Semiconductor cleaning machine

Abstract

The utility model discloses a semiconductor cleaning machine which is characterized in that a gutter is arranged at the lower end of a sealing door and provided with a first opening, the first opening faces the upper end of the sealing door, residual liquid left on the sealing door flows into the gutter downwards through the first opening, and the residual liquid can be collected through the gutter. The water receiving box is arranged below the water guide groove, the water receiving box is communicated with the interior of the water guide groove and the interior of the box body, residual liquid stored in the water guide groove can flow to the water receiving box and then flow into the box body from the water receiving box, an operator can arrange a container for receiving the residual liquid in the box body, and therefore the residual liquid is collected, the structure is simple, operation is convenient, and practicability is high. And harm to a human body and pollution to the environment can be prevented.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor production, in particular to a semiconductor cleaning machine. Background Art

[0002] The importance of silicon wafer cleaning to the semiconductor industry has attracted great attention as early as the early 1950s, because contaminants on the surface of silicon wafers can seriously affect the performance, reliability, and yield of devices. With the rapid development of microelectronics technology and the improvement of people's requirements for raw materials, the impact of contaminants on devices has become more prominent.

[0003] The semiconductor cleaning machine in the prior art is provided with a cleaning chamber. When in use, the silicon wafer is placed in the cleaning chamber, and the silicon wafer is rinsed by a cleaning system. After rinsing, the silicon wafer is dried by an air drying system. The cleaning agent used in the cleaning process is often an alkaline chemical substance. Therefore, it is necessary to design a new cleaning machine that can collect the residual liquid left after cleaning to prevent harm to the human body and pollution to the environment. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, the utility model provides a semiconductor cleaning machine which can easily collect residual liquid.

[0005] The technical solution adopted by the utility model to solve its technical problems is: the utility model provides a semiconductor cleaning machine, including a box body, a cleaning chamber is arranged in the box body, the cleaning chamber is provided with a sealing door, a water diversion groove is arranged at the lower end of the sealing door, the water diversion groove is provided with a first opening, and the first opening faces the upper end of the sealing door; a water receiving box is arranged below the water diversion groove, and the water receiving box is connected with the water diversion groove and the interior of the box body.

[0006] As a further improvement of the above technical solution, the sealed door includes a door panel and an outer frame, the four edges of the door panel are connected to the outer frame, and the outer frame is closer to the cleaning chamber than the door panel, and the bottom end of the outer frame is connected to a water retaining strip, which is arranged opposite to the door panel, and the door panel, the outer frame and the water retaining strip enclose the water diversion groove.

[0007] As a further improvement of the above technical solution, an inclined plate is connected to the upper side of the water retaining bar, the inclined plate is located in the water diversion groove, and the inclined plate is inclined downward.

[0008] As a further improvement of the above technical solution, a second opening is provided above the water receiving box, and a drainage pipe is provided on the outer frame, one end of the drainage pipe is connected to the water diversion groove, and the other end is located above the second opening.

[0009] As a further improvement of the above technical solution, a drainage pipe is provided on one side of the water receiving box close to the interior of the box, one end of the drainage pipe is connected to the water receiving box, and the other end is connected to the interior of the box, and the drainage pipe is used to discharge the residual liquid in the water receiving box into a container provided in the box.

[0010] As a further improvement of the above technical solution, a guide plate is arranged inside the water receiving box, the guide plate is connected to the inner wall of the water receiving box on the side away from the drain pipe, and the guide plate is inclined downward on the side close to the drain pipe.

[0011] As a further improvement of the above technical solution, the water receiving box includes a clamping portion, and the water receiving box is clamped with the box body through the clamping portion; a bottom plate is provided at the bottom of the cleaning chamber, and the clamping portion abuts against the bottom plate.

[0012] As a further improvement of the above technical solution, the upper end of the clamping portion is configured as a downwardly inclined slope.

