Ferromagnetic resonance detection probe

Abstract

The utility model provides a ferromagnetic resonance detection probe which comprises an angle absolute value encoder, a first displacement assembly, a second displacement assembly, a supporting arm and a coplanar waveguide, and the coplanar waveguide can be driven by the first displacement assembly and the second displacement assembly to extend into a narrow space by means of the supporting arm. Ferromagnetic resonance detection can be carried out in a narrow space; when power-off and power-on do not affect the acquisition of the distance between the supporting arm and the surface of the measured object, and after power-off and power-on, the position of the supporting arm affected by the electric control driver does not need to be calibrated, so that the position change and error of the supporting arm in the vertical direction can be effectively avoided; therefore, the support arms and the corresponding coplanar waveguides are prevented from colliding with other components or measured objects, so that the measured objects and detection equipment are protected, and nondestructive ferromagnetic resonance measurement of wafers can be realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of magnetic detection, relates to ferromagnetic resonance detection, and specifically relates to a ferromagnetic resonance detection probe. Background Art

[0002] Ferromagnetic resonance (FMR) is a technique for analyzing and studying the magnetic properties of ferromagnetic materials. This technique uses the resonance phenomenon of magnetic moments under the combined action of external magnetic fields and alternating electromagnetic fields to detect and quantify the magnetic characteristics of materials.

[0003] In ferromagnetic resonance testing, the sample is usually placed in a constant magnetic field, and an alternating magnetic field is further provided to the object to be tested. When the frequency of the alternating magnetic field matches the natural oscillation frequency of the magnetic moment inside the sample, resonance occurs. In order to provide a corresponding magnetic field environment, it is generally necessary to set an excitation component near the position to be tested of the object to be tested, thereby greatly reducing the operating space near the position to be tested of the object to be tested. For example, it is generally necessary to provide a constant magnetic field through an electromagnet, and make the position to be tested of the object to be tested close to the pole of the electromagnet to ensure that the magnetic field has the direction, strength and other characteristics required for detection.

[0004] Therefore, it is necessary to provide a ferromagnetic resonance detection probe that can be used in a narrow space.

[0005] The above information disclosed in the background technology section is only used to enhance the understanding of the background of the present invention and therefore may contain information that does not constitute the prior art known to ordinary technicians in this field. Utility Model Content

[0006] In order to provide a ferromagnetic resonance detection probe that can be used in a narrow space, the utility model provides a ferromagnetic resonance detection probe, including an angle absolute value encoder, a first displacement component, a second displacement component, a support arm, and a coplanar waveguide, wherein the first displacement component and the second displacement component are respectively provided with a fixed end and a mobile end, the fixed end of the second displacement component is installed on the mobile end of the first displacement component, the moving directions of the mobile ends of the first displacement component and the second displacement component are perpendicular to each other, the support arm is connected to the mobile end of the second displacement component, and the coplanar waveguide is arranged at the end of the support arm; the fixed end of the first displacement component is an electrically controlled driver, the first displacement component also includes a mounting block, the electrically controlled driver is fixed to the mounting block, the mobile end of the first displacement component is slidably connected to the mounting block, the output end of the electrically controlled driver drives the mobile end of the first displacement component to move, and the active shaft of the electrically controlled driver is connected to the detection end of the angle absolute value encoder.

[0007] Optionally, the electronically controlled driver is further provided with a mechanical driving end, and the mechanical driving end is drivingly connected to the driving shaft.

[0008] Optionally, the second displacement assembly further includes a limit assembly, which includes a first limit assembly fixed to the fixed end of the second displacement assembly and a second limit assembly fixed to the movable end of the second displacement assembly, and the first limit assembly and the second limit assembly are spaced apart along the moving direction of the movable end.

[0009] Optionally, a buffer is provided on a side of the first limiting assembly facing the second limiting assembly.

[0010] Optionally, the driving shaft and the detection end of the angle absolute encoder are connected via a fin coupling.

