Heating assembly and furnace body structure

Abstract

The utility model discloses a heating assembly and a furnace body structure. The heating assembly comprises a heating pipe, a housing and two connecting pieces, wherein the housing is sleeved on the outer side of the heating pipe, and the two ends of the housing axially extend outwards into the side part of a furnace body; the two connecting pieces are respectively arranged at the two ends of the heating pipe; the connecting piece comprises an adapter column arranged on the outer side of the end of the heating pipe in a sleeving mode, a conductive column arranged on the outer side of the furnace body and axially extending into the adapter column and a fixing plate arranged on the outer side of the conductive column in a sleeving mode and fixed to the outer side of the furnace body, and a sealing ring making contact with the outer side wall of the furnace body is embedded in the side, facing the furnace body, of the fixing plate. According to the utility model, the sealing of the end part of the heating pipe is realized, and the assembly process is simplified.

Description

Technical Field

[0001] The utility model relates to the technical field of heat treatment, in particular to a heating component and a furnace body structure. Background Art

[0002] In the manufacture of semiconductor devices, the wafer needs to be heat treated to eliminate defects inside the wafer and optimize the grain boundary structure and crystal quality. Annealing is a common wafer heat treatment method. Annealing furnace is a common equipment used for annealing wafers. By heating the wafer and keeping it warm under certain conditions, the lattice structure can be changed, impurities and stress can be eliminated, and the electrical properties and structural integrity of the wafer can be improved.

[0003] The basic structure of a wafer annealing furnace usually consists of a heating chamber, a control system, a feeding device, and a discharging device. The heating chamber is used to uniformly heat and insulate the wafer, and the heating temperature, time, atmosphere and other parameters are controlled by the control system to achieve the desired annealing effect for the wafer. Most existing wafer annealing furnaces heat the heating chamber by irradiating the wafer with a lamp tube, and the wires of the lamp tube need to be connected to the external interface of the wafer annealing furnace to power the lamp tube. Therefore, the usual structure is to embed the lamp tube inside the wafer annealing furnace, and the wires at the end pass through the wafer annealing furnace to connect to the external interface, and a glass cover is set on the outside of the lamp tube to isolate the heating lamp tube from the heating chamber, and a sealing ring is set on the outside of the end of the glass cover to achieve sealing. During assembly, the lamp tube with the glass cover needs to be assembled inside the sealing ring. Since the manufacturing precision of the glass cover is low, and the sealing ring has a pressing force on the glass cover, and the glass cover is relatively thin, the sealing ring is easy to crush the glass cover during assembly, and the resistance between the sealing ring and the glass cover is large during the installation process, which will also cause damage to the sealing ring. At the same time, the sealing ring seals the glass cover with a rod seal. Due to the large tolerance of the outer side of the glass, there is a problem of poor sealing. In addition, the sealing ring is set at the end, close to the heating area of ​​the lamp tube, and has a problem of short service life.

[0004] In view of this, it is necessary to improve the wafer annealing furnace in the prior art to solve the above problems. Utility Model Content

[0005] The utility model aims to disclose the problem that a glass cover is provided outside a heating lamp tube in an existing wafer annealing furnace, and a sealing ring is provided outside the glass cover, and the sealing ring is easily crushed by the glass cover during assembly, and the resistance between the sealing ring and the glass cover is large, which easily causes the sealing ring to be damaged, and the rod sealing method has the problem of poor sealing due to the large tolerance of the outer side of the glass, and the sealing ring is arranged at the end, close to the heating area of ​​the lamp tube, which has the problem of short service life.

[0006] To achieve the above purpose, the utility model shows a heating component, which is arranged inside the furnace body, and the heating component includes:

[0007] A heating tube, a cover shell sleeved on the outside of the heating tube and with both ends axially extending outward into the side of the furnace body, and two connecting pieces respectively arranged at both ends of the heating tube;

[0008] The connecting piece includes: an adapter column sleeved on the outside of the end of the heating tube, a conductive column arranged on the outside of the furnace body and extending axially into the adapter column, and a fixing plate sleeved on the outside of the conductive column and fixed to the outside of the furnace body, and a sealing ring is embedded in the fixing plate facing the side of the furnace body to form contact with the outer wall of the furnace body.

[0009] As a further improvement of the present invention, the heating tube comprises: a tube body and two connecting columns extending axially outward from both ends of the tube body, and the adapter column is sleeved on the outside of the connecting column.

[0010] As a further improvement of the present invention, a first thread is formed on the outer side of the connecting column, and a first accommodating hole with a second thread for accommodating the connecting column is recessed on one side of the adapter column facing the heating tube, and the first thread is adapted to the second thread to screw the adapter column onto the outer side of the connecting column.