[0013] As a further improvement of the above technical solution, the water receiving box protrudes from the sealing door on the side of the sealing door in the thickness direction and facing outward.

[0014] As a further improvement of the above technical solution, the water receiving box includes a folding side panel, which is located on the side of the water receiving box away from the inside of the box body. The folding side panel includes a vertical plate and an inclined plate, the vertical plate is vertically arranged, the inclined plate is inclined, and one side of the inclined plate is connected to the lower end of the vertical plate, and the other side is inclined toward the direction close to the inside of the box body.

[0015] The beneficial effects of the utility model are as follows: since the lower end of the sealed door is provided with a water diversion groove, the water diversion groove is provided with a first opening, and the first opening faces the upper end of the sealed door, the residual liquid left on the sealed door flows downward through the first opening into the water diversion groove, and the residual liquid can be collected through the water diversion groove. A water receiving box is provided below the water diversion groove, and the water receiving box is connected with the water diversion groove and the interior of the box body, and the residual liquid stored in the water diversion groove can flow to the water receiving box, and then flow into the box body from the water receiving box. The operator can set a container for receiving the residual liquid inside the box body, thereby completing the collection of the residual liquid. The structure is simple, the operation is convenient, and it can prevent harm to the human body and pollution to the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0017] Figure 1 It is a structural schematic diagram of a semiconductor cleaning machine provided by a preferred embodiment of the utility model;

[0018] Figure 2It is a structural schematic diagram of some components of a semiconductor cleaning machine provided by a preferred embodiment of the utility model;

[0019] Figure 3 It is a structural schematic diagram of a sealing door of a semiconductor cleaning machine provided by a preferred embodiment of the utility model;

[0020] Figure 4 It is a structural schematic diagram of a water receiving box of a semiconductor cleaning machine provided by a preferred embodiment of the utility model;

[0021] Figure 5 It is a cross-sectional view of a water receiving box and a sealing door of a semiconductor cleaning machine provided by a preferred embodiment of the utility model;

[0022] Figure 6 yes Figure 5 Enlarged view of part A.

[0023] Reference numerals: 1, box body, 2, cleaning chamber;

[0024] 21. Sealing door, 22. Water collecting box, 23. Bottom plate;

[0025] 210. First opening; 211. Water diversion channel; 212. Door panel; 213. Outer frame; 214. Water retaining strip; 215. Inclined plate; 216. Drainage pipe; 221. Second opening; 222. Drainage pipe; 223. Guide plate; 224. Snap-fitting portion; 225. Inclined surface; 226. Folding side panel; 227. Vertical panel; 228. Inclined plate. DETAILED DESCRIPTION

[0026] The following will be combined with the embodiments and drawings to clearly and completely describe the concept, specific structure and technical effects of the utility model, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the fact that according to the specific implementation situation, a better connection structure can be formed by adding or reducing connection accessories. For example, fixed connection / fixed installation can be selected according to the needs of screw connection, bolt connection, pin connection, key connection, bonding, mortise and tenon connection, welding, riveting and other methods. For example, detachable connection can be selected according to the needs of screw connection, bolt connection, threaded connection, snap connection, mortise and tenon connection, Velcro connection and other methods. The various technical features in the creation of the utility model can be combined interactively without conflicting with each other.

