Isolation swing valve for semiconductor and display production equipment
By designing an isolation swing valve including an emergency sealing assembly, the material leakage and impurity intrusion caused by the lack of an emergency sealing structure in the prior art is solved, and higher safety and production stability are achieved.
Patent Information
- Application Number
- CN202421257790.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-04
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-06-04
AI Technical Summary
The existing isolation swing valves for semiconductor and display production equipment lack a removable emergency sealing structure during long-term isolation operations, which may lead to failure of the valve body seal, leakage of materials or invasion of impurities, causing pollution and safety hazards.
An isolation swing valve is designed including a valve housing, an intermediate pipe and an emergency seal assembly. The emergency sealing assembly consists of a connecting rod, an intermediate block, a telescopic rod and a sealing plate, which can urgently seal the intermediate pipe when the valve housing leaks to avoid material loss or impurities invasion.
Through the design of the emergency sealing component, emergency sealing is achieved when the valve housing leaks, avoiding material leakage and impurities intrusion, and improving the safety of the equipment and production stability.
Smart Images
Figure CN222559223U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor and display production, in particular to an isolation swing valve for semiconductor and display production equipment. Background Art
[0002] A display is a display tool that displays certain electronic files on the screen through a specific transmission device and then reflects them to the human eye. Semiconductors are an important component of displays. Semiconductor and display production equipment require isolation swing valves. Semiconductor manufacturing equipment usually has chambers corresponding to each process. After the wafer completes the relevant process, it needs to be transferred to the next process. In this way, the wafer needs to be transmitted in multiple chambers, requiring isolation swing valves that connect two adjacent chambers.
[0003] The existing isolation swing valves used in semiconductor and display production equipment do not have a detachable emergency sealing structure during long-term isolation operations in the processing chambers of the production equipment. There is a possibility that the valve body seal fails, causing material leakage or impurity intrusion, causing impurities to enter the processing chamber of the production equipment with the airflow and cause pollution, which is not safe enough.
[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and an isolation swing valve for semiconductor and display production equipment is proposed. Utility Model Content
[0005] The utility model aims to provide an isolation swing valve for semiconductor and display production equipment to solve the problems raised in the above-mentioned background technology.
[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an isolation swing valve for semiconductor and display production equipment, comprising a valve housing, an intermediate tube and an emergency plugging assembly, a valve tube is arranged on one side of the valve housing, a lip sealing ring is bonded to the inner wall of the valve tube, and a valve plate is installed in the middle of the inner side of the lip sealing ring, the front and rear sides of the valve tube are connected to the intermediate tube through a connecting flange, and an emergency plugging assembly is installed inside the intermediate tube, the emergency plugging assembly comprises a connecting rod, an intermediate block, a telescopic rod and a sealing plate, an intermediate block is fixed to the inner side of the middle part of the intermediate tube through a connecting rod, and the front and rear sides of the intermediate block are connected to the sealing plate through a telescopic rod, a chamber tube is installed on the outer side of the intermediate tube, and the chamber tube is communicated with the processing chamber of the production equipment, and a sealing connection assembly is provided at the connection between the intermediate tube and the chamber tube.
[0007] Furthermore, a controller is installed on one side of the exterior of the valve housing, and an electric motor is installed on the upper rear side of the valve housing.
[0008] Furthermore, the inner diameter of the middle pipe of the intermediate pipe is larger than the inner diameters of the pipes on both sides, and the center line of the intermediate pipe coincides with the center lines of the intermediate block and the sealing plate.
[0009] Furthermore, the sealing plate is in a circular structure, and the outer ring of the sealing plate is provided with sealing rubber, and the size of the sealing plate is consistent with the size of the pipelines on both sides of the intermediate pipe.
[0010] Furthermore, the sealing connection assembly includes a snap-fit convex tube, a groove and an internal tube. A snap-fit convex tube is fixed to the outside of one end of the chamber tube, and grooves are evenly distributed on the inner side of the snap-fit convex tube. An internal tube is fixed to the inner side of the intermediate tube near one end of the chamber tube, and the cross-sections of the internal tube and the snap-fit convex tube are both "L"-shaped structures.