[0011] Preferably, the moving end of the first displacement assembly moves in a direction approaching and away from the object to be measured, and the moving end of the second displacement assembly moves in a direction parallel to a plane where the measured position of the object to be measured is located.

[0012] Optionally, the ferromagnetic resonance detection probe further includes a distance measuring device, and the distance measuring device is arranged at one end of the support arm close to the coplanar waveguide.

[0013] Furthermore, the distance measuring device is arranged in the same direction as the detection direction of the coplanar waveguide.

[0014] Optionally, the distance measuring device is a capacitive micrometer.

[0015] Optionally, the ferromagnetic resonance detection probe also includes a controller, which is communicatively connected to at least the electric-controlled driver and the absolute encoder, and the control signal transmitted by the controller to the electric-controlled driver responds to the signal transmitted by the absolute encoder to the controller.

[0016] The utility model has at least the following beneficial effects: the coplanar waveguide can be driven by the first displacement component and the second displacement component and can extend into a relatively narrow space with the help of the support arm, so that ferromagnetic resonance detection can be performed in the narrow space; when power is off and on, it does not affect the acquisition of the distance between the support arm and the surface of the object to be measured, and there is no need to calibrate the position of the support arm affected by the electric control driver after power is off and on, which can effectively avoid position changes and errors of the support arm in the vertical direction, and further avoid collisions between the support arm and the corresponding coplanar waveguide and other components or the object to be measured, thereby protecting the object to be measured and the detection equipment, and realizing non-destructive ferromagnetic resonance measurement of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The figure is a schematic diagram of the overall structure of an implementation scheme of a ferromagnetic resonance detection probe.

[0018] Figure 2 for Figure 1 A schematic diagram of the overall structure of the embodiment shown in another perspective.

[0019] Figure 3 for Figure 1 A schematic diagram of the overall structure of the illustrated embodiment from another perspective.

[0020] Figure 4 for Figure 1 A schematic diagram of the overall structure of the illustrated embodiment from another perspective.

[0021] Figure 5 for Figure 1 A schematic diagram of the overall structure of another state of the embodiment shown.

[0022] Figure 6 for Figure 5 A schematic diagram of the overall structure of the embodiment shown in another perspective.

[0023] Figure 7 A schematic diagram of a usage of a ferromagnetic resonance detection probe. DETAILED DESCRIPTION

[0024] In order to make the purpose and features of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are further described below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and use inaccurate ratios, which are only used to conveniently and clearly assist in explaining the embodiments of the utility model.

[0025] See also Figure 7 When performing ferromagnetic resonance detection, a constant magnetic field needs to be formed at the measured position of the object 900 to be detected. A more feasible way is to generate a magnetic field by setting an excitation coil 810, and adjust the magnetic field through the pole head 820, so that the end of the pole head 820 is close to the measured position of the object 900 to make the magnetic field generated by the excitation coil 810 extend to the measured position of the object 900 through the pole head 820. The object 900 to be detected is usually carried by a corresponding carrying device 830. It can be seen that the upper and lower sides of the measured position of the object 900 to be detected are provided with corresponding components, and the operating space left for ferromagnetic resonance detection is extremely small at least in the height direction.

[0026] The utility model provides a ferromagnetic resonance detection probe, comprising an angle absolute value encoder 100, a first displacement component, a second displacement component, a support arm 400, and a coplanar waveguide 600. The first displacement component and the second displacement component are respectively provided with fixed ends 210, 310 and movable ends 220, 320. The fixed end 310 of the second displacement component is installed on the movable end 220 of the first displacement component, so that the position of the second displacement component can be controlled by the first displacement component; the moving directions of the movable ends 220, 320 of the first displacement component and the second displacement component are perpendicular to each other, the support arm 400 is connected to the movable end 320 of the second displacement component, so that the support arm 400 can be driven by the first displacement component and the second displacement component to move in at least one plane; the coplanar waveguide 600 is arranged at the end 402 of the support arm 400, so that the first displacement component and the second displacement component can drive the coplanar waveguide 600 to move.

