Silicon carbide crystal ingot cleaning device
By designing a silicon carbide ingot cleaning device, spraying wax and ultrasonic cleaning liquid to automatically remove the bonding wax and chip liquid on the surface of the ingot, the problems of high labor intensity and scratch risk in the prior art are solved, and automated cleaning is achieved, and efficiency and safety are improved.
Patent Information
- Application Number
- CN202421114012.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-21
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-05-21
AI Technical Summary
In the prior art, after repair of silicon carbide ingots, it is necessary to manually wipe the chip liquid and scrape off the attached adhesive wax, resulting in high manual labor intensity and easy scratching of the ingots.
A silicon carbide ingot cleaning device is designed, including a storage base, a spraying mechanism, an ultrasonic cleaning mechanism and a driving mechanism. The bonding wax and chip liquid on the surface of the ingot is automatically removed by spraying a wax remover and performing physical or chemical reactions using ultrasonic cleaning solution.
Automatic cleaning of bonding wax and chip liquid on the surface of silicon carbide ingots is achieved, reducing the labor intensity of the operator, saving labor, and avoiding scrapers from scratching the ingots.
Smart Images
Figure CN222551529U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of silicon carbide ingot cleaning, and in particular, to a silicon carbide ingot cleaning device. Background Art
[0002] After the growth of the silicon carbide ingot is completed, it needs to be repaired by plane, rounding, main edge and other operations before slicing. During the repair operation, the operator will bond the silicon carbide ingot to the tooling. After the repair operation, cutting fluid and bonding wax will adhere to the surface of the silicon carbide ingot.
[0003] In order to ensure the subsequent slicing effect of the silicon carbide ingot, in the related technology, the operator will use alcohol to wipe the cutting liquid of the silicon carbide ingot, and use a scraper to scrape off the adhesive wax attached to the surface of the silicon carbide ingot. However, this method is relatively labor-intensive and easily causes the silicon carbide ingot to be scratched by the scraper. Utility Model Content
[0004] The purpose of the present disclosure is to provide a silicon carbide ingot cleaning device to at least partially solve the problems existing in the related art.
[0005] In order to achieve the above-mentioned objectives, the present disclosure provides a silicon carbide ingot cleaning device, comprising a frame and a storage seat, a spraying mechanism, an ultrasonic cleaning mechanism and a driving mechanism respectively installed on the frame; the storage seat is used to place the silicon carbide ingot; the spraying mechanism is used to spray a dewaxing agent onto the silicon carbide ingot on the storage seat; the ultrasonic cleaning mechanism contains a cleaning liquid for cleaning the silicon carbide ingot sprayed with the dewaxing agent; and the driving mechanism is connected to the storage seat for driving the storage seat to drive the silicon carbide ingot to move between the spraying mechanism and the ultrasonic cleaning mechanism.
[0006] Optionally, the ultrasonic cleaning mechanism has a box for containing cleaning liquid, the spraying mechanism and the storage seat are respectively arranged on opposite side walls of the box, and the driving mechanism is used to drive the storage seat to move along the height direction of the box to allow the silicon carbide ingot to enter and exit the cleaning liquid.
[0007] Optionally, the storage seat includes a seat body and a support ring, the support ring is arranged on the top surface of the seat body, the silicon carbide ingot is placed on the support ring, and a through hole is provided at the bottom of the seat body, and the cleaning liquid enters the support ring after passing through the through hole.
[0008] Optionally, the bottom of the seat body is circular in structure, and the through holes are multiple in number and are respectively arranged at intervals along the radial and circumferential directions of the bottom of the seat body.
[0009] Optionally, the storage seat further includes a baffle, which is an arc-shaped plate arranged in the circumferential direction of the seat body, and two adjacent baffles are arranged at intervals.
