Carrier feeding flatness detection equipment

Abstract

The utility model discloses a carrier loading flatness detection device, which is characterized in that a rack provided with a loading station, a circulation station, a detection station and a defective product station is arranged on the rack, a movable and replaceable carrier replacement skip car is arranged at the loading station, a carrier transmission module, a track variable pitch mechanism and a second transfer module are arranged at the circulation station, and the detection station and the defective product station are arranged on the rack. The detection station is provided with a leveling platform and a flatness detector, and the defective product station is provided with a carrier placing platform used for placing defective carriers. According to the scheme, work is stable, product risks can be reduced, the working intensity of workers is reduced, compared with the prior art, one piece of manpower can be saved, the labor cost is also saved for enterprises, the occupied area is reduced, transferring and detecting are accurate, reliable, stable and rapid, and the feeding and flatness detecting efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of automation equipment, and in particular to a carrier feeding flatness detection device applied to the SMT industry. Background Art

[0002] The carrier is the carrier of the product during production. The use of carriers during production not only ensures that the product can perform corresponding operations at each workstation, but also enables the simultaneous production of multiple products, reduces the operation actions during production, and improves production efficiency. However, the deformation of the carrier is also one of the key factors affecting product quality. Especially in the SMT industry, when gluing circuit boards, the flatness of the carrier must be ensured to be good, otherwise a large number of defective products will appear, so it is necessary to test the flatness of the carrier to prevent defective carriers from flowing to the production line.

[0003] In the process of realizing this application, the inventor found that there are at least the following problems in the existing glue laminating operation for carrier loading and flatness detection: the flatness of the carrier needs to be detected before the carrier goes online, and the carrier needs to be placed on a marble platform during the detection. Because the carrier is large, if a marble platform area is set up separately, the size of the equipment will be very large, which greatly increases the occupied area of ​​the equipment, which is not conducive to site planning and layout. In addition, the loading of the carrier sometimes relies on manual handling, and the uneven carrier is also detected and immediately removed from the line by manual labor. At this time, the loading and flatness detection of the carrier must be carried out manually throughout the process, and the operation intensity is high.

[0004] In view of this, how to solve the problems of large equipment footprint and high operator intensity required for carrier loading and flatness detection in existing glue laminating operations has become a topic to be studied and solved by the present utility model. Summary of the invention

[0005] The utility model provides a carrier loading flatness detection device, which aims to solve the problems of large equipment footprint and high operator intensity required for carrier loading and flatness detection in existing glue laminating operations.

[0006] In order to achieve the above-mentioned purpose, the utility model proposes a carrier loading flatness detection device, the carrier loading flatness detection device comprises a frame, the frame is provided with a loading station, a circulation station, a detection station and a defective product station, the circulation station is located directly above the detection station;

[0007] The loading station is provided with a movable and replaceable carrier replacement trolley, and the loading station is also provided with a first transfer module for transferring the carrier on the carrier replacement trolley to the transfer station;

[0008] The transfer station is provided with a carrier transmission module and a second transfer module, the carrier transmission module includes a transmission line, the transmission line is connected with the track pitch changing mechanism, and the second transfer module is used to transfer the carrier between the transfer station and the inspection station, and between the inspection station and the defective product station;

[0009] The inspection station is provided with a leveling platform and a leveling detector;

[0010] The defective product station is provided with a carrier placement platform for placing defective carriers;

[0011] The carrier loading flatness detection equipment is configured as follows: when the second transfer module transfers the carrier between the circulation station and the detection station, and between the detection station and the defective product station, the track variable distance mechanism controls the spacing of the transmission line to become larger, so that the carrier can be grabbed into or taken out of the flat platform.