[0027] The fixed end 210 of the first displacement assembly is an electric control driver 210, for example, an electric control motor; the first displacement assembly also includes a mounting block 230, the electric control driver 210 is fixed to the mounting block 230, and the movable end 220 of the first displacement assembly is slidably connected to the mounting block 230, see Figure 3 , Figure 6 The mounting block 230 may be provided with a slide rail 231, and the moving end 220 may be slidably connected to the slide rail 231; the output end 212 of the electric-controlled driver 210 drives the moving end 220 of the first displacement assembly to move, so that the electric-controlled driver 210 can drive the moving end 220 to slide along a preset direction. The driving shaft 211 of the electric-controlled driver 210 is connected to the detection end 120 of the angle absolute value encoder 100, so that the current angle of the driving shaft 211 of the electric-controlled driver 210 can be determined through the angle absolute value encoder 100.

[0028] See also Figures 1 to 6 , showing a specific implementation. Among them, the first displacement assembly is configured to enable its mobile end 220 to move in the vertical direction, and the second displacement assembly is configured to enable its mobile end 320 to move in the horizontal direction. More specifically, when in use, the mobile end 220 of the first displacement assembly can be moved in the direction of approaching and moving away from the object to be measured 900, and the mobile end 320 of the second displacement assembly can be moved in the direction parallel to the plane where the measured position of the object to be measured 900 is located, so that the first displacement assembly is controlled to drive the coplanar waveguide 600 to approach or move away from the object to be measured 900, and the second displacement assembly is controlled to drive the coplanar waveguide 600 to approach or move away from the measured position. By using the support arm 400 to control the position of the coplanar waveguide 600, the coplanar waveguide 600 can be driven by the first displacement assembly and the second displacement assembly to extend into a relatively narrow space, so that ferromagnetic resonance detection can be performed in a narrow space.

[0029] For the first displacement assembly, the moving distance of its moving end 212 is related to the angle of the driving shaft 211 of the electric control driver 210. More specifically, whenever the driving shaft 211 rotates, the angle absolute value encoder 100 can accurately measure and record the rotation angle of the driving shaft 211. Since the rotation angle is directly related to the displacement of the moving end 220, the reading of the angle absolute value encoder 100 can accurately reflect the actual position of the moving block. Since the angle absolute value encoder 100 provides a unique code for each position, its position can be remembered even after the power is turned off. When the power is turned on again, there is no need to recalibrate, and the device can immediately know its precise position. Accordingly, even if the power is turned off and then on again, the current angle of the driving shaft 211 of the electric control driver 210 can be determined by the angle absolute value encoder 100, and then the position of the moving end 220 of the first displacement assembly can be determined. Since the moving directions of the moving ends 220 and 320 of the first displacement assembly and the second displacement assembly are perpendicular to each other, the position of the support arm 400 in the moving direction of the moving end 220 of the first displacement assembly is uniquely determined by the position of the moving end 220 of the first displacement assembly. Therefore, the position of the support arm 400 in the moving direction of the moving end 220 of the first displacement assembly can be uniquely determined by the angle absolute value encoder 100, and is not affected by power-off or power-on conditions. That is to say, even if the power is turned off and then on, there is no need to calibrate the position of the support arm 400 in the moving direction of the mobile end 220. During use, power off and on does not affect the acquisition of the distance between the support arm 400 and the surface of the object 900 to be measured, thereby avoiding the loss of distance data between the support arm 400 and the surface of the object 900 after power off and on, and there is no need to calibrate the position of the support arm 400 affected by the electric-controlled driver 210 after power off and on; further, when the support arm 400 carrying the coplanar waveguide 600 extends into a relatively narrow position for ferromagnetic resonance detection, it can avoid collision and interference of the detection device caused by the loss of distance data between the support arm 400 and the surface of the object 900 after power off and on, and there is no need to calibrate the position of the support arm 400 affected by the electric-controlled driver 210, thereby reducing equipment damage and improving detection efficiency.

