Single crystal furnace seed crystal stabilizing device and single crystal furnace
By designing a stabilizing device for fixing plates and telescopic mechanisms in a single crystal furnace, the problem of crystal swing when the secondary chamber is rotated and returned to position is solved, and the automatic stability of crystals is achieved, reducing labor intensity and improving working efficiency.
Patent Information
- Application Number
- CN202421338729.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-12
- Publication Date
- 2025-02-28
- Estimated Expiration
- 2034-06-12
AI Technical Summary
In a single crystal furnace, when the secondary chamber rotates and returns to position, the draw rope, heavy hammer and seed crystal will swing, resulting in manual stability, high labor intensity and time-consuming and labor-intensive.
A single crystal furnace crystal stabilization device is designed, including a fixing plate and a telescopic mechanism, which is in contact with the sub-room heavy hammer, and the telescopic mechanism drives the fixing plate to extend into the sub-room and contact with the heavy hammer, and stabilizes the heavy hammer and crystal.
It realizes automatic stability of the crystal, reduces labor intensity, improves work efficiency, and saves manpower and working hours.
Smart Images
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Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a single crystal furnace seed crystal stabilizing device and a single crystal furnace. Background Art
[0002] In the single crystal furnace, a pull rope is connected to the top of the weight, and a chuck for clamping the single crystal seed crystal is provided at the bottom of the weight. In the current direct-pull single crystal process, multiple single crystals are pulled in a single furnace by repeatedly adding silicon materials. That is, after one pulling is completed, a second feeding is performed, and then the crystal is pulled. After the second feeding through the feeding cylinder, the auxiliary chamber needs to be rotated back to its position. Since the weight is connected by a pull rope, which is mostly a tungsten wire rope, the rotation of the auxiliary chamber will cause the pull rope, the weight and the seed crystal to swing. In the prior art, each time the auxiliary chamber is returned to its position, it is necessary to manually stabilize the swing of the seed crystal, which is labor-intensive, time-consuming and labor-intensive. Utility Model Content
[0003] The purpose of the utility model is to overcome the above technical problems and provide a single crystal furnace seed crystal stabilization device and a single crystal furnace, which can realize automatic stabilization of the seed crystal, have a high degree of automation, and save manpower and working hours.
[0004] To achieve the above objectives, this application provides the following technical solutions:
[0005] A single crystal furnace seed crystal stabilization device, comprising:
[0006] A fixing plate, the fixing plate being adapted to contact with a weight in the auxiliary chamber;
[0007] A telescopic mechanism, a telescopic rod of the telescopic mechanism is connected to the fixed plate, the telescopic mechanism is arranged in the observation window of the auxiliary chamber, and the telescopic mechanism drives the fixed plate to extend into the auxiliary chamber and contact the heavy hammer.
[0008] Optionally, an observation window is provided on one side of the secondary chamber, and the fixed plate and the telescopic mechanism are correspondingly arranged as a group.
[0009] Optionally, observation windows are respectively provided on both sides of the auxiliary chamber, and the fixed plate and the telescopic mechanism are correspondingly arranged in one group or two groups.
[0010] Optionally, the cross-section of the weight is circular, and the fixing plate is an arc-shaped plate matched with the outer circumference of the weight.
[0011] Optionally, the fixing plate contacts the middle or lower axial position of the weight.
[0012] Optionally, the telescopic mechanism is a telescopic air cylinder or a telescopic hydraulic cylinder.
[0013] Optionally, the telescopic rod of the telescopic mechanism is connected to the middle part of the fixed plate.
[0014] A single crystal furnace comprises the single crystal furnace seed crystal stabilizing device as described above.
[0015] In summary, the utility model has at least the following technical effects and advantages: the present application replaces manual labor with a stabilizing device, thereby realizing the switching of the stabilization of the seed crystal from manual to that completed by a single crystal furnace, reducing labor intensity, improving work efficiency, and saving manpower and working hours. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.
[0017] Figure 1 This is a schematic diagram of the structure of the single crystal furnace seed crystal stabilization device in the first embodiment of the utility model;
[0018] Figure 2 This is a schematic diagram of the structure of the fixed plate in contact with the weight in the first embodiment of the utility model;
[0019] Figure 3 This is a schematic diagram of the structure of the single crystal furnace seed crystal stabilization device in the second embodiment of the utility model;
[0020] Figure 4 It is a schematic diagram of the structure of the contact between the fixed plate and the heavy hammer in the second embodiment of the present utility model.
[0021] In the figure:
[0022] 01. Sub-chamber; 011. Observation window; 02. Heavy hammer; 03. Pull rope; 04. Seed crystal; 1. Fixed plate; 2. Telescopic mechanism; 3. Telescopic rod; 4. Support plate. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0024] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0026] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0027] Example 1
[0028] This embodiment provides a single crystal furnace seed crystal stabilization device, such as Figure 1 and Figure 2 As shown, it includes a fixed plate 1 and a telescopic mechanism 2. The fixed plate 1 is suitable for contacting a weight 02 in the auxiliary chamber 01. A pull rope 03 is connected to the top of the weight 02, and a clamping head for clamping a seed crystal 04 is provided at the bottom. The telescopic rod 3 of the telescopic mechanism 2 is connected to the fixed plate 1. The telescopic mechanism 2 is arranged in the observation window 011 of the auxiliary chamber 01. The telescopic mechanism 2 drives the fixed plate 1 to extend into the auxiliary chamber 01 and contact the weight 02.
