect silicon rods; although this detection method is suitable for square silicon rods, the silicon rod detection is affected by the tray, and it is impossible to achieve all-round detection of square silicon rods. Summary of the invention

[0004] The utility model aims to provide a silicon rod detection mechanism, which can realize all-round detection of axially moving silicon rods with high detection accuracy.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A silicon rod detection mechanism comprises a frame, a vertical mounting plate is connected to the frame, a through hole is formed on one side of the mounting plate for the silicon rod to move through in the axial direction; eight camera detection assemblies are distributed circumferentially around the through hole, four of which are used to collect optical images of four side surfaces of the silicon rod, and the other four are used to collect optical images of four chamfered surfaces of the silicon rod; the image collection positions of the camera detection assemblies are staggered along the central axis direction of the through hole.

[0007] Furthermore, the camera detection assembly includes a slide, an industrial camera, a light source and a driving assembly; the slide is slidably connected to the mounting plate and can move toward or away from the center of the through hole under the drive of the driving assembly; two vertical columns are provided on the top surface of the slide, and the industrial camera is connected between the two columns through two first brackets; two second brackets are connected to the upper ends of the two columns, and the light source is rotatably connected between the two second brackets and locked by a locking assembly; the rotation center direction of the light source is perpendicular to the sliding direction of the slide.

[0008] Furthermore, the first bracket is connected to the industrial camera through two first locking screws arranged upper and lower; a first arc groove is opened on the first bracket, and the central axis of the first arc groove is colinear with the central axis of the first locking screw above; the first locking screw below is located in the first arc groove.

[0009] Furthermore, the installation position of the first bracket on the corresponding column is adjustable along the sliding direction of the slide seat.

[0010] Furthermore, the locking assembly includes at least two second locking screws, and the second bracket is provided with two second arc grooves arranged opposite to each other in an upper and lower direction, and the central axes of the two second arc grooves are colinear with the rotation central axis of the light source; each of the second locking screws is arranged in the two second arc grooves.

[0011] Furthermore, the installation position of the second bracket on the corresponding column is adjustable along the sliding direction of the slide seat.

[0012] Furthermore, the cross-section of the through hole is octagonal.

[0013] The beneficial effects of the utility model are:

[0014] 1. The utility model is a silicon rod detection mechanism. The silicon rod passes through the through hole along the central axis of the through hole. The four side faces and four chamfered surfaces of the silicon rod are optically imaged by eight camera detection components arranged around the through hole. Since the image information of the silicon rod is collected in all directions, the appearance dimensions of the silicon rod can be accurately calculated based on the image information, and it can be identified whether there are surface defects at the edges at both ends of the silicon rod, the four side faces and the four chamfered surfaces. The silicon rod detection mechanism realizes all-round detection of the axially moving silicon rod, and the detection accuracy is high.

[0015] 2. In a silicon rod detection mechanism of the utility model, the image acquisition positions of the camera detection components are staggered along the central axis direction of the through hole, and the camera detection components do not interfere with or affect each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a structural schematic diagram of a silicon rod detection mechanism provided by the utility model.

[0017] Figure 2 yes Figure 1 Schematic diagram of the structure of four camera detection components used to capture optical images of the four chamfered surfaces of the silicon rod.

[0018] Figure 3 yes Figure 1 Schematic diagram of the structure of four camera detection components used to capture optical images of the four sides of the silicon rod.

[0019] Figure 4 yes Figure 1 Schematic diagram of the camera detection component in .

[0020] Figure 5 It is a schematic diagram of the clamping and fixing structure of the silicon rod to be tested. DETAILED DESCRIPTION

[0021] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0022] like Figures 1 to 4 As shown, a silicon rod detection mechanism includes a frame 1, a vertical mounting plate 11 is connected to the frame 1, and a through hole 111 for the silicon rod 100 to move through along the axial direction is opened on one side of the mounting plate 11; eight camera detection components 2 are distributed in the circumferential direction around the through hole 111, four of which are used to collect optical images of the four side surfaces of the silicon rod 100, and the other four camera detection components 2 are used to collect optical images of the four chamfered surfaces of the silicon rod 100; the image collection positions of the camera detection components 2 are staggered along the central axis direction of the through hole 111.

[0023] Specifically, before testing, Figure 5 The clamping and fixing method shown is used to fix the silicon rod 100. Among them, two T-shaped slides 3 are relatively arranged on both sides of the through hole 111, and chucks 31 are arranged at the opposite ends; the two T-shaped slides 3 move toward each other along the central axis direction of the through hole 111, so that the two chucks 31 clamp the two end surfaces of the silicon rod 100, thereby realizing the suspended fixation of the silicon rod 100. The two T-shaped slides 3 move together along the central axis direction of the through hole 111, driving the silicon rod 100 to pass through each camera detection component 2 in sequence and then pass through the through hole 111.

[0024] In this embodiment, the camera detection component 2 includes a slide 21, an industrial camera 22, a light source 23 and a driving component 24; the slide 21 is slidably connected to the mounting plate 11, and can move toward or away from the center of the through hole 111 under the drive of the driving component 24; two vertical columns 211 are provided on the top surface of the slide 21, and the industrial camera 22 is connected between the two columns 211 through two first brackets 25; two second brackets 26 are connected to the upper ends of the two columns 211, and the light source 23 is rotatably connected between the two second brackets 26, and is locked by a locking component; the rotation center direction of the light source 23 is perpendicular to the sliding direction of the slide 21.

