Vacuum sample transfer device and vacuum sample transfer system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a vacuum sample transfer device and a vacuum sample transfer system. The vacuum sample transfer device comprises a sample transfer vehicle, at least one rotating shaft and at least one sample parking table. The sample transfer vehicle comprises a base and a fixed seat, and the fixed seat is arranged on the base. And at least one rotating shaft is arranged on the fixed seat and is rotationally connected with the fixed seat. The at least one sample parking table is connected with the at least one rotating shaft, and the at least one sample parking table can rotate relative to the fixed seat so as to adjust the orientation of the at least one sample parking table.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a vacuum sample transfer device and a vacuum sample transfer system. Background Art

[0002] In vacuum sample transfer systems, the sample parking structure on existing sample transfer vehicles is usually fixed, and samples can only be placed and taken in one direction, which brings many limitations to the design of sample transfer solutions and subsystem layout. Utility Model Content

[0003] The present disclosure provides a vacuum sample transfer device, including a sample transfer vehicle, the sample transfer vehicle including:

[0004] Base;

[0005] A fixing seat, arranged on the base;

[0006] At least one rotating shaft is disposed on the fixing base and is rotatably connected to the fixing base; and

[0007] At least one sample parking platform is connected to at least one rotating shaft, and the at least one sample parking platform can rotate relative to the fixing seat to adjust the orientation of the at least one sample parking platform.

[0008] In some embodiments of the present disclosure, at least one rotating shaft is provided with a plurality of limiting grooves spaced apart along the circumferential direction.

[0009] The sample transfer vehicle also includes at least one shifting bead, which is arranged on a fixed seat. The at least one shifting bead faces at least one rotating shaft, and the at least one shifting bead cooperates with a plurality of limiting grooves on the at least one rotating shaft to limit the at least one rotating shaft.

[0010] In some embodiments of the present disclosure, at least one rotating shaft comprises a rotating shaft,

[0011] The at least one sample parking platform includes two sample parking platforms, which are respectively arranged at two ends of a rotating shaft.

[0012] In some embodiments of the present disclosure, at least one bead includes at least one pair of beads, each pair of beads is arranged opposite to each other, and at least two pairs of limiting grooves are arranged on at least one rotating shaft; and / or

[0013] The fixing seat is provided with a fixing seat groove adapted to the at least one rotating shaft, and the fixing seat groove is provided with at least one hole for installing at least one shifting bead, and the at least one rotating shaft can rotate relative to the fixing seat so that the at least one shifting bead is stuck in at least one limiting groove among the plurality of limiting grooves to limit the at least one rotating shaft; and / or

[0014] The sample transfer vehicle also includes at least one toggle post disposed on at least one sample parking platform for adjusting the orientation of at least one sample parking platform.

[0015] In some embodiments of the present disclosure, the vacuum sample transfer device further comprises:

[0016] A guide rail assembly, comprising at least one guide rail;

[0017] The sample car includes:

[0018] A sliding assembly, disposed at the bottom of the base and on at least one guide rail, for driving the sample transfer vehicle to slide on the at least one guide rail; and

[0019] The sample transfer vehicle driving assembly is connected to the sample transfer vehicle and is used to drive the sample transfer vehicle to slide on at least one guide rail.

[0020] In some embodiments of the present disclosure, the sample transfer vehicle driving assembly includes a sample transfer vehicle driving rope, and the sample transfer vehicle driving rope is connected to the sample transfer vehicle to drive the sample transfer vehicle to slide on at least one guide rail.

[0021] In some embodiments of the present disclosure, the sample transfer vehicle driving assembly further includes:

[0022] The driving wheels of the sample car; and

[0023] At least one driven wheel of the sample transfer vehicle, a driving rope of the sample transfer vehicle passes around the driving wheel of the sample transfer vehicle and at least one driven wheel of the sample transfer vehicle, and two ends of the driving rope of the sample transfer vehicle are respectively connected to two ends of the sample transfer vehicle.

[0024] In some embodiments of the present disclosure, the sample transfer vehicle driving assembly further includes:

[0025] Two guide rail guide wheels are respectively arranged at the two ends of at least one guide rail, and the two ends of the driving rope of the sample transfer vehicle are connected to the two ends of the sample transfer vehicle after passing through the two guide rail guide wheels; and

[0026] The sample transfer vehicle driving device is connected to the driving wheel of the sample transfer vehicle and is used to drive the driving wheel of the sample transfer vehicle to rotate.