[0030] See also Figures 1 to 3 , shows a state of a ferromagnetic resonance detection probe before ferromagnetic resonance detection, wherein the mobile end 220 of the first displacement component is close to the fixed end 210 of the first displacement component, and the mobile end 320 of the second displacement component is close to the fixed end 310 of the second displacement component. At this time, the coplanar waveguide 600 is in a state away from the plane where the detected position of the object 900 is located and away from the detected position of the object 900. Please refer to Figures 4 to 6, shows a state of a ferromagnetic resonance detection probe during ferromagnetic resonance detection, wherein the moving end 220 of the first displacement assembly moves downward, and the moving end 320 of the second displacement assembly moves horizontally. At this time, the coplanar waveguide 600, driven by the support arm 400, approaches the detection position of the object 900 and its plane. Figure 7 , shows a method of extending the coplanar waveguide 600 into the detection position by using the support arm 400, wherein the ferromagnetic resonance detection probe is installed at the corresponding fixed position 840 of the external device through the mounting block 230. It can be clearly seen that the coplanar waveguide 600 can effectively approach the detected position of the object 900 to be measured, and the position in the vertical direction is controlled by the first displacement component, and the position in the horizontal direction is controlled by the second displacement component. It can be clearly seen that when power failure and power on do not affect the acquisition of the surface distance between the support arm 400 and the object 900 to be measured, and there is no need to calibrate the position of the support arm 400 affected by the electric control driver 210 after power failure and power on, the position change and error of the support arm 400 in the vertical direction can be effectively avoided, thereby avoiding the collision between the support arm 400 and the corresponding coplanar waveguide 600 and other components or the object 900 to be measured, thereby protecting the object 900 to be measured and the detection equipment.

[0031] It should be noted that, for the electric control driver 210, its output end 212 can be either its driving shaft 211 or other corresponding structures that have a transmission relationship with the driving shaft 211. That is to say, the output end 212 and the driving shaft 211 are not mutually independent concepts, but concepts that can overlap or overlap each other in some cases. Specifically, in some cases, a corresponding mechanism can be set in the mobile end 221 connected to its driving shaft 211, so that the driving shaft 211 drives the mobile end 221 to move as the output end 212 of the electric control driver 210; or a corresponding mechanism can be set in the electric control driver 210, so that the driving shaft 211 drives the output end 221 to move to the outside or inside of the electric control driver 210, so that the output end 212 can directly drive the mobile end 221 to move; that is to say, the electric control driver 210 can use the driving shaft 211 as the output end 212, or additionally set a corresponding component as the output end 212. The specific setting method can be selected and set within the scope of the utility model, and all belong to the protection scope of the utility model.

[0032] See also Figures 1 to 6For the second displacement component, a corresponding driving element can be set in the fixed end 310 to drive the mobile end 320 of the second displacement component to move. For example, a pneumatic driving component is used as the power source of the mobile end 320, and accordingly, a pneumatic inlet and outlet can be set on the fixed end 310 for pneumatic control; an electric driving component is used as the power source of the mobile end 320, and accordingly, a corresponding electric control input terminal 350 can be set on the fixed end 310 for electric control.

[0033] See also Figures 1 to 6 In order to enable the angle absolute encoder 100 to effectively detect the angle of the active shaft 211 of the electric control driver 210, a hollow connecting frame 140 can be provided, and the main body 110 of the angle absolute encoder 100 and the electric control driver 210 are respectively connected through the connecting frame 140, and the input end 120 of the angle absolute encoder 100 and the active shaft 211 of the electric control driver 210 are connected inside the connecting frame 140. The connecting frame 140 is used to form a space that is easy to connect and can avoid interference from external equipment to a certain extent, so as to improve the overall stability of the equipment.

[0034] See also Figures 1 to 6 For the connection between the first displacement assembly and the second displacement assembly, corresponding connectors may be provided. For example, a right-angle mounting plate 700 may be used, with one connection surface of the right-angle mounting plate 700 mounted on the moving end 220 of the first displacement assembly and the other connection surface mounted on the fixing point 310 of the second displacement assembly. In addition, an adapter 330 may be provided to facilitate the connection between the corresponding components.