[0025] Among them, the first bracket 25 is connected to the industrial camera 22 through two first locking screws arranged upper and lower; a first arc groove 251 is opened on the first bracket 25, and the central axis of the first arc groove 251 is colinear with the central axis of the upper first locking screw; the lower first locking screw is located in the first arc groove 251.

[0026] Furthermore, the installation position of the first bracket 25 on the corresponding column 211 is adjustable along the sliding direction of the slide 21. In this embodiment, a first adjustment hole is provided on the first bracket 25, and a screw for screwing the column 211 is provided in the first adjustment hole.

[0027] Among them, the locking assembly includes at least two second locking screws, and the second bracket 26 is provided with two second arc grooves 261 arranged opposite to each other up and down, and the central axes of the two second arc grooves 261 are colinear with the rotation central axis of the light source 23; each second locking screw is arranged in the two second arc grooves 261.

[0028] Furthermore, the installation position of the second bracket 26 on the corresponding column 211 is adjustable along the sliding direction of the slide seat 21. In this embodiment, the second bracket 26 is provided with a second adjustment hole, and a screw for screwing the column 211 is arranged in the second adjustment hole.

[0029] The driving assembly 24 includes a screw, a screw nut and a servo motor, wherein both ends of the screw are rotatably connected to the mounting plate, the screw nut is screwed onto the screw and connected to the slide 21; the servo motor is used to drive the screw to rotate.

[0030] When in use, the lead screw rotates under the drive of the servo motor, driving the slide 21 to move, thereby causing the industrial camera 22 and the light source 23 to move toward or away from the center of the through hole 111 .

[0031] In this embodiment, the cross section of the through hole 111 is octagonal.

[0032] The utility model provides a silicon rod detection mechanism. During detection, the central axis direction of the silicon rod 100 is consistent with the central axis direction of the through hole 111; the silicon rod 1100 moves toward the through hole 111, passes through each camera detection assembly 2 in sequence, and then passes through the through hole 111; eight camera detection assemblies 2 perform optical image acquisition on the four side surfaces and four chamfered surfaces of the silicon rod 100; since the image information of the silicon rod 100 is acquired in all directions, the appearance dimensions of the silicon rod 100 can be accurately calculated according to the image information, and it can be identified whether there are surface defects at the edges at both ends of the silicon rod 100, the four side surfaces, and the four chamfered surfaces. The silicon rod detection mechanism realizes all-round detection of the axially moving silicon rod 100, and the detection accuracy is high.

[0033] The technical principle of the present invention is described above in combination with specific embodiments. These descriptions are only for explaining the principle of the present invention and cannot be interpreted as limiting the protection scope of the present invention in any way. Based on the explanations here, technicians in this field can think of other specific implementation methods of the present invention without creative work, and these methods will fall within the protection scope of the present invention.

Claims

1. A silicon rod detection mechanism, characterized in that: The invention comprises a frame (1), the frame (1) being connected to a vertical mounting plate (11), one side of the mounting plate (11) being provided with a through hole (111) for a silicon rod (100) to move through in the axial direction; eight camera detection assemblies (2) are distributed in a circumferential direction around the through hole (111), four of the camera detection assemblies (2) being used to collect optical images of four side surfaces of the silicon rod (100), and the other four of the camera detection assemblies (2) being used to collect optical images of four chamfered inclined surfaces of the silicon rod (100); and the image collection positions of the camera detection assemblies (2) are staggered along the central axis direction of the through hole (111).

2. A silicon rod detection mechanism according to claim 1, characterized in that: The camera detection component (2) comprises a slide (21), an industrial camera (22), a light source (23) and a driving component (24); the slide (21) is slidably connected to the mounting plate (11) and can move toward or away from the center of the through hole (111) under the drive of the driving component (24); two vertical columns (211) are arranged on the top surface of the slide (21), and the industrial camera (22) is connected between the two columns (211) through two first brackets (25); two second brackets (26) are connected to the upper ends of the two columns (211), and the light source (23) is rotatably connected between the two second brackets (26) and is locked by a locking component; the rotation center direction of the light source (23) is perpendicular to the sliding direction of the slide (21).

3. A silicon rod detection mechanism according to claim 2, characterized in that: The first bracket (25) is connected to the industrial camera (22) via two first locking screws arranged at the top and the bottom; a first arc-shaped groove (251) is provided on the first bracket (25), and the central axis of the first arc-shaped groove (251) is colinear with the central axis of the first locking screw at the top; the first locking screw at the bottom is located in the first arc-shaped groove (251).

4. A silicon rod detection mechanism according to claim 2 or 3, characterized in that: The installation position of the first bracket (25) on the corresponding column (211) is adjustable along the sliding direction of the slide seat (21).

5. A silicon rod detection mechanism according to claim 2, characterized in that: The locking assembly comprises at least two second locking screws, and the second bracket (26) is provided with two second arc-shaped grooves (261) arranged opposite to each other in an upper and lower direction, and the central axes of the two second arc-shaped grooves (261) are colinear with the rotational central axis of the light source (23); each of the second locking screws is arranged in the two second arc-shaped grooves (261).

6. A silicon rod detection mechanism according to claim 2 or 5, characterized in that: The installation position of the second bracket (26) on the corresponding column (211) is adjustable along the sliding direction of the slide seat (21).

7. A silicon rod detection mechanism according to claim 1, characterized in that: The cross section of the through hole (111) is octagonal.

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