Flower basket sensor

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By designing the flower basket sensor and using the cooperation of the detection rod and magnet, the problem that existing equipment cannot perceive the flower basket is solved, and accurate detection and cleaning efficiency are achieved.

CN222545516UActive Publication Date: 2025-02-28SUZHOU KZONE EQUIP TECH

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Patent Information

Application Number: CN202421417275.0
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-06-20
Publication Date: 2025-02-28
Estimated Expiration: 2034-06-20

AI Technical Summary

Technical Problem

Existing equipment cannot sense and detect whether there is a flower basket when picking and putting it up, resulting in some wafers being uncleaned.

Method used

Design a flower basket sensor, including the sensor body, a detection rod and an elastic member. A magnet is provided on the detection rod, and the magnet is brought closer to or away from the sensor body by movement of the detection rod. When the flower basket exists, the magnet stays away from the sensor body, and the sensor does not send a signal; when the flower basket does not exist, the elastic member resets the detection rod and the sensor sends a signal.

Benefits of technology

Effectively detect whether there is a flower basket, reduce induction errors, improve work efficiency, and avoid uncleaned or shutdown caused by misinduction.

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Abstract

The utility model belongs to the technical field of semiconductor wafer cleaning, and discloses a flower basket inductor. The flower basket inductor comprises an inductor body, a detection rod and an elastic piece, the detection rod is movably arranged on the inductor body in a penetrating mode, the end of the detection rod is used for abutting against a flower basket, the detection rod is provided with a magnet capable of being inducted by the inductor body, and the detection rod moves in the length direction to drive the magnet to be close to or away from the inductor body. The inductor body can send a signal to the outside; the elastic piece is arranged on the detection rod and can apply elastic force to the detection rod in the length direction of the detection rod so that the magnet can be close to the inductor body in the length direction of the detection rod. According to the flower basket inductor, the problem that the detection rod slides unsmoothly due to the fact that crystals are attached to the detection rod due to evaporation of liquid medicine in the cleaning tank is solved to a great extent, the situation that wafers in a flower basket are not cleaned or shut down due to mistaken induction is greatly reduced, and then the practicability of the flower basket inductor is improved.

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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wafer cleaning, in particular to a flower basket sensor. Background Art

[0002] Semiconductor wafers need to be cleaned during the production process. During cleaning, the semiconductor wafers usually need to be placed in a basket, which is then taken away by a cantilever robot and placed in a tank cleaning machine to clean the surface of the semiconductor silicon wafers in the basket.

[0003] Current equipment usually adopts fixed mechanical actions when picking up and placing flower baskets, that is, the program is pre-set and follows the program steps, but it is unable to sense and detect whether there is a flower basket, which easily leads to some wafers not being cleaned. Utility Model Content

[0004] The utility model aims to provide a flower basket sensor, which can facilitate the rapid reset of a detection rod to reduce the sensing error.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The utility model provides a flower basket sensor, comprising:

[0007] Sensor body;

[0008] A detection rod, the detection rod is movably arranged on the sensor body, the end of the detection rod is used to abut against the flower basket, the detection rod is provided with a magnet that can be sensed by the sensor body, the detection rod moves along the length direction to drive the magnet to approach or move away from the sensor body, and the sensor body can send a signal to the outside world;

[0009] An elastic member is arranged on the detection rod, and the elastic member can apply an elastic force along the length direction of the detection rod to the detection rod, so that the magnet is close to the sensor body along the length direction of the detection rod.

[0010] Preferably, the flower basket sensor further comprises a first stopper, which is arranged at an end of the detection rod, and the first stopper can abut against the sensor body along the length direction of the detection rod.

[0011] Preferably, the flower basket sensor further comprises a second stopper, which is arranged at the end of the detection rod, one end of the elastic member abuts against the second stopper, and the other end of the elastic member abuts against the sensor body.

[0012] Preferably, the first stopper and the second stopper are both detachably connected to the detection rod.

[0013] Preferably, the elastic member includes a spring sheet, a first connecting head and a second connecting head, the first connecting head and the second connecting head are respectively arranged at both ends of the spring sheet along the length direction, the spring sheet is passed through the detection rod, the first connecting head and the second connecting head are respectively elastically bent in the first direction and are respectively passed through the detection rod in sliding cooperation with the detection rod.

