High-temperature and high-pressure tank body and filtering device thereof

Abstract

The utility model discloses a high-temperature high-pressure tank and a filtering device thereof, and relates to the technical field of high-temperature high-pressure tanks, the filtering device comprises an air inlet pipe, a condenser, an impurity recycling bin and a filter, an air inlet of the condenser is communicated with the air inlet pipe, the impurity recycling bin is communicated with an air outlet of the condenser, and the filter is communicated with an air outlet of the condenser. The condenser condenses gaseous fluid supplied by the gas inlet pipe into liquid fluid, the condensed liquid fluid flows into the impurity recycling bin, and the impurity recycling bin recycles particle dust doped in the liquid fluid; the gaseous fluid which is not condensed by the condenser flows through the filter, and particle dust doped in the gaseous fluid is filtered by the filter. According to the utility model, particle dust in liquid fluid can be recovered by using the impurity recovery barrel, particle dust in gaseous fluid can be filtered by using the filter, the particle dust in the high-temperature and high-pressure tank body can be fully removed by using the two dust removal modes, the maintenance frequency of the tank body is reduced, and the maintenance cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of high-temperature and high-pressure tank bodies, in particular to a high-temperature and high-pressure tank body and a filtering device thereof. Background Art

[0002] With the rapid development of science and technology, semiconductor chips are an indispensable part of computers, communications, automobiles, aviation and other fields. The production of semiconductor chips is inseparable from high-temperature and high-pressure tanks. In order to ensure the output and quality of semiconductor chips, the dust-free requirements for high-temperature and high-pressure tanks are becoming more and more stringent.

[0003] In the production process of semiconductor chips, the high-temperature and high-pressure tank is affected by adverse factors such as environmental changes or failures, and it is inevitable that the temperature will be uneven or the pressure will be unstable, resulting in dust particles in the tank due to expansion and contraction. In a high-temperature and high-pressure environment, the adsorption force between these dust particles will be enhanced, and they will adhere to the inner wall of the tank. The high-temperature and high-pressure tank needs to be disassembled regularly for cleaning, which has a high maintenance cost. Utility Model Content

[0004] The utility model aims to provide a high-temperature and high-pressure tank and a filtering device thereof, which utilizes a filter and an impurity recovery barrel to remove dust from gas and liquid fluids respectively, thereby solving the technical problem of high maintenance cost of the high-temperature and high-pressure tank due to frequent dust removal.

[0005] In order to achieve the above-mentioned purpose, the utility model provides a filtering device for a high-temperature and high-pressure tank, comprising:

[0006] Intake pipe;

[0007] A condenser, wherein an air inlet of the condenser is connected to an air inlet pipe, and the condenser is used to condense the gaseous fluid supplied by the air inlet pipe into a liquid fluid;

[0008] An impurity recovery barrel, which is connected to the gas outlet of the condenser and is used to recover particulate dust mixed in the liquid fluid;

[0009] The filter is connected to the air outlet of the condenser and is used to filter particulate dust mixed in the gaseous fluid that has not been condensed by the condenser.

[0010] Preferably, it also includes:

[0011] A reflux adapter, which is fixed to the air outlet of the condenser;

[0012] The reflux pipe and the impurity recovery bucket are respectively connected with the air outlet of the condenser through a reflux adapter, and the filter is arranged on the reflux pipe.

[0013] Preferably, it also includes:

[0014] A vacuum tube, wherein the vacuum tube is provided with a vacuum pump;

[0015] A vacuum adapter, which is arranged on the reflux pipe;

[0016] Vacuum switching valve, the vacuum switching valve is arranged between the vacuum tube and the vacuum adapter, and the vacuum switching valve is used to control the connection or disconnection of the vacuum tube and the return pipe.

[0017] Preferably, it also includes:

[0018] A valve detection member, the valve detection member is used to detect whether the vacuum switching valve is in an open state;

[0019] A receiving component, the receiving component is connected to the valve detection component, and is used to receive an opening instruction, and is used to receive a trigger instruction fed back by the valve detection component when the vacuum switching valve is not in an open state;

[0020] The executing component is connected to the receiving component, and is used to control the vacuum switching valve to open when receiving the opening instruction and the triggering instruction sent simultaneously by the receiving component.

[0021] Preferably, the return pipe comprises:

[0022] A vertical pipe, the vertical pipe is connected between the vacuum adapter and the liquid inlet of the filter, and the vertical pipe is used to maintain a set height difference between the gas outlet of the condenser and the filter;

[0023] A horizontal pipe is perpendicular to the vertical pipe and is connected to the liquid outlet of the filter.

