Mounting jig

Abstract

The utility model provides an installation jig. The mounting jig comprises one or more positioning assemblies, a first positioning assembly and a second positioning assembly, the positioning assembly comprises a measuring ruler and one or more clamping pieces, and each clamping piece is provided with a clamping part used for clamping the connecting column; moreover, the surface of the measuring ruler is provided with scale marks, and the measuring ruler is used for measuring the axial length of the connecting column and the axial length of the electrode body, so as to determine the installation position of the electrode body relative to the connecting column. Compared with an installation mode depending on visual inspection experience, the installation jig provided by the utility model adopts an accurate and stable measurement mode, ensures standardized installation of the electrode bodies and the connecting columns, greatly improves the installation accuracy, effectively ensures the relative position of each pair of electrode bodies and connecting columns in the electrostatic quadruple lens, and improves the installation accuracy of the electrostatic quadruple lens. The abnormal rate of the ion beam is reduced, and the process effect and the product yield are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a mounting fixture. Background Art

[0002] The electrostatic quadrupole lens is one of the important components in high-energy ion implantation equipment. It is mainly used to optimize the degree and direction of ion beam focusing in the linear acceleration system. Figure 1 and Figure 2 As shown, the electrostatic quadruple lens is an electronic lens composed of four symmetrical electrodes 100. Among them, the electrodes 100 are used to form an electrostatic field, and the relative positions of each of the electrodes 100 directly affect the distribution of the electrostatic field. If the position of any of the electrodes 100 deviates from the set position, the distribution of the electrostatic field will be abnormal, which will further affect the regulating effects of the electrostatic field on the focusing, deflection and uniformity of the ion beam, causing the ion beam to be abnormal. In addition, the abnormal ion beam will also cause abnormal consumption of the electrode 100, affecting the service life of the device. In this regard, in the existing process, a ceramic column 101 is used to fix the position of each of the electrodes, and the relative position of each of the electrodes 100 is determined by visual evaluation. However, in view of the differences in the experience level and visual standards of the installers, the installation accuracy of each of the electrodes 100 is difficult to guarantee.

[0003] Therefore, there is an urgent need for an installation fixture to achieve standardized installation of electrodes. Utility Model Content

[0004] The utility model aims to provide a mounting fixture to solve the problem of how to improve the accuracy of electrode mounting in an electrostatic quadruple lens.

[0005] In order to solve the above technical problems, the utility model provides a mounting fixture, which is at least used for positioning and mounting the electrode body and the connecting column in the electrostatic quadruple lens, and the mounting fixture includes: one or more positioning components;

[0006] The positioning assembly includes a measuring ruler and one or more clamping members; the clamping members are movably connected to the measuring ruler, and the clamping members have a clamping portion for clamping the connecting column; and the surface of the measuring ruler has scale marks for measuring the axial length of the connecting column and the electrode body to determine the installation position of the electrode body relative to the connecting column.

[0007] Optionally, in the installation jig, the clamping portion has a first clamping arm and a second clamping arm connected to each other; the first clamping arm and the second clamping arm are parallel to each other and perpendicular to the axial direction of the measuring ruler, and are used to clamp the connecting column so that the connecting column is parallel to the axial direction of the measuring ruler; and the scale marks are arranged along the axial direction of the measuring ruler.

[0008] Optionally, in the installation fixture, the first clamp arm is connected to the second clamp arm via a telescopic member, and the distance between the first clamp arm and the second clamp arm is adjusted by extension and contraction of the telescopic member.

[0009] Optionally, in the installation jig, the clamping member further comprises a connecting portion and an adjusting portion; the connecting portion is sleeved on the outer circumference of the measuring ruler, and along a direction perpendicular to the axial direction of the measuring ruler, opposite ends of the connecting portion are respectively connected to the adjusting portion and the clamping portion;

[0010] Furthermore, the adjusting portion and the connecting portion are movably connected so that the adjusting portion can approach or move away from the measuring scale, and when the adjusting portion approaches the measuring scale, the relative position of the clamping member and the measuring scale is locked; when the adjusting portion moves away from the measuring scale, the connecting portion can drive the adjusting portion and the clamping portion to move axially along the measuring scale to adjust the relative position of the clamping member and the measuring scale.