[0010] Optionally, the driving mechanism includes a mounting rod and a slide rail, the slide rail extends along the height direction of the box of the ultrasonic cleaning mechanism, both ends of the mounting rod can be slidably installed in the slide rail up and down, the storage seat is hung on the mounting rod, and the mounting rod is used to drive the storage seat to move up and down.
[0011] Optionally, the number of the slide rails is two, and they are spaced apart on both sides of the length direction of the box body of the ultrasonic cleaning mechanism. The driving mechanism also includes two sliders, and the two sliders are respectively slidably set on the two slide rails. The two ends of the mounting rod are respectively slidably connected to the two slide rails through the two sliders.
[0012] Optionally, the lug of the storage seat is provided with a hook, and the mounting rod is hookedly connected to the hook.
[0013] Optionally, there are multiple storage seats, which are spaced apart on the side walls of the box of the ultrasonic cleaning mechanism.
[0014] Optionally, the spraying mechanism includes a pipeline and a nozzle connected to the pipeline, the nozzle is located higher than the liquid level of the cleaning liquid in the box, there are multiple nozzles, and they are arranged in a one-to-one correspondence with the multiple storage seats.
[0015] The technical solution provided by the embodiments of the present disclosure may have the following beneficial effects:
[0016] The storage seat, ultrasonic cleaning mechanism, driving mechanism and spraying mechanism are respectively installed on the frame, and the silicon carbide ingot is placed on the storage seat. The driving mechanism drives the storage seat to move the silicon carbide ingot to the spraying mechanism. The spraying mechanism sprays a dewaxing agent on the surface of the silicon carbide ingot. The dewaxing agent is used to remove the adhesive wax on the surface of the silicon carbide ingot. The driving mechanism can also drive the storage seat to move the silicon carbide ingot to the ultrasonic cleaning mechanism. The cleaning liquid of the ultrasonic cleaning mechanism causes the adhesive wax and chip liquid on the surface of the silicon carbide ingot to fall off through physical or chemical reactions and ultrasonic vibrations. By automatically cleaning the adhesive wax and chip liquid on the surface of the silicon carbide ingot, the labor intensity of the operator manually wiping the chip liquid and scraping the adhesive wax is reduced, labor is saved, and the scraper is prevented from scratching the silicon carbide ingot.
[0017] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings:
[0019] Figure 1 It is a schematic diagram of a silicon carbide ingot cleaning device according to an exemplary embodiment of the present disclosure.
[0020] Figure 2 It is a schematic diagram of the use of a storage seat in a silicon carbide ingot cleaning device according to an exemplary embodiment of the present disclosure.
[0021] Figure 3 It is a top view of a schematic diagram of the use of a storage seat in a silicon carbide ingot cleaning device according to an exemplary embodiment of the present disclosure.
[0022] Figure 4 yes Figure 3 Cross-sectional view along the AA direction.
[0023] Figure 5 It is a schematic diagram of a storage seat in a silicon carbide ingot cleaning device according to an exemplary embodiment of the present disclosure.
[0024] Description of Reference Numerals
[0025] 10. Silicon carbide ingot; 100. Storage seat; 110. Seat body; 111. Through hole; 120. Support ring; 130. Baffle; 140. Lug; 200. Spraying mechanism; 210. Pipeline; 220. Nozzle; 300. Ultrasonic cleaning mechanism; 400. Driving mechanism; 410. Slide rail; 510. Mounting rod. DETAILED DESCRIPTION
[0026] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.
[0027] In the present disclosure, unless otherwise stated, directional words such as "up, down, left, right" are defined according to the direction of the silicon carbide ingot cleaning device. Figure 1 In the drawing direction, "inside" and "outside" are defined according to the outline of the corresponding parts. In addition, when the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.