[0024] Preferably, it also includes:

[0025] A circulation pump is arranged at one end of the reflux pipe away from the condenser, and is used to draw uncondensed gaseous fluid from the air outlet of the condenser into the reflux pipe.

[0026] Preferably, it also includes:

[0027] An air outlet pipe is connected to a circulation pump, and the gaseous fluid in the return pipe flows into the air outlet pipe through the circulation pump;

[0028] The heater is arranged on the air outlet pipe and is used to heat the liquid airflow condensed in the air outlet pipe.

[0029] Preferably, it also includes:

[0030] A humidity sensor is provided in the air outlet pipe, and is used to detect the current humidity of the gaseous fluid in the air outlet pipe;

[0031] The judging component is connected to the receiving component and the executing component respectively. When the receiving component receives the current humidity sent by the humidity sensor, the judging component is used to judge whether the current humidity exceeds the set humidity. The executing component is used to start the heater when the current humidity exceeds the set humidity.

[0032] Preferably, it also includes:

[0033] The recovery barrel support is fixed to the bottom of the impurity recovery barrel, and the recovery barrel support is used to support the impurity recovery barrel so that the reflux rotating joint is connected with the air outlet of the condenser in a collinear manner.

[0034] The utility model also provides a high-temperature and high-pressure tank body, comprising the above-mentioned filtering device.

[0035] Compared with the background technology, the utility model optimizes the high-temperature and high-pressure tank body and adds a filtering device. The filtering device includes an air inlet pipe, a condenser, an impurity recovery barrel and a filter. When the gaseous fluid in the air inlet pipe flows into the condenser, the condenser liquefies the gaseous fluid, and the liquid fluid formed after liquefaction flows into the impurity recovery barrel from the air outlet of the condenser, and the impurity recovery barrel recovers the particulate dust mixed in the liquid fluid; in addition, the gaseous fluid that has not been condensed by the condenser flows through the filter, and the filter filters the particulate dust mixed in the gaseous fluid.

[0036] It can be seen that the utility model can not only use the impurity recovery barrel to recover the particulate dust in the liquid fluid, but also use the filter to filter the particulate dust in the gaseous fluid. The two dust removal methods can fully remove the particulate dust in the high-temperature and high-pressure tank body, avoid the accumulation of a large amount of particulate dust on the inner wall of the tank body, reduce the maintenance times of the tank body, and save maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0038] Figure 1 An exploded view of a filtering device for a high-temperature and high-pressure tank provided in an embodiment of the utility model;

[0039] Figure 2 A front view of a filtering device for a high-temperature and high-pressure tank provided by an embodiment of the utility model;

[0040] Figure 3 for Figure 2 Right view of;

[0041] Figure 4for Figure 2 Left view of

[0042] Figure 5 for Figure 2 Top view of the .

[0043] The reference numerals are as follows:

[0044] Inlet pipe 1, condenser 2, impurity recovery barrel 3, filter 4, reflux adapter 5, reflux pipe 6, vacuum pipe 7, vacuum pump 8, vacuum adapter 9, vacuum switching valve 10, circulation pump 11, outlet pipe 12, heater 13 and recovery barrel support 14;

[0045] An air inlet 21 and an air outlet 22;

[0046] Vertical tube 61 and horizontal tube 62. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0048] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0049] The utility model discloses a filtering device for a high-temperature and high-pressure tank, as shown in the attached Figures 1 to 5 As shown, it includes an air inlet pipe 1, a condenser 2, an impurity recovery barrel 3 and a filter 4. The air inlet pipe 1 is used to transport the gaseous fluid in the high-temperature and high-pressure tank. The air inlet 21 of the condenser 2 is connected to the air inlet pipe 1, and is used to condense the gaseous fluid supplied by the air inlet pipe 1 into a liquid fluid. The air inlet pipe 1 can be specifically connected to the air inlet 21 of the condenser 2 through a high-temperature resistant hose. The type of condenser 2 can be adaptively selected according to the type of gaseous fluid, and is not specifically limited here. The impurity recovery barrel 3 is connected to the air outlet 22 of the condenser 2. The impurity recovery barrel 3 can separate the liquid fluid and the particulate impurities, and is used to recover the particulate dust mixed in the liquid fluid to achieve the purpose of dust removal. It should be noted that the air inlet 21 of the condenser 2 is set higher than the air outlet 22, which is conducive to the rapid discharge of the particulate dust at the air outlet 22 of the condenser 2 by gravity. The filter 4 is connected to the air outlet 22 of the condenser 2 and is located downstream of the impurity recovery barrel 3 to filter particulate dust mixed in the gaseous fluid that has not been condensed by the condenser 2. The structure and working principle of the filter 4 can be specifically referred to the prior art.

