Ion vacuum gauge

Abstract

The utility model provides an ion vacuum gauge. The ion vacuum gauge comprises an ion vacuum gauge body and a protection device, the ion vacuum gauge body comprises a measuring assembly and a shell; the shell is provided with an inner cavity, the measuring assembly is contained in the inner cavity, the shell is further provided with an interface, and gas to be measured can enter the inner cavity through the interface and is detected by the measuring assembly; the protective device comprises a protective cover; the protective cover sleeves the surface of the interface, and a plurality of moving blades are distributed on the surface of the protective cover to at least prevent part of pollution particles in the gas to be detected from entering the inner cavity. Visibly, under the additional arrangement of the protection device, the adverse effect of the pollution particles on the normal operation of the ion vacuum gauge can be effectively relieved, and the service life of the device can be prolonged. And the protection device only needs to be cleaned regularly, so that sustainable protection of the protection device on the ion vacuum gauge body can be ensured, the fault rate of the ion vacuum gauge is reduced, replacement of the ion vacuum gauge is reduced, and the process preparation cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to an ion vacuum gauge. Background Art

[0002] An ion gauge is an instrument used to measure the pressure of gas in a vacuum environment. Its working principle is based on the ionization of gas molecules in a vacuum environment. By collecting the ions generated by ionization and measuring the current formed by the ions, the number of gas molecules is determined, and the pressure of the gas in the vacuum environment is calculated accordingly. And according to the different ionization methods, ion gauges are generally divided into hot cathode ion gauges, cold cathode ion gauges and radioactive ion gauges. Among them, the hot cathode ion gauge emits a large number of hot electrons by heating the cathode with a filament. These hot electrons are accelerated by the accelerating electric field and collide with gas molecules to ionize and produce ions. Therefore, the filament is one of the important components of the hot cathode ion gauge. However, in semiconductor vacuum equipment, the gas or vacuum environment measured by the ion gauge is prone to contamination of reactants or materials. These contamination fines will enter the ion gauge during the measurement process, accelerate the consumption of the filament, or cause sudden fuse, resulting in ion gauge failure. And for other types of ion gauges, contamination fines will also interfere with their normal use and affect their service life. However, the current solution to this problem in the industry can only be achieved by replacing the ion vacuum gauge, which not only affects the process but also increases the process cost.

[0003] Therefore, a new ion vacuum gauge is urgently needed to solve the above technical problems. Utility Model Content

[0004] The utility model aims to provide an ion vacuum gauge to solve at least one of the following problems: how to alleviate the influence of pollution particles on the ion vacuum gauge and how to increase the service life of the ion vacuum gauge.

[0005] In order to solve the above technical problems, the utility model provides an ion vacuum gauge, comprising: an ion vacuum gauge body and a protective device;

[0006] The ion vacuum gauge body comprises a measuring component and a shell; the shell has an inner cavity, the measuring component is accommodated in the inner cavity, and the shell also has an interface, through which the gas to be measured can enter the inner cavity and be detected by the measuring component;

[0007] The protection device comprises a protection cover; the protection cover is sleeved on the surface of the interface, and a plurality of moving blades are distributed on the surface of the protection cover to at least block some of the polluted particles in the gas to be measured from entering the inner cavity.

[0008] Optionally, in the ion vacuum gauge, the protective device also includes a protective tube; the protective tube is arranged in the inner cavity, and one or more baffles are distributed in the protective tube to block part of the contaminated particles in the gas to be measured when the gas to be measured flows through the protective tube.

[0009] Optionally, in the ion vacuum gauge, the baffle is connected to the inner wall of the protective tube, and the plate surface of the baffle is set at an angle to the axial direction of the protective tube; and the maximum length of the plate surface of the baffle is smaller than the inner diameter of the protective tube.

[0010] Optionally, in the ion vacuum gauge, a plurality of baffles are disposed in the protection tube, and the plurality of baffles are spaced apart from each other and staggeredly distributed on opposite inner cavity walls of the protection tube inner cavity.