[0029] In this embodiment, the fixed plate 1 is in contact with the heavy hammer 02 for a certain period of time, so as to stabilize the heavy hammer 02 and the seed crystal 04 clamped by the heavy hammer 02. After a period of stabilization, the telescopic mechanism 2 drives the fixed plate 1 to retract without affecting the subsequent process.
[0030] Optionally, the telescopic mechanism 2 is disposed in the window hole of the observation window 011 through a support plate 4 , the support plate 4 is installed in the window hole of the observation window 011 along the axial direction, and the telescopic mechanism 2 is installed on the support plate 4 .
[0031] In this embodiment, an observation window 011 is provided on one side of the auxiliary chamber 01, and the fixed plate 1 and the telescopic mechanism 2 are correspondingly arranged as a group.
[0032] Optionally, the cross section of the weight 02 is circular, and the fixing plate 1 is an arc-shaped plate adapted to the outer peripheral surface of the weight 02. Preferably, the edges of the fixing plate 1 are rounded. The fixing plate 1 is adapted to the outer peripheral surface of the weight 02, and has high stability and efficiency. In other embodiments, the fixing plate 1 can also be a straight plate or a corrugated plate, etc., as long as the side of the fixing plate 1 can contact the outer peripheral surface of the weight 02.
[0033] Optionally, the fixing plate 1 contacts the middle or lower axial position of the weight 02. The contact portion between the fixing plate 1 and the weight 02 is close to the seed crystal 04 but at a certain distance from the seed crystal 04, so that the fixing plate 1 can maintain a certain stability while avoiding contact with the seed crystal 04 to damage it.
[0034] Optionally, the telescopic mechanism 2 is a telescopic cylinder or a telescopic hydraulic cylinder. In this embodiment, the telescopic mechanism 2 adopts a telescopic cylinder.
[0035] Optionally, the telescopic rod 3 of the telescopic mechanism 2 is connected to the middle part of the fixed plate 1, so that the fixed plate 1 is evenly stressed when in contact with the weight 02, thereby improving the stabilization efficiency.
[0036] Optionally, the fixing plate 1 or the contact surface between the fixing plate 1 and the weight 02 is made of a high temperature resistant material, for example, the same stainless steel material as the single crystal furnace body can be used.
[0037] This embodiment also provides a single crystal furnace, comprising the single crystal furnace seed crystal stabilization device as described above.
[0038] The working process of this embodiment is as follows: after the feeding is completed and before the auxiliary chamber 01 is purified, the weight 02 and the seed crystal 04 descend to the position of the observation window 011 of the auxiliary chamber 01, and the telescopic mechanism 2 drives the telescopic rod 3 and the fixed plate 1 to extend toward the direction of the weight 02. The weight 02 is in contact with the fixed plate 1 during the swinging process and the extension process. The fixed plate 1 stops after extending a certain distance, for example, it is pushed 110mm toward the direction of the weight 02. The fixed plate 1 stabilizes the weight 02 for a certain time, for example, 1-2min, and slowly retracts the fixed plate 1, and then the subsequent purification process of the auxiliary chamber 01 is carried out.
[0039] Example 2
[0040] like Figure 3 and Figure 4As shown, the difference between this embodiment and embodiment 1 is that observation windows 011 are respectively provided on both sides of the auxiliary chamber 01, and the fixed plate 1 and the telescopic mechanism 2 are correspondingly set as two groups. Fixed plates 1 are provided on both sides of the heavy hammer 02, and the stability efficiency is high. The two fixed plates 1 can be extended simultaneously or successively, and the specific action can be determined according to the actual application scenario. In other embodiments, the fixed plate 1 and the telescopic mechanism 2 can also be set as a group and set in one of the observation windows 011.
[0041] In summary, the present application replaces manual labor with a stabilizing device, thereby realizing the switching of seed crystal stabilization from manual work to single crystal furnace work, reducing labor intensity, improving work efficiency, and saving manpower and working hours.
[0042] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A single crystal furnace seed crystal stabilization device, characterized in that: include: A fixing plate, the fixing plate being adapted to contact with a weight in the auxiliary chamber; A telescopic mechanism, a telescopic rod of the telescopic mechanism is connected to the fixed plate, the telescopic mechanism is arranged in the observation window of the auxiliary chamber, and the telescopic mechanism drives the fixed plate to extend into the auxiliary chamber and contact the heavy hammer.
2. The single crystal furnace seed crystal stabilization device according to claim 1, characterized in that: An observation window is provided on one side of the auxiliary chamber, and the fixing plate and the telescopic mechanism are correspondingly arranged as a group.
3. The single crystal furnace seed crystal stabilization device according to claim 1, characterized in that: Observation windows are respectively arranged on both sides of the auxiliary chamber, and the fixing plate and the telescopic mechanism are correspondingly arranged in one group or two groups.
4. The single crystal furnace seed crystal stabilization device according to claim 1, characterized in that: The cross section of the weight is circular, and the fixing plate is an arc-shaped plate matched with the outer peripheral surface of the weight.
5. The single crystal furnace seed crystal stabilization device according to claim 1, characterized in that: The fixing plate contacts the middle or lower portion of the heavy hammer in the axial direction.
6. The single crystal furnace seed crystal stabilization device according to claim 1, characterized in that: The telescopic mechanism is a telescopic air cylinder or a telescopic hydraulic cylinder.
7. The single crystal furnace seed crystal stabilization device according to claim 1, characterized in that: The telescopic rod of the telescopic mechanism is connected to the middle part of the fixing plate.
8. A single crystal furnace, characterized in that: It comprises a single crystal furnace seed crystal stabilization device as described in any one of claims 1-7.