Quartz boat capable of improving diffusion performance

Abstract

The utility model discloses a quartz boat for improving diffusion performance, which comprises two panels and a plurality of connecting rods for connecting the two panels, each of the two panels comprises two symmetrical semi-circular rings, the two semi-circular rings are connected through a cross rod, cross-shaped grooves are arranged in the semi-circular rings, inverted T-shaped keys are arranged in the cross-shaped grooves close to the protruding side, and the cross-shaped keys are connected with the cross-shaped grooves. A hollow inner-layer pipe extends outwards close to the sunken side, the two ends of the lower surface of the inverted-T-shaped key are connected with the cross-shaped groove through first springs, a long rod is fixedly connected to the position, between the two first springs, of the lower surface of the inverted-T-shaped key, the other end of the long rod makes contact with a telescopic buckle assembly, and the telescopic buckle assembly and the long rod are packaged in the inner-layer pipe together; an outer-layer pipe is sleeved outside the inner-layer pipe; the connecting rod is sleeved with a plurality of telescopic fixing lantern rings. The design of the telescopic buckle assembly enables the quartz boat to load silicon wafers with different sizes, and the telescopic fixing lantern ring can load silicon wafers with different thicknesses, so that the practicability of the quartz boat is greatly improved.

Description

Technical field:

[0001] The utility model relates to the field of quartz boat manufacturing, in particular to a quartz boat with improved diffusion performance. Background technology:

[0002] Quartz boat is also called quartz glass. The main component of quartz glass is silicon dioxide. Generally, the silicon dioxide content of quartz glass is 99.999%. Quartz glass has excellent optical properties. It not only has excellent visible light transmittance, but also transmits ultraviolet light and infrared light. The existing quartz boats are generally equipped with slots with fixed spacing. The slot spacing cannot be adjusted on the same quartz boat according to the thickness of the silicon wafer. In addition, most of the cylindrical quartz boats have a fixed diameter and can only fix silicon wafers of a single size, which is of low practicality. Utility model content:

[0003] The utility model provides a quartz boat with improved diffusion performance, which solves the problem in the prior art that the quartz boat is only suitable for loading silicon wafers of fixed sizes.

[0004] The technical solution measures of the utility model are as follows: a quartz boat with improved diffusion performance, comprising two panels and a plurality of connecting rods connecting the two panels, the two panels each comprising two symmetrical semicircular rings, wherein the two ends of the two semicircular rings on the same side are fixedly connected with a cross bar perpendicular to the connecting rod, and the two ends of the two semicircular rings on the other side are slidably connected with the cross bar, a cross groove is opened inside one of the semicircular rings, an inverted T-shaped button is installed in the cross groove near the convex side of the semicircular ring, and a hollow inner tube extends outward near the concave side of the semicircular ring, the two ends of the lower surface of the inverted T-shaped button are connected to the cross groove by a first spring, and a long rod is also fixedly connected to the lower surface of the inverted T-shaped button, the long rod is located between the two first springs, and the other end of the long rod contacts with a telescopic buckle assembly, the telescopic buckle assembly and the long rod are encapsulated in the inner tube together, the inner tube is covered with an outer tube, and the end of the outer tube away from the inverted T-shaped button is fixedly connected to the other symmetrical semicircular ring;

[0005] The telescopic buckle assembly includes a locking block and a locking block placement seat, a round head pin is fixedly connected to one side surface of the locking block, and a second spring is fixedly connected to the other opposite side surface, and the other two side surfaces are formed with symmetrical inclined elliptical grooves, the round head pin extends from the locking block placement seat, and the other end of the second spring is connected to the locking block placement seat, and matching grooves are also symmetrically provided on both sides of the locking block placement seat, and the matching groove and the elliptical groove are on the same side, and the matching groove is matched with an inverted U-shaped block, and extensions are formed on both sides of the inverted U-shaped block, and a transverse portion is formed at the bottom end of the extension portion, and the transverse portion extends into the matching groove and is fixed in the elliptical groove.

[0006] Preferably, a plurality of fixing rings are sleeved on the connecting rod, and the fixing rings include two circular rings and a third spring connecting the circular rings, and the fixing rings are wrapped with a soft material.

[0007] Preferably, support pads are fixedly connected to the ends of the cross bars.

[0008] Preferably, a first latch hole is provided on the inner tube corresponding to the telescopic buckle assembly, and a plurality of second latch holes are provided on the outer tube.

[0009] Preferably, the cross groove passes through the semicircular ring from top to bottom.