[0011] Furthermore, the sealing connection assembly also includes a first sealing layer and a second sealing layer, and the first sealing layer and the second sealing layer are both ring-shaped structures. The first sealing layer is arranged between the inner pipe and the clamping convex tube, and convex teeth are correspondingly distributed on the side of the first sealing layer close to the groove, and the second sealing layer is arranged between the inner pipe and the top outer wall of the chamber tube.
[0012] The utility model provides an isolation swing valve for semiconductor and display production equipment, which has the following features:
[0013] Beneficial effects:
[0014] The utility model is provided with an emergency plugging component. The inner diameter of the middle pipe of the intermediate pipe is larger than the inner diameter of the pipes on both sides. Therefore, the two telescopic rods are used to drive the movement of the front and rear two sealing plates. When the valve housing is leaking, the two sealing plates can perform emergency plugging on the intermediate pipe inside the pipes on both sides of the intermediate pipe to avoid material loss or impurity invasion. On the contrary, the two sealing plates shrink and return to the middle pipe inside the intermediate pipe, without affecting the overall flow of the intermediate pipe.
[0015] The utility model is provided with a sealing connection component, and the clamping convex tube of the chamber tube can be clamped between the tube wall of the intermediate tube and the inner tube, and the first sealing layer and the second sealing layer can play a double sealing role, and the convex teeth on the outer wall of the first sealing layer can be correspondingly embedded in the groove of the inner wall of the clamping convex tube, so as to further enhance the sealing effect and make the intermediate tube and the chamber tube tightly connected. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 This is a three-dimensional structural schematic diagram of an isolation swing valve for semiconductor and display production equipment of the utility model;
[0017] Figure 2 This is a schematic diagram of the valve housing structure of an isolation swing valve for semiconductor and display production equipment according to the utility model;
[0018] Figure 3 This is a schematic diagram of a half-section structure of an intermediate tube of an isolation swing valve for semiconductor and display production equipment according to the utility model;
[0019] Figure 4 The utility model is an isolation swing valve for semiconductor and display production equipment Figure 3 Enlarged structural diagram at A in the middle.
[0020] In the figure: 1. valve housing; 2. controller; 3. motor; 4. valve pipe; 5. lip seal; 6. valve plate; 7. connecting flange; 8. intermediate pipe; 9. emergency plugging assembly; 901. connecting rod; 902. intermediate block; 903. telescopic rod; 904. sealing plate; 10. chamber tube; 11. sealing connection assembly; 1101. snap-fit convex tube; 1102. groove; 1103. internal pipe; 1104. first sealing layer; 1105. second sealing layer. DETAILED DESCRIPTION
[0021] The following is a further detailed description of the implementation of the present utility model in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.
[0022] like Figure 1-Figure 2 As shown, an isolation swing valve for semiconductor and display production equipment includes a valve housing 1, an intermediate pipe 8 and an emergency plugging assembly 9, a controller 2 is installed on one side of the outer side of the valve housing 1, and a motor 3 is installed on the upper rear side of the valve housing 1, a valve pipe 4 is arranged on one side of the valve housing 1, and a lip seal ring 5 is bonded to the inner wall of the valve pipe 4, and a valve plate 6 is installed in the middle of the inner side of the lip seal ring 5, the front and rear sides of the valve pipe 4 are connected to the intermediate pipe 8 through a connecting flange 7, a chamber pipe 10 is installed on the outer side of the intermediate pipe 8, and the chamber pipe 10 is communicated with the processing chamber of the production equipment;
[0023] The specific operation is as follows: the controller 2 is used to control the motor 3, and the motor 3 is convenient for driving the valve plate 6 to swing in the internal chamber of the valve housing 1 to control the opening and closing of the valve tube 4. The two ends of the valve tube 4 are connected to the intermediate tube 8 through the connecting flange 7, and are connected to the chamber tube 10 of the processing chamber of the production equipment through the intermediate tube 8 to realize isolation control between the processing chambers. This connection method is convenient for replacing damaged intermediate tubes 8 and emergency plugging components 9.