[0027] In some embodiments of the present disclosure, the guide rail assembly further includes:

[0028] A guide rail support member, used to support at least one guide rail;

[0029] A plurality of guide rail bearing rollers are respectively arranged on the guide rail supporting members; and

[0030] The guide rail driving assembly is connected to at least one guide rail and is used to drive at least one guide rail to slide along the guide rail bearing roller.

[0031] In some embodiments of the present disclosure, the guide rail drive assembly includes a guide rail drive rope, which is connected to at least one guide rail to drive the at least one guide rail to slide along a plurality of guide rail bearing rollers.

[0032] In some embodiments of the present disclosure, the guide rail driving assembly further includes:

[0033] Guideway drive wheels; and

[0034] At least one guide rail driven wheel, the guide rail driving rope passes around the guide rail driving wheel and the at least one guide rail driven wheel, and two ends of the guide rail driving rope are respectively connected to two ends of at least one guide rail.

[0035] In some embodiments of the present disclosure, the guide rail assembly further includes:

[0036] A mounting seat, disposed on the guide rail support; and

[0037] At least one guide rail pulley is rotatably arranged on the mounting seat, and the at least one guide rail pulley is used to guide and limit the at least one guide rail.

[0038] In some embodiments of the present disclosure, at least one guide rail includes an I-shaped guide rail, at least one guide rail pulley cooperates with the lower guide rail of the I-shaped guide rail, and the sliding assembly of the sample transfer vehicle cooperates with the upper guide rail of the I-shaped guide rail.

[0039] The present disclosure provides a vacuum sample transfer system, comprising:

[0040] a vacuum chamber; and

[0041] According to the vacuum sample transfer device in any one of the embodiments of the present disclosure, the sample transfer vehicle can slide in the vacuum chamber to transfer the sample.

[0042] In some embodiments of the present disclosure, the vacuum sample transfer system further includes a manipulator, which is at least partially disposed in the vacuum chamber and is used to adjust the orientation of at least one sample parking platform.

[0043] The vacuum sample transfer device and vacuum sample transfer system according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the sample parking platform on the sample transfer vehicle in the vacuum sample transfer device and vacuum sample transfer system in some embodiments of the present disclosure can achieve orientation switching in different directions, thereby meeting the sample transfer directions of multiple stations and different subsystems, providing convenient conditions for system expansion. For another example, the guide rails in the vacuum sample transfer device and vacuum sample transfer system in some embodiments of the present disclosure and the sample transfer vehicle installed on the guide rails can achieve independent movement without interfering with each other, thereby effectively reducing the occupied space. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0045] Figure 1 A schematic structural diagram of a sample transfer vehicle of a vacuum sample transfer device according to some embodiments of the present disclosure is shown;

[0046] Figure 2A A side view of a sample transfer vehicle of a vacuum sample transfer device according to some embodiments of the present disclosure is shown;

[0047] Figure 2B Show Figure 2A AA section view;

[0048] Figure 3 A schematic diagram showing a partial structural decomposition of a sample transfer vehicle of a vacuum sample transfer device according to some embodiments of the present disclosure;

[0049] Figure 4 A partial structural schematic diagram of a vacuum sample transfer device according to some embodiments of the present disclosure is shown;

[0050] Figure 5 A partial structural schematic diagram of a sample transfer vehicle driving assembly of a vacuum sample transfer device according to some embodiments of the present disclosure is shown;

[0051] Figure 6 A partial structural schematic diagram showing a guide rail driving assembly of a vacuum sample transfer device according to some embodiments of the present disclosure;

[0052] Figure 7 A partial structural schematic diagram of a vacuum sample transfer system according to some embodiments of the present disclosure is shown;

[0053] Figure 8 A schematic structural diagram of a vacuum sample transfer system according to some embodiments of the present disclosure is shown.

[0054] In the above drawings, the reference numerals represent:

