Sample heating device for scanning electron microscope

Abstract

The utility model relates to the technical field of scanning electron microscope heating, in particular to a sample heating device for a scanning electron microscope, which comprises a heating shell, a heating component and a fixing component. The heating assembly comprises a reflecting plate arranged on the heat insulation layer, a heating pipe arranged on the support and the heat insulation layer arranged in the heating assembly installation groove, and the fixing assembly comprises a fixing rod inserted in the side wall of the fixing groove. The sample table provided with the heating shell is heated, the heating space is reduced, the waste of resources is reduced, the sample table is convenient to mount and dismount, heat radiated to the heating reflecting plate is reflected to the fixing groove through the heating reflecting plate, the utilization rate of heat emitted by the heating pipe is increased, energy is further saved, and the sample table is convenient to mount and dismount. And the heating shell is prevented from being overheated through the arrangement of the heat insulation layer, and the time for waiting for cooling is shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning electron microscope heating, in particular to a sample heating device for a scanning electron microscope. Background Art

[0002] A scanning electron microscope is a high-resolution microscope that can observe the microstructure and morphology of a sample surface at an extremely high magnification. It uses a focused, narrow high-energy electron beam to scan the sample, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material. It is often used for research and analysis in the fields of materials science, biology, and nanotechnology. In material research, it is necessary to heat the sample to simulate the state of the material in a high-temperature environment and observe the effect of temperature on the structure and properties of the material, so a heating device is needed.

[0003] However, the heating device in the prior art is large in size and difficult to install in the scanning electron microscope, which makes it inconvenient to heat the sample on the sample stage and will heat the scanning cavity of the scanning electron microscope. The heating range is too large, resulting in waste of resources. Summary of the invention

[0004] The utility model aims to provide a sample heating device for a scanning electron microscope to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A sample heating device for a scanning electron microscope, the heating device is used to heat a sample on a sample stage of the scanning electron microscope, the heating device comprises:

[0007] A heating shell, wherein the heating shell is provided with an electron beam channel and a fixing groove which are interconnected, and a heating component mounting groove is provided on a side wall of the electron beam channel;

[0008] A heating assembly, the heating assembly comprising a heat insulating layer disposed in the heating assembly installation groove, a reflective plate disposed on the heat insulating layer, a bracket passing through the heat insulating layer and connected to the wall of the heating assembly installation groove, a heating tube disposed on the bracket, and a glass plate disposed on the wall of the heating assembly installation groove to separate the electron beam channel from the heating assembly installation groove; and

[0009] A fixing assembly, the fixing assembly includes a fixing tube arranged on the heating shell, a fixing spring arranged in the fixing tube, and a fixing rod inserted into the side wall of the fixing groove. When the fixing rod clamps and fixes the sample table inserted into the fixing groove, the heating tube heats the sample through the glass plate, the reflecting plate reflects the heat radiation emitted by the heating tube to the sample, and the heat insulation layer is used to prevent the heating shell from overheating.

[0010] Preferably, the reflecting plate includes a temperature-insulating reflecting plate arranged on the heat-insulating layer and a heating reflecting plate obliquely arranged above the heating tube and connected to the temperature-insulating reflecting plate.

[0011] Preferably, the temperature-insulating reflective plate is used to cooperate with the heat-insulating layer to reduce heat transfer to the heating housing, and the heating reflective plate is used to reflect heat radiation irradiated on the heating reflective plate toward the sample.

[0012] Preferably, the fixing rod comprises a moving rod inserted in the fixing groove wall and connected to the fixing spring, and a clamping head arranged on the moving rod, wherein the clamping head is provided with an insertion slope.

[0013] Preferably, the sample table can be inserted into the fixing groove along the insertion slope, so that the fixing spring contracts and the clamping head fixes the sample table.

[0014] Preferably, a temperature sensor for detecting the temperature in the electron beam channel is arranged on the side wall of the electron beam channel.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] The utility model includes a heating shell, a heating component and a fixing component. The heating shell is provided with an electron beam channel and a fixing groove. The heating component includes a reflecting plate arranged on the heat insulation layer, a heating tube arranged on a bracket and a heat insulation layer arranged in the heating component installation groove. The fixing component includes a fixing rod inserted on the side wall of the fixing groove. The utility model performs surrounding heating on a sample table with the heating shell installed by arranging the heating shell and the fixing component, thereby reducing the heating space and the waste of resources. The fixing component can be quickly and conveniently installed and disassembled. The heat radiation irradiated on the heating reflecting plate is reflected toward the fixing groove by arranging the heating reflecting plate, thereby improving the utilization rate of the heat emitted by the heating tube and further saving energy. The heat insulation layer can prevent the heating shell from overheating and reduce the waiting time for cooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic cross-sectional view of the structure of the utility model;

[0018] Figure 2 This is a state diagram of the utility model when connected to the sample table;

[0019] Figure 3 This is a schematic diagram of the overall structure of the heating shell of the utility model;

[0020] Figure 4 for Figure 2 Schematic diagram of the enlarged structure of area A.