[0024] like Figure 3As shown, an emergency plugging assembly 9 is installed inside the middle pipe 8, and the emergency plugging assembly 9 includes a connecting rod 901, a middle block 902, a telescopic rod 903 and a sealing plate 904. The middle block 902 is fixed to the inner side of the middle part of the middle pipe 8 through the connecting rod 901, and the front and rear sides of the middle block 902 are connected to the sealing plates 904 through the telescopic rod 903. The inner diameter of the middle pipe of the middle pipe 8 is larger than the inner diameter of the pipes on both sides, and the center line of the middle pipe 8 coincides with the center lines of the middle block 902 and the sealing plate 904; the sealing plate 904 is a circular structure, and the outer ring of the sealing plate 904 is provided with a sealing rubber, and the size of the sealing plate 904 is consistent with the size of the pipes on both sides of the middle pipe 8;
[0025] The specific operation is as follows: the inner diameter of the middle pipe of the intermediate pipe 8 is larger than the inner diameter of the pipes on both sides. Therefore, the two telescopic rods 903 are used to facilitate the movement of the front and rear sealing plates 904, so that when the valve housing 1 is leaking, the two sealing plates 904 can perform emergency sealing on the inside of the pipes on both sides of the intermediate pipe 8 to avoid material loss or impurity intrusion. On the contrary, the two sealing plates 904 shrink and return to the inside of the middle pipe of the intermediate pipe 8, without affecting the overall flow of the intermediate pipe 8.
[0026] like Figure 3-Figure 4 As shown, a sealing connection assembly 11 is provided at the connection between the intermediate tube 8 and the chamber tube 10; the sealing connection assembly 11 includes a clamping convex tube 1101, a groove 1102 and an inner tube 1103, the clamping convex tube 1101 is fixed to the outside of one end of the chamber tube 10, and the grooves 1102 are evenly distributed on the inner side of the clamping convex tube 1101, and the inner tube 1103 is fixed to the inner side of the intermediate tube 8 near one end of the chamber tube 10, and the cross-sections of the inner tube 1103 and the clamping convex tube 1101 are uniform. The sealing connection assembly 11 further comprises a first sealing layer 1104 and a second sealing layer 1105, and both the first sealing layer 1104 and the second sealing layer 1105 are ring-shaped structures, the first sealing layer 1104 is arranged between the inner tube 1103 and the clamping convex tube 1101, and the first sealing layer 1104 is provided with convex teeth on one side close to the groove 1102, and the second sealing layer 1105 is arranged between the inner tube 1103 and the outer wall of the top end of the chamber tube 10;
[0027] The specific operation is as follows: during the connection process between the intermediate tube 8 and the chamber tube 10, the clamping convex tube 1101 of the chamber tube 10 can be clamped between the tube wall of the intermediate tube 8 and the inner tube 1103, and at the same time, the first sealing layer 1104 and the second sealing layer 1105 can play a double sealing role, and the convex teeth on the outer wall of the first sealing layer 1104 can correspond to the groove 1102 on the inner wall of the clamping convex tube 1101, further enhancing the sealing effect, so that the intermediate tube 8 and the chamber tube 10 are tightly connected.
[0028] In summary, if Figure 1-Figure 4As shown, the isolation swing valve for semiconductor and display production equipment, when in use, the intermediate tube 8 is connected to the two ends of the valve tube 4 through the connecting flange 7, and the chamber tube 10 of the semiconductor and display production equipment processing chamber is connected through the intermediate tube 8, so as to realize the isolation control between the processing chambers. When the intermediate tube 8 is connected with the chamber tube 10, the clamping convex tube 1101 of the chamber tube 10 can be clamped between the tube wall of the intermediate tube 8 and the inner tube 1103, and the first sealing layer 1104 and the second sealing layer 1105 can play a double sealing role, and the convex teeth on the outer wall of the first sealing layer 1104 can be correspondingly embedded in the groove 1102 on the inner wall of the clamping convex tube 1101, so as to further enhance the sealing effect, so that the intermediate tube 8 and the chamber tube 10 are tightly connected;
[0029] During use, the controller 2 is used to control the motor 3, and the motor 3 can drive the valve plate 6 to swing in the internal chamber of the valve housing 1, thereby controlling the opening and closing of the valve tube 4, so as to facilitate the transmission of wafers between the processing chambers. If the seal of the valve housing 1 fails and causes leakage, the two front and rear sealing plates 904 can be driven to move by the two telescopic rods 903, so that the two sealing plates 904 can perform emergency sealing on the middle tube 8 inside the pipes on both sides of the middle tube 8 to avoid material loss or impurity intrusion. On the contrary, the two sealing plates 904 shrink and return to the middle pipe of the middle tube 8, without affecting the overall circulation of the middle tube 8. In this way, the use of the isolation swing valve for semiconductor and display production equipment is completed.
