Multi-angle adjustable jig for semiconductor detection
By designing a semiconductor detection fixture that can be adjusted from multiple angles, using the combination of the rotating rod and the return spring, the problem of unstable handheld hands caused by the chip drop caused by detectors when viewing the laser-cut semiconductor, achieving a more stable operation and efficient detection process.
Patent Information
- Application Number
- CN202420883490.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-26
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-04-26
AI Technical Summary
During semiconductor detection, the detector needs to tilt the laser cut semiconductor, which leads to unstable handheld process and easily leads to semiconductor chip loss.
A semiconductor detection fixture that can be adjusted from multiple angles is designed, including an angle adjustment mechanism and a detection fixture. The fixture realizes multi-angle adjustment of the upper bracket through the cooperation of the rotating rod and the return spring, and fixes the inclination angle, which is convenient for inspection personnel to view.
This treatment is effective in avoiding the risk of semiconductor chip drop during handheld viewing, and improving the operational stability and efficiency of the detector.
Smart Images
Figure CN222579957U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the semiconductor field, and in particular, to a semiconductor detection fixture that can be adjusted at multiple angles. Background Art
[0002] At present, a chip, also known as an integrated circuit, is a microelectronic device or component that uses a certain semiconductor manufacturing process (such as photolithography, etching, deposition, and ion implantation) to interconnect the transistors, diodes, resistors, capacitors, inductors, and other components and wiring required in a circuit, and is made on a small piece or several small pieces of semiconductor wafers or dielectric substrates, and then packaged in a tube shell to become a microstructure with the required circuit function, making a big step forward in the direction of miniaturization, low power consumption, and high reliability of electronic components;
[0003] In the chip manufacturing process, when the chip is processed and manufactured before being put on the market, it must go through a testing process. As the chip integration becomes higher and higher, its test performance is also improved. The test requires conduction, and some dielectric materials will be laid on the cutting path. The dielectric material (LOW-K) is brittle and hard. Using a blade to cut will cause the dielectric material to break or even stretch. Currently, laser technology is used for cutting. After laser cutting, the inspector takes each wafer out of the material box and tilts it under strong light to check whether the laser is completed. The inspector needs to tilt the wafer to view and adjust the viewing angle. It is easy to drop the wafer due to unstable handling. Utility Model Content
[0004] In order to make up for the above shortcomings, the present application provides a semiconductor inspection fixture that can be adjusted at multiple angles, aiming to improve the problem that manual picking requires tilting for viewing, and the problem of unstable holding and easy chip drop.
[0005] An embodiment of the present application provides a semiconductor detection fixture that can be adjusted at multiple angles, including an angle adjustment mechanism and a detection fixture, the angle adjustment mechanism including a lower bracket and an upper bracket, the lower bracket is rotatably mounted with a rotating rod, the rotating rod is circumferentially fixed to the upper bracket; the lower bracket is fixed with a first tooth portion, the rotating rod is fixed with a second tooth portion that matches the first tooth portion, a reset spring for pushing the second tooth portion to engage with the first tooth portion is connected between the lower bracket and the rotating rod, and the rotating rod is fixed with a handle for pushing the reset spring to be compressed; the detection fixture is mounted on the upper end of the upper bracket.
[0006] In a preferred embodiment of the present invention, a base is further included, the lower bracket is fixed on the surface of the base, and the surface of the base is provided with mounting holes.
[0007] In a preferred embodiment of the present invention, the lower bracket is a U-shaped bracket, and the upper bracket has the same structure as the lower bracket;
[0008] The two ends of the rotating rod are slidably connected to the lower bracket through a sliding sleeve; the two ends of the rotating rod are respectively clamped with a clamping spring;
[0009] The end of the rotating rod is a prismatic column, and the end of the upper bracket is provided with a prismatic hole matched with the prismatic column, and the prismatic column slides through the prismatic hole.