[0012] The relevant contents of this utility model are explained as follows:

[0013] 1. In the above technical scheme of the utility model, in view of the problems that the equipment occupies a large area and requires employees to stand by for operation and has a high intensity in the existing glue laminating operation, a carrier loading flatness detection device is designed. The frame of the carrier loading flatness detection device is provided with a frame having a loading station, a circulation station, a detection station and a defective product station. A movable and replaceable carrier replacement trolley is provided at the loading station, and a carrier transmission module is provided at the circulation station. , a track pitch changing mechanism, a second transfer module, a leveling platform and a flatness detector are provided on the inspection station, a carrier placement platform for placing defective carriers is provided on the defective product station, and the carrier loading flatness detection equipment is configured as follows: when the second transfer module transfers the carrier between the circulation station and the inspection station, and the inspection station and the defective product station, the track pitch changing mechanism controls the spacing of the transmission line to become larger, so that the carrier is grabbed into or grabbed out of the leveling platform. Through the innovative design of the above structure, the inspection station is located directly below the circulation station. After the carrier is transferred from the carrier replacement material cart of the loading station to the carrier transmission module of the circulation station, it is grabbed by the second transfer module, and then the track pitch change mechanism controls the spacing of the transmission line to become larger, so that the second transfer module can grab the carrier and transfer it from the circulation station to the flat platform of the inspection station. Then the flatness detector at the inspection station detects the flatness of the carrier. If the detected flatness meets the requirements, it is regarded as a good product. The good product carrier is re-grabbed to the top of the transmission line, and the spacing of the transmission line is controlled by the track pitch change mechanism to be restored to the size of the carrier specification. The carrier transmission module transports the good product carrier to the external production line; if the detected flatness does not meet the requirements, it is regarded as a defective product. The defective product carrier is re-grabbed to the top of the transmission line and then transferred to the defective product station.

[0014] 2. In the above technical solution, the carrier replacement trolley includes a body and a carrier liftable material frame, the body is provided with a material frame limiter, the carrier liftable material frame is positioned and installed on the material frame limiter, the carrier liftable material frame is liftably installed with a carrier, and the carrier liftable material frame is open at least above and in front of it, so that the first transfer module can transfer the carrier on the carrier replacement trolley to the transfer station. This structural design provides a trolley that can provide up to dozens of carriers at a time, instead of manual carrier feeding, the carrier is placed in the trolley, and the trolley is used to feed the carrier, reducing the number of feeding times.

[0015] 3. In the above technical solution, the first transfer module includes a first X-axis motion assembly and a fork assembly installed below the first X-axis motion assembly. The fork assembly transfers the carrier on the carrier replacement trolley from the loading station to the transfer station, so as to load the carrier in order.

[0016] 4. In the above technical solution, the carrier transmission module also includes a driving motor, an in-place blocking cylinder, and an inductive photoelectric device. The transmission line is two parallel transmission belts, each of which is installed on a transmission bracket. The transmission belts are driven by the driving motor for transmission. The in-place blocking cylinder and the inductive photoelectric device are arranged on the transmission path of the transmission belt-driven carrier. This structural design provides a carrier transmission module with positioning and sensing functions, thereby improving the degree of automation and making the carrier feeding flatness detection equipment more compatible with the automated production line.

[0017] 5. In the above technical solution, the track pitch-changing mechanism includes a linear guide and a pitch-changing cylinder. The two transmission brackets are installed on the linear guide and are perpendicular to the linear guide. The telescopic end of the pitch-changing cylinder is connected to one of the transmission brackets. The pitch-changing cylinder drives the transmission bracket to move on the linear guide to increase or decrease the distance between the two transmission brackets. This structure improves the efficiency and accuracy of the spacing adjustment and control between the transmission lines on the carrier transmission module, and also improves the reliability and stability of the flatness detection of the feeding material.

[0018] 6. In the above technical solution, the second transfer module includes a gantry, a second Y-axis mobile module and a second Z-axis mobile module, the gantry is installed on the circulation station, the second Y-axis mobile module is installed on the gantry, the second Z-axis mobile module is installed on the second Y-axis mobile module, and the execution end of the second Z-axis mobile module is provided with a carrier handling clamp. This structural design enables the second transfer module to better transfer between the circulation station and the inspection station, and between the inspection station and the defective product station accurately, reliably, stably and quickly, thereby improving the efficiency of feeding and flatness inspection.