[0011] Optionally, in the installation jig, a plurality of slots are provided on a side of the measuring ruler close to the adjusting portion, and the adjusting portion can be engaged with or disengaged from the slots to lock or adjust the relative position of the clamping member and the measuring ruler.

[0012] Optionally, in the installation jig, the plurality of slots are evenly arranged along the axial direction of the measuring ruler.

[0013] Optionally, in the installation fixture, the positioning assembly includes two clamping members for respectively clamping opposite ends of the connecting column.

[0014] Optionally, in the installation jig, the installation jig includes two positioning components, and the two positioning components are arranged in parallel to clamp and measure one connecting column respectively to determine the relative position of the electrode body and the two connecting columns.

[0015] Optionally, in the installation jig, when the installation jig includes at least two positioning components, the measuring rulers in each of the positioning components are arranged on a slide rail and can move relative to the slide rail; wherein, the extension direction of the slide rail is perpendicular to the axial direction of each of the measuring rulers.

[0016] Optionally, in the installation fixture, the installation fixture also includes a base, and the measuring ruler in the one or more positioning components is vertically arranged on the base.

[0017] In summary, the utility model provides a mounting jig. Wherein, the mounting jig includes one or more positioning components; the positioning component includes a measuring ruler and one or more clamping members, and the clamping member has a clamping portion for clamping the connecting column; and the surface of the measuring ruler has scale marks for measuring the axial length of the connecting column and the electrode body to determine the installation position of the electrode body relative to the connecting column. Compared with the installation method that relies on visual experience, the mounting jig provided by the utility model adopts a precise and stable measurement method to ensure the standardized installation of the electrode body and the connecting column, greatly improving the accuracy of the installation, and effectively ensuring the relative position of each pair of the electrode body and the connecting column in the electrostatic quadruple lens, which is conducive to reducing the abnormality rate of the ion beam and improving the process effect and product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Those skilled in the art will appreciate that the drawings are provided for a better understanding of the present invention, but do not constitute any limitation on the scope of the present invention.

[0019] Figure 1 It is a front view of an electrode and a ceramic column installed on an acceleration system in the prior art.

[0020] Figure 2 It is a side view of an electrode and a ceramic column installed on an acceleration system in the prior art.

[0021] Figure 3 It is a schematic diagram of the connection between the electrode body and the connecting column in the embodiment of the utility model.

[0022] Figure 4 It is a structural schematic diagram of a mounting fixture with a positioning component in an embodiment of the utility model.

[0023] Figure 5 It is a side view of the positioning assembly clamping the connecting column in the embodiment of the utility model.

[0024] Figure 6 It is a top view of a clamping piece clamping a connecting column in an embodiment of the utility model.

[0025] Figure 7 It is a top view of another clamping piece clamping a connecting column in an embodiment of the utility model.

[0026] Figure 8 It is a structural schematic diagram of a mounting fixture with two positioning components in an embodiment of the utility model.

[0027] And, in the attached drawings:

[0028] 100-electrode; 101-ceramic column;

[0029] 200-electrode body; 201-connecting column;

[0030] 30-positioning assembly; 300-measurement ruler; 301-clamping member; 3011-clamping portion; 3011a-first clamping arm; 3011b-second clamping arm; 3011c-telescopic member; 3012-connecting portion; 3013-adjusting portion;

[0031] 31- base;

[0032] 32-slide rail;

[0033] C-card slot; S-scale mark. DETAILED DESCRIPTION

[0034] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing to be shown is different, and sometimes different proportions are used. It should also be understood that, unless otherwise specified or indicated, the terms "first", "second", "third" and the like in the specification are only used to distinguish the various components, elements, steps, etc. in the specification, rather than to represent the logical relationship or sequential relationship between the various components, elements, steps, etc. And, the X-axis direction, Y-axis direction and Z-axis direction referred to in the specification and the drawings of this application are three directions perpendicular to each other in three-dimensional space.