[0028] See also Figure 1 and Figure 2, a silicon carbide ingot cleaning device provided in an embodiment of the present disclosure, the silicon carbide ingot cleaning device may include a frame and a storage seat 100, a spraying mechanism 200, an ultrasonic cleaning mechanism 300 and a driving mechanism 400 respectively installed on the frame. Among them, the storage seat 100 can be used to place the silicon carbide ingot 10. The spraying mechanism 200 can be used to spray a dewaxing agent on the silicon carbide ingot 10 on the storage seat 100. The ultrasonic cleaning mechanism 300 can contain a cleaning liquid for cleaning the silicon carbide ingot 10 sprayed with the dewaxing agent, and the ultrasonic cleaning mechanism 300 is an ultrasonic cleaning machine, which is a prior art and is not described in detail here. The driving mechanism 400 can be connected to the storage seat 100 to drive the storage seat 100 to drive the silicon carbide ingot 10 to move between the spraying mechanism 200 and the ultrasonic cleaning mechanism 300.
[0029] It can be understood that the driving mechanism 400 drives the placement seat 100 to drive the silicon carbide ingot 10 to move to the spraying mechanism 200, and the spraying mechanism 200 sprays a wax remover onto the surface of the silicon carbide ingot 10, and the wax remover is used to remove the adhesive wax on the surface of the silicon carbide ingot 10. The driving mechanism 400 can also drive the placement seat 100 to drive the silicon carbide ingot 10 to move to the ultrasonic cleaning mechanism 300, and the cleaning liquid of the ultrasonic cleaning mechanism 300 causes the adhesive wax and cutting liquid on the surface of the silicon carbide ingot 10 to fall off through physical or chemical reactions and ultrasonic vibrations. The user can adjust the vibration frequency of the ultrasonic wave to avoid the ultrasonic wave from causing greater damage to the surface of the silicon carbide ingot 10 during the process of vibrating the adhesive wax and cutting liquid, thereby ensuring the surface completeness of the silicon carbide ingot 10. By automatically cleaning the adhesive wax and cutting liquid on the surface of the silicon carbide ingot 10, the labor intensity of operators manually wiping the cutting liquid and scraping the adhesive wax is reduced, the manual operation time and the risks generated during the cleaning process are reduced, and the scraper is prevented from scratching the silicon carbide ingot 10.
[0030] In one embodiment, see Figure 1 The ultrasonic cleaning mechanism 300 has a box for containing cleaning liquid, the spraying mechanism 200 and the storage seat 100 can be respectively arranged on the opposite side walls of the box, and the driving mechanism 400 can be used to drive the storage seat 100 to move along the height direction of the box to allow the silicon carbide ingot 10 to enter and exit the cleaning liquid.
[0031] It is understandable that the spraying mechanism 200 first sprays the dewaxing agent onto the silicon carbide ingot 10. After standing still for 30 seconds, the driving mechanism 400 drives the storage seat 100 to drive the silicon carbide ingot 10 to move downward to extend into the cleaning liquid. After the cleaning is completed, the driving mechanism 400 can also drive the storage seat 100 to move upward to make the silicon carbide ingot 10 leave the cleaning liquid. The spraying mechanism 200 and the storage seat 100 are installed on the housing of the ultrasonic cleaning mechanism 300. A part of the dewaxing agent sprayed by the spraying mechanism 200 can fall on the surface of the silicon carbide ingot 10, and another part of the dewaxing agent will fall into the cleaning liquid of the ultrasonic cleaning mechanism 300, which reduces the burden of the user to clean this part of the dewaxing agent. At the same time, this part of the dewaxing agent can help the cleaning liquid remove the adhesive wax on the surface of the silicon carbide ingot 10.
[0032] In this implementation, see Figures 3 to 5 The storage seat 100 may include a seat body 110 and a support ring 120. The support ring 120 may be arranged on the top surface of the seat body 110. The silicon carbide ingot 10 may be placed on the support ring 120. A through hole 111 may be arranged at the bottom of the seat body 110. The cleaning liquid may enter the support ring 120 after passing through the through hole 111.