[0011] Optionally, in the ion vacuum gauge, the inner cavity is divided into a first cavity and a second cavity that are connected to each other; the measuring component is accommodated in the first cavity, and the second cavity is connected to the interface; the protective tube is accommodated in the second cavity, and the protective tube is adapted to the morphology of the second cavity so that it can be arranged along the inner wall of the shell corresponding to the second cavity.

[0012] Optionally, in the ion vacuum gauge, the protective tube is detachably connected to the protective cover.

[0013] Optionally, in the ion vacuum gauge, the protective cover further comprises one or two connecting rings; wherein,

[0014] When the protective cover includes a connecting ring, the connecting ring is adapted to the circumferential shape of the interface and can be sleeved on the interface; and the plurality of moving blades are distributed on the inner surface of the connecting ring and connected to the connecting ring;

[0015] When the protective cover includes two connecting rings, the two connecting rings are nested, and the connecting ring located on the outside is adapted to the circumferential morphology of the interface and can be sleeved on the interface; and the multiple moving blades are distributed on the inner surface of the connecting ring located on the inside and are connected to the connecting ring located on the inside.

[0016] Optionally, in the ion vacuum gauge, in the connecting ring connected to the moving blades, the multiple moving blades are arranged parallel to each other, and the opposite ends of the moving blades have protrusions, and the protrusions are movably connected to the inner ring wall of the connecting ring.

[0017] Optionally, in the ion vacuum gauge, a plurality of gear assemblies are provided on the inner ring wall of the connecting ring connected to the moving blades, and each of the moving blades is connected to at least one of the gear assemblies so that the corresponding moving blades rotate when the gear assemblies rotate.

[0018] Optionally, in the ion vacuum gauge, an adjusting knob is provided on the ring surface of the connecting ring connected to the moving blades, and the adjusting knob is connected to each of the gear assemblies. When the adjusting knob is rotated, each of the gear assemblies drives the corresponding moving blades to rotate so as to adjust the opening and closing angles of each of the moving blades.

[0019] In summary, the utility model provides an ion vacuum gauge. Compared with the prior art, the ion vacuum gauge is provided with a protective device. The protective cover in the protective device is sleeved on the interface of the ion vacuum gauge body, and a plurality of movable blades are distributed on the surface of the protective cover to at least block part of the polluted particles in the gas to be measured from entering the inner cavity, thereby effectively alleviating the adverse effects of the polluted particles on the normal operation of the ion vacuum gauge, and is conducive to extending the service life of the ion vacuum gauge. And it is only necessary to clean the protective device regularly to ensure the sustainable protection of the ion vacuum gauge body by the protective device, reduce the failure rate of the ion vacuum gauge, thereby reducing the replacement of the ion vacuum gauge and reducing the process preparation cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Those skilled in the art will appreciate that the drawings are provided for a better understanding of the present invention, but do not constitute any limitation on the scope of the present invention.

[0021] Figure 1 It is a structural schematic diagram of an ion vacuum gauge in an embodiment of the utility model.

[0022] Figure 2 It is a structural schematic diagram of the ion vacuum gauge body in the embodiment of the utility model.

[0023] Figure 3 It is a schematic diagram of the positions of the first connecting ring and the second connecting ring in an embodiment of the utility model.

[0024] Figure 4 It is a schematic structural diagram of the first connecting ring and the second connecting ring in an embodiment of the utility model.

[0025] Figure 5 It is a schematic diagram of the connection between the moving blades and the gear assembly in the embodiment of the utility model.

[0026] Figure 6 It is a schematic diagram of the gas to be measured flowing through the moving blades in a curved shape in an embodiment of the utility model.

[0027] Figure 7 It is a structural schematic diagram of the third connecting ring in the embodiment of the utility model.

[0028] Figure 8 It is a schematic diagram of the gear assembly and the adjusting knob on the third connecting ring in the embodiment of the utility model.

[0029] Fig. 9 It is a schematic diagram of the structure of the protection tube in the embodiment of the utility model.