[0035] Please note that Figure 3, the ion implantation linear acceleration system is usually equipped with 8 to 14 electrostatic quadruple lenses, and the consistency and compatibility of the ion beam output direction between each electrostatic quadruple lens is the key parameter of the system. Among them, the electrostatic quadruple lens is composed of four pairs of electrode bodies 200 and connecting columns 201. The electrode body 200 is used to form an electrostatic field, and its material is generally graphite; the connecting column 201 is used to support and position the corresponding electrode body 200, and its material is generally ceramic. Usually, one electrode body 200 is equipped with two connecting columns 201, and the electrode body 200 and the connecting column 201 are detachably connected. For example, the electrode body 200 and the connecting column 201 are connected through an arc spring and a screw. If the position of any of the electrode bodies 200 in the electrostatic quadruple lens is abnormal, it is very easy to cause ion beam abnormality, thereby affecting the process effect and even increasing the scrap rate of the device. Therefore, the relative position of the electrode body 200 and the connecting column 201 in the electrostatic quadruple lens is one of the important factors affecting the ion beam morphology. Currently, the difficulty in installing the electrode body 200 and the connecting post 201 lies in how to accurately place the electrode body 200 at a preset position of the connecting post 201 .

[0036] Based on this, this embodiment provides a mounting fixture. Figure 3 and Figure 4 The mounting fixture is at least used for positioning and mounting the electrode body 200 and the connecting column 201 in the electrostatic quadruple lens, and includes: one or more positioning components 30; the positioning component 30 includes a measuring ruler 300 and one or more clamping members 301; the clamping member 301 is movably connected to the measuring ruler 300, and the clamping member 301 has a clamping portion 3011 for clamping the connecting column 201; and the surface of the measuring ruler 300 has a scale mark S for measuring the length of the connecting column 201 and the electrode body 200 to determine the installation position of the electrode body 200 relative to the connecting column 201.

[0037] Compared with the installation method that relies on visual experience, the installation fixture provided in this embodiment adopts a precise and stable measurement method to ensure the standardized installation of the electrode body 200 and the connecting column 201, which greatly improves the installation accuracy and effectively ensures the relative position of each pair of the electrode body 200 and the connecting column 201 in the electrostatic quadruple lens, which is beneficial to reduce the abnormality rate of the ion beam and improve the process effect and product yield.

[0038] The following is combined with Figures 3 to 8 , specifically describe the installation fixture provided in this embodiment.

[0039] See also Figure 4 and Figure 5, the installation fixture provided in this embodiment includes: one or more positioning components 30. The positioning component 30 is used to measure and determine the installation position of the electrode body 200 relative to the connecting column 201. Specifically, the positioning component 30 includes a ruler 300 and one or more clamps 301. The ruler 300 is used to measure the length of the connecting column 201 and the electrode body 200, so as to determine the installation position of the electrode body 200 relative to the connecting column 201. Exemplarily, the installation position of the electrode body 200 relative to the connecting column 201 is the axial midpoint of the connecting column 201, and the axial length of the connecting column 201 needs to be measured using the measuring ruler 300, and the position of the axial midpoint of the connecting column 201 is determined; and, the axial length of the electrode body 200 is measured, and the position of the axial midpoint of the electrode body 200 is determined, and then the axial midpoint of the electrode body 200 is overlapped with the axial midpoint of the connecting column 201 and fixedly installed, so as to ensure that the electrode body 200 can be accurately set at the installation position on the connecting column 201, and realize the standardized installation of the electrode body 200 and the connecting column 201. And, the clamping member 301 is used to clamp the connecting column 201 to ensure the stability of the measurement and installation process.

[0040] Furthermore, the measuring ruler 300 is a plate. The surface of the plate is provided with scale marks S, and the scale marks S are arranged along the axial direction of the plate, that is, along the Z axis, so that the operator can directly read the measured length of the connecting column 201 and the electrode body 200 and determine the installation position. In this embodiment, the specific unit scale of the scale mark S is not limited, and it can be determined according to the conventional size of the electrode body 200 and the connecting column 201.

