Negative pressure quartz furnace tube

Abstract

The utility model relates to a negative pressure quartz furnace tube, which aims to solve the technical problems that the outer part of the current quartz tube body is easily scratched and damaged when the current quartz tube body rotates in the furnace body and the quartz tube and the furnace body are relatively complicated to disassemble and assemble, and comprises a furnace body, an end cover is arranged at one end of the furnace body, and a tail cover is arranged at the other end of the furnace body. An arc-shaped abutting plate is mounted at one end of the tail cover, rotating plates are connected to the two sides of the exterior of the tail cover through mounting plates, clamping columns are mounted at the other ends of the rotating plates, first limiting plates are movably connected to the exteriors of the clamping columns, and second limiting plates are connected to the first limiting plates through springs. One end of the furnace body is connected with the furnace body, the other end of the furnace body is connected with the furnace body, the two sides of the other end of the furnace body are provided with clamping plates, the furnace body is internally provided with a limiting ring, and the limiting ring is connected with a ball through a limiting groove. And the phenomenon that the outer part of the quartz tube body is scratched when the quartz tube body rotates in the furnace body is avoided.

Description

Technical Field

[0001] The utility model relates to the field of quartz furnace tubes, in particular to a negative pressure quartz furnace tube. Background Art

[0002] In the photovoltaic industry, high-temperature diffusion furnaces and the quartz tubes inside them are mainly used to dope single-crystal silicon wafers and multi-crystal silicon wafers to form PN junctions. At present, the conventional diffusion furnace uses a quartz tube set in the cavity of the diffusion furnace, which is heated by heating the diffusion furnace, and an air inlet and an exhaust port are set on the quartz tube. During the diffusion process, the silicon wafer to be diffused is placed in the center of the quartz tube, the diffusion furnace starts to heat up, and the impurity source gas enters the tube from the air inlet. The impurity source gas reacts at high temperature and diffuses into the silicon wafer.

[0003] According to the published patent 202121947856.1, a negative pressure quartz furnace tube comprises a quartz furnace tube main body, the top of the quartz furnace tube main body is fixedly connected with an air inlet pipe and an air outlet pipe, the outer walls of the air inlet pipe and the air outlet pipe are jointly sleeved with a connecting cover, the upper surface of the connecting cover is fixedly connected with a connecting plate, the upper surfaces of the connecting plate and the connecting cover are both provided with two connecting through holes matching the air inlet pipe and the air outlet pipe, the inner wall of the connecting cover is movably connected to the inner wall of the quartz furnace tube main body, and the lower surface of the connecting cover is fixedly connected with a plurality of reinforcing rods. During the process, the inventor found that at least the following problems in the prior art have not been solved. The connection mechanism and the fixing mechanism are provided to solve the problems of unstable installation of the quartz tube and easy damage during installation. During use, the friction force of the traditional quartz tube body when rotating in the furnace body and the labor intensity of the workers when rotating the quartz tube body are relatively large. The quartz tube body is prone to external scratches and damage when rotating in the furnace body. Moreover, the speed of the quartz tube when installed in the furnace body is relatively slow, and the furnace body needs to be installed and fixed with disassembly tools, which reduces the convenience of disassembly and assembly of the quartz tube and the furnace body. Therefore, it is necessary to design a new technical solution to solve the problem. Utility Model Content

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art, meet actual needs, and provide a negative pressure quartz furnace tube to solve the technical problems that the quartz tube body is easily scratched and damaged when rotating in the furnace body and the quartz tube and the furnace body are complicated to disassemble and assemble.

[0005] In order to achieve the purpose of the utility model, the technical solution adopted by the utility model is: designing a negative pressure quartz furnace tube, including a furnace body, one end of the furnace body is installed with an end cover, the other end of the furnace body is installed with a tail cover, one end of the tail cover is installed with an arc-shaped abutment plate, the two sides of the outside of the tail cover are connected with a rotating plate through a mounting plate, the other end of the rotating plate is installed with a clamping column, the outside of the clamping column is movably connected with a first limit plate, the first limit plate is connected with a second limit plate through a spring, clamping plates are installed on both sides of the other end of the furnace body, a limit ring is installed inside the furnace body, the limit ring is connected with a ball through a limit groove, and the limit ring is movably connected to the quartz tube body through the ball.

[0006] Preferably, one end of the tail cover is sealed and connected to the inner wall of the other end of the furnace body, one end of the arc-shaped abutment plate is fixedly connected to one end of the tail cover, and the other end of the arc-shaped abutment plate abuts against the outer surface of the quartz tube body.

[0007] Preferably, two mounting plates are provided and fixedly connected to two sides of the outside of the tail cover, one end of the rotating plate is rotatably connected to the other end of the mounting plate, and the other end of the clamping column is fixedly connected to the other end of the rotating plate.

[0008] Preferably, the spring is sleeved on the outside of the clamping column and is movably connected to the outside of the clamping column, one end of the spring is against one side of the first limit plate, the other end of the spring is against one side of the second limit plate, and the second limit plate is fixedly connected to the other end of the clamping column.

