Manual material taking and placing device of intelligent storage equipment

Abstract

The utility model discloses a manual material taking and placing device of intelligent storage equipment, which comprises a rack and at least one material feeding and discharging station, and the material feeding and discharging station comprises a bottom plate, a first side plate, a second side plate, a carrying mechanism, an electric control module and a safety operation plate; the bottom plate is fixed on the rack and is used for placing a material box; the first side plate and the second side plate are oppositely arranged on the two sides of the bottom plate so as to define a feeding and discharging channel. The carrying mechanism is arranged on the rack and used for carrying the material boxes. The safety operation plate is arranged on the rack; the carrying mechanism and the safety operation panel are both electrically connected with the electric control module. According to the scheme, the safety of personnel and the material box during operation can be improved, and the personnel and the material box are prevented from being damaged by a mechanical structure on the device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a manual material taking and placing device for intelligent storage equipment. Background Art

[0002] In semiconductor factories, FOUP boxes are usually used as carriers for wafers. Stocker is an intelligent storage device in semiconductor factories, with multi-layer storage space, mainly used for the automated transportation and storage of FOUP boxes in semiconductor factories, to realize the flow of wafers between processes.

[0003] Smart storage equipment (Stocker) generally has two ways to store material boxes. One is the automatic access port, which is handled by AMHS (Automatic Material Handling System); the other is the manual access port set on the side of the smart storage equipment, which is manually accessed. Since the manual access port is used to manually interact with the stocker, how to ensure the safety of personnel in this process is a problem that technicians in this field need to solve. Utility Model Content

[0004] In order to overcome the defects in the prior art, an embodiment of the utility model provides a manual material loading and unloading device for intelligent storage equipment, which can improve the safety of personnel and material boxes during operation and prevent personnel and material boxes from being harmed by the mechanical structure of the device.

[0005] The embodiment of the present application discloses: a manual material loading and unloading device of intelligent warehousing equipment, comprising: a frame and at least one material loading and unloading station, the material loading and unloading station comprising a bottom plate, a first side plate, a second side plate, a conveying mechanism, an electric control module and a safety operation panel; the bottom plate is fixed on the frame for placing a material box; the first side plate and the second side plate are relatively arranged on both sides of the bottom plate to enclose a material loading and unloading channel; the conveying mechanism is arranged on the frame for conveying the material box; the safety operation panel is arranged on the frame; the conveying mechanism and the safety operation panel are both electrically connected to the electric control module.

[0006] Specifically, the safety operation panel includes a feed button, a discharge button, an abnormality indicator light and an abnormality release button.

[0007] Specifically, the safety operation panel also includes an emergency button.

[0008] Specifically, a voice announcer is also provided on the rack, and the voice announcer is electrically connected to the electric control module.

[0009] Specifically, a safety light curtain is further provided on the first side panel and / or the second side panel, and the safety light curtain is electrically connected to the electric control module.

[0010] Specifically, the bottom plate is provided with a plurality of positioning posts and a plurality of limiting blocks, and the positioning posts and limiting blocks are used to position the material box.

[0011] Specifically, the device is provided with two material loading and unloading stations.

[0012] Specifically, the transport mechanism includes a drive motor and a mechanical arm connected to the drive motor, and the drive motor is electrically connected to the electric control module.

[0013] The utility model has at least the following beneficial effects:

[0014] 1. The manual material loading and unloading device of the intelligent storage equipment of this embodiment is provided with a safety operation panel electrically connected to the electronic control module on the frame. When personnel are loading and unloading material boxes, they can interact with the device through the safety operation panel to improve the safety of personnel and material boxes during operation and prevent personnel and material boxes from being harmed by the mechanical structure of the device.

[0015] 2. The device of this embodiment is provided with two feeding and discharging stations, and the two stations can perform feeding and discharging actions simultaneously, thereby improving working efficiency.