[0055] 1000-Vacuum Sample Transfer System

[0056] 100-Vacuum Sample Transfer Device

[0057] 110-Sample transfer vehicle

[0058] 111-Base

[0059] 112-Fixed seat

[0060] 1121-Fixed seat groove

[0061] 1122-Lower fixed seat

[0062] 1123-Upper fixed seat

[0063] 11211-Hole

[0064] 113-Shaft

[0065] 1131-Limiting groove

[0066] 114a, 114b - Sample parking station

[0067] 115a, 115b-Dial

[0068] 116-Sliding assembly

[0069] 117- Sample transfer vehicle drive assembly

[0070] 1171-Drive rope for sample transfer vehicle

[0071] 1172- Sample transfer vehicle driving wheel

[0072] 1173a, 1173b - driven wheel of sample transfer vehicle

[0073] 1174- Sample transfer vehicle drive device

[0074] 1175-Guide rail and guide wheel

[0075] 118-Switch column

[0076] 119- Sample transfer vehicle drive rope fixing block

[0077] 120-Guide rail assembly

[0078] 121-Guide Rail

[0079] 122-Guide rail support

[0080] 123-Guide rail bearing roller

[0081] 124-Guide rail drive assembly

[0082] 1241-Guide rail drive rope

[0083] 1242-Guide rail drive wheel

[0084] 1243a, 1243b-guide rail driven wheel

[0085] 1244-Guide rail drive device

[0086] 125-Mounting seat

[0087] 126-Guide Pulley

[0088] 127-Limiting block

[0089] 128-Guide rail drive rope fixing block

[0090] 200-Vacuum Chamber

[0091] 300-Manipulator

[0092] 400a, 400b - Subsystem DETAILED DESCRIPTION

[0093] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0094] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). Alternatively, the end or the side that is close to the driving device is the proximal end or the proximal side, and the end or the side that is away from the driving device is the distal end or the distal side. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0095] Figure 1 A partial structural schematic diagram of a sample transfer vehicle 110 of a vacuum sample transfer device 100 according to some embodiments of the present disclosure is shown. Figure 2A A side view of a sample transfer vehicle 110 of a vacuum sample transfer device 100 according to some embodiments of the present disclosure is shown. Figure 2B Show Figure 2A AA cross-section diagram.

[0096] like Figure 1 , Figure 2A and Figure 2B As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 100 may include a sample transfer vehicle 110. The sample transfer vehicle 110 may include a base 111, a fixed seat 112, at least one rotating shaft (e.g., a rotating shaft 113) and at least one sample parking platform (e.g., sample parking platforms 114a, 114b). The fixed seat 112 is disposed on the base 111. The fixed seat 112 may be disposed on the base 111 by various suitable connection methods, such as bolt connection, clamping, welding, bonding, etc., or may be integrally formed with the base 111. At least one rotating shaft (e.g., a rotating shaft 113) is disposed on the fixed seat 112 and is rotatably connected to the fixed seat 112, for example, the rotatable connection with the fixed seat 112 may be achieved by a bearing. At least one sample parking platform (e.g., sample parking platforms 114a, 114b) is connected to at least one rotating shaft (e.g., rotating shaft 113), and at least one sample parking platform (e.g., sample parking platforms 114a, 114b) can rotate relative to the fixed seat 112 to adjust the orientation of at least one sample parking platform (e.g., sample parking platforms 114a, 114b). By adjusting the orientation of the sample parking platform, the orientation of sample transfer of multiple stations and different subsystems can be met, the operation is flexible, and convenient conditions are provided for system expansion.

[0097] Figure 3 A partial structural exploded schematic diagram of a sample transfer vehicle 110 of a vacuum sample transfer device 100 according to some embodiments of the present disclosure is shown.

[0098] like Figure 3 As shown, in some embodiments of the present disclosure, at least one rotating shaft (eg, rotating shaft 113) is provided with a plurality of limiting grooves 1131 spaced apart along the circumferential direction. Figure 2B As shown, the sample transfer vehicle 110 may further include at least one bead (e.g., bead 115a, 115b). At least one bead (e.g., bead 115a, 115b) may be disposed on the fixing seat 112. At least one bead (e.g., bead 115a, 115b) faces at least one rotating shaft (e.g., rotating shaft 113), and at least one bead (e.g., bead 115a, 115b) cooperates with a plurality of limiting grooves 1131 on at least one rotating shaft (e.g., rotating shaft 113) to limit the position of at least one rotating shaft (e.g., rotating shaft 113).

[0099] In some embodiments of the present disclosure, at least one bead includes only one bead (e.g., bead 115a or bead 115b). When one bead is embedded in the limiting groove 1131 of the rotating shaft 113, the rotating shaft 113 will stop rotating to complete self-locking, thereby ensuring stability during sample transportation. In some embodiments of the present disclosure, at least one bead includes at least one pair of beads (e.g., bead 115a and bead 115b). When each pair of beads is simultaneously embedded in a pair of limiting grooves 1131 of the rotating shaft 113, the rotating shaft 113 will stop rotating to complete self-locking, thereby ensuring stability during sample transportation.

[0100] like Figure 3 As shown, in some embodiments of the present disclosure, at least one rotating shaft may include a rotating shaft 113. At least one sample parking platform may include a sample parking platform 114a and a sample parking platform 114b, which are respectively disposed at two ends of the rotating shaft 113.

