Hairbrush self-cleaning device of mask cleaning machine

Abstract

The utility model relates to the technical field of mask plate cleaning, and discloses a brush self-cleaning device of a mask plate cleaning machine, which comprises an overflow groove, an ultrasonic generator is arranged at the lower part of an inner cavity of the overflow groove, and meanwhile, cleaning liquid is poured into the overflow groove; the sewage draining outlet is formed in the lower cavity wall of the overflow groove, the sewage draining outlet is communicated with the sewage draining pipe, and a valve is arranged on the sewage draining pipe; the filtering assembly is in buckled connection with the drain outlet; the mask cleaning carrying table is used for carrying a mask to be cleaned; and the cleaning brush is installed above the mask cleaning carrying table through a brush arm, and after the cleaning brush completes cleaning of the mask, the brush arm drives the cleaning brush to return to the standby position. According to the mask cleaning device, in the mask cleaning process, when the cleaning brush is located at the standby position, the cleaning brush can be cleaned, the cleaning brush can be independently detached for cleaning without shutdown, and the cleaning efficiency and the production efficiency are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask cleaning, in particular to a brush self-cleaning device for a mask cleaning machine. Background Art

[0002] The mask, also known as the photomask, is made of quartz glass as the substrate. First, a metal chromium layer is plated on the quartz glass substrate, and then a photoresist is coated on the chromium layer to make it a photosensitive material. The designed circuit pattern is exposed to the photoresist through an electronic laser device. The exposed area forms a circuit pattern on the metal chromium through development, etching, and demolding, becoming a photomask master similar to the exposed film. During the demolding and cleaning process, a brush is needed to physically remove the stains on the surface of the mask. The repeated use of the brush will cause dirt to adhere to the brush, reducing the cleaning effect; in order to reduce the secondary contamination of the mask by the deposition of stains on the brush itself, the brush needs to be disassembled and cleaned regularly; not only is the disassembly workload large, but the disassembly and installation of the brush requires downtime, which greatly affects production efficiency. Utility Model Content

[0003] 1. Technical issues to be resolved

[0004] In view of the deficiencies in the prior art, the utility model provides a self-cleaning device for the brush of a mask cleaning machine, which solves the problem that in the existing mask cleaning process, when cleaning the brush, the machine needs to be stopped and disassembled separately for cleaning, resulting in low cleaning efficiency and reduced production efficiency.

[0005] (II) Technical solution

[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: a self-cleaning device for a mask cleaning machine brush, which includes: an overflow trough, an ultrasonic generator is arranged at the lower part of the inner cavity, and cleaning liquid is poured into it; a drain port and a drain pipe, the drain port is arranged on the lower cavity wall of the overflow trough, the drain port is connected to the drain pipe, and a valve is arranged on the drain pipe; a filter assembly is connected with the drain port buckle; a mask cleaning platform for carrying the mask to be cleaned; a cleaning brush, which is installed above the mask cleaning platform through a brush arm, and after the cleaning brush completes cleaning the mask, the brush arm drives the cleaning brush to return to the standby position, at which time the cleaning brush is located in the overflow trough and below the liquid level of the cleaning liquid.

[0007] Preferably, the filter assembly comprises a filter cartridge, a clamping member arranged on the filter cartridge, and a clamping block fixedly arranged on the sewage outlet, the clamping block is provided with a clamping groove, and the clamping member is clamped and connected with the clamping groove.

[0008] Preferably, the clamping member comprises a plurality of protruding rods uniformly distributed in an annular shape on the filter cartridge and a clamping protrusion fixed to one end of the protruding rod, and the clamping protrusion is elastically clamped with the clamping groove.

[0009] Preferably, the clamping block is fixedly connected in the sewage outlet by screws, and the screws are installed in a hidden and sunken manner.

[0010] Preferably, sewage outlets are symmetrically arranged on the lower cavity wall of the overflow trough, and the number of the sewage outlets is not less than two.

[0011] (III) Beneficial effects

[0012] The utility model has the following beneficial effects:

[0013] The mask cleaning machine brush self-cleaning device, through the overflow trough and the ultrasonic generator, can set the ultrasonic generator start frequency through the PLC control system when the cleaning brush is in the standby position after cleaning the mask on the mask carrier. The start frequency can be set according to the frequency of the cleaning brush in the standby position and the brush dirt cycle. When the cleaning brush is in the standby position, the ultrasonic generator can be turned on, so that the cleaning liquid in the overflow trough cooperates with the ultrasonic wave to complete the automatic cleaning of the cleaning brush, so that the mask cleaning brush can be cleaned in the standby state without disassembling the brush, and the subsequent mask cleaning operation is not affected, which effectively improves the mask cleaning and production efficiency. Through the provided sewage outlet, filter assembly and sewage pipe, large-sized dirt can be effectively filtered after the cleaning brush is cleaned, and it is also convenient for the subsequent rapid sewage discharge of the overflow trough through the sewage outlet and the sewage pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the structure of the cleaning brush of the utility model in the cleaning state;

[0015] Figure 2 This is a schematic diagram of the installation structure of the filter cartridge of the utility model;

[0016] Figure 3 This is a schematic diagram of the separation structure of the filter cartridge and the sewage outlet of the utility model;

[0017] Figure 4 It is a schematic diagram of the process of the cleaning brush of the utility model in working state.

