Mounting jig

Abstract

The utility model discloses a mounting jig which at least comprises a lifting unit, a positioning unit and a positioning unit, the lifting unit comprises a lifting bottom plate and at least one supporting rod, the supporting rod penetrates through the lifting bottom plate, the lifting bottom plate reciprocates on the supporting rod, and the two ends of the lifting bottom plate are bent into preset shapes; the fixing unit comprises an upper base, a lower base and a connecting rod, the upper base and the lower base are oppositely arranged, the connecting rod is detachably connected with the upper base and the lower base, and the shape of the upper base is matched with the preset shape; and the covering unit comprises a cover plate, the shape of the cover plate is matched with the preset shape, and the lifting bottom plate is clamped with the upper base or the cover plate. According to the mounting jig provided by the utility model, the spraying device can be quickly, accurately and stably replaced or maintained.

Description

Technical Field

[0001] The utility model relates to the technical field of epitaxial equipment, in particular to a mounting fixture. Background Art

[0002] As an important component of the epitaxial equipment, the spray device is installed on the upper part of the reaction chamber to provide gas into the reaction chamber. It can evenly mix the gas and spray the gas into the reaction chamber to ensure gas control during the epitaxial process and the quality of the epitaxial layer. During the daily maintenance of the spray device, the operator works by hand, and it is difficult to ensure the accuracy of the installation position of the spray device. Moreover, the internal structure of the spray device is complex and fragile, which leads to a large workload for the operator when maintaining the spray device. It may also damage the internal structure of the spray device and affect the service life of the spray device. Utility Model Content

[0003] The purpose of the utility model is to provide a mounting fixture, which can quickly, accurately and stably replace or maintain a spray device, so that the installation position of the spray device remains accurate and consistent, and the stability of process recovery is improved.

[0004] In order to achieve the above-mentioned purpose and other related purposes, the utility model is implemented through the following technical solutions.

[0005] The utility model provides a mounting fixture, which at least comprises:

[0006] A lifting unit, comprising a lifting base plate and at least one supporting rod, wherein the supporting rod penetrates the lifting base plate, the lifting base plate reciprocates on the supporting rod, and two ends of the lifting base plate are bent into a preset shape;

[0007] A fixing unit, comprising an upper base, a lower base and a connecting rod which are arranged opposite to each other, wherein the connecting rod is detachably connected to the upper base and the lower base, and a shape of the upper base matches the preset shape; and

[0008] The covering unit comprises a cover plate, the shape of the cover plate matches the preset shape, and the lifting base plate is locked with the upper base or the cover plate.

[0009] In an embodiment of the present invention, the lifting unit includes an upper bottom plate and a lower bottom plate which are arranged opposite to each other, and the lifting bottom plate is arranged between the upper bottom plate and the lower bottom plate.

[0010] In an embodiment of the present invention, there are four support rods, which are arranged in parallel and penetrate the upper base plate, the lifting base plate and the lower base plate.

[0011] In an embodiment of the present invention, the preset shape is a semicircle.

[0012] In one embodiment of the utility model, the lifting base plate includes an inner ring and an outer ring, the inner ring is arranged close to the center of the semicircle, the outer ring is arranged on the side of the inner ring away from the center, and the height of the inner ring is lower than the height of the outer ring.

[0013] In an embodiment of the present invention, the upper base includes a first section, the first section is in the shape of a circular ring, and the thickness of the first section is equal to the difference between the heights of the outer ring and the inner ring.

[0014] In an embodiment of the present invention, the width of the first section is equal to the width of the inner circle.

[0015] In an embodiment of the present invention, the shape of the cover plate is circular, and the thickness of the cover plate is equal to the difference between the height of the outer ring and the height of the inner ring.

[0016] In an embodiment of the present invention, the lifting unit further includes scale lines, and the scale lines are arranged on the outer ring.

[0017] In an embodiment of the present invention, the fixing unit further includes a matching scale line, and the matching scale line is arranged on the first sub-portion.

