Modularized corrosion-resistant safe high-purity special gas supply cabinet

Abstract

The utility model relates to the technical field of gas supply cabinets, and discloses a modularized corrosion-resistant safe high-purity special gas supply cabinet which comprises a main body mechanism and a protection mechanism, the protection mechanism is located in front of the main body mechanism, and the main body mechanism comprises a gas supply cabinet body, a first placing disc, a second placing disc, a gas cylinder and an electric push rod. The first containing disc is fixedly installed in the gas supply cabinet body, the second containing disc is fixedly installed in the gas supply cabinet body, the second containing disc and the first containing disc are the same in structure, and the gas cylinder is movably installed in the first containing disc. According to the modularized corrosion-resistant safe high-purity special gas supply cabinet, by installing the main body mechanism, when the gas supply cabinet body carries out gas supply operation of special gas, a worker can rapidly replace a gas cylinder through operation, continuous gas supply of the special gas cannot be affected, and the practicability of the gas supply cabinet body is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas supply cabinets, in particular to a modular corrosion-resistant, safe, high-purity special gas supply cabinet. Background Art

[0002] Special gas supply cabinets are also called special gas cabinets. They are mainly used to supply special gases, such as flammable, explosive, highly toxic and other special gases, and are mainly used in the emerging industries of semiconductors and LEDs.

[0003] The existing patent document with technical disclosure number CN219809772U provides a gas monitoring and early warning device for an explosion-proof special gas supply cabinet. The utility model sets a sealing cover, which is bonded to the inside of the cabinet. After a leak occurs in the gas conveying pipeline, the gas directly passes through the gas detector without the problem of missed detection, thereby improving the accuracy of gas leakage detection and improving safety.

[0004] However, the existing special gas supply cabinets are not convenient for workers to quickly replace gas cylinders when in use. When the gas inside the gas cylinder is used up, the staff needs to shut down the equipment to replace the gas cylinder, which is not convenient for achieving continuous gas supply operations of special gases, affecting the normal progress of the process and having poor practicality. Utility Model Content

[0005] 1. Technical issues to be resolved

[0006] The utility model aims to provide a modular corrosion-resistant, safe, high-purity special gas supply cabinet to solve the problem in the above-mentioned background technology that it is inconvenient for staff to quickly replace gas cylinders when using the existing special gas supply cabinets.

[0007] (II) Technical solution

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a modular corrosion-resistant, safe, high-purity special gas supply cabinet, comprising a main body and a protective mechanism, wherein the protective mechanism is located in front of the main body, the main body comprises a gas supply cabinet body, a first placement plate, a second placement plate, a gas cylinder and an electric push rod, wherein the first placement plate is fixedly mounted inside the gas supply cabinet body, the second placement plate is fixedly mounted inside the gas supply cabinet body, the second placement plate has the same structure as the first placement plate, the gas cylinder is movably mounted inside the first placement plate, and the electric push rod is fixedly mounted on the inner end of the first placement plate;

[0009] The main structure also includes a pushing rod, a positioning plate, a conveying box, a first conduit and a second conduit. The pushing rod is fixedly mounted on the transmission end of the inner end of the electric push rod, the positioning plate is fixedly mounted on the inner end of the pushing rod, the gas cylinder is located at the inner end of the positioning plate, the conveying box is fixedly mounted inside the gas supply cabinet body, the first conduit is fixedly mounted on the lower end of the conveying box, the first conduit is movably connected to the gas cylinder, the second conduit is fixedly mounted on the upper end of the conveying box, and the upper end of the second conduit extends to the outside of the gas supply cabinet body.

[0010] Preferably, the protective mechanism includes a corrosion-resistant coating and an explosion-proof baffle, the corrosion-resistant coating is fixedly arranged inside the gas supply cabinet body, and the explosion-proof baffle is fixedly installed on the inner end of the gas supply cabinet body.

[0011] Preferably, the protection mechanism further includes a sealing door plate and a controller, wherein the sealing door plate is movably mounted on the front end of the gas supply cabinet body, and the controller is fixedly mounted on the front end of the gas supply cabinet body.

[0012] Preferably, the protection mechanism further includes a temperature detection module and a cold air fan, the temperature detection module is fixedly installed at the front end of the conveying box, and the cold air fan is fixedly installed at the left end of the gas supply cabinet body.