[0014] Preferably, a first card slot is formed on the first connector, a second card slot is formed on the second connector, a first card connection portion is provided on the first connector, a second card connection portion is provided on the second connector, the first card connection portion is clamped in the second card slot, and the second card connection portion is clamped in the first card slot.

[0015] The beneficial effects of the utility model are:

[0016] The utility model provides a flower basket sensor, in which a detection rod is movably arranged on a sensor body. Since a magnet that can be sensed by the sensor body is arranged on the detection rod, and the detection rod moves in the sensor body along the length direction, it can drive the magnet to approach or move away from the sensor body. Therefore, when there is a flower basket below the detection rod, the detection rod moves along the length direction due to the end portion abutting against the flower basket, and the magnet will move away from the sensor body. The sensor body cannot sense the magnet, and at this time the sensor body does not send out a signal. Since an elastic member is arranged on the detection rod, the elastic member can apply a force along the length direction of the detection rod to the detection rod, so that the magnet on the detection rod approaches the sensor body. Therefore, when there is no flower basket under the detection rod, the detection rod can be reset under the elastic force of the elastic member. At this time, the sensor body sends a signal to the outside world to indicate that there is no flower basket under the detection rod, which greatly facilitates the staff to judge whether there is a flower basket and improves work efficiency; because the elastic member can apply elastic force to the detection rod to reset the detection rod and be sensed by the sensor body, the problem of the detection rod sliding unsmoothly due to crystals attached to the detection rod caused by evaporation of the liquid medicine in the cleaning tank is solved to a great extent, thereby greatly reducing the situation of wafers in the flower basket not being cleaned or shutdown caused by false sensing, thereby improving the practicality of the flower basket sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a flower basket sensor provided in a specific embodiment of the utility model;

[0018] Figure 2 It is a front view of a flower basket sensor provided in a specific embodiment of the utility model;

[0019] Figure 3 It is a structural schematic diagram of an elastic member provided in a specific embodiment of the utility model.

[0020] In the figure:

[0021] 1-Sensor body;

[0022] 2-Detection rod;

[0023] 3-elastic member; 31-spring sheet; 311-through hole; 32-first connector; 321-first sleeve hole; 322-first slot; 323-first clamping portion; 33-second connector; 331-second sleeve hole; 332-second slot; 333-second clamping portion;

[0024] 4- first stopper;

[0025] 5- Second stopper. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0027] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0029] In the description of this embodiment, the terms "upper", "lower", "right", "left" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0030] like Figure 1As shown, the utility model provides a flower basket sensor, which includes a sensor body 1, a detection rod 2 and an elastic member 3. The detection rod 2 is movably arranged on the sensor body 1, and the end of the detection rod 2 is used to abut against the flower basket. A magnet that can be sensed by the sensor body 1 is arranged on the detection rod 2. The detection rod 2 moves along the length direction and can drive the magnet to approach or move away from the sensor body 1. The sensor body 1 can send a signal to the outside world; the elastic member 3 is arranged on the detection rod 2, and the elastic member 3 can apply an elastic force along the length direction of the detection rod 2 to the detection rod 2, so that the magnet approaches the sensor body 1 along the length direction of the detection rod 2. In this embodiment, the first direction is the upward direction along the length of the detection rod 2; the detection rod 2 is movably arranged on the sensor body 1. Since the detection rod 2 is provided with a magnet that can be sensed by the sensor body 1, and the detection rod 2 moves in the sensor body 1 along the length direction, it can drive the magnet to approach or move away from the sensor body 1. Therefore, when there is a flower basket below the detection rod 2, the flower basket will push the detection rod 2 upward along the first direction. Since the sensor body 1 is fixed, the detection rod 2 will move relative to the sensor body 1, and the magnet will move away from the sensor body 1. The sensor body 1 cannot sense the magnet, and the sensor body 1 does not send a signal at this time; since the detection rod 2 is provided with an elastic member 3, the elastic member 3 can apply a force along the length direction of the detection rod 2 to the detection rod 2 to The magnet on the detection rod 2 is placed close to the sensor body 1. Therefore, when there is no flower basket under the detection rod 2, the detection rod 2 will not be pressed by the flower basket, and the detection rod 2 can be reset under the elastic force of the elastic member 3. At this time, the sensor body 1 sends a signal to the outside to indicate that there is no flower basket under the detection rod 2, which greatly facilitates the staff to judge whether there is a flower basket and improves the work efficiency. Since the elastic member 3 can apply elastic force to the detection rod 2 to reset the detection rod 2 and be sensed by the sensor body 1, the problem of the detection rod 2 sliding unsmoothly due to the crystallization of the evaporation of the liquid medicine in the cleaning tank adhering to the detection rod 2 is solved to a great extent, thereby greatly reducing the situation of the wafer in the flower basket not being cleaned or the machine being shut down due to false sensing, thereby improving the practicality of the flower basket sensor. Specifically, the detection rod 2 is a hollow structure, and the magnet is fixed inside the detection rod 2; the sensor body 1 is a magnetic sensor commonly used in the industrial production field, which is used to detect magnetic materials and can convert magnetic fields into electrical signals. Its specific working principle will not be repeated here; when the detection rod 2 rises under the support of the flower basket, the magnet inside the detection rod 2 will approach and enter the interior of the sensor body 1, thereby being detected by the sensor body 1.