[0010] In a preferred embodiment of the present invention, the return spring is sleeved on the surface of the rotating rod, one end of the return spring abuts against the lower bracket, and the other end of the return spring abuts against the handle;
[0011] The return spring is in a compressed state, and is used to push the rotating rod to drive the second tooth portion to engage with the first tooth portion.
[0012] In a preferred embodiment of the utility model, a rotating seat is fixed on the upper end of the upper bracket, a rotating cover is provided on the upper end of the rotating seat, a receiving cavity is hollowly provided between the rotating seat and the rotating cover, and the detection fixture is embedded in the center position of the upper end surface of the rotating cover.
[0013] In a preferred embodiment of the present invention, the rotating cover is a cylindrical structure, the rotating cover is arranged at the upper end of the rotating seat, and the lower end of the rotating cover is in rolling contact with the edge of the rotating seat through balls.
[0014] In a preferred embodiment of the utility model, a worm is rotatably mounted on the rotating seat, a worm wheel is rotatably mounted in the accommodating chamber, the worm wheel is coaxially fixedly connected to the rotating cover, and the worm is meshed with the worm wheel.
[0015] In a preferred embodiment of the utility model, a hand wheel is rotatably mounted on the outer surface of the rotating seat, and the hand wheel is coaxially fixedly connected to one end of the worm; and a placement groove is recessed on the upper end surface of the rotating cover.
[0016] Beneficial effect: The present application provides a semiconductor detection jig which can be adjusted at multiple angles. The semiconductor to be detected is taken out and placed at the center position of the detection jig at the upper end of the upper bracket. The detection jig illuminates the semiconductor by emitting strong light, and the upper bracket is rotated to the required angle around the rotating rod. After reaching a certain angle, it is tilted to check whether the laser is completed, which is convenient for the detection personnel to check and avoids the possibility of film falling during hand-held viewing. Because the second tooth portion is engaged with the first tooth portion under the elastic force of the reset spring to prevent the upper bracket from rotating, the angle after rotation and the degree of inclination can be effectively fixed. When the inclination angle needs to be adjusted, it is only necessary to push the handle so that the reset spring compresses the second tooth portion and separates it from the first tooth portion, and push the handle to rotate around the rotating rod. Since the upper bracket connected to the surface of the rotating rod rotates together with the rod, the upper bracket on the rod is fixed circumferentially by a key connection or a prism connection, and can only rotate with the rod, thereby facilitating the adjustment of the required viewing angle. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions of the implementation methods of the present application, the drawings required for use in the implementation methods will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of a semiconductor testing fixture that can be adjusted at multiple angles provided in an embodiment of the present application;
[0019] Figure 2 A schematic diagram of a side view structure provided for an embodiment of the present application;
[0020] Figure 3 A schematic diagram of a three-dimensional structure of a base provided in an embodiment of the present application;
[0021] Figure 4 A schematic diagram of the three-dimensional structure of the rotating rod provided in the embodiment of the present application;
[0022] Figure 5 A schematic diagram of the three-dimensional structure of the worm gear engagement provided in an embodiment of the present application.
[0023] In the figure: 100, angle adjustment mechanism; 110, lower bracket; 111, first tooth portion; 130, upper bracket; 150, rotating rod; 151, second tooth portion; 153, handle; 170, reset spring; 300, detection fixture; 500, base; 700, rotating seat; 701, rotating cover; 710, worm; 730, worm wheel; 750, handwheel. DETAILED DESCRIPTION
[0024] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0025] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0026] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.
[0027] See also Figure 1-Figure 5 The utility model provides a semiconductor detection fixture that can be adjusted at multiple angles, including an angle adjustment mechanism 100 and a detection fixture 300. The angle adjustment mechanism 100 includes a lower bracket 110 and an upper bracket 130. The lower bracket 110 is rotatably mounted with a rotating rod 150, and the rotating rod 150 is circumferentially fixed to the upper bracket 130; the lower bracket 110 is fixed with a first tooth portion 111, and the rotating rod 150 is fixed with a second tooth portion 151 that matches the first tooth portion 111. A reset spring 170 for pushing the second tooth portion 151 to engage with the first tooth portion 111 is connected between the lower bracket 110 and the rotating rod 150, and a handle 153 for pushing the reset spring 170 to be compressed is fixed to the rotating rod 150; the detection fixture 300 is mounted on the upper end of the upper bracket 130.
