Bypass valve device suitable for conveying high-viscosity fluid

Abstract

The utility model relates to a bypass valve device suitable for conveying high-viscosity fluid, which comprises a valve body, a butt joint mounting head is arranged on the valve body, a leading-in hole and a leading-out hole are respectively arranged on the butt joint mounting head, a control cavity is arranged in the butt joint mounting head, the control cavity is communicated with the leading-in hole and the leading-out hole, a containing cavity is arranged in the valve body, and the containing cavity is communicated with the leading-in hole and the leading-out hole. A control mechanism is arranged in the containing cavity and comprises a control rod, a plug assembly is arranged at the front end of the control rod, an adjusting device is movably arranged at the rear end of the control rod, when the control rod is in the closed state, the plug assembly at the front end of the control mechanism abuts against the control cavity, and the guide-in hole and the guide-out hole are not communicated with each other. Therefore, liquid medicine in the external valve body can be properly guided out in a bypass mode, solidification caused by accumulation is avoided, and follow-up normal operation of the feeding pipeline cannot be affected.

Description

Technical Field

[0001] The utility model relates to a bypass valve, in particular to a bypass valve device suitable for conveying high-viscosity fluid. Background Art

[0002] For semiconductor processing, the wet processing technology is often used for wafer processing. With this technology, a liquid with high viscosity is required for processing. During the transportation of such liquid, due to its high viscosity and easy solidification, it often blocks the valve body configured in its storage container, affecting the subsequent liquid transportation.

[0003] At present, the conventional method is to configure an auxiliary stirring device to achieve the flow of the liquid medicine, but this configuration takes up a large space and requires additional power supply. From the perspective of transportation, the implementation cost is high. At the same time, the valve body cannot directly use dripping to promote the flow of liquid medicine. After the valve body is opened, the liquid medicine will be sprayed due to hydraulic pressure.

[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a bypass valve device suitable for conveying high-viscosity fluids, making it more valuable for industrial use. Utility Model Content

[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a bypass valve device suitable for conveying high-viscosity fluids.

[0006] The utility model discloses a bypass valve device suitable for conveying high-viscosity fluid, comprising a valve body, wherein: a docking mounting head is arranged on the valve body, an inlet hole and an outlet hole are respectively arranged on the docking mounting head, a control cavity is arranged in the docking mounting head, the control cavity is communicated with the inlet hole and the outlet hole, a storage cavity is arranged in the valve body, a control mechanism is arranged in the storage cavity, the control mechanism comprises a control rod, a plug assembly is arranged at the front end of the control rod, an adjusting device is movably arranged at the rear end of the control rod, and when in a closed state, the plug assembly at the front end of the control mechanism abuts against the control cavity, and the inlet hole and the outlet hole are not communicated with each other.

[0007] Furthermore, the above-mentioned bypass valve device is suitable for conveying high-viscosity fluids, wherein the cross-section of the control cavity in the docking mounting head is in an inverted T-shape, the inlet hole is located at the side end of the inverted T-shape, and the outlet hole is located at the bottom end of the inverted T-shape; or, the inlet hole is located at the bottom end of the inverted T-shape, and the outlet hole is located at the side end of the inverted T-shape.

[0008] Furthermore, the above-mentioned bypass valve device is suitable for conveying high-viscosity fluids, wherein the plug assembly includes a plug body, a conical contact head is provided at the front end of the plug body, an embedded block is provided at the rear end of the plug body, a slot is provided at the corresponding position of the control rod, the embedded block is embedded in the slot, and when the plug assembly is against the control cavity, a release gap exists between the side edge of the conical contact head and the control cavity.

[0009] Furthermore, in the bypass valve device suitable for conveying high-viscosity fluids, the plug body is provided with an extended clamping ring.

[0010] Furthermore, in the bypass valve device suitable for conveying high-viscosity fluid, the regulating device is a limit knob threadedly connected to the control rod, and the limit knob is located outside the valve body.

[0011] Furthermore, in the bypass valve device suitable for conveying high-viscosity fluid, the outer side of the limit knob is provided with anti-slip textures.

[0012] Furthermore, in the bypass valve device suitable for conveying high-viscosity fluid, the rear end of the control rod is connected to an opening and closing knob via a limit screw.

[0013] Furthermore, the above-mentioned bypass valve device suitable for high-viscosity fluid transportation, wherein a countersunk groove is provided in the opening and closing knob, a flat gasket is provided in the countersunk groove, a spring gasket is stacked on the flat gasket, and the spring gasket is in contact with the limit screw.

[0014] Furthermore, in the bypass valve device suitable for conveying high-viscosity fluid, the outer side of the opening and closing knob is provided with anti-slip textures.

[0015] Furthermore, in the bypass valve device suitable for conveying high-viscosity fluids, a connecting thread is arranged on the periphery of the docking mounting head.