[0019] 7. In the above technical solution, the flatness detector is a laser altimeter, and there are multiple laser altimeters. Multiple laser altimeters are used to measure the height of the carrier on the leveling platform to perform the final flatness detection.

[0020] 8. In the above technical solution, the flatness detector is installed on the second Y-axis moving module, and the second Y-axis moving module drives the flatness detector to move along the Y-axis, thereby further saving space and reducing the area occupied by the equipment.

[0021] 9. In the above technical solution, the leveling platform is a marble platform, and the flatness of the leveling platform is 0.02 mm. Using marble as the leveling platform has the advantages of high precision, high stability, and corrosion resistance.

[0022] 10. In the above technical solution, the carrier placement platform includes supporting columns and a placement table to provide good support for the defective carrier.

[0023] 11. In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0024] 12. In the description of the present application, it should be noted that the terms "upper", "lower", "inner", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the content protected by the present application.

[0025] 13. In the description of the present application, it should be noted that if the words "first", "second" and the like are used in this document to limit components, those skilled in the art should know that the use of the words "first", "second" and the like is only for the convenience of describing the present application and simplifying the description. Unless otherwise stated, the above words have no special meaning.

[0026] Due to the application of the above scheme, the utility model has the following advantages and effects compared with the prior art:

[0027] 1. In the above solution of the utility model, the carrier is placed in a carrier replacement material cart, and a trolley is used to feed the carrier, thereby reducing the number of feeding times.

[0028] 2. The above scheme of the utility model places the leveling platform in the middle of the streamline, so that the inspection station is located directly below the flow station. During the inspection, it is only necessary to widen the streamline and place the carrier on the leveling platform for flatness inspection, thereby reducing space.

[0029] 3. The above scheme of the utility model sets up a defective product station. If the detected flatness does not meet the requirements, it is regarded as a defective product. The defective product carrier is re-grabbed above the transmission line and then moved to the defective product station to avoid equipment shutdown when personnel are absent.

[0030] 4. In summary, after adopting the solution of the utility model, the existing problems in the existing gluing operation for carrier loading and flatness detection, such as large equipment footprint and high intensity of employee standby operation, are solved. The operation is stable, can reduce product risks, reduce employee work intensity, and compared with the existing technology, it can save one manpower, and also save labor costs for the enterprise. The occupied area is reduced, and accurate, reliable, stable and fast transfer and detection are realized, which improves the efficiency of loading and flatness detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a three-dimensional schematic diagram of the overall structure of the carrier feeding flatness detection device according to an embodiment of the utility model;

[0032] Figure 2 This is a front view of the overall structure of the carrier feeding flatness detection device according to an embodiment of the utility model;

[0033] Figure 3 This is an overall top view of the carrier loading flatness detection device according to an embodiment of the utility model;

[0034] Figure 4 It is a three-dimensional schematic diagram of a carrier replacement trolley in an embodiment of the utility model;

[0035] Figure 5 It is a side view of a carrier replacement trolley in an embodiment of the utility model;

[0036] Figure 6 It is a three-dimensional schematic diagram of the combination of the carrier transmission module and the track pitch changing mechanism in the embodiment of the utility model;

[0037] Figure 7 It is a top view of the combination of the carrier transmission module and the track pitch changing mechanism in the embodiment of the utility model;

[0038] Figure 8 It is a three-dimensional schematic diagram of placing a carrier on the carrier placement platform in an embodiment of the utility model.

[0039] The various parts of the above drawings are shown as follows:

[0040] 1 Rack

[0041] 11 Loading station

[0042] 12 Flow Stations

[0043] 13 Inspection Station

[0044] 14 Defective product station

[0045] 2 Carrier replacement trolley

[0046] 21 Body

[0047] 211 Material frame limiter

[0048] 22 Carrier can lift the material frame

[0049] 3. First transfer module

[0050] 31 First X-axis motion component

[0051] 32 Fork assembly

[0052] 4 Vehicle Transmission Module

[0053] 41 Transmission Line

[0054] 42 Drive Motor

[0055] 43 Stop cylinder in place

[0056] 44 Induction Photoelectric

[0057] 45 Transmission bracket

[0058] 5 Second transfer module

[0059] 51 Gantry

[0060] 52 Second Y-axis moving module

[0061] 53 Second Z axis moving module

[0062] 54 Carrier handling gripper

[0063] 6 Track pitch changing mechanism

[0064] 61 Linear Guides

[0065] 62 variable pitch cylinder

[0066] 7. Leveling the platform

[0067] 8 Flatness tester

[0068] 81 Laser altimeter

[0069] 9 Vehicle placement platform

[0070] 91 Support column

[0071] 92 Place the table

[0072] 100 Vehicles. DETAILED DESCRIPTION

[0073] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0074] In addition, it should be noted that Figure 1 , Figure 4 , Figure 7 , Figure 8 The carrier 100 is drawn in the figure only to facilitate the understanding of those skilled in the art, and the carrier 100 does not belong to the components of the technical solution of the present utility model.

[0075] The utility model aims to solve the problems of large equipment footprint and high operation intensity of employees required for carrier loading and flatness detection in existing glue sticking operations, and designs a carrier loading flatness detection device. The carrier loading flatness detection device is provided with a frame 1 having a loading station 11, a circulation station 12, a detection station 13 and a defective product station 14. A movable and replaceable carrier replacement trolley 2 is provided at the loading station 11, and a carrier transmission module 4, a track pitch change mechanism 6, and a first detection station 14 are provided at the circulation station 12. The second transfer module 5 is provided with a leveling platform 7 and a flatness detector 8 on the inspection station 13, and the defective product station 14 is provided with a carrier placement platform 9 for placing defective carriers, and the carrier loading flatness detection equipment is configured as follows: when the second transfer module 5 transfers the carrier between the circulation station 12 and the inspection station 13, and the inspection station 13 and the defective product station 14, the track variable distance mechanism 6 controls the spacing of the transmission line 41 to become larger, so that the carrier is grabbed into or grabbed out of the leveling platform 7.

[0076] As attached Figure 1 To Attachment Figure 3 As shown, the embodiment of the utility model provides a carrier loading flatness detection device, the carrier loading flatness detection device comprises a frame 1, the frame 1 is provided with a loading station 11, a circulation station 12, a detection station 13 and a defective product station 14, the circulation station 12 is located directly above the detection station 13;

[0077] The loading station 11 is provided with a movable and replaceable carrier replacement trolley 2, and the loading station 11 is also provided with a first transfer module 3 for transferring the carrier on the carrier replacement trolley 2 to the transfer station 12;

[0078] The transfer station 12 is provided with a carrier transmission module 4 and a second transfer module 5, the carrier transmission module 4 includes a transmission line 41, the transmission line 41 is connected with the track pitch changing mechanism 6, and the second transfer module 5 is used to transfer the carrier between the transfer station 12 and the inspection station 13, and between the inspection station 13 and the defective product station 14;

[0079] The inspection station 13 is provided with a leveling platform 7 and a leveling detector 8;

[0080] The defective product station 14 is provided with a carrier placement platform 9 for placing defective carriers;

[0081] The carrier loading flatness detection equipment is configured as follows: when the second transfer module 5 transfers the carrier between the circulation station 12 and the detection station 13, and between the detection station 13 and the defective product station 14, the track variable distance mechanism 6 controls the spacing of the transmission line 41 to become larger, so that the carrier is grabbed into or taken out of the flattening platform 7.

[0082] The workflow of the present utility model embodiment can be referred to as follows:

[0083] 1. The carrier is transferred from the carrier replacement trolley 2 of the loading station 11 to the carrier transfer module 4 of the circulation station 12 and put into place.

[0084] 2. The second transfer module 5 grabs the carrier on the carrier transmission module 4, and then the track pitch changing mechanism 6 controls the spacing of the transmission line 41 to become larger, so that the second transfer module 5 grabs the carrier and transfers it from the transfer station 12 to the flat platform 7 of the inspection station 13.