[0011] As a further improvement of the present invention, the connector further comprises: a first insulating tube sleeved on the outside of the adapter post to isolate the adapter post from the cover shell.

[0012] As a further improvement of the present invention, a second accommodating hole for accommodating the conductive post is recessed on one side of the adapter post facing the conductive post, and a bevel coil spring elastically sleeved on the outside of the conductive post is arranged inside the second accommodating hole.

[0013] As a further improvement of the present invention, the connector further comprises: a second insulating tube sleeved on the outside of the conductive column to isolate the conductive column from the fixing plate.

[0014] As a further improvement of the present invention, the connecting member further comprises: a third insulating cylinder which is sleeved on the outside of the conductive column and holds the fixing plate against the side of the furnace body.

[0015] As a further improvement of the present invention, the end surface of the cover shell is in contact with the inner side wall of the fixing plate.

[0016] Based on the same inventive concept, the utility model also discloses a furnace structure, including:

[0017] A furnace body and a heating component as described in any one of the above inventions.

[0018] As a further improvement of the present invention, the heating components are configured in plurality and are horizontally arranged on the top of the furnace body and / or the bottom of the furnace body, and / or vertically arranged on the side of the furnace body.

[0019] Compared with the prior art, the beneficial effects of the utility model are:

[0020] In the present application, a cover is sleeved on the outside of the heating tube, and two connecting parts are respectively provided at both ends of the heating tube. The connecting parts include: an adapter column sleeved on the outside of the end of the heating tube, a conductive column arranged on the outside of the furnace body and extending axially into the adapter column, and a fixing plate sleeved on the outside of the conductive column and fixed to the side of the furnace body. The fixing plate is embedded in the side of the furnace body to form a sealing ring in contact with the outer wall of the furnace body. At the same time, the internal air pressure of the cover shell is set to the same air pressure as the external air pressure. There is no need to seal the internal air pressure of the cover shell and the external air pressure. It is only necessary to ensure the sealing of the end of the cover shell. Therefore, the rod seal is replaced by the end face seal. During assembly, it is only necessary to pass the heating component through the mounting hole. The material requirements for the cover shell are relatively low, thereby solving the above-mentioned problems that the sealing ring is easy to crush the glass cover during assembly, and the large resistance between the sealing ring and the glass cover is easy to cause damage to the sealing ring, and the problem of poor sealing due to the large tolerance of the outer side of the glass when using the rod seal. At the same time, the sealing ring is embedded in the side of the fixed plate facing the heating chamber, and is far away from the heating area of ​​the heating tube to increase the service life of the sealing ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A cross-sectional view of a lamp tube when assembled in a wafer annealing furnace in the prior art;

[0022] Figure 2 for Figure 1 The enlarged view of the D1 part;

[0023] Figure 3 It is a three-dimensional diagram of the furnace body shown in the utility model at a viewing angle;

[0024] Figure 4 A three-dimensional diagram of a heating chamber and a heating assembly at a certain viewing angle;

[0025] Figure 5 A three-dimensional diagram of the heating chamber and the heating assembly from another perspective;

[0026] Figure 6 It is a cross-sectional view of the heating chamber and the heating component when assembled;

[0027] Figure 7 A partial three-dimensional diagram of a heating component at a viewing angle;

[0028] Figure 8 A three-dimensional diagram of a connector at a certain viewing angle;

[0029] Fig. 9 A three-dimensional diagram of the heating tube at a viewing angle;

[0030] Fig.10 for Figure 6 Enlarged view of section D2. DETAILED DESCRIPTION

[0031] The present invention is described in detail below in conjunction with the various embodiments shown in the accompanying drawings, but it should be noted that these embodiments are not limitations of the present invention, and any equivalent transformations or substitutions in functions, methods, or structures made by ordinary technicians in the field based on these embodiments are all within the scope of protection of the present invention.

[0032] It should be understood that, in the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present technical solution and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present technical solution.