[0021] In the figure: 1. heating shell; 2. electron beam channel; 3. fixing groove; 4. heat insulation layer; 5. temperature insulation reflector; 6. heating reflector; 7. bracket; 8. glass plate; 9. heating component installation groove; 10. heating tube; 11. clamping head; 12. moving rod; 13. fixing spring; 14. fixing tube; 15. temperature sensor; 110. sample; 120. sample table. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figures 1 to 4 , the utility model provides a technical solution:

[0024] A sample heating device for a scanning electron microscope, the heating device is used to heat a sample 110 on a sample stage 120 of the scanning electron microscope, and the heating device comprises:

[0025] A heating shell 1 is provided with an electron beam channel 2 and a fixing groove 3 which are interconnected. The appearance of the heating shell 1 is a hollow cylinder. The cavity in the heating shell 1 is divided into two layers of cavities from top to bottom. The upper cavity includes an electron beam channel 2 for directly hitting the sample with an electron beam to realize photography and a heating component mounting groove 9 provided on the side wall of the electron channel 2. The lower cavity is a fixing groove 3. The electron beam channel 2 is located above the fixing groove 3. The electron beam channel 2 is used to allow the electron beam to pass through so that the electron beam can directly hit the sample to realize photography. The heating component mounting groove 9 is used to install the heating component, and the fixing groove 3 is used to install the fixing component.

[0026] A heating assembly, the heating assembly includes a heat insulation layer 4, a reflective plate, a bracket 7, a heating tube 10 and a glass plate 8, the reflective plate includes a heat insulation reflective plate 5 and a heating reflective plate 6, the heat insulation layer 4 is arranged on the side wall of the heating assembly installation groove 9, the heat insulation layer 4 is fixedly connected to the side wall of the heating assembly installation groove 9 by gluing or other methods, the heat insulation layer 4 can choose heat insulation materials such as aerogel felt or rock wool, the heat insulation layer 4 is used to prevent the heating shell 1 from overheating, and it is difficult to remove the heating shell 1 from the sample table 120, thereby reducing the waiting time for cooling, the heat insulation reflective plate 5 is arranged on the heat insulation layer 4, the heat insulation reflective plate 5 is fixedly connected to the heat insulation layer 4 by gluing or setting screws, the heat insulation reflective plate 5 is used to work together with the heat insulation layer 4 to reduce the heat transfer to the heating shell 1, the heating reflective plate 6 is tilted above the heating tube 10 and connected to the heat insulation reflective plate 5, the heating reflective plate 6 is fixedly connected to the heat insulation reflective plate 5 by setting screws or welding, and the heating reflective plate 6 is used to The heat light on the plate 6 is reflected toward the fixing groove 3, so as to improve the utilization rate of the heat emitted by the heating tube 10 and save energy. The bracket 7 passes through the insulation layer 4 and is connected to the side wall of the heating component installation groove 9. The bracket 7 is fixedly connected to the side wall of the heating component installation groove 9 by welding or the like. The top of the bracket 7 is in a circular ring shape, so as to facilitate the fixing of the heating tube 10. The heating tube 10 is arranged in the circular ring of the bracket 7. The heating tube 10 is an electric heating wire wrapped around a glass tube. After the electric heating wire is energized, it heats the sample 110 by thermal radiation. The heating tube 10 is fixedly connected to the bracket 7 by tightening the circular ring by setting screws or the like. The heating tube 10 is fixedly connected to the bracket 7. The glass plate 8 is arranged at the opening of the heating component installation groove 9 to separate the electron beam channel 2 and the heating component installation groove 9. The glass plate 8 is fixedly connected to the opening of the heating component installation groove 9 by gluing or clamping or the like. The glass plate 8 can be made of quartz glass. Quartz glass has high heat resistance and high spectral transmittance and will not be damaged by radiation.

[0027] The fixing assembly includes a fixing tube 14, a fixing spring 13 and a fixing rod, the fixing rod includes a moving rod 12 and a clamping head 11, the fixing tube 14 is arranged on the heating shell 1, the fixing tube 14 is fixedly connected to the heating shell 1 by welding or the like, the fixing tube 14 is a hollow tube body without a cover, the fixing spring 13 is arranged in the fixing tube 14, one end of the fixing spring 13 is fixedly connected to the inner bottom wall of the fixing tube 14, the moving rod 12 is inserted in the side wall of the fixing groove 3 and connected to the fixing spring 13, the moving rod 12 is movably connected to the side wall of the fixing groove 3 and the fixing tube 14, and the moving rod 12 is The fixing spring 13 is fixedly connected by welding or the like, the clamping head 11 is arranged at one end of the moving rod 12 extending out of the side wall of the fixing groove 3, the clamping head 11 is fixedly connected to the moving rod 12 by setting screws or welding or the like, an insertion bevel is arranged on the clamping head 11, the sample table 120 can be inserted into the fixing groove 3 along the insertion bevel, so that the fixing spring 13 contracts, so that the fixing spring 13 pushes the clamping head 11 to clamp and fix the sample table 120, so that the clamping head 11 fixes the sample table 120, and if the heating device needs to be removed, the heating shell 1 can be unplugged by hand, so that it is convenient to install or remove the heating device.