[0018] In summary, the utility model proposes an installation jig that can quickly, accurately and stably replace or maintain the spray device, so that the installation position of the spray device remains accurate and consistent, the stability of the epitaxial process restart is improved, and the film quality of the epitaxial process is improved. Moreover, the installation jig provided by the utility model replaces manual work with mechanical work, which can reduce the workload of operators, save maintenance or replacement time, improve the utilization rate of the spray device and epitaxial equipment, and avoid damage to the internal structure of the spray device during maintenance.

[0019] Of course, any method of implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 It is a schematic diagram of a lifting unit in one embodiment of the utility model.

[0022] Figure 2 It is a schematic diagram of a fixing unit in one embodiment of the utility model.

[0023] Figure 3 It is a schematic diagram of a covering unit in one embodiment of the utility model.

[0024] Figure 4 Schematic diagram of a reaction chamber in one embodiment of the utility model.

[0025] Figure 5 It is a schematic diagram of a spray device in one embodiment of the utility model.

[0026] Figure 6 Schematic diagram of installing or removing a sprinkler device using an installation fixture.

[0027] Figure 7 To observe from inside the reaction chamber Figure 6 Schematic diagram of .

[0028] Figure 8 for Figure 6 Enlarged view of point A in the middle.

[0029] Fig. 9 for Figure 6 main view.

[0030] Marking Description:

[0031] 100, reaction chamber; 101, chamber; 102, upper cover; 103, gas pipeline; 104, fixing member; 105, protruding member; 1051, top cover; 106, hole; 107, extension member; 200, spray device; 201, spray assembly; 2011, bottom plate; 2012, side plate; 2013, air guide hole; 2014, slot; 202, vent hole; 203, temperature measuring hole; 300, lifting unit; 301, support rod; 3011, first support rod; 3012, second support rod; 3013, third support rod; 3014, fourth support rod; 302, lifting bottom plate; 3021 , outer ring; 3022, inner ring; 303, upper base plate; 304, lower base plate; 305, rotating handle; 306, scale line; 307, fixing block; 308, positioning hole; 400, fixing unit; 401, upper base; 4011, first division; 4012, second division; 402, lower base; 403, connecting rod; 404, upper fixing screw; 405, lower fixing screw; 406, handle; 407, fixing strip; 408, mounting hole; 409, matching scale line; 500, covering unit; 501, cover plate; 502, handle; 503, cover body; 504, shield plate; 600, gap. DETAILED DESCRIPTION

[0032] The following describes the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations. The details in the present invention can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0033] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention, and thus the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.

[0034] In the present invention, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, if the terms "first" and "second" appear, they are only used for description and distinction purposes, and cannot be understood as indicating or implying relative importance.

[0035] As an important component in the epitaxial equipment, the spray device plays the role of uniformly mixing and spraying process gases to ensure gas control and film quality during the epitaxial process. The internal structure of the spray device is very complex and cumbersome, and is composed of multiple components such as air guide holes, spray components, spray bottom plates, and quartz bottom plates. Therefore, when the operator performs daily maintenance on the spray device by hand, it is impossible to ensure that each layer of air inlet holes inside the spray device is consistent with the air guide holes of the cavity during each maintenance. There will be inaccurate positioning of the air guide holes and the spray components, especially when the spray components and the cavity air inlet holes are installed, deviations are most likely to occur, thereby affecting the quality of the process film. In addition, the spray device is basically composed of quartz and graphite materials, which are relatively fragile. When the installation method is inaccurate or misplaced, it will have a great impact on the service life of the internal components of the spray device. Through the installation fixture provided by the utility model, the spray device can be quickly, accurately and stably replaced or maintained, so that the installation position of the spray device remains accurate and consistent, the stability of the epitaxial process re-machine is improved, the film quality of the epitaxial process is improved, and the service life of the spray device is extended.

[0036] See also Figures 1 to 9As shown, the installation fixture provided by the utility model can be widely used in the installation process of various equipment to quickly, accurately and stably replace or maintain the equipment. In this embodiment, for example, the installation fixture is described by taking the installation of the spray device 200 on the reaction chamber 100 as an example.

