PVD (Physical Vapor Deposition) carrier plate transmission equipment

Abstract

The utility model discloses a PVD (Physical Vapor Deposition) carrier plate transmission device which comprises a cavity and a carrier plate moving in the cavity, the bottom of the inner wall of the cavity is fixedly connected with a mounting plate, two guide grooves are symmetrically formed in the mounting plate, and the bottom of the carrier plate is fixedly connected with two connecting plates movably connected in the corresponding guide grooves. Two magnetic suspension assemblies are symmetrically arranged between the carrier plate and the mounting plate, and deviation rectifying assemblies are symmetrically arranged at the top of the mounting plate and located on the two sides of the carrier plate; the magnetic suspension assembly comprises electromagnets fixedly connected to the top of the mounting plate and one side and the bottom of the inner wall of the guide groove, and first magnets fixedly connected to the bottom and one side of the connecting plate. Through the above structure, the carrier plate and the mounting plate can be separated to avoid friction between the carrier plate and the mounting plate, dust generated by friction is prevented from depositing in the cavity to affect the production quality of the battery piece, and meanwhile, the deviation rectifying assembly is arranged to monitor the deviation state of the carrier plate to facilitate adjustment of the position of the carrier plate by adjusting the magnetic force of the electromagnet.

Description

Technical Field

[0001] The utility model relates to the technical field of PVD production equipment, in particular to a PVD carrier plate transmission device. Background Art

[0002] When preparing high-efficiency heterojunction solar cells, the PVD process is one of the most critical steps. The silicon wafers that have undergone chemical vapor deposition are placed on a carrier, which serves as a silicon wafer carrying and conveying tray to transport the silicon wafers into the vacuum chamber for physical vapor deposition.

[0003] In the field of PVD equipment manufacturing, the carrier transmission device is a key component, and its performance directly affects the operating efficiency of the PVD equipment, the uniformity and quality of thin film deposition. Traditional carrier transmission devices usually use contact transmission methods such as rollers or belts, which have problems such as large friction loss, easy dust generation, and high maintenance costs. Therefore, those skilled in the art provide a PVD carrier transmission device to solve the problems raised in the above background technology. Utility Model Content

[0004] The purpose of the utility model is to provide a PVD carrier transmission device, which can separate the carrier from the mounting plate to avoid friction between the carrier and the mounting plate, and avoid the dust generated by the friction from being deposited in the cavity and affecting the production quality of the battery cell. At the same time, a correction component is set to monitor the offset state of the carrier so as to facilitate the adjustment of the position of the carrier by adjusting the magnetic force of the electromagnet.

[0005] To achieve the above-mentioned purpose, a PVD carrier plate transmission device is provided, comprising a cavity and a carrier plate movable inside the cavity, a mounting plate is fixedly connected to the bottom of the inner wall of the cavity, two guide grooves are symmetrically provided inside the mounting plate, two connecting plates movably connected inside the corresponding guide grooves are fixedly connected to the bottom of the carrier plate, two magnetic suspension components are symmetrically arranged between the carrier plate and the mounting plate, and deviation correction components are symmetrically arranged on the top of the mounting plate and on both sides of the carrier plate;

[0006] The magnetic levitation assembly includes an electromagnet fixedly connected to the top of the mounting plate, one side and the bottom of the inner wall of the guide groove, a first magnet fixedly connected to the bottom and one side of the connecting plate, and a second magnet fixedly connected to the bottom of the carrier plate. The first magnet repels the corresponding electromagnet, and the second magnet attracts the adjacent electromagnet.

[0007] According to the PVD carrier transmission device, the correction component includes a mounting frame fixedly connected to the top of the mounting plate and set to a C-shaped structure, two first pressure sensors fixedly connected to the inside of the mounting frame, and a second pressure sensor fixedly connected to the inside of the mounting frame and opposite to the side of the carrier, and the two first pressure sensors are respectively located on the upper and lower sides of the carrier.

[0008] According to the PVD carrier plate transmission device, it also includes a controller, and the six electromagnets, the four first pressure sensors and the two second pressure sensors are all electrically connected to the controller.

[0009] According to the PVD carrier plate transmission device, it also includes an alarm, and the alarm is also electrically connected to the controller.

[0010] According to the PVD carrier plate transmission device, the distances between the upper and lower sides of the carrier plate and the adjacent first pressure sensors are the same, and the distances between the two sides of the carrier plate and the adjacent second pressure sensors are the same.

[0011] According to the PVD carrier plate transmission device, the two first magnets and the second magnet are set as permanent magnets.