[0013] Preferably, the protection mechanism also includes a one-way air guide pipe and an air washing box, the one-way air guide pipe is fixedly installed at the upper end of the left end of the air supply cabinet body, the air washing box is fixedly installed at the left end of the air supply cabinet body, and the lower end of the one-way air guide pipe is fixedly connected to the air washing box.

[0014] Preferably, the protection mechanism further comprises an agitator and a one-way exhaust pipe, wherein the agitator is fixedly mounted inside the air washing box, and the one-way exhaust pipe is fixedly mounted at the upper end of the air washing box.

[0015] Preferably, the protection mechanism further comprises a gas detection module and an audible and visual alarm, the gas detection module is fixedly mounted on the front end of the conveying box, and the audible and visual alarm is fixedly mounted on the upper end of the gas supply cabinet body.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] 1. The modular corrosion-resistant, safe, high-purity special gas supply cabinet, by installing the main body mechanism, enables the staff to quickly replace the gas cylinders through operation when the gas supply cabinet is performing the special gas supply operation, and will not affect the continuous gas supply of the special gas, thereby improving the practicality of the gas supply cabinet body;

[0018] 2. This modular corrosion-resistant, safe, high-purity special gas supply cabinet is equipped with a protective mechanism to ensure that when the gas supply cabinet body is in use, the design of the corrosion-resistant coating and the explosion-proof partition improves the structural strength of the gas supply cabinet body. The design of the temperature detection module and the gas detection module facilitates the automatic detection of the internal temperature and gas leakage of the gas supply cabinet body. The design of the gas washing box can purify the exhausted gas to avoid pollution to the surrounding environment caused by the leakage of special gases, thereby improving the safety and protection of the gas supply cabinet body. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the gas supply cabinet body of the utility model;

[0021] Figure 3 This is a schematic diagram of the three-dimensional structure of the air washing box of the utility model;

[0022] Figure 4 It is a schematic diagram of the enlarged structure of the local details of the first placement plate of the utility model.

[0023] In the figure: 1. Main body; 101. Gas supply cabinet body; 102. First placement plate; 103. Second placement plate; 104. Gas cylinder; 105. Electric push rod; 106. Push rod; 107. Positioning plate; 108. Delivery box; 109. First duct; 110. Second duct; 2. Protection mechanism; 201. Corrosion-resistant coating; 202. Explosion-proof partition; 203. Sealing door panel; 204. Controller; 205. Temperature detection module; 206. Cooling fan; 207. One-way air guide pipe; 208. Air washing box; 209. Agitator; 210. One-way exhaust pipe; 211. Gas detection module; 212. Sound and light alarm. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1 - Figure 4The utility model provides a technical solution: a modular corrosion-resistant, safe, high-purity special gas supply cabinet, comprising a main body mechanism 1 and a protective mechanism 2, the protective mechanism 2 is located in front of the main body mechanism 1, the main body mechanism 1 comprises a gas supply cabinet body 101, a first placement tray 102, a second placement tray 103, a gas cylinder 104 and an electric push rod 105, the first placement tray 102 is fixedly installed inside the gas supply cabinet body 101, the second placement tray 103 is fixedly installed inside the gas supply cabinet body 101, the second placement tray 103 has the same structure as the first placement tray 102, the gas cylinder 104 is movably installed inside the first placement tray 102, and the electric push rod 105 is fixedly installed at the inner end of the first placement tray 102;

[0026] The main mechanism 1 also includes a push rod 106, a positioning plate 107, a conveying box 108, a first conduit 109 and a second conduit 110. The push rod 106 is fixedly mounted on the transmission end of the inner end of the electric push rod 105, the positioning plate 107 is fixedly mounted on the inner end of the push rod 106, the gas cylinder 104 is located at the inner end of the positioning plate 107, the conveying box 108 is fixedly mounted inside the gas supply cabinet body 101, the first conduit 109 is fixedly mounted on the lower end of the conveying box 108, the first conduit 109 is movably connected to the gas cylinder 104, the second conduit 110 is fixedly mounted on the upper end of the conveying box 108, and the upper end of the second conduit 110 extends to the outside of the gas supply cabinet body 101. When the gas supply cabinet body 101 is performing a special gas supply operation, the special gas enters the first conduit through the gas cylinder 104. The gas cylinder 104 is put into the inner part of the conduit 109, and then enters the delivery box 108 through the first conduit 109, and finally realizes the gas supply operation through the second conduit 110. When the gas inside the gas cylinder 104 is almost exhausted, the staff will place a new gas cylinder 104 on the second placement tray 103, start the electric push rod 105 to push the positioning plate 107 to clamp and fix the new gas cylinder 104, and then connect the first conduit 109 corresponding to the second placement tray 103 with the new gas cylinder 104. After the connection is completed, the valve of the current first conduit 109 is opened to allow the special gas inside the new gas cylinder 104 to enter the delivery box 108 to ensure the continuous progress of the gas supply operation. At the same time, the valve of the first conduit 109 corresponding to the first placement tray 102 is closed, and the exhausted gas cylinder 104 can be removed for replacement.