[0033] Please refer to Figures 3 to 10As shown, the utility model shows a specific implementation of a heating component 20. The heating component 20 can be assembled in the furnace structure, and can be specifically arranged inside the furnace 30 included in the furnace structure 100. A wafer (not shown) is arranged inside the furnace 30, and the wafer can be heated by the heating component 20. Specifically, the furnace structure includes: a furnace 30 and a heating component 20, and the heating component 20 is arranged inside the furnace 30. The furnace 30 includes: a cabin 31 with a hollow cavity A and a heating cabin 32, the heating cabin 32 is arranged at the top of the cabin 31, a mounting frame 311 for placing the wafer is arranged in the cabin 31, and an opening 312 for wafer placement is opened on the side of the cabin 31. The heating component 20 is configured in multiple, and is horizontally arranged at the top of the furnace 30 and / or the bottom of the furnace 30, and / or, vertically arranged on the side of the furnace 30. For example, the heating assembly 20 can be arranged horizontally in the heating chamber 32, and the heating chamber 32 and the chamber body 31 are isolated by a quartz plate, so that heat is dissipated by the heating assembly 20 and transferred to the interior of the chamber body 31 (i.e., the hollow cavity A) through the quartz plate to heat the wafer placed on the mounting rack 311. The heating assembly 20 can also be directly arranged at the bottom of the chamber body 31 and / or the side of the chamber body 31 to transfer heat to the interior of the chamber body 31 in multiple directions; at the same time, the heating assembly 20 can be arranged in multiple layers when arranged horizontally to further ensure the heating effect. In the following description, only the heating assembly 20 is horizontally arranged in the heating chamber 32 for exemplary description, and other arrangements of the heating assembly 20 can be specifically referred to the specific structure of the heating assembly 20 being horizontally arranged in the heating chamber 32, for example, horizontally arranged at the bottom of the chamber body 31 and / or vertically arranged at the side of the chamber body 31, and this embodiment will not be repeated here. In this application, vertical arrangement refers to arrangement in a direction perpendicular to the horizontal direction. When the wafer needs to be annealed, the wafer is placed on the mounting frame 311 through the opening 312, and the wafer is heated by the heating chamber 32. After being heated to a certain temperature, the wafer is kept warm and cooled under certain conditions. After the annealing process, the annealed wafer on the mounting frame 311 is taken out through the opening 312, thereby completing the entire annealing process of the wafer.

[0034] Ginseng Figures 3 to 6As shown, the side of the heating chamber 32 is provided with a mounting hole 321 for the heating assembly 20 to pass through. The heating assembly 20 is configured as a plurality of mounting holes 321 arranged in two layers inside the heating chamber 32. The heating assembly 20 passes through the mounting holes 321 opened on the two opposite sides to be stably installed inside the heating chamber 32. The heating assembly 20 includes: a heating tube 21, a cover 22 which is sleeved on the outside of the heating tube 21 and whose two ends extend axially outward into the side of the furnace body 30, and two connectors (i.e., connector 23 and connector 24) respectively provided at both ends of the heating tube 21. Since the two connectors are respectively provided on both sides of the heating tube 21 and can be regarded as being axially symmetrically provided along a straight line passing through the center point of the heating tube 21 and perpendicular to the axis thereof, in the following description, only one of the two connectors (e.g., connector 23) is specifically described, and the specific structure of the other connector (i.e., connector 24) can refer to connector 23, and this embodiment will not be repeated here.

[0035] Ginseng Figure 7 and Figure 8 As shown, the connector 23 includes: an adapter column 231 sleeved on the outer side of the end of the heating tube 21, a conductive column 232 arranged on the side of the furnace body 30 and axially extending into the adapter column 231, and a fixing plate 233 sleeved on the outer side of the conductive column 232 and fixed on the outer side of the furnace body 30, and the fixing plate 233 is embedded with a sealing ring 234 that contacts the outer side wall of the furnace body 30 on the side facing the furnace body 30. Specifically, the conductive column 232 is arranged on the side of the heating chamber 32 and axially extends into the adapter column 231, the fixing plate 233 is fixed on the outer side of the heating chamber 32, and the fixing plate 233 is embedded with a sealing ring 234 that contacts the outer side wall of the heating chamber 32 on the side facing the heating chamber 32. Thus, by embedding the sealing ring 234 on the side of the fixing plate 233, the inside and outside of the heating chamber 32 are isolated and sealed. When the wafer is annealed, it is generally necessary to anneal it under a specific pressure. For example, for silicon wafers, it is generally necessary to anneal it under a vacuum or nitrogen atmosphere, while for nitride wafers, it is necessary to anneal it under a nitrogen atmosphere. Therefore, in order to avoid the problem of effective sealing between the heating chamber 32 and the chamber body 31, the internal air pressure of the heating chamber 32 is set to be the same as the internal air pressure of the chamber body 32, and at the same time, the internal air pressure of the cover shell 22 is set to be the same as the external air pressure of the cover shell 22 (that is, the internal air pressure of the heating chamber 32). Based on this, it is only necessary to seal the end of the heating component 20 to seal the internal air pressure of the heating chamber 32, so as to achieve effective isolation between the atmospheric environment and the internal air pressure of the internal furnace body 30.

