Full-automatic high-speed indium coating device for inner side of rotary target material

Abstract

The utility model relates to the technical field of target metallization, and discloses a full-automatic high-speed indium coating device for the inner side of a rotary target, which comprises a base and a driving assembly, the top of the base is fixedly connected with a cylinder, the inside of the cylinder is rotatably connected with a constant-temperature heating box, and the inside of the constant-temperature heating box is detachable. The base is connected with the rotating target material, the two ends of the rotating target material extend to the outside of the cylinder, the top of the base is fixedly connected with a vertical plate, one side of the vertical plate is rotationally connected with a first electric telescopic rod, the telescopic end of the first electric telescopic rod is fixedly connected with a high-pressure spray head, and the driving assembly is arranged in the cylinder. The rotating shaft drives the gear to rotate, the gear drives the gear ring to rotate, and the gear ring drives the heating box to rotate, so that the rotating target material can be uniformly heated, and subsequent indium coating work is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of target metallization, in particular to a device for fully automatically and quickly coating indium on the inner side of a rotating target. Background Art

[0002] There are various types of target tubes, including metal tubes (molybdenum target tubes, tungsten target tubes, aluminum target tubes) and ceramic tubes (ITO target materials, alumina target materials, silicon carbide target materials, etc.). Since the target tube and the liner tube are made of different materials, the target tube and the solder are made of different materials. If the wettability of the target tube and the solder is not good enough, the solder may fall off easily, resulting in poor conductivity and thermal conductivity of the target during use, and even cracking of the target. The current method for metallizing the target tube is to use a manual handheld ultrasonic indium coating machine head to coat the indium, which results in uneven indium coating thickness, high labor intensity for workers, and high proficiency requirements for workers.

[0003] Chinese patent CN208791766U discloses a self-controlled target metallization device, which belongs to the target metallization technology field. The utility model includes a fixed base and a support frame arranged above the fixed base, an elastic sleeve is fixedly installed on the support frame, a vibrating rod is installed in the elastic sleeve, an indium coating head is installed at the end of the vibrating rod, a mobile platform is provided on the fixed base, a heating platform is fixed above the mobile platform, the target material is arranged on the heating platform, the mobile platform moves under the drive of the motor, a pressure sensor is provided at the top of the elastic sleeve, the pressure sensor and the motor are connected to the PLC controller, the device can stably control the target metallization process, reduce the dependence of metallization on the number of operators' operations, and reduce the labor intensity of operators; through the PLC controller, pressure sensor and alarm, ensure that the pressure value of the indium coating head is within a certain range, thereby ensuring the consistency of metallization thickness.

[0004] The device mainly starts the ultrasonic indium coating machine, starts the X-axis motor 10 and the Y-axis motor 13 at the same time, sets the moving speed to 8 mm / s, and performs the indium coating operation. However, the device does not perform dust removal on the inside of the rotating target before coating indium, which makes it easy to be affected by impurities during indium coating, thereby affecting the quality of the produced products. Therefore, we propose a device for fully automatic high-speed indium coating on the inside of a rotating target. Utility Model Content

[0005] The purpose of the utility model is to provide a device for fully automatic high-speed indium coating on the inner side of a rotating target material in order to solve the above problems, thereby solving the problems mentioned in the background technology.

[0006] In order to solve the above problems, the utility model provides a technical solution:

[0007] A device for fully automatic high-speed indium coating on the inside of a rotating target, comprising a base and a drive assembly, wherein the top of the base is fixedly connected to a cylinder, the inside of the cylinder is rotatably connected to a heating box, the inside of the heating box is detachably connected to a rotating target, both ends of the rotating target extend to the outside of the cylinder, the top of the base is fixedly connected to a vertical plate, one side of the vertical plate is rotatably connected to an electric telescopic rod, the telescopic end of the electric telescopic rod is fixedly connected to a high-pressure nozzle, and the drive assembly is arranged inside the cylinder.

