Ejector pin head based on two-section jacking structure

Abstract

The utility model provides an ejector pin head based on a two-section jacking structure, which comprises a first shell, a second shell, an ejector pin shaft, an ejector pin lower end fixing seat, an ejector pin sealing cushion block, an ejector pin upper end fixing seat and an ejector pin cap. The contact area of the product and the blue film is reduced, F is reduced, the product is separated from the blue film through contact between a needle head and the product, product damage is avoided, and the yield is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging, in particular to an ejector pin head based on a two-stage ejection structure. Background Art

[0002] The ejector pin modules of the current die bonding equipment on the market are basically single-stage ejectors, which use a rotary motor to connect a cam mechanism or a voice coil motor to make a linear up and down motion, so that the internal single-stage mechanism is ejected upward, and the needle part directly contacts the product. According to P=F / S, when the product area is large, the contact area between the product and the blue film is also large, and the required F is also increased. However, when the needle directly contacts the product, S is small, and the generated P will increase, which is easy to damage the product. Utility Model Content

[0003] The utility model aims to provide a chip ejection device which can accurately control the temperature of the surface of a pin head to reduce the viscosity of a wafer film, so as to cope with a chip extraction scenario in which the chip is thin and the film viscosity is high.

[0004] To achieve the above purpose, the technical solution of the utility model is as follows:

[0005] A ejector head based on a two-stage jacking structure, the ejector head comprises a first shell, a second shell, an ejector shaft, an ejector lower end fixing seat, an ejector sealing pad, an ejector upper end fixing seat and an ejector cap, the ejector lower end fixing seat is provided with an ejector sealing pad, an ejector upper end fixing seat and an ejector cap in sequence, the second shell is arranged in a cavity of the ejector lower end fixing seat, the ejector sealing pad, the ejector upper end fixing seat and the ejector cap, the first shell is sleeved with the first shell, a first-stage top cover is arranged above the first shell, the first shell is provided with a spring adapter, the ejector shaft sleeve is arranged in the spring adapter, the ejector lower end fixing seat is provided with an axis frame, the axis frame is connected to the lower end of the ejector shaft, the ejector shaft is sleeved with a spring between the spring adapter and the axis frame, the upper end of the ejector shaft is connected with a needle frame through an adapter, an ejector is arranged on the needle frame, and an adsorption gas path for adsorbing chips is also provided in the ejector head.

[0006] Preferably, a first ball bushing is provided between the first shell and the second shell.

[0007] Preferably, a second ball bushing is provided between the first housing and the ejector shaft.

[0008] Preferably, the adsorption gas path includes a first channel, a second channel, a third channel and a fourth channel, the first channel is arranged in the lower end fixing seat of the ejector, the second channel is arranged in the ejector sealing pad, the third channel is arranged in the upper end fixing seat of the ejector, and the fourth channel is arranged in the upper end fixing seat of the ejector. A first cavity is arranged between the upper end fixing seat of the ejector and the second shell, a second cavity is arranged between the ejector cap, the first stage top cover and the first shell, the first channel is connected to the second channel, the third channel, the first cavity, the fourth channel and the second cavity in sequence, and an adsorption hole connected to the second cavity is opened on the ejector cap.

[0009] Preferably, a second sealing ring is provided between the fixing seat at the upper end of the ejector pin and the ejector cap.

[0010] Preferably, a first sealing ring is provided between the ejector pin sealing pad and the ejector pin upper end fixing seat.

[0011] Preferably, a positioning pin is provided on the shaft frame.

[0012] The utility model changes the single-stage ejection into a two-stage ejection, firstly uses a small boss to contact the product to reduce the contact area between the product and the blue film and reduce F, and then uses a needle to contact the product to separate it from the blue film, thereby avoiding product damage and improving the yield.

[0013] The rotary motor of the bottom ejector seat of the utility model cooperates with the cam mechanism / voice coil motor to provide the power for linear up and down movement. The power transfer end part contacts the shaft frame, so that the shaft frame, positioning pin, spring, ejector shaft, spring adapter, first shell, adapter seat, needle frame, first stage top cover and ejector realize the first stage of lifting action together. When the second plane b of the first stage top cover contacts the first plane a of the ejector cap, the first stage of lifting action ends. The first stage top cover, the first shell and the spring adapter are already in the highest position, but because the power continues to be transmitted, the power will overcome the elastic force of the spring and continue to make the shaft frame, positioning pin, spring (which is continuously compressed at this time), ejector shaft, adapter seat, needle frame and ejector continue to do the lifting action. When the fourth surface of the needle frame contacts the third surface of the first stage top cover, the second stage of lifting action ends. At this time, the needle tip part of the ejector is higher than the uppermost surface of the first stage top cover, realizing the second contact with the product. The reset movement is completed by the joint action of the spring and the decline of its own gravity. When the shaft frame contacts the lower end fixing seat of the ejector again, it forms a hard limit and the reset is completed. At this time, the three forces of spring force, ball bushing friction force, and internal parts' own gravity are balanced. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural cross-sectional view of this embodiment.