[0010] The beneficial effects of the utility model are:

[0011] 1. The utility model designs a telescopic buckle assembly. After pressing the inverted T-shaped button, the round pin of the telescopic buckle assembly retracts from the second pin hole. After pulling the semicircular ring to slide to a suitable position on the crossbar, the button is released to allow the round pin to re-engage the second pin hole for fixing. This design broadens the size of silicon wafers that can be loaded on the quartz boat. At the same time, a fixing ring with a spring is designed so that the spacing between the fixing rings can be changed according to the thickness of the silicon wafer, and the fixing ring does not need to be disassembled. This greatly improves the scope of application of the quartz boat, thereby improving its practicality.

[0012] 2. The utility model is designed to fix support pads at both ends of the crossbar, so that the quartz boat can be placed vertically with the panel as the bottom surface, or horizontally with the support pads as the bottom surface. This design allows the quartz boat to be placed in a suitable manner according to the direction of the airflow. Description of the drawings:

[0013] Figure 1 It is a schematic diagram of the structure of the utility model.

[0014] Figure 2 This is a schematic diagram of the outer tube structure of the utility model.

[0015] Figure 3 This is a schematic diagram of the structure of the locking block placement seat of the utility model.

[0016] Figure 4 This is a schematic diagram of the locking block structure of the utility model.

[0017] Figure 5 It is a detailed schematic diagram of AA of the utility model.

[0018] Figure 6 This is a schematic diagram of the fixing ring structure of the utility model.

[0019] In the figure: 1. panel; 11. semicircular ring; 12. cross bar; 13. cross groove; 14. inverted T-shaped button; 15. inner tube; 16. first spring; 17. long rod; 18. first latch hole; 19. outer tube; 20. second latch hole; 2. connecting rod; 21. fixing ring; 211. circular ring; 212. third spring; 3. telescopic buckle assembly; 31. locking block; 32. locking block placement seat; 33. round head pin; 34. second spring; 35. elliptical groove; 36. matching groove; 37. inverted U-shaped block; 38. extension part; 39. transverse part. Specific implementation method:

[0020] Combined with Figure 1 The utility model is further described as a quartz boat with improved diffusion performance.

[0021] The utility model provides a quartz boat for improving diffusion performance, comprising two panels 1 and a plurality of connecting rods 2 connecting the two panels 1, wherein the two panels 1 each comprise two symmetrical semicircular rings 11, wherein the two ends of the two semicircular rings 11 on the same side are fixedly connected with a cross bar 12 which is perpendicular to the connecting rod 2, and the two ends of the two semicircular rings 11 on the other side are slidably connected with the cross bar 12, a cross groove 13 is provided inside one of the semicircular rings 11, an inverted T-shaped button 14 is installed on the convex side of the semicircular ring 11 in the cross groove 13, and an inverted T-shaped button 14 is installed on the concave side of the semicircular ring 11 near the concave side of the semicircular ring 11 A hollow inner tube 15 is extended outside, and the two ends of the lower surface of the inverted T-shaped button 14 are connected to the cross groove 13 through the first spring 16. A long rod 17 is also fixed to the lower surface of the inverted T-shaped button 14. The long rod 17 is located between the two first springs 16. The other end of the long rod 17 contacts the telescopic buckle assembly 3. The telescopic buckle assembly 3 and the long rod 17 are encapsulated in the inner tube 15 together. The inner tube 15 is connected with an outer tube 19. The end of the outer tube 19 away from the inverted T-shaped button 14 is fixed to another symmetrical semicircular ring 11;

[0022] The telescopic buckle assembly 3 includes a locking block 31 and a locking block placement seat 32. A round head pin 33 is fixedly connected to one side surface of the locking block 31, and a second spring 34 is fixedly connected to the other opposite side surface. The other two side surfaces are formed with symmetrical inclined elliptical grooves 35. The round head pin 33 extends from the locking block placement seat, and the other end of the second spring 34 is connected to the locking block placement seat 32. Matching grooves 36 are also symmetrically provided on both sides of the locking block placement seat 32. The matching grooves 36 and the elliptical groove 35 are on the same side. The matching grooves 36 are matched with inverted U-shaped blocks 37. Extensions 38 are formed on both sides of the inverted U-shaped block 37. A transverse portion 39 is formed at the bottom end of the extension portion 38. The transverse portion 39 extends into the matching groove 36 and is fixed in the elliptical groove 35.

[0023] Furthermore, a plurality of fixing rings 21 are sleeved on the connecting rod 2 . The fixing rings 21 include two circular rings 211 and a third spring 212 connecting the circular rings 211 . The fixing rings 21 are wrapped with a soft material.

[0024] Furthermore, support pads 121 are fixedly connected to the ends of the crossbars 12 .