[0037] See also Figure 4 As shown, in one embodiment of the present invention, the reaction chamber 100 includes, for example, a chamber body 101, an upper cover 102, a gas pipeline 103, a fixing member 104, a protruding member 105, and a hole 106. Among them, one end of the chamber body 101 is open, the upper cover 102 is arranged in the opening direction of the chamber body 101, and the fixing member 104 is, for example, at least one, and the fixing member 104 connects the upper cover 102 and the chamber body 101, and the fixing member 104 is, for example, a fixing screw.

[0038] See also Figure 4 As shown, in one embodiment of the present invention, an opening is provided at the center of the upper cover 102, and the protruding member 105 is provided in the opening of the upper cover 102, and the protruding member 105 is provided to protrude toward a side away from the cavity 101. Moreover, a top cover 1051 is provided on a side of the protruding member 105 away from the upper cover 102, and the top cover 1051 is detachably connected to the protruding member 105.

[0039] See also Figure 4 As shown, in one embodiment of the utility model, an extension piece 107 is provided on the protrusion 105, for example, and the extension piece 107 is, for example, arranged around the outer wall of the protrusion 105. In this embodiment, a plurality of holes 106 are provided on the extension piece 107, for example, and the plurality of holes 106 are, for example, evenly distributed on the extension piece 107. In this embodiment, a gas pipeline 103 is also provided on the outer wall of the protrusion 105, for example, there are a plurality of gas pipelines 103, and the plurality of gas pipelines 103 penetrate the side wall of the protrusion 105, and the gas pipeline 103 is connected to an external gas source. The external gas source enters the protrusion 105 through the gas pipeline 103, diffuses into the cavity 101, and enters the reaction chamber 100.

[0040] See also Figures 4 to 5As shown, in one embodiment of the utility model, the spray device 200 is installed in the protruding member 105, and the spray device 200, for example, includes a spray assembly 201, a vent hole 202, and a temperature measuring hole 203. Among them, the spray assembly 201 is, for example, multiple, and multiple layers of spray assemblies 201 are stacked, and the centers of the multiple spray assemblies 201 are located on the axis of the cavity 100. And the size of the spray assembly 201 increases gradually from the cavity 101 to the upper cover 102. In this embodiment, each layer of the spray assembly 201, for example, includes a bottom plate 2011, a side plate 2012, an air guide hole 2013, and a card slot 2014. Among them, the bottom plate 2011 is, for example, a circular or polygonal shape. In this embodiment, the bottom plate 2011 is, for example, circular, the side plate 2012 is arranged around the bottom plate 2011, the air guide hole 2013 is arranged on the side plate 2012 and passes through the side plate 2012, the card slot 2014 is arranged between the side plate 2012 and the bottom plate 2011, and there is at least one card slot 2014 to connect the side plate 2012 and the bottom plate 2011.

[0041] See also Figures 4 to 5 As shown, in one embodiment of the utility model, a vent hole 202 is provided on each bottom plate 2011, and for example, there are multiple vent holes 202. For example, there is at least one temperature measuring hole 203, and in this embodiment, for example, there are three temperature measuring holes 203, so as to monitor the temperature of the gas flowing in the spray device 200, and the temperature measuring holes 203 sequentially penetrate each bottom plate 2011. In the spray device 200, the gas reaches the spray assembly 201 from the gas guide hole 2013, diffuses into the adjacent spray assembly 201 close to the side of the reaction chamber 100 through the vent hole 202, diffuses through multiple spray assemblies 201 layer by layer, and finally reaches the chamber 101.

[0042] See also Figures 1 to 9As shown, the utility model provides a mounting fixture, for example, including a lifting unit 300, a fixing unit 400 and a covering unit 500. The lifting unit 300 and the fixing unit 400 are locked together, and the fixing unit 400 and the spray device 200 are fixedly connected. When the lifting unit 300 moves toward the side away from the reaction chamber 100, it drives the fixing unit 400 and the spray device 200 to move toward the side away from the reaction chamber 100, so that the spray device 200 is separated from the protruding member 105. Moreover, the covering unit 500 and the lifting unit 300 are locked together, and the lifting unit 300 drives the covering unit 500 to move toward the side close to the reaction chamber 100, so that the covering unit 500 is placed on the protruding member 105. The installation jig provided by the utility model can replace or maintain the spray device 200 quickly, accurately and stably through the lifting unit 300 and the fixing unit 400, and replaces manual work with mechanical work, which can reduce the workload of operators, save maintenance or replacement time, improve the utilization rate of the spray device 200 and the epitaxial equipment, and avoid damaging the internal structure of the spray device 200 during maintenance. Moreover, the installation jig provided by the utility model can prevent external impurities from entering the reaction chamber 100 during the maintenance of the spray device 200 through the covering unit 500 and the lifting unit 300.