[0031] Furthermore, if Figure 1 and Figure 2As shown, the flower basket sensor further includes a first stopper 4, which is disposed at the end of the detection rod 2 and can abut against the sensor body 1 along the length direction of the detection rod 2. In this embodiment, the end of the detection rod 2 is provided with a first stopper 4, which can abut against the sensor body 1, thereby preventing the detection rod 2 from sliding vertically downward and escaping from the sensor body 1.

[0032] Specifically, Figure 1 and Figure 2 As shown, the flower basket sensor further includes a second stopper 5, which is arranged at the end of the detection rod 2, one end of the elastic member 3 abuts against the second stopper 5, and the other end of the elastic member 3 abuts against the sensor body 1. In this embodiment, a second stopper 5 is further arranged at the other end of the detection rod 2 away from the first stopper 4. When a flower basket appears below the detection rod 2, one end of the elastic member 3 abuts against the sensor body 1, and the other end abuts against the second stopper 5. At this time, the elastic member 3 is in a compressed state. When there is no flower basket below the detection rod 2, the detection rod 2 will move in the opposite direction of the first direction under the elastic force of the elastic member 3; therefore, the second stopper 5 can fix the elastic member 3 and provide a force application point for the elastic member 3 to apply elastic force to the detection rod 2.

[0033] Specifically, the first stopper 4 and the second stopper 5 are both detachably connected to the detection rod 2. In this embodiment, the first stopper 4 is detachably connected to the detection rod 2, so the detection rod 2 can be conveniently and quickly removed from the sensor body 1 by removing the first stopper 4; since the second stopper 5 is also detachably connected to the detection rod 2, it is convenient to quickly install the elastic member 3.

[0034] Furthermore, if Figure 3As shown, the elastic member 3 includes a spring piece 31, a first connector 32 and a second connector 33, the first connector 32 and the second connector 33 are respectively arranged at two ends of the spring piece 31 along the length direction, the spring piece 31 is inserted into the detection rod 2, the first connector 32 and the second connector 33 are respectively elastically bent in the first direction and respectively inserted into the detection rod 2 in a sliding cooperation with the detection rod 2. In this embodiment, the spring piece 31, the first connector 32 and the second connector 33 are all made of polyetheretherketone (peek), which is corrosion-resistant, high-temperature-resistant, and has strong toughness and rigidity, and is a high-performance engineering plastic commonly used in the field; the spring piece 31, the first connector 32 and the second connector 33 are integrally formed, the first connector 32 and the second connector 33 are respectively arranged at two ends of the spring piece 31, and form a flat and long elastic member 3. Specifically, a through hole 311 is provided in the middle position of the spring piece 31 along the length direction, and a first sleeve hole 321 and a second sleeve hole 331 are provided on the first connecting head 32 and the second connecting head 33 respectively. The apertures of the through hole 311, the first sleeve hole 321 and the second sleeve hole 331 are slightly larger than the outer diameter of the detection rod 2. When installing the elastic member 3, the staff firstly penetrates the spring piece 31 on the detection rod 2 through the through hole 311, and makes the spring piece 31 abut against the second stopper 5, and then bends the first connecting head 32 and the second connecting head 33 upwards in the first direction respectively and respectively connects the first connecting head 32 and the second connecting head 33 to the detection rod 2. 33 is passed through the detection rod 2 from top to bottom; then the staff passes the detection rod 2 with the elastic member 3 through the sensor body 1 along the first direction, and finally installs the first stopper 4 on the end of the detection rod 2; when there is no flower basket below the detection rod 2, the detection rod 2 moves in the opposite direction of the first direction until the first stopper 4 abuts against the sensor body 1, and at this time the elastic member 3 forms a circular structure on the detection rod 2; and when there is a flower basket below the detection rod 2, the detection rod 2 moves along the first direction to squeeze the elastic member 3, and the elastic member 3 will be deformed to form an elliptical shape, and at this time the elastic member 3 elastically abuts against the second stopper 5. It can be understood that since the first connecting head 32 and the second connecting head 33 are respectively slidably fitted on the detection rod 2, when the detection rod 2 moves along the length direction under the action of the flower basket or the elastic member 3 below, the medicine crystals attached to the outer wall of the detection rod 2 can be scraped off by the first connecting head 32 and the second connecting head 33, thereby further reducing the sliding resistance of the detection rod 2 relative to the sensor body 1.