[0035] In some embodiments, a mechanical drive end may be provided in the electric-controlled driver 210, and the mechanical drive end may be connected to the driving shaft 211 in transmission so as to provide a driving method for the driving shaft 211 other than electric control. For example, in some cases, the electric-controlled driver 210 may also drive its driving shaft 211 to rotate by an external device or manually, and a knob may be installed on the driving shaft 211 or a transmission structure that cooperates with the driving shaft 211 may be installed. Accordingly, the mechanical drive end may be either a driver or a corresponding structure installed on the driving shaft 211 itself, or other input end that has a transmission connection with the driving shaft 211.

[0036] The second displacement assembly further includes a limiting assembly, which includes a first limiting assembly 311 fixed to the fixed end 310 of the second displacement assembly and a second limiting assembly 321 fixed to the movable end 320 of the second displacement assembly, wherein the first limiting assembly 311 and the second limiting assembly 321 are arranged at intervals along the moving direction of the movable end 320. In some cases, a buffer 312 is arranged on one side of the first limiting assembly 311 facing the second limiting assembly 321 to prevent the first limiting assembly 311 and the second limiting assembly 321 from colliding when they gradually approach each other.

[0037] See also Figure 2 , Figure 5 , shows a specific form of a limit assembly, the first limit assembly 311 is fixed to the fixed end 310 of the second displacement assembly and extends outward, the second limit assembly 321 is fixed to the movable end 320 of the second displacement assembly and extends outward, and the first limit assembly 311 is at least partially located in the path of the second limit assembly 321 driven by the movable end 320.

[0038] See also Figure 3 , a fin coupling 130 can be used to connect the driving shaft 211 and the detection end 120 of the angle absolute encoder 100. The fin coupling 130 (also called an elastic coupling) is usually composed of two metal flanges and an intermediate elastic element, which is often composed of multiple fin-shaped layers, so that the coupling can not only transmit torque, but also absorb axial, radial and angular centering errors, and can effectively reduce mechanical vibration and impact, thereby protecting the connection between the driving shaft 211 and the detection end 120 of the angle absolute encoder 100 from excessive stress.

[0039] See also Figure 3 , Figure 6 In order to enable the support arm 400 to effectively extend the coplanar waveguide 600 into a narrow space, one end of the support arm 400 can be used as a fixed end 401 fixedly connected to the movable end 320 of the second displacement assembly, and the other end of the support arm 400 can be used as a detection end 402 provided with the coplanar waveguide 600, so that the free end of the support arm 400 is longer, and the coplanar waveguide 600 can be extended to the measured position under the condition of a larger range of vertical space restrictions.

[0040] See also Figure 4In some cases, the ferromagnetic resonance detection probe may also include a distance measuring device 500, which is arranged at the end of the support arm 400 close to the coplanar waveguide 600, so that the distance measuring device 500 can analyze the distance between the coplanar waveguide 600 and the object 900 by analyzing the distance between the support arm 400 and the object 900, and at the same time, it can avoid the distance between the coplanar waveguide 600 and the object 900. The calculation error caused by the displacement of the cantilever beam structure formed by the support arm 400 at its end where the coplanar waveguide 600 is arranged.

[0041] See also Figure 4 The distance measuring device 500 and the detection direction of the coplanar waveguide 600 are arranged in the same direction. For details, please refer to Figure 4 , Figure 7 The distance measuring device 500 detects the distance between it and the object 900 to be measured, and then analyzes the distance between the support arm 400 and the coplanar waveguide 600 and the object 900 to be measured, and uses the coplanar waveguide 600 to detect the object 900 to be measured.

[0042] The distance measuring device 500 needs to be small in axial volume or flat. As an optional form, the distance measuring device 500 can be a capacitive micrometer. In some cases, an optical distance meter, an ultrasonic distance meter, a magnetic induction distance measuring system, an inductive distance meter, etc. can also be selected.