[0101] Those skilled in the art will appreciate that the at least one rotating shaft including a rotating shaft 113 is merely exemplary. The at least one rotating shaft may also include, for example, two rotating shafts or more than two rotating shafts. The two or more rotating shafts may be connected by a coupling or a gear transmission, or may operate independently of each other. Similarly, the at least one sample parking station may include two sample parking stations 114a and 114b, which is also merely exemplary. The at least one sample parking station may also include other suitable quantities. In addition, Figure 1 Although only two sample parking platforms 114 a and 114 b are shown to be disposed at the two ends of the rotating shaft 113 , this is merely exemplary, and the sample parking platform 114 may also be disposed at other suitable positions on the rotating shaft 113 , such as the middle.

[0102] like Figure 3 As shown, in some embodiments of the present disclosure, at least one bead may include at least one pair of beads (e.g., a pair of beads 115a and 115b). The beads 115a and the beads 115b are arranged relative to each other, for example, at 180° to each other. At least two pairs of limiting grooves 1131 (e.g., four evenly distributed limiting grooves 1131) may be arranged on at least one rotating shaft (e.g., rotating shaft 113) (e.g., the middle or end). The cooperation of at least two pairs of limiting grooves 1131 and at least one pair of beads (e.g., beads 115a and beads 115b) enables the parking platform (e.g., parking platform 114a, 114b) on the sample transfer vehicle 110 to quantitatively flip, for example, it can flip 90° or 180°, so that multiple orientation switching and self-locking limit can be achieved to meet the sample transfer orientation of multiple stations and different subsystems.

[0103] Those skilled in the art will appreciate that the at least one bead includes two beads (e.g., beads 115a and 115b) for exemplary purposes only, and the at least one bead may also include other suitable numbers of beads, such as three or four. Similarly, the two beads are arranged at 180° for exemplary purposes only, and the two beads may also be arranged at other suitable angles, such as 90°, 60°, etc. The four evenly distributed limiting grooves 1131 are arranged in the middle of the at least one rotating shaft (e.g., rotating shaft 113), which is also exemplary only, and the number and distribution of the limiting grooves 1131 may match the number and arrangement position of the at least one bead to limit the rotating shaft 113.

[0104] like Figure 3 As shown, in some embodiments of the present disclosure, a fixing seat groove 1121 adapted to at least one rotating shaft (e.g., rotating shaft 113) is provided on the fixing seat 112. At least one hole 11211 is provided in the fixing seat groove 1121 for mounting at least one bead (e.g., bead 115a, 115b). At least one rotating shaft (e.g., rotating shaft 113) can rotate relative to the fixing seat 112 so that the bead (e.g., bead 115a, 115b) is inserted into one of the plurality of limiting grooves 1131 to limit the position of at least one rotating shaft 113.

[0105] like Figure 3 As shown, in some embodiments of the present disclosure, the fixing seat 112 can adopt a split structure, which is divided into a lower fixing seat 1122 and an upper fixing seat 1123. This arrangement can make the installation and maintenance of the sample transfer vehicle 110 more convenient. In some embodiments, the bead 115a can be installed on the upper fixing seat 1123, and the bead 115b can be installed on the lower fixing seat 1122.

[0106] like Figure 1 As shown in FIG. 2 , in some embodiments of the present disclosure, the sample transfer vehicle 110 may further include at least one toggle post 118. The at least one toggle post 118 may be disposed on the sample parking platform 114a and / or the sample parking platform 114b, for example, Figure 7 The robot arm 300 is shown to be moved to conveniently adjust the orientation of the sample parking platform 114a and / or the sample parking platform 114b.

[0107] Figure 4 A partial structural schematic diagram of a vacuum sample transfer device 100 according to some embodiments of the present disclosure is shown.

[0108] like Figure 4As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 100 may further include a guide rail assembly 120. The guide rail assembly 120 may include at least one guide rail 121. The sample transfer vehicle 110 may further include a sliding assembly 116 and a sample transfer vehicle driving assembly 117. The sliding assembly 116 is disposed at the bottom of the base 111 and disposed on at least one guide rail 121, and is used to drive the sample transfer vehicle 110 to slide on at least one guide rail 121. The sample transfer vehicle driving assembly 117 is connected to the sample transfer vehicle 110, and is used to drive the sample transfer vehicle 110 to slide on at least one guide rail 121.