[0018] In the figure: 1. mask cleaning stage; 2. cleaning brush; 3. brush arm; 4. overflow trough; 5. drain port; 6. filter assembly; 61. filter cartridge; 62. extension rod; 63. snap-in protrusion; 64. snap-in block; 65. snap-in groove; 7. drain pipe; 8. valve. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1 The utility model provides a technical solution: a mask cleaning machine brush self-cleaning device, which includes: an overflow trough 4, an ultrasonic generator is arranged at the lower part of the inner cavity, and cleaning liquid is poured into it; a sewage outlet 5 and a sewage pipe 7, the sewage outlet 5 is arranged on the lower cavity wall of the overflow trough 4, the sewage outlet 5 is connected with the sewage pipe 7, and a valve 8 is arranged on the sewage pipe 7; a filter component 6 is snap-connected with the sewage outlet 5; a mask cleaning platform 1, which is used to carry the mask to be cleaned; a cleaning brush 2, which is installed above the mask cleaning platform 1 through a brush arm 3, and after the cleaning brush completes the cleaning of the mask, the brush arm 3 drives the cleaning brush to return to the standby position, at which time the cleaning brush is located in the overflow trough 4 and below the liquid level of the cleaning liquid.

[0021] The utility model is provided with an overflow trough 4 and an ultrasonic generator, so when the cleaning brush has finished cleaning the mask on the mask carrier and is in the standby position, the start frequency of the ultrasonic generator can be set through the PLC control system, and the start frequency can be set according to the frequency of the cleaning brush in the standby position and the dirty cycle of the brush. When the cleaning brush is in the standby position at a certain time, the ultrasonic generator can be turned on, so that the cleaning liquid in the overflow trough 4 cooperates with the ultrasonic wave to complete the automatic cleaning of the cleaning brush, so that the mask cleaning brush 2 can be cleaned in the standby state, and there is no need to disassemble the brush, which does not affect the subsequent mask cleaning operation, and effectively improves the mask cleaning and production efficiency. Through the provided sewage outlet 5, filter assembly 6 and sewage pipe 7, large-sized dirt can be effectively filtered after the cleaning brush 2 is cleaned, and it is also convenient for the subsequent rapid sewage discharge of the overflow trough 4 through the sewage outlet 5 and the sewage pipe 7.

[0022] In this embodiment, the filter assembly 6 includes a filter cartridge 61, a clamping member arranged on the filter cartridge 61, and a clamping block 64 fixedly arranged on the sewage outlet 5. The clamping block 64 is provided with a clamping groove 65, and the clamping member is clamped and connected with the clamping groove 65. Figure 2 and 3As shown, by setting the clamping piece and the clamping groove 65, the stability of the installation of the filter cartridge 61 can be effectively guaranteed when ultrasonic cleaning is performed in the overflow groove 4. At the same time, it is also convenient to quickly disassemble the filter cartridge 61 and clean the overflow groove 4 during the subsequent cleaning process.

[0023] In this embodiment, the clamping member includes a plurality of protruding rods 62 evenly distributed on the filter cartridge 61 in an annular manner and a clamping protrusion 63 fixed to one end of the protruding rod 62, and the clamping protrusion 63 is elastically clamped with the clamping groove 65. Figure 3 As shown, by elastically engaging the engaging protrusion 63 with the engaging groove 65 , the filter cartridge 61 in the sewage outlet 5 can be quickly disassembled later.

[0024] In this embodiment, the clamping block 64 is fixedly connected in the sewage outlet 5 by screws, and the screws are installed in a hidden and sunken manner.

[0025] In this embodiment, sewage outlets 5 are symmetrically arranged on the lower cavity wall of the overflow trough 4, and the number of sewage outlets 5 is not less than two.

[0026] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A mask cleaning machine brush self-cleaning device, wherein: include: Overflow tank, the lower part of the inner cavity is provided with an ultrasonic generator, and cleaning liquid is poured into it; A sewage outlet and a sewage pipe, wherein the sewage outlet is arranged on the lower cavity wall of the overflow tank, the sewage outlet is connected with the sewage pipe, and a valve is arranged on the sewage pipe; The filter assembly is connected with the sewage outlet by snap-fit; A mask cleaning stage, used for carrying the mask to be cleaned; The cleaning brush is installed above the mask cleaning platform through the brush arm. After the cleaning brush completes cleaning the mask, the brush arm drives the cleaning brush back to the standby position. At this time, the cleaning brush is located in the overflow tank and below the level of the cleaning liquid.

2. The brush self-cleaning device for a mask cleaning machine according to claim 1, characterized in that: The filter assembly comprises a filter cartridge, a clamping piece arranged on the filter cartridge and a clamping block fixedly arranged on the sewage outlet, wherein the clamping block is provided with a clamping groove, and the clamping piece is clamped and connected with the clamping groove.

3. The brush self-cleaning device for a mask cleaning machine according to claim 2, characterized in that: The clamping member comprises a plurality of protruding rods uniformly distributed on the filter cartridge in an annular manner and a clamping protrusion fixed on one end of the protruding rod, and the clamping protrusion is elastically clamped with the clamping groove.

4. A mask cleaning machine brush self-cleaning device according to claim 2 or 3, characterized in that: The clamping block is fixedly connected in the sewage outlet by screws, and the screws are installed in a hidden and sunken manner.

5. The brush self-cleaning device for a mask cleaning machine according to claim 1, characterized in that: The lower cavity wall of the overflow trough is symmetrically arranged with sewage outlets, and the number of the sewage outlets is not less than two.

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