[0025] Furthermore, a first pin hole 18 is formed on the inner tube 15 corresponding to the telescopic buckle assembly 3 , and a plurality of second pin holes 20 are formed on the outer tube 19 .

[0026] Furthermore, the cross groove 13 passes through the semicircular ring 11 from top to bottom.

[0027] The working principle of the utility model is as follows: the quartz boat designed by the utility model is used to load silicon wafers. According to the size of the silicon wafers, first, the inverted T-shaped button 14 is pressed, and the long rod 17 connected to the inverted T-shaped button 14 is pressed down to apply force to the inverted U-shaped block 37. The downward force provides a downward force to the inverted U-shaped block, but the inclined elliptical groove 35 converts the downward force into a lateral force to retract the locking block 31, and the round head pin 33 is retracted from the second pin hole 20, so that the inner tube 15 can move in the outer tube 19. Due to the two semicircular rings 11 slidably connected to the cross bar 12 They are connected by a connecting rod 2, so pulling one half of the ring 11 will also drive the other half of the ring 11 to slide together. After pulling the half ring 11 to a position suitable for loading silicon wafers, release the inverted T-shaped button 14. Under the action of the second spring 34, the round head pin 33 extends out to clamp the outer tube 19 and fix it. The quartz boat is formed into a loading groove by a number of fixing rings 21. A third spring 212 is installed in the fixing ring 21 to adjust the distance between the fixing rings 21. The spacing between the fixing rings 21 is adjusted according to the thickness of the silicon wafer, and then the silicon wafer is placed in the loading groove and fixed.

[0028] The above description is only the preferred embodiment of the present utility model. All other embodiments obtained by ordinary technicians in this field without making creative work should fall within the scope of protection of the present utility model.

Claims

1. A quartz boat for improving diffusion performance, comprising two panels (1) and a plurality of connecting rods (2) connecting the two panels (1), characterized in that: The two panels (1) each comprise two symmetrical semicircular rings (11), wherein the two semicircular rings (11) on the same side have two ends fixedly connected to a cross bar (12) perpendicular to the connecting rod (2), and the two semicircular rings (11) on the other side have two ends slidably connected to the cross bar (12), a cross groove (13) is provided inside one of the semicircular rings (11), an inverted T-shaped button (14) is installed in the cross groove (13) near the convex side of the semicircular ring (11), and a hollow inner tube (15) extends outward near the concave side of the semicircular ring (11), and the inverted T-shaped button (14) is provided below the surface. The two ends of the surface are connected to the cross groove (13) through the first spring (16), and the lower surface of the inverted T-shaped button (14) is also fixedly connected to a long rod (17), the long rod (17) is located between the two first springs (16), and the other end of the long rod (17) contacts a telescopic buckle assembly (3), and the telescopic buckle assembly (3) and the long rod (17) are encapsulated together in an inner tube (15), and the inner tube (15) is connected to an outer tube (19), and the end of the outer tube (19) away from the inverted T-shaped button (14) is fixedly connected to another symmetrical semicircular ring (11); The telescopic buckle assembly (3) comprises a locking block (31) and a locking block placement seat (32). A round pin (33) is fixedly connected to one side surface of the locking block (31), and a second spring (34) is fixedly connected to the other side surface opposite thereto. The other two side surfaces are formed with symmetrical inclined elliptical grooves (35). The round pin (33) extends from the locking block placement seat. The other end of the second spring (34) is connected to the locking block placement seat (32). Matching grooves (36) are also symmetrically provided on both sides of the locking block placement seat (32). The matching grooves (36) and the elliptical groove (35) are located on the same side. The matching grooves (36) are matched with an inverted U-shaped block (37). Extensions (38) are formed on both sides of the inverted U-shaped block (37). A transverse portion (39) is formed at the bottom end of the extension portion (38). The transverse portion (39) extends into the matching groove (36) and is fixed in the elliptical groove (35).

2. A quartz boat for improving diffusion performance according to claim 1, characterized in that: A plurality of fixing collars (21) are sleeved on the connecting rod (2), the fixing collars (21) comprising two circular rings (211) and a third spring (212) connecting the circular rings (211), and the fixing collars (21) are wrapped with a soft material.

3. The quartz boat for improving diffusion performance according to claim 1, characterized in that: Support pads (121) are fixedly connected to the ends of the cross bars (12).

4. The quartz boat for improving diffusion performance according to claim 1, characterized in that: A first pin hole (18) is provided on the inner tube (15) at a position corresponding to the telescopic buckle assembly (3), and a plurality of second pin holes (20) are provided on the outer tube (19).

5. The quartz boat for improving diffusion performance according to claim 1, characterized in that: The cross groove (13) passes through the semicircular ring (11) from top to bottom.

Images