[0036] Ginseng Figure 1 and Figure 2As shown, in the wafer annealing furnace in the prior art, the lamp tube 11 is inserted into the annealing furnace 10, and the lamp tube 11 is placed in the atmospheric environment, and a glass cover 12 is sleeved on the outside of the lamp tube 11. The interior of the annealing furnace 10 is under a specific atmospheric pressure. A sealing ring 13 is sleeved on the outside of the lamp tube 11 and abuts against the inner wall of the annealing furnace 10 to isolate and seal the internal atmospheric pressure of the glass cover 12 (i.e., atmospheric environment) from the external atmospheric pressure (i.e., specific atmospheric pressure). When assembling this structure, the lamp tube 11 sleeved with the glass cover 12 needs to be assembled as a whole inside the sealing ring 13. Since the manufacturing precision of the glass cover 12 is low, and the sealing ring 13 has a pressing force on the glass cover 12, and the glass cover 12 is relatively loose, the sealing ring 13 is easy to crush the glass cover 12 during assembly, and the resistance between the sealing ring 13 and the glass cover 12 is large during the installation process, which will also cause damage to the sealing ring 13. At the same time, the sealing ring 13 seals the glass cover 12 in a rod seal, which has the problem of poor sealing due to the large tolerance of the outer side of the glass, and the sealing ring 13 is arranged at the end, close to the heating area of ​​the lamp tube 11, which has the problem of short service life. In the present application, the internal air pressure of the cover 22 is the same as the external air pressure, and it is not necessary to seal the internal air pressure of the cover 22 with the external air pressure. It is only necessary to ensure the sealing of the end of the cover 22, thereby replacing the rod seal with the end face seal. During assembly, it is only necessary to pass the heating component 20 through the mounting hole 321, and the material requirements for the cover 22 are relatively low, thereby solving the above-mentioned problem that the sealing ring is easy to crush the glass cover during assembly, and the resistance between the sealing ring and the glass cover is large and easy to cause the sealing ring to be damaged, and the problem of poor sealing due to the large tolerance of the outer side of the glass when the rod seal is used; at the same time, the sealing ring 234 is embedded in the side of the fixing plate 233 facing the heating chamber 32, which is far away from the heating area of ​​the heating tube 21, so as to increase the service life of the sealing ring 234.

[0037] Ginseng Fig. 9 As shown, the heating tube 21 includes: a tube body 211 and two connecting posts (i.e., connecting posts 212 and 213) extending axially outward from both ends of the tube body 211. Taking the connecting post 212 as an example, the adapter post 231 is sleeved on the outside of the connecting post 212. The connecting post in this application can be regarded as a connection for transmitting electric energy to the tube body 211. By sleeved the adapter post 231 on the outside of the connecting post and extending the conductive post 232 into the adapter post, the connection of the heating tube 21 is extended to the outside of the furnace body 30 in a disguised manner, thereby achieving the purpose of supplying power to the heating tube 21.

[0038] The connection column 212 and the adapter column 231 can be assembled in any manner in the prior art, as long as the electric energy can be transmitted to the heating tube 21 through the adapter column 231. Fig.10As shown, in one embodiment, a first thread (not shown) is formed on the outer side of the connecting column 212, and a first accommodating hole 235 having a second thread (not shown) for accommodating the connecting column 212 is recessed on the side of the adapter column 231 facing the heating tube 21. The first thread is adapted to the second thread so that the adapter column 231 can be screwed to the outer side of the connecting column 212, thereby realizing the detachable assembly between the adapter column 231 and the heating tube 21, and also facilitating the replacement of the adapter column 231 and / or the heating tube 21.

[0039] Ginseng Figure 8 and Fig.10 As shown, the connector 23 further includes: a first insulating tube 236 sleeved on the outside of the adapter column 231 to isolate the adapter column 231 from the housing 22, so as to prevent leakage or interference of current between the connecting column 212 and the housing 22, thereby playing the role of isolation and protection. At the same time, the connector 23 further includes: a second insulating tube 237 sleeved on the outside of the conductive column 232 to isolate the conductive column 232 from the fixing plate 233, so as to prevent leakage or interference of current between the conductive column 232 and the fixing plate 233, and to prevent the current on the conductive column 232 from being conducted to the fixing plate 233, and then conducted to the heating chamber 32 through the fixing plate 233, thereby playing the role of isolation and protection. In addition, the connecting piece 212 also includes: a third insulating tube 238 which is sleeved on the outside of the conductive column 232 and holds the fixing plate 233 against the side of the furnace body 30. More specifically, the third insulating tube 238 is sleeved on the outside of the conductive column 232 and holds the fixing plate 233 against the side of the heating chamber 32 to further prevent the current on the conductive column 232 from being conducted to the fixing plate 233 and then conducted to the heating chamber 32 through the fixing plate 233, thereby playing a role of isolation and protection.