[0109] like Figure 4 As shown, in some embodiments of the present disclosure, at least one guide rail 121 may include an I-shaped guide rail. Figure 1 , Figure 2A As shown, the sliding assembly 116 of the sample transfer vehicle 110 may include a plurality of sample transfer vehicle pulleys. The sample transfer vehicle pulleys may cooperate with the upper guide rail of the I-shaped guide rail, so that the sample transfer vehicle 110 slides on at least one guide rail 121.

[0110] Those skilled in the art will appreciate that it is merely exemplary to arrange the sample transfer vehicle 110 on at least one guide rail 121. The sample transfer vehicle 110 may also be arranged on a magnetic sample transfer rod or a mechanical arm to transfer samples.

[0111] However, in the conventional sample transfer system, a magnetic sample transfer rod is installed on one side of the sample transfer port, and a subsystem is docked on the other side, which results in low utilization of the sample transfer port. In some embodiments of the present disclosure, the sample transfer vehicle 110 is disposed on at least one guide rail 121 through a sliding assembly 116, and multiple subsystems can be docked using one sample transfer port, thereby increasing utilization of the sample transfer port.

[0112] like Figure 4 As shown, in some embodiments of the present disclosure, the sample transfer vehicle driving assembly 117 may include a sample transfer vehicle driving rope 1171. The sample transfer vehicle driving rope 1171 is connected to the sample transfer vehicle 110 to drive the sample transfer vehicle 110 to slide on at least one guide rail 121.

[0113] like Figure 1 As shown, in some embodiments of the present disclosure, the sample transfer vehicle 110 may further include two sample transfer vehicle drive rope fixing blocks 119. The two sample transfer vehicle drive rope fixing blocks 119 are disposed at both ends of the sample transfer vehicle 110, and are used to fix both ends of the sample transfer vehicle drive rope 1171, respectively.

[0114] Figure 5 A partial structural schematic diagram of a sample transfer vehicle driving assembly 117 of a vacuum sample transfer device 100 according to some embodiments of the present disclosure is shown.

[0115] like Figure 5As shown, in some embodiments of the present disclosure, the sample transfer vehicle driving assembly 117 may also include a sample transfer vehicle driving wheel 1172 and at least one sample transfer vehicle driven wheel (e.g., sample transfer vehicle driven wheels 1173a, 1173b). The sample transfer vehicle driving rope 1171 passes around the sample transfer vehicle driving wheel 1172 and at least one sample transfer vehicle driven wheel (e.g., sample transfer vehicle driven wheels 1173a, 1173b).

[0116] 1173b). The two ends of the sample transfer vehicle driving rope 1171 are connected to the two ends of the sample transfer vehicle 110 respectively.

[0117] Those skilled in the art will appreciate that although Figure 5 It is shown that the sample transfer vehicle driving assembly 117 includes a sample transfer vehicle driving wheel 1172 and two sample transfer vehicle driven wheels 1173a and 1173b, but this is merely exemplary. The positions and quantities of the sample transfer vehicle driving wheel and the sample transfer vehicle driven wheels can be adjusted as needed to form a suitable sample transfer vehicle pulley set to drive the sample transfer vehicle 110 to slide on at least one guide rail 121.

[0118] like Figure 4 As shown, in some embodiments of the present disclosure, the sample transfer vehicle driving assembly 117 may further include two guide rail guide wheels 1175, which are respectively disposed at both ends of at least one guide rail 121. Figure 5 As shown, the driving rope 1171 of the sample transfer vehicle passes around the driving wheel 1172 of the sample transfer vehicle, and the two ends pass around the driven wheel 1173a and the driven wheel 1173b of the sample transfer vehicle respectively, and then pass around the two guide rail guide wheels 1175 respectively, and then connect to the two ends of the sample transfer vehicle 110 respectively, so as to drive the sample transfer vehicle 110 to slide on at least one guide rail 121.

[0119] like Figure 4 As shown, in some embodiments of the present disclosure, the sample transfer vehicle driving assembly 117 may further include a sample transfer vehicle driving device 1174, which is connected to the sample transfer vehicle driving wheel 1172 and is used to drive the sample transfer vehicle driving wheel 1172 to rotate. The sample transfer vehicle driving device 1174 may include a bellows rotation drive. The bellows rotation drive may transmit power to the sample transfer vehicle driving wheel 1172 through a universal joint, a transmission shaft, etc.

[0120] like Figure 4 As shown, in some embodiments of the present disclosure, the guide rail assembly 120 may further include a guide rail support 122, a plurality of guide rail bearing rollers 123, and a guide rail driving assembly 124. The guide rail support 122 is used to support at least one guide rail 121. The plurality of guide rail bearing rollers 123 are respectively arranged on the guide rail support 122. The guide rail driving assembly 124 is connected to at least one guide rail 121, and is used to drive the guide rail 121 to slide along the guide rail bearing rollers 123.