[0050] When the gaseous fluid in the air inlet pipe 1 flows into the condenser 2, the condenser 2 liquefies the gaseous fluid, and the liquid fluid formed after liquefaction flows into the impurity recovery barrel 3 from the air outlet 22 of the condenser 2, and the impurity recovery barrel 3 recovers the particulate dust mixed in the liquid fluid; in addition, the gaseous fluid that has not been condensed by the condenser 2 flows through the filter 4, and the filter 4 filters the particulate dust mixed in the gaseous fluid.

[0051] In summary, the utility model can not only utilize the impurity recovery barrel 3 to recover the particulate dust in the liquid fluid, but also utilize the filter 4 to filter the particulate dust in the gaseous fluid. The two dust removal methods can fully remove the particulate dust in the high-temperature and high-pressure tank body, avoid a large amount of particulate dust adhering to the inner wall of the tank body and accumulating, reduce the maintenance times of the tank body, and save maintenance costs.

[0052] The above-mentioned filtering device also includes a reflux adapter 5 and a reflux pipe 6. The reflux adapter 5 is fixedly arranged at the air outlet 22 of the condenser 2, and the filter 4 is arranged at the reflux pipe 6. The reflux adapter 5 can be a three-way pipe, but is not limited thereto. The reflux pipe 6 and the impurity recovery barrel 3 are respectively connected to the air outlet 22 of the condenser 2 through the reflux adapter 5, so that the air outlet 22 of the condenser 2 is divided into two paths through the reflux adapter 5, and the condensed liquid fluid flows into the impurity recovery barrel 3 through the reflux adapter 5, and the uncondensed gaseous fluid flows into the reflux pipe 6 through the reflux adapter 5 and flows into the filter 4 along the reflux pipe 6.

[0053] The above-mentioned filtering device also includes a vacuum tube 7, a vacuum adapter 9 and a vacuum switching valve 10. The vacuum tube 7 is provided with a vacuum pump 8, so that the vacuum pump 8 can evacuate through the vacuum tube 7. The vacuum adapter 9 is arranged on the reflux pipe 6, and the vacuum switching valve 10 is arranged between the vacuum tube 7 and the vacuum adapter 9, and is used to control the connection or disconnection of the vacuum tube 7 and the reflux pipe 6. When the vacuum switching valve 10 is opened, the vacuum tube 7 is connected to the reflux pipe 6 to meet the functional requirements; when the vacuum switching valve 10 is closed, the vacuum tube 7 is disconnected from the reflux pipe 6 to prevent the vacuum tube 7 from affecting the dust removal of the filter 4, thereby ensuring that the dust removal effect of the filter 4 remains optimal. The vacuum switching valve 10 can specifically be a ball valve or a solenoid valve.

[0054] The vacuum adapter 9 may also be a three-way pipe. The vacuum adapter 9 and the reflux adapter 5 are arranged in the same line with a short distance between them, which shortens the distance between the air outlet 22 of the condenser 2 and the filter 4, and is conducive to improving the filtering efficiency.

[0055] The above-mentioned filtering device also includes a valve detection component, a receiving component and an execution component. The valve detection component is used to detect whether the vacuum switching valve 10 is in an open state, and can be a camera or an infrared sensor, etc. The receiving component is connected to the valve detection component, and is used to receive the trigger instruction fed back by the valve detection component when the vacuum switching valve 10 is not in an open state. In addition, the receiving component is also used to receive an opening instruction, and the opening instruction can be an instruction fed back after the button switch is touched, or it can be an instruction fed back after the sensor is sampled. The execution component is connected to the receiving component. When the receiving component sends the opening instruction and the trigger instruction to the execution component at the same time, the execution component controls the vacuum switching valve 10 to open automatically, with a high degree of automation and more convenient operation.