[0027] The protection mechanism 2 includes a corrosion-resistant coating 201 and an explosion-proof partition 202. The corrosion-resistant coating 201 is fixedly arranged inside the gas supply cabinet body 101. The explosion-proof partition 202 is fixedly installed at the inner end of the gas supply cabinet body 101. The protection mechanism 2 also includes a sealing door plate 203 and a controller 204. The sealing door plate 203 is movably installed at the front end of the gas supply cabinet body 101. The controller 204 is fixedly installed at the front end of the gas supply cabinet body 101. The protection mechanism 2 also includes a temperature detection module 205 and a cold air fan 206. The temperature detection module 205 is fixedly installed at the conveying box 1 08, the cooling fan 206 is fixedly installed at the left end of the air supply cabinet body 101, the protection mechanism 2 also includes a one-way air guide pipe 207 and an air washing box 208, the one-way air guide pipe 207 is fixedly installed at the upper end of the left end of the air supply cabinet body 101, the air washing box 208 is fixedly installed at the left end of the air supply cabinet body 101, the lower end of the one-way air guide pipe 207 is fixedly connected to the air washing box 208, the protection mechanism 2 also includes a stirrer 209 and a one-way exhaust pipe 210, the stirrer 209 is fixedly installed inside the air washing box 208, the one-way exhaust pipe 210 is fixedly installed inside the air washing box 208, the protective mechanism 2 also includes a gas detection module 211 and an audible and visual alarm 212. The gas detection module 211 is fixedly installed at the front end of the conveying box 108, and the audible and visual alarm 212 is fixedly installed at the upper end of the gas supply cabinet body 101. During the use of the gas supply cabinet body 101, the temperature detection module 205 detects the internal temperature of the gas supply cabinet body 101 and uploads the data to the controller 204. When the internal temperature of the gas supply cabinet body 101 is too high, the cold air fan 206 works to input cold air to avoid the high temperature from affecting the special gas. The storage is affected, the saturated gas inside the gas supply cabinet body 101 enters the gas washing box 208 through the one-way air guide pipe 207, the agitator 209 works to make the gas and the washing liquid react fully, and the gas is purified. The purified gas is discharged through the one-way exhaust pipe 210 to avoid the pollution of the surrounding environment caused by gas leakage. The gas detection module 211 detects the gas inside the gas supply cabinet body 101. When a special gas leakage is detected inside the gas supply cabinet body 101, the sound and light alarm 212 works to sound an alarm to remind the staff to deal with it.

[0028] Working principle: When the gas supply cabinet body 101 is supplying special gases, the special gases enter the first conduit 109 through the gas cylinder 104, then enter the delivery box 108 through the first conduit 109, and finally realize the gas supply operation through the second conduit 110. During the use of the gas supply cabinet body 101, the temperature detection module 205 detects the internal temperature of the gas supply cabinet body 101 and uploads the data to the controller 204. When the internal temperature of the gas supply cabinet body 101 is too high, the cold air fan 206 works to input cold air to avoid the influence of excessive temperature on the special gases. The saturated gas inside the gas supply cabinet body 101 enters the washing box 208 through the one-way air guide 207. The agitator 209 works to make the gas fully react with the washing liquid to purify the gas. The purified gas is discharged through the one-way exhaust pipe 210 to avoid the pollution of the surrounding environment caused by gas leakage. The gas detection module 211 detects the gas inside the gas supply cabinet body 101. When a special gas leak is detected inside the gas supply cabinet body 101, the sound and light alarm 212 will sound an alarm to remind the staff to deal with it. When the gas inside the gas cylinder 104 is almost exhausted, the staff pulls the sealing door panel 203, places a new gas cylinder 104 on the second placement tray 103, starts the electric push rod 105 to push the positioning plate 107 to clamp the new gas cylinder 104, and then connects the first conduit 109 corresponding to the second placement tray 103 with the new gas cylinder 104. After the connection is completed, the valve of the current first conduit 109 is opened to allow the special gas inside the new gas cylinder 104 to enter the conveying box 108 to ensure the continuous progress of the gas supply operation. At the same time, the valve of the first conduit 109 corresponding to the first placement tray 102 is closed, and the exhausted gas cylinder 104 can be removed for replacement.