[0121] Those skilled in the art will appreciate that although Figure 4The guide rail assembly 120 is shown to include two guide rail bearing rollers 123, which are respectively arranged at the two ends of the guide rail support member 122. However, this is only exemplary, and the guide rail assembly 120 may also include other suitable numbers of guide rail bearing rollers 123. The guide rail bearing rollers 123 may also be arranged at other positions of the guide rail support member 122, such as the middle part.

[0122] In some embodiments of the present disclosure, the guide rail 121 and the sample transfer vehicle 110 mounted on the guide rail 121 can move independently without interfering with each other. The guide rail 121 can be used in, for example, a vacuum sample transfer system 1000 (e.g., Figure 7 The vacuum sample transfer system 1000 shown in the figure performs telescopic movement between the guide rail 121 and the subsystem, and after the guide rail 121 is extended to the designated sample transfer position, the sample transfer vehicle 110 loaded with the sample is moved to the sample transfer position for sample transfer. The sample transfer space of the vacuum sample transfer device 100 can be effectively reduced by performing the telescopic movement of the guide rail 121 in conjunction with the movement of the sample transfer vehicle 110 for sample transfer.

[0123] like Figure 4 As shown, in some embodiments of the present disclosure, the guide rail driving assembly 124 may further include a guide rail driving rope 1241. The guide rail driving rope 1241 is connected to at least one guide rail 121 to drive at least one guide rail 121 to slide along the two guide rail bearing rollers 123.

[0124] Figure 6 A partial structural schematic diagram of the guide rail driving assembly 124 of the vacuum sample transfer device 100 according to some embodiments of the present disclosure is shown.

[0125] like Figure 6 As shown, in some embodiments of the present disclosure, the guide rail drive assembly 124 may further include a guide rail drive wheel 1242 and at least one guide rail driven wheel (e.g., guide rail driven wheels 1243a, 1243b). The guide rail drive rope 1241 passes around the guide rail drive wheel 1242 and at least one guide rail driven wheel (e.g., guide rail driven wheels 1243a, 1243b), and both ends of the guide rail drive rope 1241 are respectively connected to both ends of at least one guide rail 121.

[0126] Those skilled in the art will appreciate that although Figure 6 It is shown that the guide rail driving assembly 124 includes a guide rail driving wheel 1242 and two guide rail driven wheels 1243a and 1243b, but this is merely exemplary. The positions and quantities of the guide rail driving wheels and the guide rail driven wheels can be adjusted as needed to form a suitable guide rail pulley set to drive the sample transfer vehicle 110 to slide on at least one guide rail 121.

[0127] like Figure 4As shown, in some embodiments of the present disclosure, the guide rail drive assembly 124 may further include a guide rail drive device 1244. The guide rail drive device 1244 may include a bellows rotation drive. The bellows rotation drive may transmit power to the guide rail drive wheel 1242 through a universal joint, a transmission shaft, etc.

[0128] like Figure 4 As shown, in some embodiments of the present disclosure, the guide rail assembly 120 may further include a mounting seat 125 and at least one guide rail pulley 126. The mounting seat 125 is disposed on the guide rail support 122. The at least one guide rail pulley 126 is rotatably disposed on the mounting seat 125 for guiding and limiting at least one guide rail 121.

[0129] like Figure 4 and Figure 6 As shown, in some embodiments of the present disclosure, at least one guide rail 121 may include an I-shaped guide rail. At least one guide rail pulley 126 may cooperate with the lower guide rail of the at least one guide rail 121 to guide and limit the at least one guide rail 121.

[0130] Those skilled in the art will appreciate that the number of the at least one guide rail pulley 126 may be four or other suitable numbers.

[0131] like Figure 4 As shown, in some embodiments of the present disclosure, the guide rail assembly 120 may further include at least one limit block 127, for example, two limit blocks 127. The two limit blocks 127 are respectively disposed at both ends of at least one guide rail 121 to limit the position of the sample transfer vehicle 110.

[0132] like Figure 4 As shown, in some embodiments of the present disclosure, the guide rail assembly 120 may further include two guide rail drive rope fixing blocks 128, respectively used to fix the two ends of the guide rail drive rope 1241. In some embodiments, the two guide rail drive rope fixing blocks 128 may be fixed on the two limit blocks 127 respectively.

[0133] Figure 7 A partial structural schematic diagram of a vacuum sample transfer system 1000 according to some embodiments of the present disclosure is shown.