[0030] And, in the attached drawings:

[0031] 10- ion vacuum gauge body; 101- measuring component; 102- housing;

[0032] 20-protection device; 201-protection cover; 2011-moving blade; 2011a-protrusion; 2012-first connecting ring; 2013-second connecting ring; 2014-gear assembly; 2015-adjusting knob; 2016-third connecting ring; 202-protection tube; 2021-hollow tube body; 2021a-first side wall; 2021b-second side wall; 2022-baffle;

[0033] G-gas to be tested; P-polluted particles; C-inner cavity; c1-first cavity; c2-second cavity; α-opening and closing angle. DETAILED DESCRIPTION

[0034] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing to be shown is different, and sometimes different proportions are used. It should also be understood that, unless otherwise specified or indicated, the terms "first", "second", "third" and the like in the specification are only used to distinguish the various components, elements, steps, etc. in the specification, rather than to represent the logical relationship or sequential relationship between the various components, elements, steps, etc. And, the X-axis direction, Y-axis direction and Z-axis direction referred to in the specification and the drawings of this application are three directions perpendicular to each other in three-dimensional space.

[0035] See also Figure 1The present embodiment provides an ion vacuum gauge, comprising: an ion vacuum gauge body 10 and a protective device 20; the ion vacuum gauge body 10 comprises a measuring component 101 and a shell 102; the shell 102 has an inner cavity C, the measuring component 101 is accommodated in the inner cavity C, and the shell 102 also has an interface 1021, and the gas G to be measured can enter the inner cavity C through the interface 1021 and be detected by the measuring component 101; the protective device 20 comprises a protective cover 201; the protective cover 201 is sleeved on the surface of the interface 1021, and a plurality of moving blades 2011 are distributed on the surface of the protective cover 201 to at least block part of the polluted particles P in the gas G to be measured from entering the inner cavity C.

[0036] It can be seen that the ion vacuum gauge provided in this embodiment effectively blocks some of the polluted particles P in the gas G to be measured from entering the inner cavity C by adding the protective device 20, thereby alleviating the adverse effects of the polluted particles P on the normal operation of the ion vacuum gauge, which is conducive to extending the service life of the ion vacuum gauge. And only the protective device 20 needs to be cleaned regularly to ensure that the protective device 20 can continuously protect the ion vacuum gauge body 10, reduce the failure rate of the ion vacuum gauge, thereby reducing the replacement of the ion vacuum gauge and reducing the process preparation cost.

[0037] The following is combined with Figures 1 to 9 The ion vacuum gauge provided in this embodiment is specifically described.

[0038] Please continue reading Figure 1 The ion vacuum gauge provided in this embodiment includes an ion vacuum gauge body 10 and a protective device 20. The ion vacuum gauge body 10 is used to detect pressure and vacuum degree, and the protective device 20 is used to block the pollutant particles P in the gas G to be measured from entering the ion vacuum gauge body 10, thereby alleviating the adverse effects of the pollutant particles P on the normal operation of the ion vacuum gauge body 10. Preferably, the ion vacuum gauge body 10 and the protective device 20 are detachably connected, so that the protective device 20 can be disassembled and cleaned when the device is maintained, thereby ensuring the sustainable protection of the ion vacuum gauge body 10 and extending the service life of the device.

[0039] See also Figure 2, the ion vacuum gauge body 10 includes a measuring component 101 and a shell 102. The measuring component 101 is used to detect information such as the pressure of the gas under a vacuum environment, and the shell 102 is a protective shell of the measuring component 101. Based on this, according to the different detection methods of the ion vacuum gauge body 10, the component structure in the measuring component 101 is also different. Exemplarily, the ion vacuum gauge body 10 is a hot cathode ion vacuum gauge, and the measuring component 101 includes a filament, an anode mesh, an ion collector, and a measuring circuit, etc. Of course, the ion vacuum gauge body 10 can also be a cold cathode ion vacuum gauge or a radioactive ion vacuum gauge, etc., and this embodiment does not specifically limit this. Further, the shell 102 has an inner cavity C, and the measuring component 101 is accommodated in the inner cavity C, and the shell 102 also has an interface 1021, and the gas G to be measured can enter the inner cavity C through the interface 1021 and be detected by the measuring component 101. And, in one example, the part of the housing 102 close to the measuring component 101 is also provided with an input / output interface. The input / output interface is connected to the measuring component 101 and an external device in the housing 102, and is used to provide power to the measuring component 101 and output the detection information of the measuring component 101 to the external device. In another example, the measuring component 101 has a wireless transmission module so as to be able to wirelessly connect to an external device to realize information transmission.