[0056] The two ends of the reflux pipe 6 are connected between the air outlet 22 of the condenser 2 and the circulation pump 11. The reflux pipe 6 includes a vertical pipe 61 and a horizontal pipe 62. The vertical pipe 61 is connected between the vacuum adapter 9 and the liquid inlet of the filter 4, so that the set height difference is maintained between the air outlet 22 of the condenser 2 and the filter 4, which is more conducive to the uncondensed gaseous fluid to flow into the filter 4 quickly, thereby improving the filtering efficiency. The horizontal pipe 62 is perpendicular to the vertical pipe 61, and the horizontal pipe 62 is connected to the liquid outlet of the filter 4. The uncondensed gaseous fluid flows into the filter 4 from top to bottom along the vertical pipe 61, and then flows along the horizontal pipe 62 after being filtered by the filter 4. The vertical pipe 61 is vertically connected to the vacuum adapter 9 through a bend pipe. Of course, the structure of the reflux pipe 6 is not limited to this.

[0057] The filtering device further includes a circulation pump 11, which is disposed at one end of the reflux pipe 6 away from the condenser 2. The circulation pump 11 is used to draw uncondensed gaseous fluid from the air outlet 22 of the condenser 2 into the reflux pipe 6, ensuring that the gas flow fluid has sufficient pressure to flow through the filter 4, speeding up the filtering speed, and also helping to improve the filtering efficiency. A pump support is fixedly disposed at the bottom of the circulation pump 11, which is used to stably support the circulation pump 11, and to adjust the height of the circulation pump 11 so that the circulation pump 11 is connected to the horizontal pipe 62 of the reflux pipe 6.

[0058] It should be noted that the present invention is provided with a circulation pump 11 and a vacuum pump 8 at the same time, so that positive pressure and negative pressure can be used compatibly to meet functional requirements.

[0059] The filtering device further includes an outlet pipe 12 and a heater 13. The outlet pipe 12 is connected to the circulation pump 11, and the gaseous fluid in the return pipe 6 flows into the outlet pipe 12 through the circulation pump 11. The outlet pipe 12 is L-shaped, but not limited to this. The heater 13 is arranged on the outlet pipe 12, and is used to heat the condensed liquid gas flow in the outlet pipe 12, reduce the loss of the gaseous fluid in the filtering process, and is conducive to energy saving.

[0060] The above-mentioned filtering device also includes a humidity sensor and a judgment component. The humidity sensor is arranged in the air outlet pipe 12. The humidity sensor is used to detect the current humidity of the gaseous fluid in the air outlet pipe 12. The judgment component is connected to the receiving component and the execution component respectively. The receiving component sends the current humidity collected by the humidity sensor to the judgment component in real time. After the judgment component receives the current temperature of the gaseous fluid, it performs judgment processing. The judgment component judges whether the current humidity of the gaseous fluid in the air outlet pipe 12 exceeds the set humidity. If so, the judgment component sends a signal to the execution component, and the execution component starts the heater 13. The heater 13 adjusts the heating state of the heater 13 according to the current humidity of the gaseous fluid in the air outlet pipe 12. The degree of automation is high and the operation is more convenient.

[0061] It should be noted that the controller should include a signal receiving unit, a signal judging unit and a signal sending unit. The signal receiving unit is used to receive the electrical signal sent by the detection components such as the valve detection component or the humidity sensor. The signal judging unit and the signal receiving unit are electrically connected so that the signal judging unit is used to judge whether the signal received by the signal receiving unit is a trigger signal. The signal sending unit and the signal judging unit are electrically connected so that the signal sending unit sends the judgment signal generated by the signal judging unit to the execution components such as the vacuum switching valve 10 or the heater 13. The specific setting methods of the signal receiving unit, the signal judging unit and the signal sending unit can refer to the prior art; in the present utility model, only the application scenarios of the above three are changed, and no substantial improvement is made to them. Obviously, the controller with this structure is widely used in existing automatic control equipment, such as MCU, DSP or single-chip microcomputer. The key point of the present utility model is that the controller combines each execution component and each detection component in pairs.

[0062] The above-mentioned filtering device also includes a recovery barrel support 14, which is fixed to the bottom of the impurity recovery barrel 3 and is used to support the impurity recovery barrel 3 so that the reflux adapter 5 is in collinear communication with the air outlet 22 of the condenser 2, which is conducive to the condensed liquid fluid to quickly flow into the impurity recovery barrel 3, further improving the filtering efficiency. The recovery barrel support 14 can be designed to be height-adjustable so that the height of the impurity recovery barrel 3 can be flexibly adjusted as needed.

[0063] The embodiment of the utility model discloses a high-temperature and high-pressure tank body, comprising the above-mentioned filtering device, and having the same beneficial effects.