[0008] As a preferred solution of the utility model, a rotating shaft is rotatably connected to one side of the vertical plate and located below the electric telescopic rod one, and a motor is fixedly connected to the side of the vertical plate away from the electric telescopic rod one, and the output end of the motor extends to the interior of the vertical plate and is fixedly connected to one end of the rotating shaft.

[0009] As a preferred solution of the utility model, the driving assembly includes a gear ring, which is fixedly mounted on the outer wall of the heating box, and a gear is fixedly connected to one end of the rotating shaft away from the motor, and the gear is meshingly connected to the gear ring.

[0010] As a preferred solution of the utility model, the outer wall of the rotating shaft is fixedly connected with a second pulley, the outer wall of the electric telescopic rod one is fixedly connected with a first pulley, and the first pulley is connected to the second pulley via a belt.

[0011] As a preferred solution of the utility model, the top of the base is fixedly connected to an indium box, the top of the base is fixedly connected to a water pump, the input end of the water pump extends to the interior of the indium box, the output end of the water pump is fixedly connected to a telescopic tube, and the end of the telescopic tube away from the water pump extends to the interior of the high-pressure nozzle.

[0012] As a preferred solution of the utility model, the top of the base is slidably connected to a fixed seat, the top of the fixed seat is fixedly connected to a vertical rod, one side of the vertical rod is fixedly connected to an electric telescopic rod 2, the telescopic end of the electric telescopic rod 2 is fixedly connected to a suction nozzle, the top of the fixed seat is fixedly connected to a bellows, the interior of the bellows is fixedly connected to a filter, the top of the fixed seat is fixedly connected to a fan, the output end of the fan extends to the interior of the bellows, one side of the bellows is fixedly connected to a discharge pipe, the end of the discharge pipe away from the bellows is fixedly connected to a hose, and the end of the hose away from the discharge pipe extends to the interior of the suction nozzle.

[0013] The beneficial effects of the utility model are as follows: the motor drives the rotating shaft to rotate, the rotating shaft drives the gear to rotate, the gear drives the gear ring to rotate, and the gear ring drives the heating box to rotate, so that the rotating target material can be heated evenly, which is convenient for subsequent work; the rotating shaft drives the second pulley to rotate, the second pulley drives the first pulley to rotate, and the first pulley drives the electric telescopic rod to rotate, so that the high-pressure nozzle can evenly coat the inside of the rotating target material with indium; the fan, the bellows, the hose and the suction nozzle are used to suck dust from the inside of the rotating target material, so as to avoid the influence of impurities during the indium coating process, thereby affecting the quality of the produced products. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] For ease of explanation, the present invention is described in detail by the following specific implementations and drawings.

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 3 This utility model Figure 2 Enlarged view of point A in the middle.

[0018] In the figure: 1. base; 2. cylinder; 3. heating box; 4. vertical plate; 5. electric telescopic rod 1; 6. high-pressure nozzle; 7. indium box; 8. water pump; 9. telescopic tube; 10. fixed base; 11. vertical rod; 12. hose; 13. suction nozzle; 14. discharge pipe; 15. filter; 16. fan; 17. bellows; 18. drive assembly; 181. gear ring; 182. gear; 183. pulley 1; 184. pulley 2; 19. motor; 20. shaft; 21. electric telescopic rod 2. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0020] Example