[0016] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a structural schematic diagram of a manual material taking and placing device of an intelligent storage device in an embodiment of the utility model;

[0019] Figure 2 It is a structural schematic diagram of the safety operation panel in the embodiment of the utility model;

[0020] Figure 3 It is a structural schematic diagram of the transport mechanism in the embodiment of the utility model.

[0021] The figure marks of the above drawings are: 1. frame; 2. bottom plate; 3. first side plate; 4. second side plate; 5. transport mechanism; 51. robotic arm; 6. safety operation panel; 61. feed button; 62. discharge button; 63. abnormal indicator light; 64. abnormal release button; 65. emergency button; 7. voice announcer; 8. safety light curtain; 91. positioning column; 92. limit block. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "fixed", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0024] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being "above", "below" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0025] In the description of this embodiment, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application.

[0026] In addition, the terms "first", "second", etc. are only used to distinguish in description and have no special meaning.

[0027] The manual material loading and unloading device of the intelligent storage equipment of this embodiment can be installed on the intelligent storage equipment, and connected and coordinated with other devices such as the robot of the intelligent storage equipment.

[0028] like Figure 1 As shown, the manual material loading and unloading device of the intelligent storage equipment of this embodiment mainly includes a frame 1 and at least one loading and unloading station arranged on the frame 1. The loading and unloading station includes a bottom plate 2, a first side plate 3, a second side plate 4, a conveying mechanism 5, an electric control module (not shown in the figure) and a safety operation panel 6. Specifically, the bottom plate 2 is fixed on the frame 1, and is used to place the material boxes to be fed or unloaded; the first side plate 3 and the second side plate 4 are relatively arranged on both sides of the bottom plate 2, and the first side plate 3 and the second side plate 4 together form a loading and unloading channel; the conveying mechanism 5 is arranged on the frame 1, and is used to convey the material boxes to be fed or unloaded; the safety operation panel 6 is arranged on the frame 1, and is used for personnel to interact with the device when feeding and unloading the material boxes, thereby improving the safety of the operation; the conveying mechanism 5 and the safety operation panel 6 are both electrically connected to the electric control module.

[0029] Through the above structure, the manual material loading and unloading device of the intelligent storage equipment of this embodiment is provided with a safety operation panel 6 electrically connected to the electronic control module on the frame 1. When personnel are loading and unloading material boxes, they can interact with the device through the safety operation panel 6 to improve the safety of personnel and material boxes during operation and prevent personnel and material boxes from being harmed by the mechanical structure of the device.

[0030] Specifically, Figure 2 As shown, the safety operation panel 6 of this embodiment includes a feed button 61, a discharge button 62, an abnormal indicator light 63, and an abnormal release button 64. When the personnel places the material box on the bottom plate 2, click the feed button 61, the device enters the automatic operation state, and the conveying mechanism 5 conveys the material box to the robot of the intelligent storage equipment; when the robot puts the material box to be discharged into the inlet and outlet channel, the conveying mechanism 5 takes the material box from the robot and conveys it to the bottom plate 2 for placement. After the personnel takes the material box, they click the discharge button 62 to complete the material collection. If an abnormal situation occurs during the process of taking and placing the material box, the abnormal indicator light 63 will flash. After the personnel investigates the specific abnormal situation, they can click the abnormal release button 64 to extinguish the abnormal indicator light 63.

[0031] Preferably, if Figure 2 As shown, the safety operation panel 6 of this embodiment is also provided with an emergency button 65. When an emergency occurs in the device, but the electric control module does not receive a stop signal, the personnel can stop the device by pressing the emergency button 65, further improving the safety of the operation.

[0032] like Figure 1 As shown, the manual material taking and placing device of the intelligent storage equipment of this embodiment can also be provided with a voice announcer 7 on the frame 1, and the voice announcer 7 is electrically connected to the electric control module. When the material is fed in and the material is ready to be taken out, the voice announcer 7 can remind the personnel through the voice broadcast so that the personnel can work in time.

[0033] like Figure 1 As shown, in this embodiment, a safety light curtain 8 may be further provided on the first side panel 3 and / or the second side panel 4, and the safety light curtain 8 is electrically connected to the electric control module. Specifically, the safety light curtain 8 may be provided at one end of the inlet and outlet passage close to the operator, and may provide an obvious safety reminder to the operator.