[0040] Please continue reading Figure 1 The protective device 20 includes a protective cover 201. The protective cover 201 is arranged at the position of the interface 1021, and is used to block part of the polluted particles P in the gas G to be measured. Specifically, the protective cover 201 includes a plurality of moving blades 2011 and a connecting ring. Preferably, one or two connecting rings are arranged in the protective cover 201. For example, Figure 3 and Figure 4 As shown, the protective cover 201 includes two connecting rings, namely a first connecting ring 2012 and a second connecting ring 2013. Among them, the outer diameter of the first connecting ring 2012 is greater than the outer diameter of the second connecting ring 2013, and the inner diameter of the first connecting ring 2012 is greater than or equal to the outer diameter of the second connecting ring 2013, so that the second connecting ring 2013 can be embedded in the ring of the first connecting ring 2012 and detachably connected to the first connecting ring 2012. And, the circumferential shape of the first connecting ring 2012 located on the outside is adapted to the circumferential shape of the interface 1021, so that the first connecting ring 2012 can be sleeved on the interface 1021 and detachably connected to the interface 1021. It should be noted that the detachable connection referred to in this embodiment includes but is not limited to threaded connection, snap connection or hinge connection.

[0041] Furthermore, the plurality of moving blades 2011 are distributed on the inner surface of the second connecting ring 2013 located on the inner side. Preferably, the moving blades 2011 are arranged parallel to each other and are evenly laid on the inner surface of the second connecting ring 2013. Figure 4 and Figure 5 As shown, the two opposite ends of the moving blade 2011 have protrusions 2011a, and the protrusions 2011a are movably connected to the inner ring wall of the second connecting ring 2013, so that the moving blade 2011 can rotate relative to the second connecting ring 2013, thereby adjusting the opening and closing angle of the moving blade 2011. Exemplarily, the inner ring wall of the second connecting ring 2013 is provided with a plurality of gear assemblies 2014, and each of the moving blades 2011 is connected to at least one of the gear assemblies 2014, so that the corresponding moving blade 2011 rotates under the rotation of the gear assembly 2014. Figure 1 and Figure 5 As shown, the protrusion 2011a at one end of the moving blade 2011 is connected to a gear assembly 2014, so when the gear assembly 2014 rotates along the Y axis, the moving blade 2011 can also rotate along the Y axis, thereby adjusting the inclination angle of the moving blade 2011 relative to the plane where the X-axis-Y-axis is located, that is, the opening and closing angle. Figure 6 As shown, when each of the moving blades 2011 rotates along the Y axis to a preset opening and closing angle α, there will be a certain angle between the surface of the moving blade 2011 and the inflow direction of the gas G to be measured, and the route of the gas G to be measured flowing through the moving blade 2011 is curved. Compared with the linear flow mode, the curved flow mode prolongs the path of the gas G to be measured flowing through the moving blade 2011, increases the difficulty of the polluted particles P in the gas G to be measured passing through the moving blade 2011, and is conducive to the moving blade 2011 blocking more of the polluted particles P, thereby effectively alleviating the adverse effects of the polluted particles P on the measuring component 101 in the inner cavity C. And after adjustment, the closer the opening and closing angle α is to 90°, the greater the difficulty of the polluted particles P passing through the moving blade 2011, and the better the blocking effect on the polluted particles P. And preferably, the range of the opening and closing angle α is: 0°<α<180°, and α≠90°.