[0021] See also Figure 1-Figure 3The utility model provides a technical solution: a device for fully automatic high-speed indium coating on the inside of a rotating target, comprising a base 1 and a driving assembly 18, a cylinder 2 is fixedly connected to the top of the base 1, a heating box 3 is rotatably connected to the inside of the cylinder 2, a rotating target is detachably connected to the inside of the heating box 3, both ends of the rotating target extend to the outside of the cylinder 2, a vertical plate 4 is fixedly connected to the top of the base 1, and an electric telescopic rod 5 is rotatably connected to one side of the vertical plate 4. It should be noted that the model of the electric telescopic rod 5 is YNT-03, and the telescopic The end is fixedly connected with a high-pressure nozzle 6, the driving assembly 18 is arranged inside the cylinder 2, one side of the vertical plate 4 and located below the electric telescopic rod 5 is rotatably connected with a rotating shaft 20, and the side of the vertical plate 4 away from the electric telescopic rod 5 is fixedly connected with a motor 19. It should be noted that the model of the motor 19 is Y80M1-2, and the output end of the motor 19 extends to the inside of the vertical plate 4 and is fixedly connected to one end of the rotating shaft 20. The driving assembly 18 includes a gear ring 181, which is fixedly mounted on the outer wall of the heating box 3, and the end of the rotating shaft 20 away from the motor 19 is fixed. The rotating shaft 20 is driven by the motor 19 to rotate, the rotating shaft 20 drives the gear 182 to rotate, the gear 182 drives the gear ring 181 to rotate, and the gear ring 181 drives the heating box 3 to rotate, so that the rotating target can be heated evenly, which is convenient for subsequent indium coating work; the outer wall of the rotating shaft 20 is fixedly connected with a pulley 184, and the outer wall of the electric telescopic rod 15 is fixedly connected with a pulley 183, the pulley 183 is connected to the pulley 184 through a belt, and the pulley is driven by the rotating shaft 20 The second pulley 184 rotates, the pulley 2 184 drives the pulley 1 183 to rotate, and the pulley 1 183 drives the electric telescopic rod 1 5 to rotate, so that the high-pressure nozzle 6 can evenly coat the inside of the rotating target with indium; the top of the base 1 is fixedly connected to an indium box 7, and the top of the base 1 is fixedly connected to a water pump 8. It should be noted that the model of the water pump 8 is DYCDW2-30, and the input end of the water pump 8 extends to the inside of the indium box 7, and the output end of the water pump 8 is fixedly connected to a telescopic tube 9, and the end of the telescopic tube 9 away from the water pump 8 extends to the inside of the high-pressure nozzle 6.

[0022] Furthermore, in order to improve the yield rate of the rotating target after indium coating, a fixed seat 10 is slidably connected to the top of the base 1, and a vertical rod 11 is fixedly connected to the top of the fixed seat 10. An electric telescopic rod 21 is fixedly connected to one side of the vertical rod 11. It should be noted that the model of the electric telescopic rod 21 is YNT-03, and the telescopic end of the electric telescopic rod 21 is fixedly connected to a suction nozzle 13. A bellows 17 is fixedly connected to the top of the fixed seat 10, and a filter 15 is fixedly connected to the inside of the bellows 17. A fan 16 is fixedly connected to the top of the fixed seat 10, and the output end of the fan 16 extends to the inside of the bellows 17. A discharge pipe 14 is fixedly connected to one side of the bellows 17, and a hose 12 is fixedly connected to one end of the discharge pipe 14 away from the bellows 17. The end of the hose 12 away from the discharge pipe 14 extends to the inside of the suction nozzle 13. The inside of the rotating target is dusted by the fan 16, the bellows 17, the hose 12 and the suction nozzle 13 to avoid being affected by impurities during the indium coating process, thereby affecting the quality of the produced products.

[0023] In summary, the staff first inserts the rotating target into the heating box 3, then starts the power supply, and the fan 16 sucks air into the inside of the wind box 17. At the same time, under the action of the exhaust pipe 14 and the hose 12, the suction nozzle 13 can suck the dust inside the rotating target. At the same time, the electric telescopic rod 21 drives the suction nozzle 13 to move left and right to achieve dust removal inside the rotating target. Then the motor 19 drives the shaft 20 to rotate, the shaft 20 drives the gear 182 to rotate, the gear 182 drives the gear ring 181 to rotate, and the gear ring 181 drives the heating. The hot box 3 rotates so that the rotating target can be heated evenly, which is convenient for the subsequent indium coating. When the rotating target is heated evenly, the water pump 8 extracts indium from the indium box 7 and transports it to the inside of the high-pressure nozzle 6 through the telescopic tube 9. Under the extension of the electric telescopic rod 15, the high-pressure nozzle 6 can coat the inner wall of the rotating target with indium. At the same time, the rotating shaft 20 drives the pulley 2 184 to rotate, the pulley 2 184 drives the pulley 1 183 to rotate, and the pulley 1 183 drives the electric telescopic rod 15 to rotate, so that the inside of the rotating target can be coated with indium evenly. Although the embodiments of the utility model have been shown and described, it can be understood by ordinary technicians in this field that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the utility model, and the scope of the utility model is defined by the attached claims and their equivalents.