[0085] 3. Then the flatness detector 8 at the inspection station 13 inspects the flatness of the carrier.

[0086] 4. If the detected flatness meets the requirements, it is considered a good product. The good product carrier is re-grabbed above the transmission line 41, and the spacing of the transmission line 41 is controlled by the track pitch change mechanism 6 to be restored to the size of the carrier specification. The good product carrier is transported to the external production line by the carrier transmission module 4.

[0087] 5. If the detected flatness does not meet the requirements, it is regarded as a defective product. The defective product carrier is re-grabbed above the transmission line 41 and then moved to the defective product station 14.

[0088] In another embodiment of the utility model, the carrier replacement trolley 2 includes a body 21 and a carrier liftable material frame 22, the body 21 is provided with a material frame limiter 211, the carrier liftable material frame 22 is positioned and installed on the material frame limiter 211, the carrier can be lifted and installed in the carrier liftable material frame 22, and the carrier liftable material frame 22 is open at least above and in front thereof, so that the first transfer module 3 can transfer the carrier on the carrier replacement trolley 2 to the transfer station 12. This structural design provides a trolley that can provide up to dozens of carriers at a time, instead of manual carrier feeding, the carrier is placed in the trolley, and the trolley is used to feed the carrier, thereby reducing the number of feeding times.

[0089] In another embodiment of the present invention, the first transfer module 3 includes a first X-axis motion assembly 31 and a fork assembly 32 installed below the first X-axis motion assembly 31. The fork assembly 32 transfers the carrier on the carrier replacement trolley 2 from the loading station 11 to the transfer station 12, so as to load the carrier in order.

[0090] In another embodiment of the utility model, the carrier transmission module 4 also includes a driving motor 42, an in-place blocking cylinder 43, and an inductive photoelectric 44. The transmission line 41 is two parallel transmission belts, and the two transmission belts are respectively installed on a transmission bracket 45. The transmission belts are driven by the driving motor 42 for transmission. The in-place blocking cylinder 43 and the inductive photoelectric 44 are arranged on the transmission path of the transmission belt transmission carrier. Thus, the structural design provides a carrier transmission module 4 with positioning and sensing functions, so as to improve the degree of automation and make the carrier feeding flatness detection equipment more compatible and matched with the automated production line. More specifically, the track pitch-changing mechanism 6 includes a linear guide 61 and a pitch-changing cylinder 62. The two transmission brackets 45 are installed on the linear guide 61 and are perpendicular to the linear guide 61. The telescopic end of the pitch-changing cylinder 62 is connected to one of the transmission brackets 45, and the pitch-changing cylinder 62 drives the transmission bracket 45 to move on the linear guide 61, so that the spacing between the two transmission brackets 45 becomes larger or smaller. This structure can improve the efficiency and accuracy of adjusting and controlling the spacing between the transmission lines 41 on the carrier transmission module 4, and also improve the reliability and stability of the flatness detection of the feeding material.

[0091] In another embodiment of the utility model, the second transfer module 5 includes a gantry 51, a second Y-axis moving module and a second Z-axis moving module, the gantry 51 is installed on the circulation station 12, the second Y-axis moving module is installed on the gantry 51, the second Z-axis moving module is installed on the second Y-axis moving module, and the execution end of the second Z-axis moving module is provided with a carrier handling clamp 54. This structural design enables the second transfer module 5 to better transfer between the circulation station 12 and the inspection station 13, and between the inspection station 13 and the defective product station 14 accurately, reliably, stably and quickly, thereby improving the efficiency of loading and flatness inspection.

[0092] In another embodiment of the utility model, the flatness detector 8 is a laser altimeter 81, and the number of the laser altimeters 81 is multiple, and the multiple laser altimeters 81 are used to measure the height of the carrier on the leveling platform 7 for the final flatness detection. Furthermore, the flatness detector 8 is installed on the second Y-axis moving module, and the second Y-axis moving module drives the flatness detector 8 to move along the Y-axis. In this way, space can be further saved and the area occupied by the equipment can be reduced. The leveling platform 7 is a marble platform, and the flatness of the leveling platform 7 is 0.02mm. Using marble as the leveling platform 7 has the advantages of high precision, high stability, and corrosion resistance.