[0029] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Simple modifications or equivalent substitutions of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.

Claims

1. A modular corrosion-resistant, safe, high-purity special gas supply cabinet, comprising a main body (1) and a protection mechanism (2), characterized in that: The protection mechanism (2) is located in front of the main mechanism (1), and the main mechanism (1) comprises a gas supply cabinet body (101), a first placement plate (102), a second placement plate (103), a gas cylinder (104) and an electric push rod (105), wherein the first placement plate (102) is fixedly installed inside the gas supply cabinet body (101), the second placement plate (103) is fixedly installed inside the gas supply cabinet body (101), the second placement plate (103) has the same structure as the first placement plate (102), the gas cylinder (104) is movably installed inside the first placement plate (102), and the electric push rod (105) is fixedly installed at the inner end of the first placement plate (102); The main body mechanism (1) also includes a push rod (106), a positioning plate (107), a conveying box (108), a first conduit (109) and a second conduit (110), wherein the push rod (106) is fixedly mounted on the transmission end of the inner end of the electric push rod (105), the positioning plate (107) is fixedly mounted on the inner end of the push rod (106), the gas cylinder (104) is located at the inner end of the positioning plate (107), the conveying box (108) is fixedly mounted inside the gas supply cabinet body (101), the first conduit (109) is fixedly mounted on the lower end of the conveying box (108), the first conduit (109) is movably connected to the gas cylinder (104), the second conduit (110) is fixedly mounted on the upper end of the conveying box (108), and the upper end of the second conduit (110) extends to the outside of the gas supply cabinet body (101).

2. A modular corrosion-resistant, safe, high-purity special gas supply cabinet according to claim 1, characterized in that: The protection mechanism (2) comprises a corrosion-resistant coating (201) and an explosion-proof baffle (202); the corrosion-resistant coating (201) is fixedly arranged inside the gas supply cabinet body (101); and the explosion-proof baffle (202) is fixedly installed at the inner end of the gas supply cabinet body (101).

3. A modular corrosion-resistant, safe, high-purity special gas supply cabinet according to claim 2, characterized in that: The protection mechanism (2) further comprises a sealing door plate (203) and a controller (204); the sealing door plate (203) is movably mounted on the front end of the gas supply cabinet body (101); and the controller (204) is fixedly mounted on the front end of the gas supply cabinet body (101).

4. A modular corrosion-resistant, safe, high-purity special gas supply cabinet according to claim 3, characterized in that: The protection mechanism (2) further comprises a temperature detection module (205) and a cold air fan (206), wherein the temperature detection module (205) is fixedly mounted on the front end of the conveying box (108), and the cold air fan (206) is fixedly mounted on the left end of the gas supply cabinet body (101).

5. A modular corrosion-resistant, safe, high-purity special gas supply cabinet according to claim 4, characterized in that: The protection mechanism (2) further comprises a one-way air guide pipe (207) and an air washing box (208), wherein the one-way air guide pipe (207) is fixedly mounted on the upper end of the left end of the air supply cabinet body (101), the air washing box (208) is fixedly mounted on the left end of the air supply cabinet body (101), and the lower end of the one-way air guide pipe (207) is fixedly connected to the air washing box (208).

6. A modular corrosion-resistant, safe, high-purity special gas supply cabinet according to claim 5, characterized in that: The protection mechanism (2) further comprises an agitator (209) and a one-way exhaust pipe (210), wherein the agitator (209) is fixedly installed inside the air washing box (208), and the one-way exhaust pipe (210) is fixedly installed at the upper end of the air washing box (208).

7. A modular corrosion-resistant, safe, high-purity special gas supply cabinet according to claim 6, characterized in that: The protection mechanism (2) further comprises a gas detection module (211) and an audible and visual alarm (212); the gas detection module (211) is fixedly mounted on the front end of the delivery box (108); and the audible and visual alarm (212) is fixedly mounted on the upper end of the gas supply cabinet body (101).

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