Claims

1. A device for fully automatic high-speed indium coating on the inner side of a rotating target, characterized in that: The invention comprises a base (1) and a driving assembly (18), wherein the top of the base (1) is fixedly connected to a cylinder (2), the interior of the cylinder (2) is rotatably connected to a heating box (3), the interior of the heating box (3) is detachably connected to a rotating target, both ends of the rotating target extend to the outside of the cylinder (2), the top of the base (1) is fixedly connected to a vertical plate (4), one side of the vertical plate (4) is rotatably connected to an electric telescopic rod (5), the telescopic end of the electric telescopic rod (5) is fixedly connected to a high-pressure nozzle (6), and the driving assembly (18) is arranged inside the cylinder (2).

2. The device for fully automatic high-speed indium coating on the inner side of a rotating target according to claim 1, characterized in that: A rotating shaft (20) is rotatably connected to one side of the vertical plate (4) and located below the electric telescopic rod (5); a motor (19) is fixedly connected to the side of the vertical plate (4) away from the electric telescopic rod (5); an output end of the motor (19) extends to the interior of the vertical plate (4) and is fixedly connected to one end of the rotating shaft (20).

3. The device for fully automatic high-speed indium coating on the inner side of a rotating target according to claim 2, characterized in that: The driving assembly (18) comprises a ring gear (181), wherein the ring gear (181) is fixedly mounted on the outer wall of the heating box (3), and a gear (182) is fixedly connected to one end of the rotating shaft (20) away from the motor (19), and the gear (182) is meshingly connected to the ring gear (181).

4. The device for fully automatic high-speed indium coating on the inner side of a rotating target according to claim 2, characterized in that: The outer wall of the rotating shaft (20) is fixedly connected with a second pulley (184), and the outer wall of the electric telescopic rod (5) is fixedly connected with a first pulley (183), and the first pulley (183) is connected to the second pulley (184) via a belt.

5. The device for fully automatic high-speed indium coating on the inner side of a rotating target according to claim 1, characterized in that: The top of the base (1) is fixedly connected to an indium box (7), the top of the base (1) is fixedly connected to a water pump (8), the input end of the water pump (8) extends to the interior of the indium box (7), the output end of the water pump (8) is fixedly connected to a telescopic tube (9), and the end of the telescopic tube (9) away from the water pump (8) extends to the interior of the high-pressure nozzle (6).

6. The device for fully automatic high-speed indium coating on the inner side of a rotating target according to claim 1, characterized in that: The top of the base (1) is slidably connected to a fixed seat (10), the top of the fixed seat (10) is fixedly connected to a vertical rod (11), one side of the vertical rod (11) is fixedly connected to an electric telescopic rod 2 (21), the telescopic end of the electric telescopic rod 2 (21) is fixedly connected to a suction nozzle (13), the top of the fixed seat (10) is fixedly connected to a bellows (17), the interior of the bellows (17) is fixedly connected to a filter screen (15), the top of the fixed seat (10) is fixedly connected to a fan (16), the output end of the fan (16) extends to the interior of the bellows (17), one side of the bellows (17) is fixedly connected to a discharge pipe (14), one end of the discharge pipe (14) away from the bellows (17) is fixedly connected to a hose (12), and one end of the hose (12) away from the discharge pipe (14) extends to the interior of the suction nozzle (13).

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