[0027] See also Figure 1-3The preferred embodiment of the utility model provides a semiconductor cleaning machine, including a box body 1, a cleaning chamber 2 is arranged in the box body 1, the cleaning chamber 2 is provided with a sealing door 21, a water guide groove 211 is arranged at the lower end of the sealing door 21, and the water guide groove 211 is provided with a first opening 210, and the first opening 210 faces the upper end of the sealing door 21; see Figure 5 A water receiving box 22 is provided below the water diversion groove 211, and the water receiving box 22 is connected to the water diversion groove 211 and the interior of the housing 1. Since the water diversion groove 211 is provided at the lower end of the sealing door 21, and the water diversion groove 211 is provided with a first opening 210, and the first opening 210 faces the upper end of the sealing door 21, the residual liquid left on the sealing door 21 flows into the water diversion groove 211 through the first opening 210 downward, and the residual liquid can be collected by the water diversion groove 211. A water receiving box 22 is provided below the water diversion groove 211, and the water receiving box 22 is connected to the water diversion groove 211 and the interior of the housing 1, and the residual liquid stored in the water diversion groove 211 can flow to the water receiving box 22, and then flow into the housing 1 from the water receiving box 22. The operator can set a container for receiving the residual liquid inside the housing 1, thereby completing the collection of the residual liquid, with a simple structure, convenient operation, and can prevent harm to the human body and pollution to the environment.

[0028] The sealed door 21 includes a door panel 212 and an outer frame 213. The edges of the door panel 212 are connected to the outer frame 213. The outer frame 213 is closer to the inside of the cleaning chamber 2 than the door panel 212. The bottom end of the outer frame 213 is connected to a water retaining strip 214. The water retaining strip 214 is arranged opposite to the door panel 212. The door panel 212, the outer frame 213 and the water retaining strip 214 enclose a water diversion groove 211. The water diversion groove 211 does not occupy extra space and can be hidden behind the sealed door 21. The structure is more concise. The water diversion groove 211 and the first opening 210 extend to both sides of the sealed door 21, and can collect residual liquid left on the entire sealed door 21. The collection range is wide.

[0029] See also Figure 3 and Figure 6 The upper side of the water retaining bar 214 is connected with an inclined plate 215, which is located in the water diversion groove 211 and tilted downward. The inclined plate 215 plays a role of guiding the residual liquid to flow into the water diversion groove 211, so as to better collect the residual liquid.

[0030] See also Figure 4 and Figure 6 A second opening 221 is provided above the water receiving box 22, and a drainage pipe 216 is provided on the outer frame 213. One end of the drainage pipe 216 is connected to the water diversion groove 211, and the other end is located above the second opening 221. The residual liquid in the water diversion groove 211 can be discharged into the water receiving box 22 through the drainage pipe 216.

[0031] A drain pipe 222 is provided on one side of the water receiving box 22 close to the interior of the box 1. One end of the drain pipe 222 is connected to the water receiving box 22, and the other end is connected to the interior of the box 1. The drain pipe 222 is used to discharge the residual liquid in the water receiving box 22 into a container provided in the box 1. The residual liquid in the water receiving box 22 is discharged to the interior of the box 1 through the drain pipe 222. The operator can place the container near the water outlet of the drain pipe 222 to collect the residual liquid in the container.

[0032] A guide plate 223 is provided inside the water receiving box 22. The guide plate 223 is connected to the inner wall of the water receiving box 22 on the side away from the drain pipe 222. The guide plate 223 is inclined downward on the side close to the drain pipe 222. The guide plate 223 plays a role of guiding. Due to the setting of the guide plate 223, water flowing into the water receiving box 22 from the drainage pipe 216 will be guided to the side close to the drain pipe 222, so that the water in the water receiving box 22 can be discharged from the drain pipe 222 in time.

[0033] The water receiving box 22 includes a clamping portion 224, and the water receiving box 22 is clamped to the housing 1 through the clamping portion 224; a bottom plate 23 is provided at the bottom of the cleaning chamber 2, and the clamping portion 224 abuts against the bottom plate 23. Due to the setting of the clamping portion 224, the water receiving box 22 can be detachably connected to the housing 1. There may be residual liquid hanging on the inner wall of the water receiving box 22, and the operator can remove the water receiving box 22 for cleaning.

[0034] The upper end of the clamping portion 224 is arranged as a downwardly inclined slope 225. Due to the arrangement of the slope 225, when the clamping portion 224 is clamped with the box body 1, the closer the clamping portion 224 is to the box body 1, the tighter the clamping connection between the two becomes.