[0016] By means of the above solution, the utility model has at least the following advantages:

[0017] 1. It can allow the liquid medicine in the external valve body to be properly bypassed to avoid solidification due to accumulation, and will not affect the subsequent normal operation of the feeding pipeline.

[0018] 2. Equipped with an independent docking installation head, it can be replaced according to the model of the current valve body to achieve a stable combination without replacing the entire bypass valve device, thus reducing the cost of use.

[0019] 3. The conical contact head structure can achieve convenient release without negative pressure and avoid jamming.

[0020] 4. The overall structure is simple, easy to manufacture and assemble, and can be adapted to the conventional medicine delivery external valve body used in semiconductor processing, with good versatility.

[0021] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of a bypass valve device suitable for conveying high-viscosity fluids.

[0023] Figure 2 It is a schematic diagram of the combination of the utility model and the valve body.

[0024] The meanings of the reference numerals in the drawings are as follows.

[0025] 1 Valve body 2 Butt mounting head

[0026] 3 Import hole 4 Export hole

[0027] 5 Storage chamber 6 Control lever

[0028] 7 Plug assembly 8 Embedded card block

[0029] 9 Extension ring 10 Limit knob

[0030] 11 Limit screw 12 Open / close knob

[0031] 13 Flat washer 14 Spring washer

[0032] 15 Valve body 16 Feed channel DETAILED DESCRIPTION

[0033] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0034] like Figures 1 to 2The bypass valve device suitable for conveying high-viscosity fluids includes a valve body 1, which is different in that: a docking mounting head 2 is provided on the valve body 1, which is convenient for combining with an external valve body 15 to achieve effective bypass control. Specifically, in order to dock with the external valve body 15 channel to achieve low-flow bypass feeding, an inlet hole 3 and an outlet hole 4 are respectively provided on the docking mounting head 2. During use, the docking mounting head 2 is connected to the feeding channel 16 of the external valve body 15, and the inlet hole 3 and the outlet hole 4 are respectively connected to the feed inlet and the outlet of the feeding channel 16. Considering the flow rate and hydraulic control during the bypass, a control cavity (not shown in the figure) is provided in the docking mounting head 2, and the control cavity is connected with the inlet hole 3 and the outlet hole 4. At the same time, a storage cavity 5 is provided in the valve body 1, and a control mechanism is provided in the storage cavity 5. Specifically, the control mechanism includes a control rod 6, and a plug assembly 7 is provided at the front end of the control rod 6. Furthermore, considering the limitation of the free travel of the control rod 6 during use, the position of the plug assembly 7 can be ultimately controlled, and an adjustment device is movably provided at the rear end of the control rod 6. During implementation, when in a closed state, the plug assembly 7 at the front end of the control mechanism abuts against the control cavity, and the inlet hole 3 and the outlet hole 4 are not connected to each other.

[0035] In combination with a preferred embodiment of the utility model, the cross section of the control cavity in the docking installation head 2 is in an inverted T-shape, the inlet hole 3 is located at the side end of the inverted T-shape, and the outlet hole 4 is located at the bottom end of the inverted T-shape. Of course, considering the preset pipeline directions of different valve bodies 15, the inlet hole 3 can also be located at the bottom end of the inverted T-shape, and the outlet hole 4 can be located at the side end of the inverted T-shape.

[0036] Looking further, the plug assembly 7 adopted by the utility model includes a plug body, and a conical contact head is provided at the front end of the plug body, which is used to cooperate with the control cavity to realize conduction control. At the same time, the plug assembly 7 is provided at the rear end of the plug body, and a card slot is provided at the corresponding position of the control rod 6. The plug assembly 7 is embedded in the card slot, which is convenient for realizing a stable combination of the control rod 6 and the plug body. In addition, in order to ensure the smooth flow of the liquid medicine during the release period, when the plug assembly 7 is against the control cavity, there is a release gap between the side edge of the conical contact head and the control cavity. Furthermore, in order to prevent the liquid medicine from leaking outward through the storage cavity 5, an extension clamp 9 is provided on the plug body for auxiliary plugging.

[0037] In view of the actual implementation, the regulating device is a limit knob 10 threadedly connected to the control rod 6, and the limit knob 10 is located outside the valve body 1. In this way, the free stroke of the control rod 6 can be effectively adjusted by the position of the limit knob 10. In other words, the switching of the normally open bypass and normally closed bypass of the bypass valve can be realized by limiting the free stroke of the control rod 6 by the limit knob 10. At the same time, the actual flow rate in the conduction state can be controlled to deal with the conduction amount of different liquid medicines to prevent solidification during transportation, and avoid unnecessary waste of liquid medicine. Furthermore, considering the steady grip during use, the utility model is provided with anti-slip texture on the outside of the limit knob 10.