[0043] See also Figure 1 As shown, in one embodiment of the utility model, the lifting unit 300 includes, for example, a support rod 301, a lifting base plate 302, an upper base plate 303, and a lower base plate 304. The upper base plate 303 and the lower base plate 304 are arranged relatively to each other, the lifting base plate 302 is arranged between the upper base plate 303 and the lower base plate 304, and the support rod 301 passes through the upper base plate 303, the lifting base plate 302, and the lower base plate 304 in sequence. By setting the lifting unit 300, the spray device 200 is moved by mechanical operation instead of manual operation. The installation fixture provided by the utility model can reduce the workload of the operator, save maintenance or replacement time, improve the utilization rate of the spray device 200 and the epitaxial equipment, and avoid damage to the internal structure of the spray device 200 during maintenance.

[0044] See also Figure 1 As shown, in one embodiment of the utility model, the upper bottom plate 303 and the lower bottom plate 304 are arranged opposite to each other. In this embodiment, the two ends of the upper bottom plate 304 are bent into a semicircle, and the shape of the lower bottom plate 304 is, for example, a ring, so that the lower bottom plate 304 provides support for structures such as the support rod 301, the upper bottom plate 303 and the lifting bottom plate 302.

[0045] See also Figure 1As shown, in one embodiment of the utility model, the lifting base plate 302 is arranged between the upper base plate 303 and the lower base plate 304. The two ends of the lifting base plate 302 are bent into a preset shape. In this embodiment, the two ends of the lifting base plate 302 are symmetrically bent into a semicircular shape. The lifting base plate 302, for example, includes an outer ring 3021 and an inner ring 3022, the inner ring 3022 is arranged close to the center of the semicircle, and the outer ring 3021 is arranged on the side of the inner ring 3022 away from the center of the semicircle. Moreover, the height of the inner ring 3022 is lower than the height of the outer ring 3021, and the difference between the height of the inner ring 3022 and the height of the outer ring 3021 is, for example, 2-5 mm, and for example, 3 mm.

[0046] See also Figure 1 As shown, in one embodiment of the utility model, the support rod 301 sequentially penetrates the upper base plate 303, the lifting base plate 302 and the lower base plate 304, and the lifting base plate 302 reciprocates on the support rod 301. Among them, there is at least one support rod 301, for example. In this embodiment, there are four support rods 301, for example, the support rods 301 include a first support rod 3011, a second support rod 3012, a third support rod 3013 and a fourth support rod 3014, etc., and the four support rods 301 are arranged in parallel. Among them, the fourth support rod 3014 is, for example, a threaded screw.

[0047] See also Figure 1 As shown, in one embodiment of the utility model, the lifting unit 300 further includes a rotating handle 305, which is disposed on the fourth support rod 3014, and the rotating handle 305 is located on a side of the upper base plate 303 away from the lifting base plate 302. In this embodiment, by operating the rotating handle 305, the lifting base plate 302 is controlled to reciprocate on the support rod 301.

[0048] See also Figure 1 As shown, in one embodiment of the present invention, the lifting unit 300 further includes a scale line 306, which is arranged on a side of the outer ring 3021 close to the inner ring 3022. There is, for example, at least one scale line 306. In this embodiment, there are, for example, three scale lines 306, which are symmetrically distributed on the outer ring 3021.

[0049] See also Figure 1As shown, in one embodiment of the utility model, the lifting unit 300 further includes a fixing block 307, which is disposed between the fourth support rod 3014 and the rotating handle 305, and the fixing block 307 is located on a side of the upper base plate 303 away from the lifting base plate 302, so as to fix the upper base plate 303 and the fourth support rod 3014. In this embodiment, the first support rod 3011, the second support rod 3012 and the third support rod 3013 are respectively fixedly connected to the upper base plate 303 or the lower base plate 304, for example, by a connection structure such as a screw or a buckle.