[0134] like Figure 7 As shown, in some embodiments of the present disclosure, the vacuum sample transfer system 1000 may include a vacuum chamber 200 and a vacuum sample transfer device 100 according to any one of the embodiments of the present disclosure, and the sample transfer vehicle 110 can slide in the vacuum chamber 200 to transfer the sample.

[0135] like Figure 7As shown, in some embodiments of the present disclosure, the vacuum sample transfer system 1000 may further include a manipulator 300. The manipulator 300 is at least partially disposed in the vacuum chamber 200, and is used to adjust the orientation of at least one sample parking platform 114.

[0136] In some embodiments of the present disclosure, when the vacuum sample transfer system 1000 is used for sample transfer, the sample transfer vehicle 110 loaded with the sample can be slid to the sample transfer position after at least one guide rail 121 slides to the designated sample transfer position for sample transfer. Of course, the sample transfer vehicle 110 can also be slid first, and then at least one guide rail 121 slides to the designated sample transfer position.

[0137] In some embodiments of the present disclosure, the sliding operation of at least one guide rail 121 may include: starting the guide rail driving device 1244, transmitting power to the guide rail driving wheel 1242, thereby driving the guide rail driving rope 1241 wrapped around the guide rail driving wheel 1242 to move, driving the guide rail driven wheels 1243a and 1243b to rotate, and through the left and right movement of the guide rail driving rope 1241, at least one guide rail 121 slides along a plurality of guide rail bearing rollers 123, thereby causing any end of at least one guide rail 121 to extend out of or retract into the vacuum chamber 200.

[0138] In some embodiments of the present disclosure, the sliding operation of the sample transfer vehicle 110 may include: starting the sample transfer vehicle driving device 1174, transmitting power to the sample transfer vehicle driving wheel 1172, thereby driving the sample transfer vehicle driving rope 1171 wrapped around the sample transfer vehicle driving wheel 1172 to move, driving the sample transfer vehicle driven wheels 1173a and 1173b to rotate, and driving the sample transfer vehicle 110 to slide left and right on at least one guide rail 121 through the left and right movement of the sample transfer vehicle driving rope 1171.

[0139] Figure 8 A schematic structural diagram of a vacuum sample transfer system 1000 according to some embodiments of the present disclosure is shown.

[0140] like Figure 8 As shown, in some embodiments of the present disclosure, the vacuum sample transfer system 1000 may further include a subsystem 400a and a subsystem 400b. The subsystem 400a and the subsystem 400b are vacuum-sealed and connected to the vacuum chamber 200. When the sample transfer vehicle 110 arrives at the designated sample transfer position, the sample grabber in the subsystem 400a or the subsystem 400b moves the sample to the parking platform (e.g. Figure 1The sample transfer is completed by inserting or removing a sample tray (such as a flag-type sample tray) on the sample parking platform 114a, 114b) shown in Figure 2. When the sample grabber of subsystem 400a or subsystem 400b cannot be on the same side due to the system structure layout or other factors, one end cannot transfer the sample normally. The sample transfer vehicle 110 has the function of flipping the sample parking platform to solve this problem. When the sample parking platform needs to be flipped, when the sample transfer vehicle 110 passes by the sample manipulator 300, the "straight" toggle lever installed above the manipulator 300 is used to toggle the toggle column 118 on the sample transfer vehicle 110 (see Figure 1 2), the orientation of the sample parking platform is adjusted.

[0141] In some embodiments of the present disclosure, subsystem 400a and subsystem 400b may be the same or different. Subsystem 400a or subsystem 400b may include a molecular beam epitaxy system, an X-ray photoelectron spectrometer, a physical vapor deposition system, and the like.

[0142] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum sample transfer device, characterized in that: The invention comprises a sample transfer vehicle, wherein the sample transfer vehicle comprises: Base; A fixing seat, arranged on the base; at least one rotating shaft, disposed on the fixing base and rotatably connected to the fixing base; and At least one sample parking platform is connected to the at least one rotating shaft, and the at least one sample parking platform can rotate relative to the fixing seat to adjust the orientation of the at least one sample parking platform.

2. The vacuum sample transfer device according to claim 1, characterized in that: The at least one rotating shaft is provided with a plurality of limiting grooves spaced apart along the circumferential direction, The sample transfer vehicle further includes at least one bead disposed on the fixing seat, the at least one bead facing the at least one rotating shaft, and the at least one bead cooperates with the plurality of limiting grooves on the at least one rotating shaft to limit the at least one rotating shaft.