[0034] like Figure 3 As shown, the bottom plate 2 of this embodiment is provided with a plurality of positioning posts 91 and a plurality of limiting blocks 92, and the plurality of positioning posts 91 and the plurality of limiting blocks 92 can well position the material box.

[0035] like Figure 3 As shown, the transport mechanism 5 of this embodiment includes a drive motor (not shown) and a mechanical arm 51 connected to the drive motor. The drive motor is electrically connected to the electric control module.

[0036] Preferably, if Figure 1 As shown, the manual material loading and unloading device of the intelligent storage equipment of this embodiment is provided with two parallel material loading and unloading stations. When one of the stations is loading materials, the other station can be used for unloading materials, thereby improving the working efficiency.

[0037] In summary, the working process of the manual material taking and placing device of the intelligent storage equipment of this embodiment is as follows: Figure 1 Take the feeding at the left station and the discharging at the right station as an example: the personnel puts the material box on the bottom plate 2 on the left, clicks the feeding button 61 on the safety operation panel 6 on the left, the equipment enters automatic operation, the safety light curtain 8 on the left turns on, the conveying mechanism 5 conveys the material box to the robot pick-up and release port inside the intelligent storage equipment, and waits for the robot to take the material box, the safety light curtain 8 on the left turns off, and the voice announcer 7 broadcasts the prompt sound of the material box being put into the intelligent storage equipment; after the intelligent storage equipment receives the discharging signal, the robot takes the corresponding material box in the equipment and puts it on the robot pick-up and release port, the safety light curtain 8 on the right turns on, the conveying mechanism 5 on the right takes the material from the robot pick-up and release port and places it on the bottom plate 2 on the right, the safety light curtain 8 on the right turns off, the voice announcer 7 broadcasts the prompt sound of the material box to be taken away, the personnel takes the material box and clicks the discharging button 62 on the right, and the operation is completed.

[0038] The present invention uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A manual material loading and unloading device for intelligent storage equipment, characterized in that: include: A frame and at least one loading and unloading station, the loading and unloading station comprising a bottom plate, a first side plate, a second side plate, a conveying mechanism, an electric control module and a safety operation panel; the bottom plate is fixed on the frame and is used to place a material box; the first side plate and the second side plate are relatively arranged on both sides of the bottom plate to enclose a loading and unloading channel; the conveying mechanism is arranged on the frame and is used to convey the material box; the safety operation panel is arranged on the frame; the conveying mechanism and the safety operation panel are both electrically connected to the electric control module.

2. The manual material loading and unloading device of the intelligent storage equipment according to claim 1 is characterized in that: The safety operation panel includes a feed button, a discharge button, an abnormality indicator light and an abnormality release button.

3. The manual material loading and unloading device of the intelligent storage equipment according to claim 1 is characterized in that: The safety operation panel also includes an emergency button.

4. The manual material loading and unloading device of the intelligent storage equipment according to claim 1 is characterized in that: The frame is also provided with a voice announcer, and the voice announcer is electrically connected to the electric control module.

5. The manual material loading and unloading device of the intelligent storage equipment according to claim 1 is characterized in that: A safety light curtain is also provided on the first side panel and / or the second side panel, and the safety light curtain is electrically connected to the electric control module.

6. The manual material loading and unloading device of the intelligent storage equipment according to claim 1 is characterized in that: The bottom plate is provided with a plurality of positioning posts and a plurality of limiting blocks, and the positioning posts and limiting blocks are used to position the material box.

7. The manual material loading and unloading device of the intelligent storage equipment according to claim 1 is characterized in that: The device is provided with two material loading and unloading stations.

8. The manual material loading and unloading device of the intelligent storage equipment according to claim 1 is characterized in that: The transport mechanism includes a driving motor and a mechanical arm connected to the driving motor, and the driving motor is electrically connected to the electric control module.

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