[0012] The utility model has the following beneficial effects:

[0013] 1. Compared with the prior art, in this PVD carrier plate transmission device, the upper and lower positions of the carrier plate are stabilized by the cooperation of the second magnet disposed at the bottom of the carrier plate and the first magnet disposed at the bottom of the connecting plate and the corresponding electromagnet, and the left and right positions of the carrier plate are stabilized by the cooperation of the first magnet disposed on the side of the connecting plate and the corresponding electromagnet, so that the carrier plate can be separated from the mounting plate to avoid friction between the carrier plate and the mounting plate, and to avoid dust generated by friction from being deposited in the cavity to affect the production quality of the battery cell;

[0014] 2. Compared with the prior art, this PVD carrier transmission device, by setting a deviation correction component to monitor the offset state of the carrier, can facilitate adjusting the position of the carrier by adjusting the magnetic force of the electromagnet, and has a simple structure and strong practicality.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0017] Figure 1 This is a first overall structural schematic diagram of a PVD carrier plate transmission device of the utility model;

[0018] Figure 2 This is a second overall structural schematic diagram of a PVD carrier plate transmission device of the utility model;

[0019] Figure 3 The utility model is a PVD carrier plate transmission device Figure 2 Enlarged structural diagram at A in the middle.

[0020] Legend:

[0021] 1. Cavity; 2. Mounting plate; 3. Carrier plate; 4. Electromagnet; 5. Connecting plate; 6. First magnet; 7. Second magnet; 8. Mounting frame; 9. First pressure sensor; 10. Second pressure sensor; 11. Guide groove; 12. Alarm; 13. Controller. DETAILED DESCRIPTION

[0022] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0023] Reference Figure 1 , Figure 2 and Figure 3 The utility model embodiment is a PVD carrier transmission device, which includes a cavity 1 and a carrier 3 movable inside the cavity 1, a mounting plate 2 is fixedly connected to the bottom of the inner wall of the cavity 1, two guide grooves 11 are symmetrically arranged inside the mounting plate 2, two connecting plates 5 movably connected inside the corresponding guide grooves 11 are fixedly connected to the bottom of the carrier 3, two magnetic suspension components are symmetrically arranged between the carrier 3 and the mounting plate 2, and a correction component is symmetrically arranged on the top of the mounting plate 2 and on both sides of the carrier 3; the magnetic suspension component includes an electromagnet 4 fixedly connected to the top of the mounting plate 2, one side and the bottom of the inner wall of the guide groove 11, a first magnet 6 fixedly connected to the bottom and one side of the connecting plate 5 and a first magnet 6 fixedly connected to the carrier The second magnet 7 at the bottom of the carrier plate 3, the first magnet 6 and the corresponding electromagnet 4 repel each other, and the second magnet 7 and the adjacent electromagnet 4 attract each other. The up and down position of the carrier plate 3 is stabilized by the second magnet 7 arranged at the bottom of the carrier plate 3 and the first magnet 6 arranged at the bottom of the connecting plate 5 and the corresponding electromagnet 4. The left and right position of the carrier plate 3 is stabilized by the first magnet 6 arranged on the side of the connecting plate 5 and the corresponding electromagnet 4, so that the carrier plate 3 can be separated from the mounting plate 2 to avoid friction between the carrier plate 3 and the mounting plate 2. At the same time, the deviation correction component is used to monitor the offset state of the carrier plate 3, so as to facilitate adjusting the position of the carrier plate 3 by adjusting the magnetic force of the electromagnet 4. The structure is simple and practical.

[0024] The correction component includes a mounting frame 8 fixedly connected to the top of the mounting plate 2 and set to a C-shaped structure, two first pressure sensors 9 fixedly connected to the inside of the mounting frame 8, and a second pressure sensor 10 fixedly connected to the inside of the mounting frame 8 and opposite to the side of the carrier 3. The two first pressure sensors 9 are respectively located on the upper and lower sides of the carrier 3. When the carrier 3 moves normally inside the mounting frame 8, it is separated from the first pressure sensor 9 and the second pressure sensor 10. When the carrier 3 deviates in the up and down directions, the corresponding first pressure sensor 9 is triggered, and when the carrier 3 deviates in the left and right directions, the second pressure sensor 10 is triggered. Therefore, the offset state of the carrier 3 can be monitored in real time according to the trigger signals of the first pressure sensor 9 and the second pressure sensor 10, so as to facilitate the subsequent adjustment of the position of the carrier 3 by the electromagnet 4.

[0025] It also includes a controller 13, and the six electromagnets 4, four first pressure sensors 9 and two second pressure sensors 10 are all electrically connected to the controller 13. Under the action of the controller 13, the operating status of the six electromagnets 4 can be easily controlled. When the trigger signal of the first pressure sensor 9 or the second pressure sensor 10 at different positions is transmitted to the controller 13, the controller 13 can control the corresponding first pressure sensor 9 or the second pressure sensor 10 to change the operating status according to the received signal, so as to adjust the magnetic force of the electromagnet 4 to adjust the position of the carrier plate 3.