[0028] A temperature sensor 15 is also provided on the side wall of the electron beam channel 2. The temperature sensor 15 is embedded and fixed on the side wall of the electron beam channel 2. The temperature sensor 15 can select the HEL-700 series temperature sensor 15 of Honeywell. A single-chip microcomputer and a temperature control module are also provided in the heating shell 1. The model of the single-chip microcomputer is 80c51 of Intel. The temperature control module can select an XY-T04-W high-temperature control module of Yiyangguang brand or a ZY-HW002 constant temperature heating platform control board of Zhanyi brand. The temperature sensor 15, the heating tube 10 and the temperature control module are respectively connected to the single-chip microcomputer through data electrical signals. When the temperature sensor 15 detects that the heating tube 10 heats the temperature of the sample 110 in the electron beam channel 2 to a set temperature (such as 200°C), the single-chip microcomputer maintains the heating temperature of the heating tube 10 at the set temperature through the temperature control module, so that the temperature of the sample 110 in the electron beam channel 2 is maintained at the set temperature. A display device such as a digital tube connected to the single-chip microcomputer through data electrical signal communication can also be provided to display the temperature detected by the temperature sensor 15.

[0029] Working principle: When in use, the sample table 120 with the sample 110 fixed thereon is inserted into the fixing groove 3, and the fixing spring 13 pushes the clamping head 11 to fix the sample table 120. When the clamping head 11 clamps and fixes the sample table 120 inserted into the fixing groove 3, power is supplied to the heating tube 10, and the heating tube 10 heats the sample 110 through the glass plate 8. The heating reflection plate 6 reflects the heat light emitted by the heating tube 10 onto the sample 110 to heat the sample 110. After the sample 110 is heated to the set temperature and maintained at this temperature, the surface microstructure and morphology of the sample 110 at this temperature can be observed by a scanning electron microscope.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A sample heating device for a scanning electron microscope, the heating device is used to heat a sample on a sample stage of the scanning electron microscope, characterized in that: The heating device comprises: A heating shell, wherein the heating shell is provided with an electron beam channel and a fixing groove which are interconnected, and a heating component mounting groove is provided on a side wall of the electron beam channel; A heating assembly, the heating assembly comprising a heat insulating layer disposed in the heating assembly installation groove, a reflective plate disposed on the heat insulating layer, a bracket passing through the heat insulating layer and connected to the wall of the heating assembly installation groove, a heating tube disposed on the bracket, and a glass plate disposed on the wall of the heating assembly installation groove to separate the electron beam channel from the heating assembly installation groove; and A fixing assembly, the fixing assembly includes a fixing tube arranged on the heating shell, a fixing spring arranged in the fixing tube, and a fixing rod inserted into the side wall of the fixing groove. When the fixing rod clamps and fixes the sample table inserted into the fixing groove, the heating tube heats the sample through the glass plate, the reflecting plate reflects the heat radiation emitted by the heating tube to the sample, and the heat insulation layer is used to prevent the heating shell from overheating.

2. A sample heating device for a scanning electron microscope according to claim 1, characterized in that: The reflecting plate comprises a temperature-insulating reflecting plate arranged on the heat-insulating layer and a heating reflecting plate obliquely arranged above the heating tube and connected to the temperature-insulating reflecting plate.

3. A sample heating device for a scanning electron microscope according to claim 2, characterized in that: The temperature-insulating reflective plate is used to cooperate with the heat-insulating layer to reduce the heat transfer to the heating housing, and the heating reflective plate is used to reflect the heat radiation irradiated on the heating reflective plate toward the sample.

4. The sample heating device for a scanning electron microscope according to claim 1, characterized in that: The fixing rod comprises a moving rod inserted in the fixing groove wall and connected to the fixing spring, and a clamping head arranged on the moving rod, wherein the clamping head is provided with an insertion inclined surface.

5. A sample heating device for a scanning electron microscope according to claim 4, characterized in that: The sample table can be inserted into the fixing groove along the insertion slope, so that the fixing spring contracts and the clamping head fixes the sample table.

6. A sample heating device for a scanning electron microscope according to claim 4, characterized in that: A temperature sensor for detecting the temperature in the electron beam channel is arranged on the side wall of the electron beam channel.

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