[0015] Figure 2 Schematic diagram of the gas path structure of this embodiment.

[0016] Figure 3 yes Figure 1 Enlarged schematic diagram at L. DETAILED DESCRIPTION

[0017] The utility model is described in detail below with reference to the accompanying drawings. Example 1

[0018] like Figure 1-3 As shown, a two-stage jacking structure based on the ejector head, the ejector head includes a first shell 9, a second shell 11, an ejector shaft 5, an ejector lower end fixing seat 1, an ejector sealing pad 6, an ejector upper end fixing seat 10 and an ejector cap 15, the ejector lower end fixing seat 1 is provided with an ejector sealing pad 6, an ejector upper end fixing seat 10 and an ejector cap 15 in sequence, the second shell 11 is arranged in the cavity of the ejector lower end fixing seat 1, the ejector sealing pad 6, the ejector upper end fixing seat 10 and the ejector cap 15, and the second shell 11 is sleeved with a first shell 9, a first-stage top cover 18 is provided above the first shell 9, the first shell 9 is provided with a spring adapter 7, the ejector shaft 5 is sleeved in the spring adapter 7, a shaft frame 2 is provided on a fixing seat 1 at the lower end of the ejector, the shaft frame 2 is connected to the lower end of the ejector shaft 5, the ejector shaft 5 is sleeved with a spring between the spring adapter 7 and the shaft frame 2, the upper end of the ejector shaft 5 is connected to a needle frame 17 through a transfer seat 16, an ejector 19 is provided on the needle frame 17, and an adsorption air path for adsorbing the chip is also provided in the ejector head.

[0019] Preferably, a first ball bushing 12 is provided between the first housing 9 and the second housing 11 .

[0020] Preferably, a second ball bushing 13 is provided between the first housing 9 and the ejector shaft 5 .

[0021] Preferably, the adsorption gas path includes a first channel A, a second channel B, a third channel C and a fourth channel E. The first channel A is arranged in the ejector lower end fixing seat 1, the second channel B is arranged in the ejector sealing pad 6, the third channel C is arranged in the ejector upper end fixing seat 10, and the fourth channel E is arranged in the ejector upper end fixing seat 10. A first cavity D is arranged between the ejector upper end fixing seat 10 and the second shell 11, and a second cavity F is arranged between the ejector cap 15 and the first stage top cover 18 and the first shell 9. The first channel A is connected to the second channel B, the third channel C, the first cavity D, the fourth channel E and the second cavity F in sequence, and an adsorption hole connected to the second cavity F is opened on the ejector cap 15.

[0022] Preferably, a second sealing ring 14 is provided between the ejector upper end fixing seat 10 and the ejector cap 15 .

[0023] Preferably, a first sealing ring 8 is provided between the ejector sealing pad 6 and the ejector upper end fixing seat 10 .

[0024] Preferably, a positioning pin 3 is provided on the shaft frame 2 .

[0025] In this embodiment, the vacuum gas source enters from the bottom fixing seat 1 of the ejector pin, flows through the first channel A, the second channel B, the third channel C, enters the first cavity D, then flows through the first cavity D, the fourth channel E, enters the second cavity F, and finally contacts the blue film at the adsorption hole on the top of the ejector cap 15 to achieve vacuum adsorption. The first sealing ring 8 and the second sealing ring 14 play the role of sealing / preventing vacuum leakage.