[0050] See also Figure 1 As shown, in one embodiment of the utility model, the lifting unit 300 also includes a positioning hole 308, and the positioning hole 308 is arranged on the lower base plate 304. Among them, there is at least one positioning hole 308, for example. In this embodiment, there are four positioning holes 308, for example, and two positioning holes 308 are symmetrically arranged on both sides of the center of the lower base plate 304, and the size of the positioning holes 308 is equal to the size of the hole 106. By setting the positioning holes 308, it is possible to align with the hole 106 to form a corresponding hole, and insert a connecting structure into the corresponding hole to fix the lifting unit 300 and the reaction chamber 100 together to ensure the stability of the lifting unit 300. Among them, the connecting structure includes at least one of a pin structure and a screw structure, for example.

[0051] See also Figure 2 As shown, in an embodiment of the utility model, the fixing unit 400 includes, for example, an upper base 401, a lower base 402, and a connecting rod 403. The upper base 401 and the lower base 402 are arranged opposite to each other, and the shape of the upper base 401 matches the preset shape of the lifting base plate 302. In this embodiment, the upper base 401 includes, for example, a first sub-section 4011 and a second sub-section 4012, the cross section of the first sub-section 4011 is, for example, an annular shape, and the second sub-section 4012 extends from the inner ring of the first sub-section 4011 to one side of the first sub-section 4011. The thickness of the first sub-section 4011 is, for example, equal to the height difference between the outer ring 3021 and the inner ring 3022, the width of the first sub-section 4011 is, for example, equal to the width of the inner ring 3022, and the height of the second sub-section 4012 is, for example, 20-40 mm, and for example, 30 mm. By providing the upper base 401 , the outer ring of the first section 4011 can be stably placed on the inner ring 3022 , so that the upper base 401 and the lifting base plate 302 can be clamped and fixed.

[0052] See also Figure 2 As shown, in one embodiment of the present invention, the lower base 402 is arranged opposite to the upper base 401. In this embodiment, the lower base 402 is, for example, in the shape of a cylinder with one end open, and the interior of the lower base 402 is hollow.

[0053] See also Figure 2 As shown, in one embodiment of the utility model, a connecting rod 403 is disposed between the lower base 402 and the upper base 401, and the lower base 402 and the upper base 401 are detachably connected. There is, for example, at least one connecting rod 403, and the length of the connecting rod 403 is, for example, greater than the length of the spray device 200. In this embodiment, there are, for example, two connecting rods 403, so as to more stably connect the lower base 402 and the upper base 401.

[0054] See also Figures 2 to 9 As shown, in one embodiment of the utility model, the fixing unit 400 further includes a fixing bar 407, and the fixing bar 407 is, for example, multiple, and each is arranged in the second subsection 4012 and the lower base 402. Among them, each fixing bar 407 is, for example, provided with a mounting hole 408, and each fixing bar 407 has, for example, at least one mounting hole 408. In this embodiment, each fixing bar 407 has, for example, two mounting holes 408, and in the direction perpendicular to the axis of the upper base 401, the cross-sectional size of the connecting rod 403, the size of the mounting hole 408, and the size of the temperature measuring hole 203 are, for example, equal. During the operation of the fixing unit 400, the upper base 401 is attached to the side of the spray device 200 away from the upper cover 102, and the lower base 402 is attached to the side of the spray device 200 close to the upper cover 102. The connecting rod 403 is inserted into the mounting hole 408 on the upper base 401, the temperature measuring hole 203 and the mounting hole 408 on the lower base 402 in sequence to connect the fixing unit 400 and the spray device 200 together.

[0055] See also Figures 2 to 9 As shown, in one embodiment of the utility model, the fixing unit 400 further includes an upper fixing screw 404, which is disposed on a side of the upper base 401 away from the lower base 402 to connect the upper base 401 and the connecting rod 403. Moreover, the fixing unit 400 further includes a lower fixing screw 405, which is disposed on a side of the lower base 402 away from the upper base 401 to connect the lower base 402 and the connecting rod 403. By providing the upper fixing screw 404 and the lower fixing screw 405, the upper base 401, the connecting rod 403, the spray device 200 and the lower base 402 can be connected together, so as to achieve the purpose of fixing the fixing unit 400 and the spray device 200 together.