[0041] Based on this, the clamping member 301 is arranged perpendicular to the axial direction of the measuring ruler 300, so that the axial direction of the connecting column 201 is parallel to the axial direction of the measuring ruler 300 during measurement, which is convenient for reading according to the scale mark S. Further, the clamping member 301 has a clamping portion 3011, a connecting portion 3012 and an adjusting portion 3013, and along the direction perpendicular to the axial direction of the measuring ruler 300, the opposite ends of the connecting portion 3012 are connected to the adjusting portion 3013 and the clamping portion 3011 respectively. Figure 6 and Figure 7As shown, the clamping portion 3011 is used to clamp the connecting column 201 in the radial direction. And the clamping portion 3011 has a first clamping arm 3011a and a second clamping arm 3011b. The first clamping arm 3011a and the second clamping arm 3011b are parallel to each other and perpendicular to the axial direction of the measuring ruler 300. That is, the first clamping arm 3011a and the second clamping arm 3011b both extend along the X-axis direction, and are parallel to the plane where the X-axis-Y-axis is located. Among them, the spacing between the first clamping arm 3011a and the second clamping arm 3011b in the Y-axis direction is less than or equal to the diameter of the connecting column 201, so as to ensure that the first clamping arm 3011a and the second clamping arm 3011b stably hold the connecting column 201. Exemplarily, as Figure 6 As shown, the first clamp arm 3011a and the second clamp arm 3011b are fixedly connected at one end close to the measuring ruler 300, and the spacing between the first clamp arm 3011a and the second clamp arm 3011b in the Y-axis direction is a fixed value, so as to be able to clamp a type of connecting column 201 with a diameter equivalent to the fixed value. Figure 7 As shown, the first clamp arm 3011a and the second clamp arm 3011b are connected via a telescopic member 3011c, and the telescopic member 3011c is extended and contracted to adjust the distance between the first clamp arm 3011a and the second clamp arm 3011b, so as to adapt to the connecting column 201 of different diameters. Optionally, the telescopic member 3011c is a spring, a leaf spring, or a push-pull telescopic sleeve. Preferably, the contacting parts of the first clamp arm 3011a and the second clamp arm 3011b with the connecting column 201 are provided with anti-skid silicone pads to improve the clamping stability and avoid damage to the connecting column 201.

[0042] Please continue reading Figure 4 and Figure 5 The connecting portion 3012 is a frame that can be sleeved on the outer periphery of the measuring ruler 300, and drives the clamping portion 3011 and the adjusting portion 3013 to move along the axial direction of the measuring ruler 300, so as to adjust the relative position of the clamping member 301 and the measuring ruler 300, so as to adapt to the connecting column 201 of different lengths. The adjusting portion 3013 and the connecting portion 3012 can be movably connected, so that the adjusting portion 3013 can approach or move away from the measuring ruler 300, and when the adjusting portion 3013 approaches the measuring ruler 300, the relative position of the clamping member 301 and the measuring ruler 300 is locked; and when the adjusting portion 3013 moves away from the measuring ruler 300, the connecting portion 3012 can drive the adjusting portion 3013 and the clamping portion 3011 to move along the axial direction of the measuring ruler 300, so as to adjust the relative position of the clamping member 301 and the measuring ruler 300.

[0043] Exemplarily, the adjusting portion 3013 is a bolt, and the connecting portion 3012 is provided with a threaded hole penetrating the connecting portion 3012, and the threaded hole is adapted to the bolt so that the bolt can be screwed in or out of the threaded hole. When the bolt is screwed into the threaded hole, the bolt is close to the measuring ruler 300 and can be close to the side wall of the measuring ruler 300 to lock the position so that the clamp 301 is fixedly connected to the measuring ruler 300; when the bolt is screwed out of the threaded hole, the bolt is away from the measuring ruler 300 to unlock the position of the clamp 301 relative to the measuring ruler 300, so that the clamp 301 can move up and down along the axial direction of the measuring ruler 300, so that the position of the clamp 301 relative to the measuring ruler 300 can be adjusted to adapt to the connecting column 201 of different lengths. In another exemplary embodiment, the adjusting portion 3013 is a pin, and the connecting portion 3012 has a hole matched with the pin, so that the pin can be inserted or pulled out by an operator to lock or unlock the position of the clamp 301 relative to the measuring ruler 300.