[0043] In some cases, in order to realize the control of the ferromagnetic resonance detection probe, a corresponding control device can also be set. As a feasible implementation, the ferromagnetic resonance detection probe can also include a controller, which is at least connected to the electronically controlled driver 210 and the absolute encoder 100 for communication. For example, the signal output terminal 111 of the absolute encoder 100 is electrically connected to the controller, and the electronically controlled input terminal 213 of the electronically controlled driver 210 is electrically connected to the controller. The control signal transmitted by the controller to the electronically controlled driver responds to the signal transmitted by the absolute encoder to the controller.

[0044] In addition, when the second displacement component is an electrically controlled component, the controller can also be electrically connected to the electrically controlled input terminal 350 of the fixed end 310 of the second displacement component to drive and control the movement of the movable end 320 of the second displacement component.

[0045] The above shows and describes the basic principles, main features and advantages of the utility model, so the above is only an embodiment of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions only describe the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model also includes various equivalent changes and improvements, which will fall within the scope of the utility model to be protected.

Claims

1. A ferromagnetic resonance detection probe, characterized in that: The invention comprises an angle absolute value encoder, a first displacement component, a second displacement component, a support arm, and a coplanar waveguide, wherein the first displacement component and the second displacement component are respectively provided with a fixed end and a movable end, the fixed end of the second displacement component is mounted on the movable end of the first displacement component, the moving directions of the movable ends of the first displacement component and the second displacement component are perpendicular to each other, the support arm is connected to the movable end of the second displacement component, and the coplanar waveguide is provided at the end of the support arm; The fixed end of the first displacement component is an electric-controlled driver, and the first displacement component also includes a mounting block. The electric-controlled driver is fixed to the mounting block. The movable end of the first displacement component is slidably connected to the mounting block. The output end of the electric-controlled driver drives the movable end of the first displacement component to move. The active shaft of the electric-controlled driver is connected to the detection end of the angle absolute encoder.

2. A ferromagnetic resonance detection probe as claimed in claim 1, characterized in that: The electronically controlled driver is also provided with a mechanical driving end, and the mechanical driving end is drivingly connected to the driving shaft.

3. The ferromagnetic resonance detection probe according to claim 1, characterized in that: The second displacement assembly also includes a limit assembly, which includes a first limit assembly fixed to the fixed end of the second displacement assembly and a second limit assembly fixed to the movable end of the second displacement assembly, and the first limit assembly and the second limit assembly are arranged at intervals along the moving direction of the movable end.

4. A ferromagnetic resonance detection probe as claimed in claim 3, characterized in that: A buffer is provided on one side of the first limiting assembly facing the second limiting assembly.

5. The ferromagnetic resonance detection probe according to claim 1, characterized in that: The driving shaft is connected to the detection end of the angle absolute value encoder via a fin coupling.

6. The ferromagnetic resonance detection probe according to claim 1, characterized in that: The moving end of the first displacement assembly moves in a direction approaching and away from the object to be measured, and the moving end of the second displacement assembly moves in a direction parallel to a plane where a measured position of the object to be measured is located.

7. The ferromagnetic resonance detection probe according to claim 1, characterized in that: The ferromagnetic resonance detection probe further comprises a distance measuring device, and the distance measuring device is arranged at one end of the support arm close to the coplanar waveguide.

8. The ferromagnetic resonance detection probe according to claim 7, characterized in that: The distance measuring device is arranged in the same direction as the detection direction of the coplanar waveguide.

9. The ferromagnetic resonance detection probe according to claim 7, characterized in that: The distance measuring device is a capacitive micrometer.

10. The ferromagnetic resonance detection probe according to claim 1, characterized in that: The ferromagnetic resonance detection probe also includes a controller, which is at least in communication with the electric control driver and the absolute value encoder. The control signal transmitted by the controller to the electric control driver responds to the signal transmitted by the absolute value encoder to the controller.

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