[0040] It should be noted that, in the present application, the assembly between the fixing plate 233 and the heating chamber 32 and the assembly between the third insulating tube 238 and the fixing plate 233 can be fixedly assembled by welding. Preferably, the fixing plate 233, the conductive column 232, the second insulating tube 237 and the third insulating tube 238 can be regarded as a whole, and can be specifically welded, thereby further ensuring the sealing effect of the connector 23 on the end of the cover 22. Among them, the material of the first insulating tube 236, the second insulating tube 237 and the third insulating tube 238 can be ceramic, and the material corresponding to the other components welded to the first insulating tube 236, the second insulating tube 237 and the third insulating tube 238 made of ceramic material can be sealing alloy.

[0041] The assembly method between the conductive column 232 and the adapter column 231 can be any one of the prior art, as long as the electrical energy transmitted by the conductive column 232 can be transmitted to the heating tube 21 through the adapter column 231. Fig.10As shown, in one embodiment, a second receiving hole 239 for receiving the conductive column 232 is recessed on one side of the adapter column 231 facing the conductive column 232, and a bevel coil spring 240 elastically sleeved on the outside of the conductive column 232 is disposed inside the second receiving hole 239. When the conductive column 232 extends into the second receiving hole 239, it passes through the middle of the bevel coil spring 240 and forms contact with the bevel coil spring 240, thereby ensuring reliable conduction.

[0042] In addition, in order to prevent the cover shell 22 from axially moving in the heating chamber 32, the end face of the cover shell 22 comes into contact with the inner wall of the fixing plate 233, so that the fixing plate 233 is supported against the cover shell 22 to fix the cover shell 22, thereby ensuring the stable assembly of the heating component 20.

[0043] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

[0044] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A heating assembly, which is arranged inside a furnace body, characterized in that: The heating assembly comprises: A heating tube, a cover shell sleeved on the outside of the heating tube and with both ends axially extending outward into the side of the furnace body, and two connecting pieces respectively arranged at both ends of the heating tube; The connecting piece includes: an adapter column sleeved on the outside of the end of the heating tube, a conductive column arranged on the outside of the furnace body and extending axially into the adapter column, and a fixing plate sleeved on the outside of the conductive column and fixed to the outside of the furnace body, and a sealing ring is embedded in the fixing plate facing the side of the furnace body to form contact with the outer wall of the furnace body.

2. The heating assembly according to claim 1, characterized in that The heating tube comprises: a tube body and two connecting posts extending axially outward from two ends of the tube body, and the adapter post is sleeved on the outside of the connecting post.

3. The heating assembly according to claim 2, characterized in that A first thread is formed on the outer side of the connecting column, and a first accommodating hole with a second thread for accommodating the connecting column is recessed on one side of the adapter column facing the heating tube. The first thread is adapted to the second thread to screw the adapter column onto the outer side of the connecting column.

4. The heating assembly according to claim 1, characterized in that The connector also includes a first insulating tube which is sleeved on the outside of the adapter post to isolate the adapter post from the cover shell.

5. The heating assembly according to claim 1, characterized in that A second accommodating hole for accommodating the conductive post is recessed on one side of the adapter post facing the conductive post, and a bevel coil spring elastically sleeved on the outer side of the conductive post is arranged inside the second accommodating hole.

6. The heating assembly according to claim 1, characterized in that The connecting member further includes: a second insulating tube sleeved on the outside of the conductive column to isolate the conductive column from the fixing plate.

7. The heating assembly according to claim 1, characterized in that The connecting member further comprises: a third insulating cylinder which is sleeved on the outer side of the conductive column and holds the fixing plate against the side of the furnace body.

8. The heating assembly according to claim 1, characterized in that The end surface of the cover shell is in contact with the inner side wall of the fixing plate.

9. A furnace structure, characterized in that: include: A furnace body and a heating component as claimed in any one of claims 1 to 8.

10. The furnace structure according to claim 9, characterized in that: The heating components are configured in plurality and are horizontally arranged at the top of the furnace body and / or the bottom of the furnace body, and / or vertically arranged at the side of the furnace body.

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