[0033] It is understandable that when the driving mechanism 400 drives the storage seat 100 to move downward into the cleaning liquid, part of the cleaning liquid will enter the support ring 120 through the through hole 111, so that the cleaning liquid and ultrasonic waves can contact the bottom of the silicon carbide ingot 10, ensuring the cleaning effect of the bottom of the silicon carbide ingot 10.
[0034] For further information, see Figures 2 to 5 The bottom of the seat body 110 can be constructed in a circular shape, and the number of through holes 111 can be multiple, and they can be respectively arranged at radial and circumferential intervals along the bottom of the seat body 110. By setting multiple through holes 111, the speed at which the cleaning liquid enters the support ring 120 can be increased, thereby improving the cleaning speed of the bottom of the silicon carbide ingot 10.
[0035] Of course, in other embodiments, the support ring 120 may be provided with a plurality of notches in the circumference thereof, and the cleaning liquid may enter the support ring 120 through the plurality of notches so that the cleaning liquid can contact the bottom of the silicon carbide ingot 10 , thereby ensuring the cleaning effect of the bottom of the silicon carbide ingot 10 .
[0036] In this implementation, see Figure 2 and Figure 5 The storage seat 100 may further include a baffle 130 , which may be an arc-shaped plate arranged in the circumference of the seat body 110 , and two adjacent baffles 130 are arranged at intervals to prevent the silicon carbide ingot 10 from sliding out of the seat body 110 from the bottom of the seat body 110 .
[0037] In one embodiment, see Figure 1 The driving mechanism 400 may include a mounting rod 510 and a slide rail 410. The slide rail 410 extends along the height direction of the box of the ultrasonic cleaning mechanism 300. Both ends of the mounting rod 510 are slidably installed in the slide rail 410 through sliders. The storage seat 100 is hung on the mounting rod 510, and the mounting rod 510 drives the storage seat 100 to move up and down.
[0038] By setting the slider and the slide rail 410, the friction between the storage seat 100 and the side wall of the box of the ultrasonic cleaning mechanism 300 can be reduced, so that the storage seat 100 can realize the lifting function. When the slider drives the mounting rod 510 to slide downward, the storage seat 100 will move downward so that the silicon carbide crystal ingot 10 can be extended into the cleaning liquid; when the slider drives the mounting rod 510 to move upward, the storage seat 100 will move upward so that the silicon carbide crystal ingot 10 can leave the cleaning liquid.
[0039] For further information, see Figure 1 The number of slide rails 410 can be two, and they can be spaced apart on both sides of the length direction of the box of the ultrasonic cleaning mechanism 300. The driving mechanism 400 also includes two sliders, which are slidably arranged on the two slide rails 410 respectively. The two ends of the mounting rod 510 are slidably connected to the two slide rails 410 through the two sliders respectively. When the two sliders slide up or down on their respective slide rails 410 at the same time, the two ends of the mounting rod 510 can move synchronously with the two sliders, ensuring that the left and right sides of the storage seat 100 can contact the cleaning liquid at the same time, thereby ensuring the cleaning effect of the left and right side surfaces of the silicon carbide crystal ingot 10.
[0040] In one embodiment, see Figure 1 and Figure 2 The lug 140 of the storage seat 100 may be provided with a hook, and the mounting rod 510 may be connected to the hook by hooking. The hooking method is easy to implement, which facilitates the assembly of the storage seat 100 and the mounting rod 510.
[0041] In one embodiment, see Figure 1 There can be multiple storage seats 100, and they can be spaced apart on the side walls of the box of the ultrasonic cleaning mechanism 300, so that the silicon carbide ingot cleaning device can clean multiple silicon carbide ingots 10 at one time, which is convenient for users to clean silicon carbide ingots 10 in large batches.