[0042] It should be noted that the present embodiment does not limit the specific number of the moving blades 2011 and the gear assemblies 2014. For example, one protrusion 2011a of the moving blade 2011 is connected to one gear assembly 2014; the other protrusion 2011a can extend into the corresponding groove on the inner ring wall of the second connecting ring 2013 to achieve movable connection. Alternatively, the two protrusions 2011a of the moving blade 2011 are respectively connected to one gear assembly 2014. Furthermore, the gear assembly 2014 is not limited to one gear, but can be composed of multiple gears, so as to drive the moving blade 2011 to rotate along the Y-axis direction. Furthermore, an adjusting knob 2015 is also provided on the annular surface of the second connecting ring 2013, and the adjusting knob 2015 is connected to each of the gear assemblies 2014, and when the adjusting knob 2015 is rotated, each of the gear assemblies 2014 drives the corresponding moving blades 2011 to rotate, so as to adjust the opening and closing angles of each of the moving blades 2011. The adjusting knob 2015 may be an electric knob or a mechanical knob, which is not specifically limited in this embodiment.

[0043] It can be seen from the above example that the first connecting ring 2012 and the second connecting ring 2013 are provided in the protective cover 201, and the second connecting ring 2013 is connected to the plurality of moving blades 2011. When cleaning and maintaining the moving blades 2011, the second connecting ring 2013 can be directly removed from the first connecting ring 2012 without separating the first connecting ring 2012 and the interface 1021, so as to avoid frequent disassembly of the first connecting ring 2012 to cause damage to the interface 1021 and affect the connection stability between the two. Of course, in order to simplify the structure of the protective cover 201, the protective cover 201 can also be provided with only one connecting ring. Another exemplary example, Figure 1 , Figure 7 and Figure 8 As shown, the protective cover 201 includes a third connecting ring 2016. The third connecting ring 2016 is adapted to the circumferential shape of the interface 1021, so the third connecting ring 2016 can be sleeved on the interface 1021 and detachably connected to the interface 1021, for example, by threaded connection. The plurality of moving blades 2011 are distributed on the inner surface of the third connecting ring 2016 and are movably connected to the inner ring wall of the third connecting ring 2016. For example, Figure 8As shown, the inner ring wall of the third connecting ring 2016 is provided with a plurality of gear assemblies 2014, and each of the moving blades 2011 is connected to at least one of the gear assemblies 2014, so that the corresponding moving blade 2011 rotates under the rotation of the gear assembly 2014. The connection and relative movement of the gear assembly 2014 and the moving blade 2011 can refer to the embodiment of the present invention. Figure 5 and Figure 6 The relevant description of the third connecting ring 2016 is not repeated here. Further, an adjusting knob 2015 is provided on the ring surface of the third connecting ring 2016. The adjusting knob 2015 is connected to each of the gear assemblies 2014, and under the rotation of the adjusting knob 2015, each of the gear assemblies 2014 drives the corresponding moving blades 2011 to rotate, so as to adjust the opening and closing angles of each of the moving blades 2011.

[0044] Preferably, see Figure 1 and Fig. 9 , the protection device 20 also includes a protection tube 202. The protection tube 202 is arranged in the inner cavity C, and is used to further block and collect the polluted particles P in the gas G to be measured. Wherein, the protection tube 202 includes a hollow tube body 2021 and one or more baffles 2022 distributed in the hollow tube body 2021. And, the inner cavity C is divided into a first cavity c1 and a second cavity c2 that are connected. The measuring component 101 is accommodated in the first cavity c1, and the second cavity c2 is adjacent to and connected to the interface 1021. The hollow tube body 2021 is accommodated in the second cavity c2, and the morphology of the hollow tube body 2021 and the second cavity c2 are adapted so that they can be arranged along the inner wall of the shell 102 corresponding to the second cavity c2. In other words, the hollow tube body 2021 can be arranged in close contact with the inner wall corresponding to the second cavity c2, so that after the gas to be measured G enters through the interface 1021, it is blocked by the baffle 2022 in the hollow tube body 2021 and then enters the first cavity c1, so that the gas to be measured G is filtered by the protective tube 202 as much as possible, thereby improving the cleanliness of the first cavity c1.