[0056] See also Figure 1 , Figure 2 and Figure 8As shown, in one embodiment of the utility model, the fixing unit 400 further includes matching scale lines 409, which are arranged on the side of the first subsection 4011 away from the second subsection 4012. The relative position and number of the matching scale lines 409 on the first subsection 4011 are, for example, the same as the relative position and number of the scale lines 306 on the outer ring 3021. During the reinstallation of the spray device 200, by aligning the scale lines 306 and the matching scale lines 409, it is possible to ensure that the position of the fixing unit 400 on the lifting base plate 302 is always maintained at the preset position, thereby enabling the installation position of the spray device 200 fixed by the fixing unit 400 on the reaction chamber 100 to remain consistent, thereby improving the stability of the epitaxial process reinstallation and improving the film forming quality of the epitaxial process. Moreover, during the reinstallation of the spray device 200, the gap 600 between the upper base 401 and the lifting base plate 302 remains uniform and consistent. The deviation of the gap 600 at different positions between the upper base 401 and the lifting base plate 302 is, for example, 3-3.5 mm. If the deviation is too large, the gas guide holes 2013 and the gas pipeline 103 cannot be aligned when the spray device 200 is reinstalled, causing the gas flow rate and flow direction inside the spray device 200 to be disordered, affecting the use of the epitaxial equipment and the quality of the epitaxial layer.

[0057] See also Figure 2 As shown, in one embodiment of the utility model, the fixing unit 400 further includes a handle 406, which is disposed on a side of the second sub-portion 4012 close to the first sub-portion 4011. There is, for example, at least one handle 406. In this embodiment, there are, for example, two handles 406, which are, for example, symmetrically disposed on both sides of the fixing bar 407 to provide a force point for the operator to move the upper base 401, making it convenient for the operator to move the upper base 401.

[0058] See also Figure 1 and Figure 3 As shown, in one embodiment of the utility model, the covering unit 500 includes a cover plate 501, a cover body 503, a cover plate 504, etc. The material of the covering unit 500 includes, for example, Teflon or stainless steel. Among them, the shape of the cover plate 501 matches the preset shape of the lifting bottom plate 302. In this embodiment, in the direction perpendicular to the axis of the covering unit 500, the cross section of the cover plate 501 is, for example, circular, and the thickness of the cover plate 501 is, for example, equal to the height difference between the outer ring 3021 and the inner ring 3022. By setting the shape of the cover plate 501 to match the preset shape of the lifting bottom plate 302, the cover plate 501 and the lifting bottom plate 302 can be locked, so that the lifting bottom plate 302 can drive the covering unit 500 to move back and forth.

[0059] See also Figures 3 to 5As shown, in one embodiment of the utility model, the shield 504 is arranged on one side of the cover plate 501, and the size of the shield 504 is larger than the size of the cover plate 501. Moreover, in the axial direction perpendicular to the cavity 101, the size of the shield 504 is greater than or equal to the cross-sectional size of the cavity 101, so as to be able to completely shield the cavity 101. In this embodiment, the top cover 1051 and the fixing member 104 must be removed to separate the upper cover 102 and the cavity 101 before the spray device 200 can be installed or removed. Therefore, the cavity 101 will inevitably be exposed to the air. By setting the shield 504 to temporarily replace the upper cover 102, the interior of the reaction chamber 100 is prevented from being exposed to the air, and the particles and water vapor in the air can be prevented from entering the reaction chamber 100 after the spray device 200 is removed. Affecting the process recovery result.

[0060] See also Figures 3 to 5 As shown, in one embodiment of the present invention, the cover body 503 is disposed between the shield plate 504 and the cover plate 501, connecting the shield plate 504 and the cover plate 501. The cover body 503 is, for example, a cylinder or a polyhedron or other shapes.

