Jig for baking carrying disc

Abstract

The jig comprises a support assembly and a handrail assembly, the support assembly comprises a fixing support and a fixing rod, the two ends of the fixing rod are connected with the fixing support respectively, and the handrail assembly comprises a size-compatible handrail and a bottom rod. The two ends of the size-compatible handrail are fixedly connected to the two ends of the upper portion of the fixing support through round hole bolts, a plurality of first rectangular grooves which are evenly distributed are formed in one side of the size-compatible handrail, the bottom rod is arranged below the size-compatible handrail, the bottom rod is fixed to the fixing support, and a plurality of second rectangular grooves which are evenly distributed are formed in the bottom rod. The round hole bolts and the round holes are used for fixing, the carrying discs are vertically placed in the second rectangular grooves in the bottom rods, the two ends of the carrying discs are just clamped in the first rectangular grooves, the carrying discs are spaced by a certain distance, water vapor is easier to disperse during baking, drying is more thorough, and under the condition that target requirements are the same, the baking time is shortened, and the production efficiency is improved; and it is ensured that the trays baked each time have the same attribute.

Description

Technical Field

[0001] The utility model relates to the technical field of auxiliary processes, in particular to a fixture for tray baking. Background Art

[0002] In LED manufacturing, both the coating magnetron sputtering and ICP ion etching machines use independent carriers to hold wafers. The machine arm transfers the carrier to the process chamber for process processing, and the cleanliness of the carrier has a great impact on the chamber environment. The carrier is generally maintained by spraying and aluminum melting, and then it will be exposed to the air for a long time, resulting in the adsorption of water vapor. Therefore, the carrier is placed in the oven for baking before use. Currently, there is no standard operation method for baking, and it is generally stacked and baked directly in the oven.

[0003] The carrier plate is generally a cylinder with a large cross-sectional diameter. The current baking method is to directly stack a large number of carrier plates together and put them into the oven. Because the carrier plates are stuck together, the water vapor in the stuck parts cannot be effectively dissipated, and the baking effect is poor. Using the carrier plates in this state for operation will cause product abnormalities. Utility Model Content

[0004] In view of the above situation, it is necessary to provide a fixture for tray baking to address the problem of poor tray lamination and baking effect in the prior art.

[0005] A jig for tray baking, comprising a bracket assembly and a railing assembly, the bracket assembly comprising a fixed bracket and a fixed rod, the two ends of the fixed rod are respectively connected to the fixed bracket, the railing assembly comprises a size-compatible railing and a bottom rod, the two ends of the size-compatible railing are fixedly connected to the upper two ends of the fixed frame through round hole pins, one side of the size-compatible railing is provided with a plurality of uniformly distributed first rectangular grooves, the bottom rod is arranged below the size-compatible railing, the bottom rod is fixedly connected to the vertical rod, and the bottom rod is provided with a plurality of uniformly distributed second rectangular grooves;

[0006] The first rectangular groove and the second rectangular groove are used to accommodate the carrier trays, so that a relative interval is formed between the carrier trays to be baked.

[0007] In the utility model, the round hole pins of the railing with compatible size are fixed with the round holes at both ends of the upper fixed bracket, and the carrier tray to be baked is vertically placed on the second rectangular groove of the bottom rod, and the two ends of the carrier tray are just stuck in the first rectangular groove. A certain interval is maintained between the placed carrier trays so that water vapor can be more easily dissipated during baking. Compared with conventional stacking baking, the use of this fixture can achieve more thorough drying. Under the same target requirements, the baking time can be reduced, the production efficiency can be improved, and it is ensured that the carrier trays baked each time have the same properties.

[0008] Furthermore, the jig for tray baking, the fixed bracket includes vertical rods, cross rods and support rods, the vertical rods are two groups of parallel vertical rods symmetrically arranged in the vertical direction, the cross rods are four parallel cross rods symmetrically arranged, the support rods are four parallel support rods symmetrically arranged, the two ends of the vertical rods are respectively connected to the middle part of the cross rods, and the two ends of the support rods are respectively connected to the two ends of the cross rods.

[0009] In the utility model, the fixing rod is connected with the cross rod, the two ends of the vertical rod are respectively connected with the middle of the cross rod, and the two ends of the supporting rod are respectively connected with the two ends of the cross rod, so as to ensure the stability and reliability of the overall structure.

[0010] Furthermore, in the jig for tray baking, a plurality of evenly distributed connecting blocks are provided between the parallel vertical bars in the vertical direction, and a plurality of evenly distributed round holes are provided at both ends of the horizontal bar, and the round holes are adapted to fit the round hole pins.

[0011] In the utility model, a plurality of evenly distributed connecting blocks are arranged between the two groups of parallel vertical bars, and a plurality of evenly distributed round holes are arranged at both ends of the two upper cross bars. The size-compatible railings and the cross bars are fixed by matching the round holes and the round hole pins, and the bottom bars are clamped on different connecting blocks to realize the placement of carriers of different sizes.