[0030] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.
Claims
1. An isolation swing valve for semiconductor and display production equipment, comprising a valve housing (1), an intermediate pipe (8) and an emergency plugging assembly (9), characterized in that: A valve tube (4) is provided on one side of the valve housing (1), and a lip seal ring (5) is bonded to the inner wall of the valve tube (4), and a valve plate (6) is installed in the middle of the inner side of the lip seal ring (5). The front and rear sides of the valve tube (4) are connected to an intermediate tube (8) via a connecting flange (7), and an emergency plugging assembly (9) is installed inside the intermediate tube (8), and the emergency plugging assembly (9) comprises a connecting rod (901), an intermediate block (902), a telescopic rod (903) and a sealing member (904). A sealing plate (904) is provided, wherein an intermediate block (902) is fixed to the inner side of the middle part of the intermediate tube (8) via a connecting rod (901), and the front and rear sides of the intermediate block (902) are connected to a sealing plate (904) via a telescopic rod (903), a chamber tube (10) is installed on the outer side of the intermediate tube (8), and the chamber tube (10) is interconnected with a processing chamber of the production equipment, and a sealing connection assembly (11) is provided at the connection between the intermediate tube (8) and the chamber tube (10).
2. The isolation swing valve for semiconductor and display production equipment according to claim 1, characterized in that: A controller (2) is installed on one side of the exterior of the valve housing (1), and an electric motor (3) is installed on the upper rear side of the valve housing (1).
3. The isolation swing valve for semiconductor and display production equipment according to claim 1, characterized in that: The inner diameter of the middle pipe of the intermediate pipe (8) is larger than the inner diameters of the pipes on both sides, and the center line of the intermediate pipe (8) coincides with the center lines of the intermediate block (902) and the sealing plate (904).
4. The isolation swing valve for semiconductor and display production equipment according to claim 1, characterized in that: The sealing plate (904) is of a circular structure, and the outer ring of the sealing plate (904) is provided with sealing rubber, and the size of the sealing plate (904) is consistent with the size of the pipes on both sides of the intermediate pipe (8).
5. The isolation swing valve for semiconductor and display production equipment according to claim 1, characterized in that: The sealing connection assembly (11) comprises a snap-fitting convex tube (1101), a groove (1102) and an inner tube (1103); the snap-fitting convex tube (1101) is fixed to the outside of one end of the chamber tube (10), and the grooves (1102) are evenly distributed on the inner side of the snap-fitting convex tube (1101); the inner tube (1103) is fixed to the inner side of the intermediate tube (8) close to one end of the chamber tube (10), and the cross-sections of the inner tube (1103) and the snap-fitting convex tube (1101) are both in an "L"-shaped structure.
6. The isolation swing valve for semiconductor and display production equipment according to claim 5, characterized in that: The sealing connection assembly (11) further comprises a first sealing layer (1104) and a second sealing layer (1105), and both the first sealing layer (1104) and the second sealing layer (1105) are ring-shaped structures, the first sealing layer (1104) is arranged between the inner tube (1103) and the clamping convex tube (1101), and convex teeth are correspondingly distributed on one side of the first sealing layer (1104) close to the groove (1102), and the second sealing layer (1105) is arranged between the inner tube (1103) and the outer wall of the top end of the chamber tube (10).