[0026] The rotary motor of the bottom ejector seat of the utility model cooperates with the cam mechanism / voice coil motor to provide the power for linear up and down movement. The power transfer end part contacts the shaft frame 2, so that the shaft frame 2, the positioning pin 3, the spring 4, the ejector shaft 5, the spring adapter 7, the first shell 9, the adapter seat 16, the needle frame 17, the first stage top cover 18 and the ejector 19 realize the first stage of jacking action together. When the second plane b of the first stage top cover 18 contacts the first plane a of the ejector cap 15, the first stage of jacking action ends. The first stage top cover 18, the first shell 9 and the spring adapter 7 are already in the highest position, but because the power continues to be transmitted, the power will overcome the elastic force of the spring 4 and continue to compress the shaft frame 2, the positioning pin 3, the spring 4, and the ejector shaft 5, the adapter seat 16, the needle frame 17 and the ejector 19 continue to do the jacking action. When the fourth surface d of the needle frame 17 contacts the third surface c of the first stage top cover 18, the second stage of jacking action ends. At this time, the tip of the ejector pin 19 is higher than the uppermost surface of the top cover 18 in the first stage, achieving the second contact with the product. The reset movement is completed by the combined action of the spring 4 and the drop of its own gravity. When the shaft frame 2 contacts the lower end fixing seat of the ejector pin 19 again, a hard limit is formed and the reset is completed. At this time, the spring elastic force, the friction force of the ball bushing, and the self-gravity of the internal parts form a balance.

[0027] Compared with the conventional ejector pins, there is still a risk of damaging the product when processing small chips below 100 um in this embodiment, while the two-stage ejector pins of this embodiment can safely process large chips above 40 um.

[0028] The above is a detailed description of the utility model in combination with specific embodiments, and it cannot be determined that the specific implementation methods of the present invention are limited to these descriptions. For ordinary technicians in the technical field to which the utility model belongs, making several equivalent substitutions or obvious modifications without departing from the concept of the present invention, and having the same performance or use, should be regarded as belonging to the patent protection scope of the utility model determined by the submitted claims.

Claims

1. A two-stage jacking structure based on a pin head, characterized in that: The ejector head comprises a first housing (9), a second housing (11), an ejector shaft (5), an ejector lower end fixing seat (1), an ejector sealing pad (6), an ejector upper end fixing seat (10) and an ejector cap (15); The ejector lower end fixing seat (1) is provided with an ejector sealing pad (6), an ejector upper end fixing seat (10) and an ejector cap (15) in sequence; The second housing (11) is arranged in the cavity of the ejector lower end fixing seat (1), the ejector sealing pad (6), the ejector upper end fixing seat (10) and the ejector cap (15); The second outer shell (11) is provided with a first outer shell (9) inside. A first-stage top cover (18) is provided above the first housing (9); The first housing (9) is provided with a spring adapter (7), and the ejector shaft (5) is sleeved in the spring adapter (7); A shaft frame (2) is provided on the fixing seat (1) at the lower end of the ejector pin, and the shaft frame (2) is connected to the lower end of the ejector pin shaft (5); The ejector shaft (5) is sleeved with a spring between the spring adapter (7) and the shaft frame (2); The upper end of the ejector shaft (5) is connected to a needle frame (17) via an adapter seat (16); an ejector (19) is provided on the needle frame (17); An adsorption gas path for adsorbing the chip is also arranged in the ejector pin head.

2. The ejector head based on the two-stage jacking structure according to claim 1 is characterized in that: A first ball bushing (12) is provided between the first housing (9) and the second housing (11).

3. The ejector head based on the two-stage jacking structure according to claim 2 is characterized in that: A second ball bushing (13) is provided between the first housing (9) and the ejector shaft (5).

4. The ejector head based on the two-stage jacking structure according to claim 3 is characterized in that: The adsorption gas path includes a first channel (A), a second channel (B), a third channel (C) and a fourth channel (E); The first channel (A) is arranged in a fixing seat (1) at the lower end of the ejector pin; The second channel (B) is arranged in the ejector pin sealing pad (6); The third channel (C) is arranged in the fixing seat (10) at the upper end of the ejector pin; The fourth channel (E) is arranged in the fixing seat (10) at the upper end of the ejector pin; A first cavity (D) is provided between the ejector upper end fixing seat (10) and the second housing (11); A second cavity (F) is provided between the ejector cap (15), the first stage top cover (18) and the first housing (9); The first channel (A) is connected to the second channel (B), the third channel (C), the first cavity (D), the fourth channel (E) and the second cavity (F) in sequence; The ejector cap (15) is provided with an adsorption hole which is in communication with the second cavity (F).

5. The ejector head based on the two-stage jacking structure according to claim 4 is characterized in that: A second sealing ring (14) is provided between the ejector upper end fixing seat (10) and the ejector cap (15).

6. The ejector head based on the two-stage jacking structure according to claim 5 is characterized in that: A first sealing ring (8) is provided between the ejector pin sealing pad (6) and the ejector pin upper end fixing seat (10).

7. The ejector head based on the two-stage jacking structure according to claim 6 is characterized in that: A positioning pin (3) is provided on the shaft frame (2).

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