[0042] For further information, see Figure 1The spray mechanism 200 may include a pipeline 210 and a nozzle 220 connected to the pipeline 210. The position of the nozzle 220 may be higher than the liquid level of the cleaning liquid in the box. The number of nozzles 220 may be multiple, and they may be arranged one-to-one with multiple storage seats 100. The dewaxing agent may be pumped into the pipeline 210 through the pump body, and may leave the pipeline 210 through the nozzle 220. The nozzle 220 and the pipeline 210 are easy to obtain, which is convenient for users to maintain the spray mechanism 200 later. Of course, in other embodiments, the number of nozzles 220 may be more than the number of storage seats 100, that is, two or more nozzles 220 correspond to one storage seat 100, so that the dewaxing agent can contact more parts of the silicon carbide ingot 10, thereby improving the spraying effect.
[0043] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.
[0044] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.
[0045] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.
Claims
1. A silicon carbide ingot cleaning device, characterized in that: It includes a frame and a storage seat, a spraying mechanism, an ultrasonic cleaning mechanism and a driving mechanism respectively installed on the frame; The storage seat is used for placing the silicon carbide ingot; The spraying mechanism is used to spray a dewaxing agent onto the silicon carbide ingot on the storage seat; The ultrasonic cleaning mechanism contains a cleaning liquid for cleaning the silicon carbide ingot sprayed with a dewaxing agent; and The driving mechanism is connected to the placement seat to drive the placement seat to drive the silicon carbide ingot to move between the spraying mechanism and the ultrasonic cleaning mechanism.
2. The silicon carbide ingot cleaning device according to claim 1, characterized in that: The ultrasonic cleaning mechanism has a box body for containing cleaning liquid, the spraying mechanism and the storage seat are respectively arranged on the opposite side walls of the box body, and the driving mechanism is used to drive the storage seat to move along the height direction of the box body so that the silicon carbide ingot can enter and exit the cleaning liquid.
3. The silicon carbide ingot cleaning device according to claim 2, characterized in that: The storage seat includes a seat body and a support ring, wherein the support ring is arranged on the top surface of the seat body, the silicon carbide ingot is placed on the support ring, and a through hole is arranged at the bottom of the seat body, and the cleaning liquid enters the support ring after passing through the through hole.
4. The silicon carbide ingot cleaning device according to claim 3, characterized in that: The bottom of the seat body is circular in structure, and the through holes are multiple in number and are respectively arranged at intervals along the radial direction and circumferential direction of the bottom of the seat body.
5. The silicon carbide ingot cleaning device according to claim 3, characterized in that: The storage seat further comprises a baffle, which is an arc-shaped plate arranged in the circumferential direction of the seat body, and two adjacent baffles are arranged at intervals.
6. The silicon carbide ingot cleaning device according to claim 2, characterized in that: The driving mechanism includes a mounting rod and a slide rail, the slide rail extends along the height direction of the box of the ultrasonic cleaning mechanism, both ends of the mounting rod can be slidably installed in the slide rail up and down, the storage seat is hung on the mounting rod, and the mounting rod drives the storage seat to move up and down.
7. The silicon carbide ingot cleaning device according to claim 6, characterized in that: There are two slide rails, which are spaced apart on both sides of the length direction of the box of the ultrasonic cleaning mechanism. The driving mechanism also includes two sliders, which are respectively slidably arranged on the two slide rails, and the two ends of the mounting rod are respectively slidably connected to the two slide rails through the two sliders.
8. The silicon carbide ingot cleaning device according to claim 6, characterized in that: The lug of the storage seat is provided with a hook, and the mounting rod is connected to the hook by hooking.
9. The silicon carbide ingot cleaning device according to claim 2, characterized in that: The number of the storage seats is multiple and they are arranged at intervals on the side walls of the box body of the ultrasonic cleaning mechanism.
10. The silicon carbide ingot cleaning device according to claim 9, characterized in that: The spraying mechanism includes a pipeline and a nozzle connected to the pipeline. The position of the nozzle is higher than the liquid level of the cleaning liquid in the box. There are multiple nozzles, and they are arranged in a one-to-one correspondence with the multiple storage seats.