[0061] See also Figure 3 As shown, in one embodiment of the utility model, the covering unit 500 further includes a handle 502, which is disposed on a side of the cover plate 501 away from the cover body 503. There is, for example, at least one handle 502. In this embodiment, there are, for example, two handles 502, which are, for example, symmetrically disposed on both sides of the center of the cover plate 501 to provide a force point for the operator to move the covering unit 500, making it convenient for the operator to move the covering unit 500.

[0062] In order to further illustrate the installation jig provided by the present invention, the process of using the installation jig to maintain the spray device 200 is specifically described below.

[0063] See also Figures 1 to 9 As shown, in one embodiment of the utility model, the positioning hole 308 and the hole 106 are aligned, and the connecting mechanism is inserted into the aligned positioning hole 308 and the hole 106 to fix the lifting unit 300, the protruding member 105 and the upper cover 102. The rotating handle 305 is turned to make the lifting base plate 302 rise to the limit position away from the lower base plate 304. The connecting rod 403 is inserted into the mounting hole 408 in the upper base 401, and the upper base 401 and the connecting rod 403 are fixed with the upper fixing screw 404, and then the fixed upper base 401 and the connecting rod 403 are placed on the lifting base plate 302, so that the outer ring of the first division 4011 can be stably placed on the inner ring 3022, and the upper base 401 and the lifting base plate 302 are clamped and fixed. At the same time, the connecting rod 403 is inserted into the temperature measuring hole 203, and the scale line 306 and the matching scale line 409 are matched and aligned with each other.

[0064] See also Figures 1 to 9 As shown, in one embodiment of the present invention, the top cover 1051 and the fixing member 104 are removed to separate the cavity 101 and the upper cover 102, and the spray device 200 is exposed. The rotating handle 305 is turned to make the lifting bottom plate 302 drive the upper base 401 and the connecting rod 403 to descend to the lowest point, and the upper base 401 is attached to one side of the spray device 200. The lower base 402 is moved to make the lower base 402 attached to the other side of the spray device 200. At the same time, the lower base 402 and the connecting rod 403 are fixed by the lower fixing screw 405 to fix the spray device 200 and the fixing unit 400 together.

[0065] See also Figures 1 to 9 As shown, in one embodiment of the utility model, the rotary handle 305 is rotated to make the lifting bottom plate 302 drive the fixing unit 400 and the spray device 200 to move upward until the lifting bottom plate 302 reaches the limit position away from the lower bottom plate 304. The fixing unit 400 and the spray device 200 are taken out, the upper fixing screws 404 are removed, the upper base 401 is removed, and the spray device 200 is taken out for maintenance. At the same time, the cover unit 500 is placed on the lifting bottom plate 302, so that the cover plate 501 and the lifting bottom plate 302 are locked, and the rotary handle 305 is rotated to make the lifting bottom plate 302 drive the cover unit 500 to descend until the cover plate 504 can be placed on the cavity 101.

[0066] See also Figures 1 to 9 As shown, in one embodiment of the utility model, after the maintenance work of the spray device 200 is completed, the rotating handle 305 is turned to make the lifting base plate 302 drive the covering unit 500 to rise until the lifting base plate 302 reaches the extreme position away from the lower base plate 304, and the covering unit 500 is taken out to reinstall the spray device 200.

[0067] See also Figures 1 to 9As shown, in one embodiment of the present utility model, when the spray device 200 is reinstalled, the fixed unit 400 and the spray device 200 are further fixedly connected through the upper base 401, the lower base 402, the connecting rod 403, the upper fixing screw 404 and the lower fixing screw 405, and then, the upper base 401 and the lifting bottom plate 302 are locked, so that the lifting bottom plate 302 drives the fixed unit 400 and the spray device 200 to descend to the lowest point. At the same time, the scale line 306 and the matching scale line 409 are matched and aligned with each other to ensure that the relative position of the fixed unit 400 on the lifting bottom plate 302 remains unchanged. Next, the upper base 401, the lower base 402, the connecting rod 403, the upper fixing screw 404 and the lower fixing screw 405 are removed, and the spray device 200 is reinstalled inside the protruding member 105. The top cover 1051 and the fixing member 104 are installed to restore the reaction chamber 100 to its original state. Next, the connection structure in the hole 106 and the positioning hole 308 is removed, the fixed connection between the lifting unit 300 and the protruding member 105 is disconnected, and the lifting unit 300 is removed.