[0035] Specifically, Figure 3As shown, the first connector 32 is provided with a first slot 322, the second connector 33 is provided with a second slot 332, the first connector 32 has a first snap-in portion 323, the second connector 33 has a second snap-in portion 333, the first snap-in portion 323 is snapped in the second slot 332, and the second snap-in portion 333 is snapped in the first slot 322. In this embodiment, after the staff inserts the first connector 32 and the second connector 33 from top to bottom on the detection rod 2, they snap the first snap-in portion 323 in the second slot 332 and the second snap-in portion 333 in the first slot 322, respectively, thereby fixing the first connector 32 and the second connector 33, so that the outer peripheral surface of the elastic member 3 can be relatively flat against the sensor body 1.

[0036] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. Flower basket sensor, characterized in that: include: Sensor body (1); A detection rod (2), the detection rod (2) being movably arranged on the sensor body (1), the end of the detection rod (2) being used to abut against the flower basket, the detection rod (2) being provided with a magnet that can be sensed by the sensor body (1), the detection rod (2) being able to move along the length direction to drive the magnet to approach or move away from the sensor body (1), and the sensor body (1) being able to send a signal to the outside world; An elastic member (3), wherein the elastic member (3) is arranged on the detection rod (2), and the elastic member (3) is capable of applying an elastic force along the length direction of the detection rod (2) to the detection rod (2), so that the magnet is close to the sensor body (1) along the length direction of the detection rod (2).

2. The flower basket sensor according to claim 1, characterized in that: The flower basket sensor further comprises a first stopper (4), wherein the first stopper (4) is arranged at the end of the detection rod (2), and the first stopper (4) can abut against the sensor body (1) along the length direction of the detection rod (2).

3. The flower basket sensor according to claim 2, characterized in that: The flower basket sensor further comprises a second stopper (5), wherein the second stopper (5) is arranged at the end of the detection rod (2), one end of the elastic member (3) abuts against the second stopper (5), and the other end of the elastic member (3) abuts against the sensor body (1).

4. The flower basket sensor according to claim 3, characterized in that: The first stopper (4) and the second stopper (5) are both detachably connected to the detection rod (2).

5. The flower basket sensor according to claim 1, characterized in that: The elastic member (3) comprises a spring sheet (31), a first connecting head (32) and a second connecting head (33); the first connecting head (32) and the second connecting head (33) are respectively arranged at two ends of the spring sheet (31) along the length direction; the spring sheet (31) is passed through the detection rod (2); the first connecting head (32) and the second connecting head (33) are respectively elastically bent in a first direction and are respectively passed through the detection rod (2) in a sliding manner with the detection rod (2).

6. The flower basket sensor according to claim 5, characterized in that: The first connecting head (32) is provided with a first clamping slot (322), the second connecting head (33) is provided with a second clamping slot (332), the first connecting head (32) has a first clamping portion (323), the second connecting head (33) has a second clamping portion (333), the first clamping portion (323) is clamped in the second clamping slot (332), and the second clamping portion (333) is clamped in the first clamping slot (322).