3. The vacuum sample transfer device according to claim 1 or 2, characterized in that: The at least one rotating shaft comprises a rotating shaft, The at least one sample parking platform includes two sample parking platforms, which are respectively arranged at two ends of the one rotating shaft.

4. The vacuum sample transfer device according to claim 1 or 2, characterized in that: The at least one shifting bead comprises at least one pair of shifting beads, each pair of shifting beads are arranged opposite to each other, and at least two pairs of limiting grooves are arranged on the at least one rotating shaft; and / or The fixing seat is provided with a fixing seat groove adapted to the at least one rotating shaft, and the fixing seat groove is provided with at least one hole for installing the at least one shifting bead, and the at least one rotating shaft can rotate relative to the fixing seat so that the at least one shifting bead is inserted into at least one limiting groove of the plurality of limiting grooves to limit the at least one rotating shaft; and / or The sample transfer vehicle further comprises at least one toggle post disposed on the at least one sample parking platform for adjusting the orientation of the at least one sample parking platform.

5. The vacuum sample transfer device according to claim 1, characterized in that: Also includes: A guide rail assembly, comprising at least one guide rail; The sample transmission vehicle comprises: A sliding assembly, disposed at the bottom of the base and on the at least one guide rail, and used to drive the sample transfer vehicle to slide on the at least one guide rail; as well as The sample transfer vehicle driving assembly is connected to the sample transfer vehicle and is used to drive the sample transfer vehicle to slide on the at least one guide rail.

6. The vacuum sample transfer device according to claim 5, characterized in that: The sample transfer vehicle driving assembly includes a sample transfer vehicle driving rope, and the sample transfer vehicle driving rope is connected to the sample transfer vehicle to drive the sample transfer vehicle to slide on the at least one guide rail.

7. The vacuum sample transfer device according to claim 6, characterized in that: The sample transmission vehicle driving assembly also includes: The driving wheels of the sample car; and At least one driven wheel of the sample transfer vehicle, the sample transfer vehicle driving rope passes around the sample transfer vehicle driving wheel and at least one driven wheel of the sample transfer vehicle, and two ends of the sample transfer vehicle driving rope are respectively connected to two ends of the sample transfer vehicle.

8. The vacuum sample transfer device according to claim 7, characterized in that: The sample transmission vehicle driving assembly also includes: Two guide rail guide wheels are respectively arranged at two ends of the at least one guide rail, and two ends of the driving rope of the sample transfer vehicle are connected to two ends of the sample transfer vehicle after passing through the two guide rail guide wheels; and The sample transfer vehicle driving device is connected to the driving wheel of the sample transfer vehicle and is used to drive the driving wheel of the sample transfer vehicle to rotate.

9. The vacuum sample transfer device according to claim 5, characterized in that: The guide rail assembly also includes: A guide rail support member, used to support the at least one guide rail; A plurality of guide rail bearing rollers are respectively arranged on the guide rail support members; and The guide rail driving assembly is connected to the at least one guide rail and is used to drive the at least one guide rail to slide along the guide rail bearing roller.

10. The vacuum sample transfer device according to claim 9, characterized in that: The guide rail driving assembly includes a guide rail driving rope, and the guide rail driving rope is connected to the at least one guide rail to drive the at least one guide rail to slide along the plurality of guide rail bearing rollers.

11. The vacuum sample transfer device according to claim 10, characterized in that: The guide rail drive assembly also includes: Guideway drive wheels; and At least one guide rail driven wheel, the guide rail driving rope passes around the guide rail driving wheel and the at least one guide rail driven wheel, and two ends of the guide rail driving rope are respectively connected to two ends of the at least one guide rail.

12. The vacuum sample transfer device according to claim 9, characterized in that: The guide rail assembly also includes: A mounting seat, disposed on the guide rail support member; and At least one guide rail pulley is rotatably arranged on the mounting seat, and the at least one guide rail pulley is used to guide and limit the at least one guide rail.

13. The vacuum sample transfer device according to claim 12, characterized in that: The at least one guide rail comprises an I-shaped guide rail, the at least one guide rail pulley cooperates with the lower guide rail of the I-shaped guide rail, and the sliding assembly of the sample transfer vehicle cooperates with the upper guide rail of the I-shaped guide rail.

14. A vacuum sample transfer system, characterized in that: include: Vacuum chamber; as well as According to the vacuum sample transfer device according to any one of claims 1 to 11, the sample transfer vehicle can slide in the vacuum chamber to transfer the sample.

15. The vacuum sample transfer system according to claim 14, characterized in that: It also includes a manipulator, which is at least partially disposed in the vacuum chamber and is used to adjust the orientation of the at least one sample parking platform.

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