[0044] Preferably, a plurality of slots C are provided on one side of the measuring ruler 300 close to the adjusting portion 3013, and the adjusting portion 3013 can be engaged with or disengaged from the slots C to lock or adjust the relative position of the clamp 301 and the measuring ruler 300. In other words, when it is necessary to lock the position of the clamp 301 relative to the measuring ruler 300, the adjusting portion 3013 is close to the measuring ruler 300 and inserted into the corresponding slots C to increase the stability of position locking; when it is necessary to adjust the position of the clamp 301 relative to the measuring ruler 300, the adjusting portion 3013 is away from the measuring ruler 300 and disengaged from the corresponding slots C. Preferably, a plurality of slots C are evenly arranged along the axial direction of the measuring ruler 300, so that the clamp 301 can be adjusted to any position of the measuring ruler 300, thereby improving the applicable range of the length of the connecting column 201.

[0045] Preferably, in order to ensure the clamping stability and measurement accuracy of the connecting column 201, Figure 4 and Figure 5 As shown, the positioning assembly 30 includes two clamping members 301, which are used to respectively clamp the opposite ends of the connecting column 201. And, further, the installation fixture also includes a base 31. The base 31 serves as a bearing bracket of the installation fixture, and the measuring ruler 300 is vertically arranged on the base 31.

[0046] It should be noted that if Figure 3As shown, usually one electrode body 200 in the electrostatic quadruple lens is connected to two corresponding connecting posts 201. The two connecting posts 201 are arranged parallel to each other, and are detachably connected to opposite sides of the electrode body 200. Therefore, when installing the electrode body 200, one of the connecting posts 201 can be clamped and measured first, one side of the electrode body 200 can be connected thereto, and then the other connecting post 201 can be clamped and measured, and the other side of the electrode body 200 can be connected thereto, thereby realizing the connection between one electrode body 200 and the two connecting posts 201. However, the above-mentioned installation process requires steps such as clamping and disassembly, and the process is relatively cumbersome. Therefore, Figure 4 , Figure 5 and Figure 8 As shown, the installation fixture provided in this embodiment may include two positioning components 30 to clamp one connecting column 201 respectively. The two positioning components 30 are arranged in parallel. That is, the two measuring scales 300 in the two positioning components 30 are arranged in parallel, and the directions of the clamping members 301 arranged on the measuring scales 300 are the same. For example, the clamping parts 3011 are all located on the right side of the measuring scale 300, and the adjusting parts 3013 are all located on the left side of the measuring scale 300, so that the connecting columns 201 clamped by the clamping members 301 in the two positioning components 30 are parallel to each other and arranged at intervals along the Y axis. Further, because the spacing requirements of the two connecting columns 201 corresponding to the connection of different electrode bodies 200 are different, the installation fixture is also provided with a slide rail 32, and the measuring scales 300 are respectively arranged on the slide rail 32, and can move relative to the slide rail 32 to adjust the spacing of the two connecting columns 201. The extending direction of the slide rail 32 is perpendicular to the axial direction of each of the measuring rulers 300. Furthermore, the present embodiment does not limit the number of the connecting posts 201 corresponding to the electrode body 200, and the same number of the positioning components 30 can be provided according to the number of the connecting posts 201 to improve the convenience of installation for the operator. Also, the present embodiment does not limit the installation fixture to be only applicable to the installation of the electrode body 200 and the connecting posts 201 in the electrostatic quadruple lens, but can also be applicable to other electronic lenses.

