The invention belongs to the technical field of
semiconductor manufacturing and testing, and discloses a matching evaluation method,
system and device of a WAT testing
machine and a storage medium. The method comprises the following steps: acquiring
test data of a target and a reference
machine, generating comparability conditions based on information such as products and stations to perform data alignment and preprocessing, and outputting an alignment
data set and a quality index; calculating a multi-dimensional
feature vector including distribution, risk, trend and
wafer spatial features for each
test item based on the alignment data; the
feature vector and the alignment quality index are fused, a difference
score is calculated, and evaluation is carried out in combination with a self-adaptive threshold value dynamically generated based on historical data and parameter importance; and finally, outputting a difference parameter
list and an
evaluation result, simultaneously introducing an AI model to carry out comprehensive judgment, and continuously optimizing through a feedback
closed loop. Through the method,
automation, quantification and intelligentization of
machine matching evaluation are realized, and evaluation efficiency, consistency and accuracy are remarkably improved.