[0028] In a preferred embodiment of the present invention, a base 500 is further included, the lower bracket 110 is fixed on the surface of the base 500, and the surface of the base 500 is provided with installation holes.
[0029] In a preferred embodiment of the present invention, the lower bracket 110 is a U-shaped bracket, and the upper bracket 130 has the same structure as the lower bracket 110;
[0030] The two ends of the rotating rod 150 are slidably connected to the lower bracket 110 through a sliding sleeve; the two ends of the rotating rod 150 are respectively clamped with a clamping spring;
[0031] The end of the rotating rod 150 is a prismatic column, and the end of the upper bracket 130 is provided with a prismatic hole matched with the prismatic column, and the prismatic column slides through the prismatic hole.
[0032] In a preferred embodiment of the present invention, the return spring 170 is sleeved on the surface of the rotating rod 150, one end of the return spring 170 abuts against the lower bracket 110, and the other end of the return spring 170 abuts against the handle 153;
[0033] The return spring 170 is in a compressed state, and is used to push the rotating rod 150 to drive the second tooth portion 151 to engage with the first tooth portion 111 .
[0034] In a preferred embodiment of the utility model, a rotating seat 700 is fixed to the upper end of the upper bracket 130, a rotating cover 701 is provided at the upper end of the rotating seat 700, a receiving cavity is hollowly provided between the rotating seat 700 and the rotating cover 701, and the detection fixture 300 is embedded in the center position of the upper end surface of the rotating cover 701.
[0035] In a preferred embodiment of the present invention, the rotating cover 701 is a cylindrical structure, the rotating cover of the rotating cover 701 is arranged at the upper end of the rotating seat 700, and the lower end of the rotating cover 701 is in rolling contact with the edge of the rotating seat 700 through balls.
[0036] In a preferred embodiment of the present invention, a worm 710 is rotatably mounted on the rotating seat 700 , a worm wheel 730 is rotatably mounted in the accommodating chamber, the worm wheel 730 is coaxially fixedly connected to the rotating cover 701 , and the worm 710 is meshed with the worm wheel 730 .
[0037] In a preferred embodiment of the present invention, a hand wheel 750 is rotatably mounted on the outer surface of the rotating seat 700 , and the hand wheel 750 is coaxially fixedly connected to one end of the worm 710 ; a placement groove is recessed on the upper end surface of the rotating cover 701 .
[0038] The working principle of the multi-angle adjustable semiconductor detection fixture is as follows: when in use, the semiconductor to be detected is taken out and placed at the center of the detection fixture 300 at the upper end of the upper bracket 130. The detection fixture 300 emits strong light to illuminate the semiconductor, and the upper bracket 130 is rotated around the rotating rod 150 to the required angle. After reaching a certain angle, it is tilted to check whether the laser is completed, which is convenient for the detection personnel to check and avoid the possibility of the film falling during the hand-held viewing process; because under the elastic force of the reset spring 170, the second tooth portion 151 is engaged with the first tooth portion 111 to prevent the upper bracket 130 from rotating, the angle after rotation and the degree of inclination can be effectively fixed. When the inclination angle needs to be adjusted, it is only necessary to push the handle 153 so that the reset spring 170 compresses the second tooth portion 151 and separates it from the first tooth portion 111, and push the handle to rotate around the rotating rod 150. Since the upper bracket 130 connected to the surface of the rotating rod 150 rotates together with the rod, the upper bracket 130 on the rod is fixed circumferentially by key connection or prism connection, and can only rotate with the rod, thereby facilitating the adjustment of the required viewing angle.