[0047] In summary, the installation fixture provided in this embodiment includes one or more positioning components 30. And under the action of the positioning component 30, the connecting column 201 can be clamped by the clamping member 301, and the axial length of the connecting column 201 can be read through the scale mark S on the measuring ruler 300. And, through the measurement of the measuring ruler 300, the axial length of the electrode body 200 can also be determined, and then the installation position of the electrode body 200 relative to the connecting column 201 can be accurately determined, so as to achieve standardized installation of the electrode body 200 and the connecting column 201. Compared with the installation method relying on visual experience, the positioning component 30 provided in this embodiment greatly improves the installation accuracy, which is conducive to ensuring the relative position of each pair of the electrode body 200 and the connecting column 201 in the electrostatic quadruple lens is accurate, effectively reducing the abnormal rate of the ion beam, and improving the process effect and product yield.

[0048] In addition, it should be recognized that although the present invention has been disclosed as a preferred embodiment, the above embodiment is not intended to limit the present invention. For any technician familiar with the art, without departing from the scope of the technical solution of the present invention, the above disclosed technical content can be used to make many possible changes and modifications to the technical solution of the present invention, or modified into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the scope of protection of the technical solution of the present invention.

Claims

1. A mounting fixture, characterized in that: At least used for positioning and installing the electrode body and the connecting column in the electrostatic quadruple lens, the installation fixture includes: one or more positioning components; The positioning assembly includes a measuring ruler and one or more clamping members; the clamping members are movably connected to the measuring ruler, and the clamping members have a clamping portion for clamping the connecting column; and the surface of the measuring ruler has scale marks for measuring the axial length of the connecting column and the electrode body to determine the installation position of the electrode body relative to the connecting column.

2. The installation jig according to claim 1, characterized in that: The clamping portion comprises a first clamping arm and a second clamping arm connected to each other; the first clamping arm and the second clamping arm are parallel to each other and arranged perpendicular to the axial direction of the measuring ruler, and are used to clamp the connecting column so that the connecting column is parallel to the axial direction of the measuring ruler; and the scale mark is arranged along the axial direction of the measuring ruler.

3. The installation jig according to claim 2, characterized in that: The first clamping arm is connected to the second clamping arm via a telescopic member, and the distance between the first clamping arm and the second clamping arm is adjusted by the extension and contraction of the telescopic member.

4. The installation jig according to claim 1, characterized in that: The clamping member also has a connecting portion and an adjusting portion; the connecting portion is sleeved on the outer circumference of the measuring ruler, and along a direction perpendicular to the axial direction of the measuring ruler, opposite ends of the connecting portion are respectively connected to the adjusting portion and the clamping portion; Furthermore, the adjusting portion and the connecting portion are movably connected so that the adjusting portion can approach or move away from the measuring scale, and when the adjusting portion approaches the measuring scale, the relative position of the clamping member and the measuring scale is locked; when the adjusting portion moves away from the measuring scale, the connecting portion can drive the adjusting portion and the clamping portion to move axially along the measuring scale to adjust the relative position of the clamping member and the measuring scale.

5. The installation jig according to claim 4, characterized in that: A plurality of slots are provided on one side of the measuring ruler close to the adjusting portion, and the adjusting portion can be engaged with or disengaged from the slots to lock or adjust the relative position of the clamping member and the measuring ruler.

6. The installation jig according to claim 5, characterized in that: The plurality of slots are evenly arranged along the axial direction of the measuring ruler.

7. The installation jig according to claim 1, characterized in that: The positioning assembly includes two clamping members, which are used to clamp the opposite ends of the connecting column respectively.

8. The installation jig according to claim 1, characterized in that: The installation fixture includes two positioning components, and the two positioning components are arranged in parallel and are used to clamp and measure one connecting post respectively to determine the relative position of the electrode body and the two connecting posts.

9. The installation jig according to claim 1, characterized in that: When the installation fixture includes at least two positioning components, the measuring rulers in each positioning component are arranged on a slide rail and can move relative to the slide rail; wherein the extension direction of the slide rail is perpendicular to the axial direction of each measuring ruler.

10. The installation jig according to claim 1, characterized in that: The installation fixture also includes a base, and the measuring ruler in the one or more positioning components is vertically arranged on the base.

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