[0012] Furthermore, in the jig for tray baking, a handle is provided in the middle of the crossbar.

[0013] In the utility model, the overall movement is facilitated by the handles arranged at the middle parts of the two upper cross bars.

[0014] Furthermore, in the jig for tray baking, the first rectangular groove and the second rectangular groove are of the same size and correspond one to one along the vertical direction.

[0015] Furthermore, in the jig for tray baking, both ends of the bottom rod are provided with snap-in grooves, and the snap-in grooves are adapted to the connecting blocks.

[0016] In the utility model, the initial height of the tray to be baked is changed by adjusting the position of the connecting block fixed by the clamping groove, so as to match the size of the compatible railing to accommodate trays of different radii.

[0017] Furthermore, in the jig for tray baking, the bracket assembly and the railing assembly are both made of aluminum.

[0018] In the utility model, the bracket assembly and the railing assembly are made of aluminum material, which is light in weight and consistent with the outer material of the carrier plate. The carrier plate is in contact with the bracket assembly and the railing assembly, and there is no compatibility problem with the carrier plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a front view of the bracket assembly in the first embodiment of the utility model.

[0020] Figure 2 It is a top view of the bracket assembly in the first embodiment of the utility model.

[0021] Figure 3 It is a side view of the bracket assembly in the first embodiment of the utility model.

[0022] Figure 4 This is a schematic diagram of a size-compatible railing in the first embodiment of the present utility model.

[0023] Figure 5 It is a schematic diagram of the bottom rod in the first embodiment of the utility model.

[0024] Figure 6 This is a front view of the assembly of the bracket assembly and the railing assembly in the first embodiment of the utility model.

[0025] Figure 7 It is a top view of the assembly of the bracket assembly and the railing assembly in the first embodiment of the utility model.

[0026] Figure 8 It is a side view of the assembly of the bracket assembly and the railing assembly in the first embodiment of the utility model.

[0027] Reference numerals:

[0028] 1. Bracket assembly; 2. Railing assembly; 11. Fixed bracket; 12. Fixed rod; 13. Handle; 21. Size compatible railing; 22. Bottom rod; 100. Vertical rod; 101. Connecting block; 110. Cross rod; 111. Round hole; 120. Support rod; 211. Round hole pin; 212. First rectangular groove; 221. Snap-in groove; 222. Second rectangular groove. DETAILED DESCRIPTION

[0029] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The drawings provide embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing this embodiment is to make the disclosure of the present invention more thorough and comprehensive.

[0030] It should be noted that when an element is said to be "fixed with" another element, it can be directly on the other element or there can be a central element. When an element is said to be "connected to" another element, it can be directly connected to the other element or there can be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this utility model belongs. The terms used in the description of this utility model herein are only for the purpose of describing specific embodiments and are not intended to limit this utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items. Moreover, the various embodiments of this utility model, the features between embodiments, and the features of embodiments and embodiments can be freely combined on the premise of no obvious conflict and contradiction.

[0032] As Figures 1 to 3 shown, the bracket assembly 1 includes a fixed bracket 11 and a fixed rod 12. The two ends of the fixed rod 12 are respectively connected to the fixed bracket 11. The fixed bracket 11 includes a vertical rod 100, a horizontal rod 110, and a support rod 120. The structure of the fixed bracket 11 is in the shape of a lying "day" character, with a width of 388 mm and a height of 167.5 mm. The vertical rod 100 is two groups of parallel vertical rods 100 symmetrically arranged in the vertical direction. The horizontal rod 110 is four parallel horizontal rods 110 symmetrically arranged. The support rod 120 is four parallel support rods 120 symmetrically arranged. The two ends of the vertical rod 100 are respectively connected to the middle of the horizontal rod 110. The two ends of the support rod 120 are respectively connected to the two ends of the horizontal rod 110. There are three evenly distributed connecting blocks 102 between the two groups of parallel vertical rods 100. There are three evenly distributed round holes 111 at both ends of the two upper horizontal rods 110. The diameter of the round holes 111 is 5 mm. The distance from the innermost hole to the center of the horizontal rod 110 is 164 mm, the distance from the middle hole to the center of the horizontal rod 110 is 174 mm, and the distance from the outermost hole to the center of the horizontal rod 110 is 184 mm. There is a handle 13 in the middle of the two upper horizontal rods 110.