[0045] Further, the baffle 2022 is connected to the inner wall of the hollow tube 2021, and the plate surface of the baffle 2022 is set at an angle with the axial direction of the hollow tube 2021, so that the baffle 2022 can block and collect the polluted particles P in the gas G to be measured. Preferably, the plate surface of the baffle 2022 is perpendicular to the axial direction of the hollow tube 2021. Among them, this embodiment does not limit the specific size of the baffle 2022, but the maximum length on the plate surface of the baffle 2022 needs to be smaller than the inner diameter of the hollow tube 2021 to avoid the baffle 2022 being too large to block the gas G to be measured from flowing into the measurement component 101. And, this embodiment does not limit the specific morphology of the baffle 2022, the baffle 2022 can be a solid plate or a mesh plate; and the baffle 2022 can be rectangular, circular, triangular, diamond and other regular or irregular shapes. Furthermore, the present embodiment does not limit the number of the baffles 2022, which may be one or more. When a plurality of the baffles 2022 are provided in the hollow tube body 2021, the plurality of the baffles 2022 are spaced apart and staggeredly distributed on the opposite inner cavity walls of the inner cavity C of the hollow tube body 2021. In other words, the plurality of the baffles 2022 are spaced apart along the axial and radial directions of the hollow tube body 2021, and the projections of the connection positions of two adjacent baffles 2022 with the inner cavity walls of the hollow tube body 2021 on the Z-axis-Y-axis plane do not overlap, so that the gas G to be measured flows through each of the baffles 2022 in a curved shape.

[0046] For example, Fig. 9 As shown, three baffles 2022 are arranged in the hollow tube body 2021. The three baffles 2022 are separated from each other in three-dimensional space, and along the positive semi-axis direction of the X-axis, the connection position between the first baffle 2022 and the inner cavity wall of the hollow tube body 2021 is on the first side wall 2021a of the inner cavity wall; the connection position between the second baffle 2022 and the inner cavity wall of the hollow tube body 2021 is on the second side wall 2021b of the inner cavity wall; and the connection position between the third baffle 2022 and the inner cavity wall of the hollow tube body 2021 is on the first side wall 2021a of the inner cavity wall. And in Fig. 9On the Z-axis-X-axis plane shown, the first side wall 2021a and the second side wall 2021b are opposite to each other, and the first baffle 2022, the second baffle 2022 and the third baffle 2022 are arranged alternately up and down. Based on this, the gas to be measured G needs to bypass each baffle 2022 in turn before it can flow out of the hollow tube body 2021. Therefore, the gas to be measured G in the hollow tube body 2021 is also in a curved shape to extend the flow path of the gas to be measured G, which is beneficial for each baffle 2022 to improve the blocking rate of the polluted particles P in the gas to be measured G, further alleviate the adverse effects of the polluted particles P on the normal operation of the measuring component 101, and extend the service life of the ion vacuum gauge.

[0047] Furthermore, the protection tube 202 and the protection cover 201 can be independent components, or can be connected to each other to form an integrated structure. Preferably, the protection tube 202 and the protection cover 201 are detachably connected to facilitate unified disassembly and maintenance. For example, one end of the hollow tube body 2021 close to the interface 1021 is engaged with the first connecting ring 2012 or the second connecting ring 2013.

[0048] In summary, the ion vacuum gauge provided in this embodiment is provided with the protective device 20 on the ion vacuum gauge body 10. The protective cover 201 in the protective device 20 is sleeved on the interface 1021 of the shell 102, and the moving blades 2011 on the protective cover 201 have a certain blocking effect on the polluted particles P in the gas G to be measured. In addition, one or more baffles 2022 are distributed in the protective tube 202 arranged in the inner cavity C, and the baffles 2022 can further block and collect the polluted particles P in the gas G to be measured that enter the inner cavity C. Therefore, under the multi-level blocking of the protective cover 201 and the protective tube 202, the adverse effects of the polluted particles P on the normal operation of the ion vacuum gauge can be effectively alleviated, which is conducive to extending the service life of the ion vacuum gauge. And only the protective device 20 needs to be cleaned regularly to ensure the sustainable protection of the ion vacuum gauge body 10 by the protective device 20, reduce the failure rate of the ion vacuum gauge, thereby reducing the replacement of the ion vacuum gauge and reducing the process preparation cost.