[0035] The water receiving box 22 protrudes from the sealing door 21 on the side facing outward in the thickness direction of the sealing door 21 . When removing the water receiving box 22 , the operator can hold the protruding part by hand to facilitate the removal of the water receiving box 22 .

[0036] The water receiving box 22 includes a foldable side panel 226, which is located on the side of the water receiving box 22 away from the interior of the box body 1. The foldable side panel 226 includes a vertical panel 227 and an inclined panel 228. The vertical panel 227 is vertically arranged, and the inclined panel 228 is inclined. One side of the inclined panel 228 is connected to the lower end of the vertical panel 227, and the other side is inclined toward the direction close to the interior of the box body 1. This arrangement makes the lower end of the water receiving box 22 narrower than the upper end. Even if a small amount of residual liquid accumulates at the bottom of the water receiving box 22, it can reach the height of the drain pipe 222, and thus be discharged by the drain pipe 222, so that there will not be too much residual liquid at the bottom of the water receiving box 22.

[0037] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A semiconductor cleaning machine, characterized in that: It includes a box body, a cleaning chamber is provided in the box body, a sealing door is provided in the cleaning chamber, a water diversion trough is provided at the lower end of the sealing door, the water diversion trough is provided with a first opening, and the first opening faces the upper end of the sealing door; a water receiving box is provided below the water diversion trough, and the water receiving box is connected with the water diversion trough and the interior of the box body.

2. The semiconductor cleaning machine according to claim 1, characterized in that: The sealed door includes a door panel and an outer frame, the four edges of the door panel are connected to the outer frame, and the outer frame is closer to the cleaning chamber than the door panel, and the bottom end of the outer frame is connected to a water retaining bar, which is arranged opposite to the door panel, and the door panel, the outer frame and the water retaining bar enclose the water diversion groove.

3. The semiconductor cleaning machine according to claim 2, characterized in that: The upper side of the water retaining strip is connected with an inclined plate, the inclined plate is located in the water diversion groove, and the inclined plate is inclined downward.

4. The semiconductor cleaning machine according to claim 2, characterized in that: A second opening is arranged above the water receiving box, a drainage pipe is arranged on the outer frame, one end of the drainage pipe is communicated with the water diversion groove, and the other end of the drainage pipe is located above the second opening.

5. The semiconductor cleaning machine according to claim 1, characterized in that: A drain pipe is provided on one side of the water receiving box close to the interior of the box body. One end of the drain pipe is connected to the water receiving box, and the other end is connected to the interior of the box body. The drain pipe is used to discharge the residual liquid in the water receiving box into a container provided in the box body.

6. The semiconductor cleaning machine according to claim 5, characterized in that: A guide plate is arranged inside the water receiving box, and the guide plate is connected to the inner wall of the water receiving box at a side away from the drain pipe, and the guide plate is inclined downward at a side close to the drain pipe.

7. The semiconductor cleaning machine according to any one of claims 1 to 6, characterized in that: The water receiving box comprises a clamping portion, through which the water receiving box is clamped with the box body; a bottom plate is arranged at the bottom of the cleaning chamber, and the clamping portion abuts against the bottom plate.

8. The semiconductor cleaning machine according to claim 7, characterized in that: The upper end of the clamping portion is arranged as a downwardly inclined slope.

9. The semiconductor cleaning machine according to claim 7, characterized in that: The water receiving box protrudes from the sealing door on one side facing outward in the thickness direction of the sealing door.

10. The semiconductor cleaning machine according to claim 1, characterized in that: The water receiving box includes a folding side panel, which is located on a side of the water receiving box away from the interior of the box body. The folding side panel includes a vertical panel and an inclined panel, the vertical panel is vertically arranged, the inclined panel is inclined, and one side of the inclined panel is connected to the lower end of the vertical panel, and the other side is inclined toward the direction close to the interior of the box body.

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