[0064] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0065] This article uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the method and core ideas of the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A filtering device for a high-temperature and high-pressure tank, characterized in that: include: Intake pipe (1); A condenser (2), wherein an air inlet (21) of the condenser (2) is connected to the air inlet pipe (1), and the condenser (2) is used to condense the gaseous fluid supplied by the air inlet pipe (1) into a liquid fluid; An impurity recovery barrel (3), the impurity recovery barrel (3) being connected to the air outlet (22) of the condenser (2), and the impurity recovery barrel (3) being used to recover particulate dust mixed in the liquid fluid; A filter (4), the filter (4) being connected to the air outlet (22) of the condenser (2), the filter (4) being used to filter particulate dust mixed in the gaseous fluid that has not been condensed by the condenser (2).

2. The filtering device for a high-temperature and high-pressure tank according to claim 1, characterized in that: Also includes: A reflux adapter (5), the reflux adapter (5) being fixedly mounted on the gas outlet (22) of the condenser (2); A reflux pipe (6), wherein the reflux pipe (6) and the impurity recovery barrel (3) are respectively connected to the air outlet (22) of the condenser (2) through the reflux adapter (5), and the filter (4) is arranged on the reflux pipe (6).

3. The filtering device for a high-temperature and high-pressure tank according to claim 2, characterized in that: Also includes: A vacuum tube (7), wherein the vacuum tube (7) is provided with a vacuum pump (8); A vacuum adapter (9), wherein the vacuum adapter (9) is arranged on the return pipe (6); A vacuum switching valve (10), the vacuum switching valve (10) is arranged between the vacuum tube (7) and the vacuum adapter (9), and the vacuum switching valve (10) is used to control the connection or disconnection between the vacuum tube (7) and the return tube (6).

4. The filtering device for a high-temperature and high-pressure tank according to claim 3, characterized in that: Also includes: A valve detection member, the valve detection member being used to detect whether the vacuum switching valve (10) is in an open state; a receiving component, the receiving component being connected to the valve detection component, the receiving component being used to receive an opening instruction, and being used to receive a trigger instruction fed back by the valve detection component when the vacuum switching valve (10) is not in the open state; An executing component is connected to the receiving component, and is used for controlling the vacuum switching valve (10) to open when receiving the opening instruction and the triggering instruction sent simultaneously by the receiving component.

5. The filtering device for a high-temperature and high-pressure tank according to claim 4, characterized in that: The reflux pipe (6) comprises: a vertical pipe (61), the vertical pipe (61) being connected between the vacuum adapter (9) and the liquid inlet of the filter (4), the vertical pipe (61) being used to maintain a set height difference between the gas outlet (22) of the condenser (2) and the filter (4); A horizontal pipe (62), wherein the horizontal pipe (62) is perpendicular to the vertical pipe (61), and the horizontal pipe (62) is connected to the liquid outlet of the filter (4).

6. The filtering device for a high-temperature and high-pressure tank according to claim 5, characterized in that: Also includes: A circulation pump (11), wherein the circulation pump (11) is arranged at one end of the reflux pipe (6) away from the condenser (2), and the circulation pump (11) is used to draw uncondensed gaseous fluid from the gas outlet (22) of the condenser (2) into the reflux pipe (6).

7. The filtering device for a high-temperature and high-pressure tank according to claim 6, characterized in that: Also includes: an air outlet pipe (12), the air outlet pipe (12) being connected to the circulation pump (11), and the gaseous fluid in the return pipe (6) flows into the air outlet pipe (12) through the circulation pump (11); A heater (13), wherein the heater (13) is arranged on the air outlet pipe (12), and the heater (13) is used to heat the liquid gas flow condensed in the air outlet pipe (12).

8. The filtering device for a high-temperature and high-pressure tank according to claim 7, characterized in that: Also includes: a humidity sensor, the humidity sensor being arranged on the air outlet pipe (12), the humidity sensor being used to detect the current humidity of the gaseous fluid in the air outlet pipe (12); A judging component, the judging component is connected to the receiving component and the executing component respectively. When the receiving component receives the current humidity sent by the humidity sensor, the judging component is used to judge whether the current humidity exceeds the set humidity. The executing component is used to start the heater (13) when the current humidity exceeds the set humidity.

9. The filtering device for a high-temperature and high-pressure tank according to claim 2, characterized in that: Also includes: A recovery barrel support (14), wherein the recovery barrel support (14) is fixed to the bottom of the impurity recovery barrel (3), and the recovery barrel support (14) is used to support the impurity recovery barrel (3) so that the reflux adapter (5) is connected to the air outlet (22) of the condenser (2) in a colinear manner.

10. A high temperature and high pressure tank, characterized in that: A filter device comprising any one of claims 1 to 9.

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