[0009] Preferably, one end of the clamping plate is fixedly connected to two sides of the other end of the furnace body and corresponds to the positions of the two mounting plates.

[0010] Preferably, the outside of the limiting ring is fixedly connected to the inner wall of the furnace body, the limiting groove is located inside the limiting ring, and there are multiple balls, which are movably connected to the inner wall of the limiting groove, and 1 / 4 of them are located outside the limiting groove.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] The utility model combines the mounting plate, the rotating plate, the clamping column, the first limiting plate, the spring, the second limiting plate and the clamping plate. When the quartz tube is installed inside the furnace body, the quartz tube is first inserted into the ball of the limiting ring, and then the end cover is fixed to one end of the furnace body, and then the quartz tube drives the ball to rotate inside the limiting groove, so as to adjust the position of the air outlet pipe on the quartz tube, reduce the friction force when the quartz tube rotates in the furnace body and the labor intensity of the workers when rotating the quartz tube, and avoid the phenomenon of external scratches when the quartz tube rotates in the furnace body;

[0013] After the position of the air outlet pipe of the quartz tube body is adjusted, the tail cover is put on the outside of the air outlet pipe of the quartz tube body and inserted into the interior of the furnace body. At this time, the arc-shaped abutting plate abuts against the outside of the quartz tube body, thereby limiting its position. Then the first limiting plate squeezes the spring, and at the same time, the clamping column drives the rotating plate to rotate on the mounting plate, so that the clamping column is inserted into the interior of the clamping plate. Then the first limiting plate is loosened, and the spring will abut the first limiting plate against the surface of the clamping plate, thereby limiting the position of the tail cover, thereby speeding up the installation of the quartz tube in the furnace body, avoiding the need to install and fix the furnace body with disassembly and assembly tools, and improving the convenience of disassembling and assembling the quartz tube and the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 It is a partial enlarged view of the utility model;

[0016] Figure 3 It is a cross-sectional view of the utility model;

[0017] Figure 4 It is a schematic diagram of the limit ring mechanism of the utility model;

[0018] In the figure: 1, furnace body; 11, tail cover; 12, arc-shaped abutment plate; 13, mounting plate; 14, rotating plate; 15, clamping column; 16, first limit plate; 17, spring; 18, second limit plate; 19, clamping plate;

[0019] 2. Limiting ring; 21. Limiting groove; 22. Ball; 23. Quartz tube;

[0020] 3. End cover. DETAILED DESCRIPTION

[0021] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0022] Example 1: A negative pressure quartz furnace tube, see Figures 1 to 4, including a furnace body 1, an end cover 3 is installed at one end of the furnace body 1, a tail cover 11 is installed at the other end of the furnace body 1, an arc-shaped abutting plate 12 is installed at one end of the tail cover 11, and a rotating plate 14 is connected to the two sides of the outside of the tail cover 11 through a mounting plate 13, and a clamping column 15 is installed at the other end of the rotating plate 14. The outside of the clamping column 15 is movably connected with a first limiting plate 16, and the first limiting plate 16 is connected to a second limiting plate 18 through a spring 17. The spring 17 is sleeved on the outside of the clamping column 15 and is movably connected to the outside of the clamping column 15. One end of the spring 17 abuts on one side of the first limiting plate 16, and the other end of the spring 17 abuts on one side of the second limiting plate 18. The second limiting plate 18 is fixedly connected to the other end of the clamping column 15. Clamping plates 19 are installed on both sides of the other end of the furnace body 1. When the quartz tube 23 is released, the quartz tube 23 is released. After the position of the air pipe is adjusted, the tail cover 11 is sleeved on the outside of the air outlet pipe of the quartz tube body 23 and inserted into the interior of the furnace body 1. At this time, the arc-shaped abutting plate 12 abuts against the outside of the quartz tube body 23, thereby limiting its position, and then the first limiting plate 16 squeezes the spring 17, and at the same time, the clamping column 15 drives the rotating plate 14 to rotate on the mounting plate 13, so that the clamping column 15 is inserted into the interior of the clamping plate 19, and then the first limiting plate 16 is loosened. At this time, the spring 17 will abut the first limiting plate 16 against the surface of the clamping plate 19, thereby limiting the position of the tail cover 11, so as to speed up the installation of the quartz tube in the furnace body 1, avoid the installation and fixing of the furnace body 1 by the disassembly and assembly tools when using, and improve the convenience of disassembly and assembly of the quartz tube and the furnace body 1;

[0023] A limiting ring 2 is installed inside the furnace body 1. The limiting ring 2 is connected to a ball 22 through a limiting groove 21. The limiting ring 2 is movably connected to a quartz tube 23 through the ball 22. The outside of the limiting ring 2 is fixedly connected to the inner wall of the furnace body 1. The limiting groove 21 is located inside the limiting ring 2. A plurality of balls 22 are provided and movably connected to the inner wall of the limiting groove 21, wherein 1 / 4 of the ball 22 is located outside the limiting groove 21. When the quartz tube 23 is installed inside the furnace body 1, first The quartz tube 23 is inserted into the ball 22 of the limiting ring 2, and then the end cover 3 is fixed to one end of the furnace body 1. The quartz tube 23 drives the ball 22 to rotate inside the limiting groove 21, thereby adjusting the position of the air outlet pipe on the quartz tube 23, reducing the friction force of the quartz tube 23 when rotating in the furnace body 1 and the labor intensity of the workers when rotating the quartz tube 23, and avoiding the phenomenon of external scratches on the quartz tube 23 when rotating in the furnace body 1.