[0039] It should be noted that the specific model and specifications of the detection fixture 300 need to be selected and determined based on the actual specifications of the device, and the specific selection and calculation method adopts the existing technology in this field, so it will not be described in detail.
[0040] The power supply and principle of the detection fixture are clear to those skilled in the art and will not be described in detail here.
[0041] The above description is only an embodiment of the present application and is not intended to limit the scope of protection of the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
Claims
1. A multi-angle adjustable semiconductor testing fixture, characterized in that: include An angle adjustment mechanism (100), the angle adjustment mechanism (100) comprising a lower bracket (110) and an upper bracket (130), the lower bracket (110) being rotatably mounted with a rotating rod (150), the rotating rod (150) being circumferentially fixed to the upper bracket (130); the lower bracket (110) being fixed with a first tooth portion (111), the rotating rod (150) being fixed with a second tooth portion (151) matching with the first tooth portion (111), a return spring (170) being connected between the lower bracket (110) and the rotating rod (150) for pushing the second tooth portion (151) to engage with the first tooth portion (111), and the rotating rod (150) being fixed with a handle (153) for pushing the return spring (170) to be compressed; A detection jig (300) is installed on the upper end of the upper bracket (130).
2. The multi-angle adjustable semiconductor testing fixture according to claim 1, characterized in that: It also includes a base (500), the lower bracket (110) is fixed on the surface of the base (500), and the surface of the base (500) is provided with installation and fixing holes.
3. The multi-angle adjustable semiconductor testing fixture according to claim 1, characterized in that: The lower bracket (110) is a U-shaped bracket, and the upper bracket (130) has the same structure as the lower bracket (110); The two ends of the rotating rod (150) are slidably connected to the lower bracket (110) via a sliding sleeve; the two ends of the rotating rod (150) are respectively clamped with a clamping spring; The end of the rotating rod (150) is a prismatic column, and the end of the upper bracket (130) is provided with a prismatic hole matching the prismatic column, and the prismatic column slides through the prismatic hole.
4. The multi-angle adjustable semiconductor testing fixture according to claim 1, characterized in that: The return spring (170) is sleeved on the surface of the rotating rod (150), one end of the return spring (170) is in contact with the lower bracket (110), and the other end of the return spring (170) is in contact with the handle (153); The return spring (170) is in a compressed state, and is used to push the rotating rod (150) to drive the second tooth portion (151) to engage with the first tooth portion (111).
5. The multi-angle adjustable semiconductor testing fixture according to claim 1, characterized in that: A rotating seat (700) is fixed at the upper end of the upper bracket (130), a rotating cover (701) is provided at the upper end of the rotating seat (700), a receiving cavity is hollowly provided between the rotating seat (700) and the rotating cover (701), and the detection fixture (300) is embedded in the center position of the upper end surface of the rotating cover (701).
6. The multi-angle adjustable semiconductor testing fixture according to claim 5, characterized in that: The rotating cover (701) is a cylindrical structure. The rotating cover of the rotating cover (701) is arranged at the upper end of the rotating seat (700). The lower end of the rotating cover (701) is in rolling contact with the edge of the rotating seat (700) through a ball.
7. The multi-angle adjustable semiconductor testing fixture according to claim 6, characterized in that: A worm (710) is rotatably mounted on the rotating seat (700), a worm wheel (730) is rotatably mounted in the accommodating chamber, the worm wheel (730) is coaxially fixedly connected to the rotating cover (701), and the worm (710) is meshed with the worm wheel (730).
8. The multi-angle adjustable semiconductor testing fixture according to claim 7, characterized in that: A hand wheel (750) is rotatably mounted on the outer surface of the rotating seat (700), and the hand wheel (750) is coaxially fixedly connected to one end of the worm (710); and a placement groove is recessed on the upper end surface of the rotating cover (701).