[0093] In another embodiment of the present invention, the carrier placement platform 9 includes a support column 91 and a placement table 92 to provide good support for defective carriers.

[0094] It should also be noted that in the embodiments of the present invention, the control of each module and mechanism belongs to the prior art, and those skilled in the art are aware of their principles and structures. These technologies are not the focus of the present invention, so no further description will be given here.

[0095] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A carrier feeding flatness detection device, characterized in that: The carrier loading flatness detection device comprises a frame, on which a loading station, a circulation station, a detection station and a defective product station are arranged, and the circulation station is located directly above the detection station; The loading station is provided with a movable and replaceable carrier replacement trolley, and the loading station is also provided with a first transfer module for transferring the carrier on the carrier replacement trolley to the transfer station; The transfer station is provided with a carrier transmission module, a track pitch changing mechanism, and a second transfer module. The carrier transmission module includes a transmission line, and the transmission line is connected with the track pitch changing mechanism. The second transfer module is used to transfer the carrier between the transfer station and the inspection station, and between the inspection station and the defective product station. The inspection station is provided with a leveling platform and a leveling detector; The defective product station is provided with a carrier placement platform for placing defective carriers; The carrier loading flatness detection equipment is configured as follows: when the second transfer module transfers the carrier between the circulation station and the detection station, and between the detection station and the defective product station, the track variable distance mechanism controls the spacing of the transmission line to become larger, so that the carrier can be grabbed into or taken out of the flat platform.

2. The carrier loading flatness detection device according to claim 1, characterized in that: The carrier replacement trolley includes a body and a carrier liftable material frame, the body is provided with a material frame limiting portion, the carrier liftable material frame is positioned and installed on the material frame limiting portion, a carrier is liftably installed in the carrier liftable material frame, and the carrier liftable material frame is open at least above and in front thereof, so that the first transfer module can transfer the carrier on the carrier replacement trolley to the circulation station.

3. The carrier loading flatness detection device according to claim 1, characterized in that: The first transfer module includes a first X-axis motion component and a fork component installed below the first X-axis motion component.

4. The carrier loading flatness detection device according to claim 1, characterized in that: The carrier transmission module also includes a driving motor, an in-place blocking cylinder, and an induction photoelectric. The transmission line is two parallel transmission belts, and the two transmission belts are respectively installed on a transmission bracket. The transmission belts are driven by the driving motor for transmission. The in-place blocking cylinder and the induction photoelectric are arranged on the transmission path of the transmission belt-driven carrier.

5. The carrier loading flatness detection device according to claim 4, characterized in that: The track pitch changing mechanism includes a linear guide and a pitch changing cylinder. The two transmission brackets are installed on the linear guide and are perpendicular to the linear guide. The telescopic end of the pitch changing cylinder is connected to one of the transmission brackets. The pitch changing cylinder drives the transmission bracket to move on the linear guide to increase or decrease the distance between the two transmission brackets.

6. The carrier loading flatness detection device according to claim 1, characterized in that: The second transfer module includes a gantry, a second Y-axis mobile module and a second Z-axis mobile module. The gantry is installed on the flow station, the second Y-axis mobile module is installed on the gantry, the second Z-axis mobile module is installed on the second Y-axis mobile module, and the execution end of the second Z-axis mobile module is provided with a carrier handling clamp.

7. The carrier loading flatness detection device according to claim 6, characterized in that: The flatness detector is a laser altimeter, and there are multiple laser altimeters.

8. The carrier loading flatness detection device according to claim 7, characterized in that: The flatness detector is installed on the second Y-axis moving module, and the second Y-axis moving module drives the flatness detector to move along the Y-axis.

9. The carrier loading flatness detection device according to claim 1, characterized in that: The flat platform is a marble platform, and the flatness of the flat platform is 0.02 mm.

10. The carrier loading flatness detection device according to claim 1, characterized in that: The carrier placement platform includes a supporting column and a placement table.

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