[0024] For details, see Figure 1 and Figure 3One end of the tail cover 11 is sealed and connected to the inner wall of the other end of the furnace body 1, one end of the arc-shaped abutment plate 12 is fixedly connected to one end of the tail cover 11, and the other end of the arc-shaped abutment plate 12 abuts against the outer surface of the quartz tube body 23, so that the arc-shaped abutment plate 12 can limit the position of the quartz tube body 23 in the furnace body 1, thereby avoiding the position deviation of the quartz tube body 23 in the furnace body 1.

[0025] It is worth noting that see Figure 2 One end of the card plate 19 is fixedly connected to both sides of the other end of the furnace body 1 and corresponds to the position of the two mounting plates 13, which improves the firmness between the card plate 19 and the furnace body 1 and makes it convenient for the card plate 19 and the mounting plate 13 to cooperate with the card column 15, so that the tail cover 11 can be installed and fixed to the furnace body 1.

[0026] It is worth mentioning that see Figure 1 and Figure 2 Two mounting plates 13 are provided and fixedly connected to both sides of the outside of the tail cover 11. One end of the rotating plate 14 is rotatably connected to the other end of the mounting plate 13. The other end of the clamping column 15 is fixedly connected to the other end of the rotating plate 14, so that the rotating plate 14 can be rotated inside the mounting plate 13 to adjust the angle between the clamping column 15 and the mounting plate 13, so as to allow the clamping column 15 to be inserted into the inside of the clamping plate 19.

[0027] In addition, the components designed in the present invention are all universal standard parts or components known to technical personnel in the field. Their structures and principles can be known to technical personnel through technical manuals or through conventional experimental methods. They can be fully implemented by technical personnel in the field, and there is no need to elaborate. The content protected by the present invention does not involve improvements to internal structures and methods.

[0028] The embodiments of the present invention disclose preferred embodiments, but are not limited thereto. A person skilled in the art can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. However, as long as they do not deviate from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A negative pressure quartz furnace tube, comprising a furnace body (1), characterized in that: An end cover (3) is installed at one end of the furnace body (1), a tail cover (11) is installed at the other end of the furnace body (1), an arc-shaped abutting plate (12) is installed at one end of the tail cover (11), two sides of the outside of the tail cover (11) are connected to a rotating plate (14) through a mounting plate (13), a clamping column (15) is installed at the other end of the rotating plate (14), the outside of the clamping column (15) is movably connected to a first limit plate (16), the first limit plate (16) is connected to a second limit plate (18) through a spring (17), clamping plates (19) are installed at two sides of the other end of the furnace body (1), a limit ring (2) is installed inside the furnace body (1), the limit ring (2) is connected to a ball (22) through a limit groove (21), and the limit ring (2) is movably connected to a quartz tube (23) through the ball (22).

2. A negative pressure quartz furnace tube as claimed in claim 1, characterized in that: One end of the tail cover (11) is sealedly connected to the inner wall of the other end of the furnace body (1), one end of the arc-shaped abutment plate (12) is fixedly connected to one end of the tail cover (11), and the other end of the arc-shaped abutment plate (12) abuts against the outer surface of the quartz tube body (23).

3. A negative pressure quartz furnace tube as claimed in claim 1, characterized in that: Two mounting plates (13) are provided and fixedly connected to two sides of the outside of the tail cover (11); one end of the rotating plate (14) is rotatably connected to the other end of the mounting plate (13); and the other end of the clamping column (15) is fixedly connected to the other end of the rotating plate (14).

4. A negative pressure quartz furnace tube as claimed in claim 1, characterized in that: The spring (17) is sleeved on the outside of the clamping column (15) and is movably connected to the outside of the clamping column (15); one end of the spring (17) is abutted against one side of the first limiting plate (16); the other end of the spring (17) is abutted against one side of the second limiting plate (18); and the second limiting plate (18) is fixedly connected to the other end of the clamping column (15).

5. A negative pressure quartz furnace tube as claimed in claim 1, characterized in that: One end of the clamping plate (19) is fixedly connected to both sides of the other end of the furnace body (1) and corresponds to the position of the two mounting plates (13).

6. A negative pressure quartz furnace tube as claimed in claim 1, characterized in that: The outside of the limiting ring (2) is fixedly connected to the inner wall of the furnace body (1), the limiting groove (21) is located inside the limiting ring (2), and a plurality of balls (22) are provided and movably connected to the inner wall of the limiting groove (21), wherein 1 / 4 of the balls (22) are located outside the limiting groove (21).

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