[0033] As Figure 4 and Figure 5 shown, the railing assembly 2 includes a dimension-compatible railing 21 and a bottom rod 22. The dimension-compatible rod 21 is 430 mm long, 20 mm thick, and 20 mm wide. There are round hole pins 211 with a diameter of 4 mm and a length of 20 mm left at the center of the area 10 mm away from the edges at both ends of the dimension-compatible rod 21. The round hole pins 211 are adapted to the round holes 111 for fixing on the horizontal rod 110. On the surface facing the inner side, starting from 20 mm away from both ends, there are a number of first rectangular grooves 212 with a width of 10 mm and a depth of 15 mm at intervals of 10 mm.

[0034] Both ends of the bottom rod 22 are provided with clamping grooves 221, which are adapted to the connecting blocks 102. The size of the bottom rod 22 is 410 mm long, 20 mm thick, and 20 mm wide. There are a number of second rectangular grooves 222 with a width of 10 mm and a depth of 15 mm at intervals of 10 mm on the bottom rod.

[0035] As Figures 6 to 8As shown, the fixture includes: a bracket assembly 1 and a railing assembly 2, and the railing assembly 2 is correspondingly installed on the bracket assembly 1, and the two ends of the size-compatible railing 21 are respectively adapted and installed with two cross bars 110 through round hole pins 211 and round holes 111. If a relatively large-sized carrier plate is required to be placed, the installation position of the size-compatible railing 21 is far away from the handle. If a relatively small-sized carrier plate is required to be placed, the installation position of the size-compatible railing 21 is close to the handle 13.

[0036] The two ends of the bottom rod 22 are respectively adapted and installed with the connecting blocks 102 of the two sets of parallel vertical rods 100 through the snap-in grooves 221. The installation position of the bottom rod 22 is selected according to the radius of the carrier. If a relatively large-sized carrier is to be placed, the bottom rod 22 is installed close to the ground. If a relatively small-sized carrier is to be placed, the bottom rod 22 is installed away from the ground.

[0037] In the utility model, the railing assembly 2 is correspondingly installed on the bracket assembly 1, and then the tray to be baked is placed in the second rectangular groove 222. The first rectangular groove 212 and the second rectangular groove 222 are of the same size and correspond one to one in the vertical direction. Therefore, the tray to be baked will also be stuck in the first rectangular groove 212. After the tray to be baked is installed, the handle 13 can be used to move the fixture in the baking oven. A certain interval is maintained between the placed trays so that water vapor can be more easily dissipated during baking. Compared with conventional stacking baking, the use of this fixture can achieve more thorough drying. Under the same target requirements, the baking time can be reduced, the production efficiency can be improved, and it is ensured that the trays baked each time have the same properties.

[0038] The support assembly 1 and the railing assembly 2 are made of aluminum, which is light in weight and consistent with the outer material of the carrier. The carrier is in contact with the support assembly 1 and the railing assembly 2, and there is no compatibility problem with the carrier.

[0039] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0040] The above-mentioned embodiments only express the implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A fixture for tray baking, characterized in that: It comprises a bracket assembly and a railing assembly, wherein the bracket assembly comprises a fixed bracket and a fixed rod, the two ends of the fixed rod are respectively connected to the fixed bracket, the railing assembly comprises a size-compatible railing and a bottom rod, the two ends of the size-compatible railing are fixedly connected to the upper two ends of the fixed bracket through round hole pins, one side of the size-compatible railing is provided with a plurality of evenly distributed first rectangular grooves, the bottom rod is provided below the size-compatible railing, the bottom rod is fixed to the fixed bracket, and the bottom rod is provided with a plurality of evenly distributed second rectangular grooves; The first rectangular groove and the second rectangular groove are used to accommodate the carrier trays, so that a relative interval is formed between the carrier trays to be baked.

2. The jig for tray baking according to claim 1, characterized in that: The fixed bracket includes vertical rods, cross rods and support rods. The vertical rods are two groups of parallel vertical rods symmetrically arranged in the vertical direction, the cross rods are four parallel cross rods symmetrically arranged, and the support rods are four parallel support rods symmetrically arranged. The two ends of the vertical rods are respectively connected to the middle of the cross rods, and the two ends of the support rods are respectively connected to the two ends of the cross rods.

3. The jig for tray baking according to claim 2, characterized in that: A plurality of evenly distributed connecting blocks are arranged between the parallel vertical bars along the vertical direction, and a plurality of evenly distributed round holes are arranged at both ends of the horizontal bar, and the round holes are adapted to the round hole pins.

4. The jig for tray baking according to claim 2, characterized in that: A handle is provided in the middle of the cross bar.

5. The jig for tray baking according to claim 1, characterized in that: The first rectangular groove and the second rectangular groove have the same size and correspond one to one along the vertical direction.

6. The jig for tray baking according to claim 3, characterized in that: The two ends of the bottom rod are provided with clamping grooves, and the clamping grooves are adapted to the connecting blocks.

7. The jig for tray baking according to claim 1, characterized in that: The bracket assembly and the railing assembly are both made of aluminum.

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