[0049] In addition, it should be recognized that although the present invention has been disclosed as a preferred embodiment, the above embodiment is not intended to limit the present invention. For any technician familiar with the art, without departing from the scope of the technical solution of the present invention, the above disclosed technical content can be used to make many possible changes and modifications to the technical solution of the present invention, or modified into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the scope of protection of the technical solution of the present invention.

Claims

1. An ion vacuum gauge, characterized in that: include: Ion vacuum gauge body and protective device; The ion vacuum gauge body comprises a measuring component and a shell; the shell has an inner cavity, the measuring component is accommodated in the inner cavity, and the shell also has an interface, through which the gas to be measured can enter the inner cavity and be detected by the measuring component; The protection device comprises a protection cover; the protection cover is sleeved on the surface of the interface, and a plurality of moving blades are distributed on the surface of the protection cover to at least block some of the polluted particles in the gas to be measured from entering the inner cavity.

2. The ion vacuum gauge according to claim 1, characterized in that: The protection device further comprises a protection tube; the protection tube is arranged in the inner cavity, and one or more baffles are distributed in the protection tube to block part of the polluted particles in the gas to be measured when the gas to be measured flows through the protection tube.

3. The ion vacuum gauge according to claim 2, characterized in that: The baffle is connected to the inner wall of the protection tube, and the plate surface of the baffle is set at an angle with the axial direction of the protection tube; and the maximum length of the plate surface of the baffle is smaller than the inner diameter of the protection tube.

4. The ion vacuum gauge according to claim 2 or 3, characterized in that: A plurality of baffles are arranged in the protection tube, and the baffles are spaced apart and staggeredly distributed on opposite inner cavity walls of the inner cavity of the protection tube.

5. The ion vacuum gauge according to claim 2 or 3, characterized in that: The inner cavity is divided into a first cavity and a second cavity which are connected to each other; the measuring component is accommodated in the first cavity, and the second cavity is connected to the interface; the protective tube is accommodated in the second cavity, and the protective tube is adapted to the morphology of the second cavity so as to be able to be arranged along the inner wall of the shell corresponding to the second cavity.

6. The ion vacuum gauge according to claim 2, characterized in that: The protection tube is detachably connected to the protection cover.

7. The ion vacuum gauge according to claim 1, characterized in that: The protective cover also includes one or two connecting rings; wherein, When the protective cover includes a connecting ring, the connecting ring is adapted to the circumferential shape of the interface and can be sleeved on the interface; and the plurality of moving blades are distributed on the inner surface of the connecting ring and connected to the connecting ring; When the protective cover includes two connecting rings, the two connecting rings are nested, and the connecting ring located on the outside is adapted to the circumferential morphology of the interface and can be sleeved on the interface; and the multiple moving blades are distributed on the inner surface of the connecting ring located on the inside and are connected to the connecting ring located on the inside.

8. The ion vacuum gauge according to claim 7, characterized in that: In the connecting ring connected to the moving blades, the multiple moving blades are arranged parallel to each other, and opposite ends of the moving blades have protrusions, and the protrusions are movably connected to the inner ring wall of the connecting ring.

9. The ion vacuum gauge according to claim 7 or 8, characterized in that: The inner ring wall of the connecting ring connected to the moving blades is provided with a plurality of gear assemblies, and each of the moving blades is connected to at least one of the gear assemblies, so that the corresponding moving blades rotate when the gear assemblies rotate.

10. The ion vacuum gauge according to claim 9, characterized in that: An adjusting knob is provided on the ring surface of the connecting ring connected to the moving blades, and the adjusting knob is connected to each of the gear assemblies. When the adjusting knob is rotated, each of the gear assemblies drives the corresponding moving blades to rotate to adjust the opening and closing angles of each of the moving blades.

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