[0068] In summary, the utility model proposes an installation jig, which is fixedly connected by a fixing unit and a spray device, and a lifting unit drives the fixing unit and the spray device to leave the cavity of the reaction chamber, so that the spray device can be replaced or maintained quickly, accurately and stably. Moreover, by matching and aligning the matching scale lines on the fixing unit and the scale lines on the lifting unit, the installation jig provided by the utility model can maintain the accuracy and consistency of the installation position of the spray device, improve the stability of the epitaxial process restart, and improve the film forming quality of the epitaxial process. At the same time, the installation jig provided by the utility model replaces manual work with mechanical work, which can reduce the workload of operators, save maintenance or replacement time, improve the utilization rate of the spray device and epitaxial equipment, and avoid damage to the internal structure of the spray device during maintenance.

[0069] References throughout the specification to "one embodiment," "an embodiment," or "a specific embodiment" mean that the particular features, structures, or characteristics described in conjunction with the embodiment are included in at least one embodiment of the utility model, and not necessarily in all embodiments. Thus, various appearances of the phrases "in one embodiment," "in an embodiment," or "in a specific embodiment" in different places throughout the specification do not necessarily refer to the same embodiment. In addition, the particular features, structures, or characteristics of any specific embodiment of the utility model may be combined with one or more other embodiments in any suitable manner. It should be understood that other variations and modifications of the utility model embodiments described and illustrated herein may be based on the teachings herein and will be considered part of the spirit and scope of the utility model.

[0070] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the utility model involved in the present application is not limited to the technical solution formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the concept of the utility model, such as the technical solution formed by replacing the above-mentioned features with the technical features with similar functions disclosed in this application (but not limited to). In addition to the technical features described in the specification, the remaining technical features are known technologies to those skilled in the art. In order to highlight the innovative features of the present utility model, the remaining technical features will not be repeated here.

Claims

1. A mounting fixture, characterized in that: At least: A lifting unit, comprising a lifting base plate and at least one supporting rod, wherein the supporting rod penetrates the lifting base plate, the lifting base plate reciprocates on the supporting rod, and two ends of the lifting base plate are bent into a preset shape; A fixing unit, comprising an upper base, a lower base and a connecting rod which are arranged opposite to each other, wherein the connecting rod is detachably connected to the upper base and the lower base, and the shape of the upper base matches the preset shape; as well as The covering unit comprises a cover plate, the shape of the cover plate matches the preset shape, and the lifting base plate is locked with the upper base or the cover plate.

2. The installation jig according to claim 1, characterized in that: The lifting unit includes an upper bottom plate and a lower bottom plate which are arranged opposite to each other, and the lifting bottom plate is arranged between the upper bottom plate and the lower bottom plate.

3. The installation jig according to claim 2, characterized in that: There are four support rods, which are arranged in parallel and penetrate the upper base plate, the lifting base plate and the lower base plate.

4. The installation jig according to claim 1, characterized in that: The preset shape is a semicircle.

5. The installation jig according to claim 4, characterized in that: The lifting base plate includes an inner ring and an outer ring, wherein the inner ring is arranged close to the center of the semicircle, and the outer ring is arranged on a side of the inner ring away from the center, and the height of the inner ring is lower than that of the outer ring.

6. The installation jig according to claim 5, characterized in that: The upper base includes a first section, the first section is in the shape of a circular ring, and the thickness of the first section is equal to the difference between the height of the outer ring and the height of the inner ring.

7. The installation jig according to claim 6, characterized in that: The width of the first section is equal to the width of the inner circle.

8. The installation jig according to claim 5, characterized in that: The cover plate is circular in shape, and the thickness of the cover plate is equal to the height difference between the outer ring and the inner ring.

9. The installation jig according to claim 5, characterized in that: The lifting unit further comprises scale lines, and the scale lines are arranged on the outer ring.

10. The installation jig according to claim 6, characterized in that: The fixing unit further includes a matching scale line, and the matching scale line is arranged on the first section.

Images