[0038] Further, in order to facilitate the adjustment of the actual position of the control rod 6 and meet the convenient opening and closing control, the rear end of the control rod 6 is connected to the opening and closing knob 12 through the limit screw 11. Considering the stability of the combination, a countersunk groove is provided in the opening and closing knob 12, and a flat gasket 13 is provided in the countersunk groove. A spring gasket 14 is stacked on the flat gasket 13, and the spring gasket 14 is in contact with the limit screw 11. In this way, the limit screw 11 can always be firmly combined, and it will not loosen when the opening and closing knob 12 is rotated. Similarly, considering the anti-slip needs of users to adjust by grasping, the outer side of the opening and closing knob 12 is provided with anti-slip texture.

[0039] During implementation, in order to facilitate the processing of the utility model and the external valve body 15 for stable docking, a connecting thread is provided on the periphery of the docking mounting head 2. In this way, the utility model can be stably and sealedly docked with the bypass pipeline of the external valve body 15 through the docking mounting head 2.

[0040] The working principle of the utility model is as follows:

[0041] According to the current material of the liquid medicine, the control rod 6 is pulled outward for a certain stroke, so that the plug body is properly away from the corresponding inlet hole 3 and outlet hole 4 of the control cavity. At this time, the inlet and outlet of the feeding channel 16 of the external valve body 15 connected with the utility model are connected, and the liquid medicine begins to flow.

[0042] Afterwards, the limit knob 10 is rotated to limit the current position of the control rod 6 to achieve a locking state similar to a normally open state. At this time, during transportation, the liquid medicine can be bypassed and discharged at a specific flow rate, and will not accumulate in the feeding channel 16 to avoid solidification.

[0043] It can be seen from the above text description and the accompanying drawings that the following advantages are achieved after adopting the utility model:

[0044] 1. It can allow the liquid medicine in the external valve body to be properly bypassed to avoid solidification due to accumulation, and will not affect the subsequent normal operation of the feeding pipeline.

[0045] 2. Equipped with an independent docking installation head, it can be replaced according to the model of the current valve body to achieve a stable combination without replacing the entire bypass valve device, thus reducing the cost of use.

[0046] 3. The conical contact head structure can achieve convenient release without negative pressure and avoid jamming.

[0047] 4. The overall structure is simple, easy to manufacture and assemble, and can be adapted to the conventional medicine delivery external valve body used in semiconductor processing, with good versatility.

[0048] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A bypass valve device suitable for conveying high-viscosity fluids, comprising a valve body, characterized in that: The valve body is provided with a docking mounting head, on which an inlet hole and an outlet hole are respectively provided, a control cavity is provided in the docking mounting head, the control cavity is communicated with the inlet hole and the outlet hole, a receiving cavity is provided in the valve body, a control mechanism is provided in the receiving cavity, the control mechanism includes a control rod, a plug assembly is provided at the front end of the control rod, an adjusting device is movably provided at the rear end of the control rod, and when in a closed state, the plug assembly at the front end of the control mechanism abuts against the control cavity, and the inlet hole and the outlet hole are not communicated with each other.

2. The bypass valve device suitable for conveying high-viscosity fluid according to claim 1, characterized in that: The cross-section of the control cavity in the docking installation head is in an inverted T-shape, the introduction hole is located at the side end of the inverted T-shape, and the outlet hole is located at the bottom end of the inverted T-shape; or, the introduction hole is located at the bottom end of the inverted T-shape, and the outlet hole is located at the side end of the inverted T-shape.

3. The bypass valve device suitable for conveying high-viscosity fluid according to claim 1, characterized in that: The plug assembly includes a plug body, a conical contact head is provided at the front end of the plug body, an embedded block is provided at the rear end of the plug body, a slot is provided at the corresponding position of the control rod, the embedded block is embedded in the slot, and when the plug assembly is against the control cavity, a release gap exists between the side edge of the conical contact head and the control cavity.

4. The bypass valve device suitable for conveying high-viscosity fluid according to claim 3, characterized in that: The plug body is provided with an extended clamping ring.

5. The bypass valve device suitable for conveying high-viscosity fluid according to claim 1, characterized in that: The regulating device is a limit knob threadably connected to the control rod, and the limit knob is located outside the valve body.

6. The bypass valve device suitable for conveying high-viscosity fluid according to claim 5, characterized in that: The outer side of the limit knob is provided with anti-slip textures.

7. The bypass valve device suitable for conveying high-viscosity fluid according to claim 1, characterized in that: The rear end of the control rod is connected with an opening and closing knob through a limit screw.

8. The bypass valve device suitable for conveying high-viscosity fluid according to claim 7, characterized in that: A countersunk groove is arranged in the opening and closing knob, a flat washer is arranged in the countersunk groove, a spring washer is stacked on the flat washer, and the spring washer is in contact with the limit screw.

9. The bypass valve device suitable for conveying high-viscosity fluid according to claim 7, characterized in that: The outer side of the opening and closing knob is provided with anti-slip textures.

10. The bypass valve device suitable for conveying high-viscosity fluid according to claim 1, characterized in that: The periphery of the docking installation head is provided with a connecting thread.

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