[0026] It also includes an alarm 12, which is also electrically connected to the controller 13. The controller 13 uses the trigger signals received from the first pressure sensor 9 and the second pressure sensor 10 as operating signals of the alarm 12. When the carrier 3 deviates, an alarm message can be issued through the alarm 12 to remind the operator to take timely action.

[0027] The distances between the upper and lower sides of the carrier plate 3 and the adjacent first pressure sensors 9 are the same, the distances between the two sides of the carrier plate 3 and the adjacent second pressure sensors 10 are the same, and the first pressure sensor 9 and the second pressure sensor 10 maintain the same distance from the carrier plate 3, which is conducive to stably monitoring the displacement of the carrier plate 3 in different directions.

[0028] The two first magnets 6 and the second magnet 7 are set as permanent magnets. The first magnet 6 and the second magnet 7 set as permanent magnets can retain a relatively high residual magnetism in a state of long-term use to ensure the stability of the cooperation with the electromagnet 4.

[0029] Working principle: The up and down position of the carrier plate 3 is stabilized by the cooperation of the second magnet 7 arranged at the bottom of the carrier plate 3 and the first magnet 6 arranged at the bottom of the connecting plate 5 and the corresponding electromagnet 4. The left and right position of the carrier plate 3 is stabilized by the cooperation of the first magnet 6 arranged on the side of the connecting plate 5 and the corresponding electromagnet 4, so that the carrier plate 3 can be separated from the mounting plate 2 to avoid friction between the carrier plate 3 and the mounting plate 2.

[0030] When the carrier plate 3 moves normally inside the mounting frame 8, it is separated from the first pressure sensor 9 and the second pressure sensor 10. When the carrier plate 3 deviates in the up-down direction, the corresponding first pressure sensor 9 is triggered. When the carrier plate 3 deviates in the left-right direction, the second pressure sensor 10 is triggered. Thus, the offset state of the carrier plate 3 can be monitored in real time according to the trigger signals of the first pressure sensor 9 and the second pressure sensor 10. The position of the carrier plate 3 can be adjusted by adjusting the magnetic force of the electromagnet 4, thereby ensuring the stability of the movement of the carrier plate 3. The structure is simple and practical.

[0031] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present invention.

Claims

1. A PVD carrier plate transmission device, comprising a cavity (1) and a carrier plate (3) movable inside the cavity (1), characterized in that: A mounting plate (2) is fixedly connected to the bottom of the inner wall of the cavity (1), two guide grooves (11) are symmetrically provided inside the mounting plate (2), two connecting plates (5) movably connected inside the corresponding guide grooves (11) are fixedly connected to the bottom of the carrier plate (3), two magnetic suspension components are symmetrically provided between the carrier plate (3) and the mounting plate (2), and deviation correction components are symmetrically provided on the top of the mounting plate (2) and on both sides of the carrier plate (3); The magnetic suspension assembly comprises an electromagnet (4) fixedly connected to the top of the mounting plate (2), one side and the bottom of the inner wall of the guide groove (11), a first magnet (6) fixedly connected to the bottom and one side of the connecting plate (5), and a second magnet (7) fixedly connected to the bottom of the carrier plate (3), wherein the first magnet (6) repels the corresponding electromagnet (4), and the second magnet (7) attracts the adjacent electromagnet (4).

2. A PVD carrier plate transmission device according to claim 1, characterized in that: The deviation correction component comprises a mounting frame (8) fixedly connected to the top of the mounting plate (2) and arranged in a C-shaped structure, two first pressure sensors (9) fixedly connected to the inside of the mounting frame (8), and a second pressure sensor (10) fixedly connected to the inside of the mounting frame (8) and opposite to the side of the carrier plate (3), wherein the two first pressure sensors (9) are respectively located on the upper and lower sides of the carrier plate (3).

3. A PVD carrier plate transmission device according to claim 2, characterized in that: It also includes a controller (13), and the six electromagnets (4), the four first pressure sensors (9) and the two second pressure sensors (10) are all electrically connected to the controller (13).

4. A PVD carrier plate transmission device according to claim 3, characterized in that: It also includes an alarm (12), which is also electrically connected to the controller (13).

5. A PVD carrier plate transmission device according to claim 4, characterized in that: The distances between the upper and lower sides of the carrier plate (3) and the adjacent first pressure sensors (9) are the same, and the distances between the two sides of the carrier plate (3) and the adjacent second pressure sensors (10) are the same.

6. A PVD carrier plate transmission device according to claim 1, characterized in that: The first magnet (6) and the second magnet (7) are both permanent magnets.

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