Circulating liquid supply system

Abstract

The utility model belongs to the technical field of silicon wafer cleaning, and particularly relates to a circulating liquid supply system which comprises a plurality of sets of cleaning tanks, each set of cleaning tanks comprises a plurality of cleaning tanks which are arranged in a stacked mode, cleaning liquid outlets are formed in the side walls of the cleaning tanks, and cleaning liquid inlets are formed in the bottoms of the cleaning tanks. The plurality of reflux tanks are respectively arranged below each group of cleaning tanks, a first reflux inlet is formed in the side wall of each reflux tank, a second reflux inlet is formed in the top of each reflux tank, the first reflux inlets are connected with first reflux pipelines, and the first reflux pipelines are respectively communicated with the cleaning liquid outlets of the group; the second reflux inlet is connected with a second reflux pipeline, and the second reflux pipeline is communicated with the cleaning liquid inlets of the group; a backflow tank is arranged below each group of stacked cleaning tanks, so that one backflow tank can be supplied to a plurality of cleaning tanks.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon chip cleaning, and in particular relates to a circulating liquid supply system. Background Art

[0002] As the global demand for renewable energy continues to increase, the solar photovoltaic industry has developed rapidly. In existing technologies, silicon wafers need to go through processes such as cleaning, diffusion, and coating before they can become solar cells;

[0003] In the existing technology, multiple cleaning tanks are arranged in the cleaning equipment. In order to ensure the stability of the medium concentration in the cleaning tank, a reflux tank needs to be welded at the bottom of the cleaning tank. The medium with a higher concentration is pumped into the cleaning tank through the reflux tank. The cleaning tank efficiency is low. However, when multiple cleaning tanks and reflux tanks are combined, the volume of the overall liquid supply system is large.

[0004] Therefore, it is necessary to provide a circulating liquid supply system that allows multiple cleaning tanks to share a reflux tank and can ensure the transportation efficiency of the medium. Utility Model Content

[0005] The utility model aims to provide a circulating liquid supply system in which a plurality of cleaning tanks share a reflux tank and can ensure the conveying efficiency of the medium.

[0006] In order to solve the above technical problems, the utility model provides a circulating liquid supply system, comprising: a plurality of groups of cleaning tanks, each group of the cleaning tanks comprising a plurality of cleaning tanks, and each group of the cleaning tanks are stacked, the side walls of the cleaning tanks are provided with a cleaning liquid outlet, and the bottoms of the cleaning tanks are provided with a cleaning liquid inlet; a plurality of reflux tanks, the reflux tanks are respectively placed under each group of the cleaning tanks, the side walls of the reflux tanks are provided with a first reflux port, the tops of the reflux tanks are provided with a second reflux port, and the first reflux port is connected to a first reflux pipeline, and the first reflux pipeline is respectively connected to the cleaning liquid outlet of the group; the second reflux port is connected to a second reflux pipeline, and the second reflux pipeline is respectively connected to the cleaning liquid inlet of the group.

[0007] Preferably, the first reflux pipeline is vertically arranged, and a plurality of branch pipe bodies are arranged on the first reflux pipe, and the branch pipe bodies on the first reflux pipeline are respectively connected to the cleaning liquid outlet and the first reflux port of the group.

[0008] Preferably, the second reflux pipeline is vertically arranged, and a plurality of branch pipe bodies are arranged on the second reflux pipeline, and the branch pipe bodies on the second reflux pipeline are respectively connected to the cleaning liquid inlet and the second reflux port of the group.

[0009] Preferably, a pump body is provided on the second return pipeline, and the body is provided at the front end of the connection of the lowest branch pipe body.

[0010] Preferably, a reflux liquid inlet is provided on the side wall of the reflux groove, and a reflux liquid outlet is provided on the bottom of the reflux groove.

[0011] Preferably, a pair of baffles are provided in the cleaning tank, the height of the baffles is lower than the height of the cleaning tank, the bottom wall of the area outside the baffles is provided with a mesh plate, and the bottom of the cleaning tank is integrally provided with a convergence partition, and the mesh plate is arranged in the convergence partition, and the cleaning liquid outlet is connected to the convergence partition.

[0012] Preferably, a through cleaning gap is provided on the side wall of the cleaning tank.

[0013] The beneficial effects of the utility model are:

[0014] 1. Several cleaning tanks are stacked into a group, and multiple groups of cleaning tanks are integrated in the equipment to improve the cleaning efficiency;

[0015] 2. By arranging a reflux tank under each set of stacked cleaning tanks, one reflux tank can supply multiple cleaning tanks, saving space;

[0016] 3. The first reflux port is connected to the cleaning liquid outlet to complete the reflux of the medium in the cleaning tank, and the second reflux port is connected to the cleaning liquid inlet to complete the replenishment of the medium in the cleaning tank.

[0017] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0018] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a front view of a preferred embodiment of the circulating liquid supply system of the utility model;

[0021] Figure 2It is a three-dimensional diagram of a preferred embodiment of the cleaning tank of the utility model;

[0022] Figure 3 It is a side view of a preferred embodiment of the cleaning tank of the utility model;

[0023] Figure 4 It is a top view of a preferred embodiment of the cleaning tank of the utility model;

[0024] Figure 5 It is a front view of a preferred embodiment of the reflow trough of the utility model.

[0025] In the figure:

[0026] 100, cleaning tank; 101, cleaning liquid outlet; 102, cleaning liquid inlet; 103, baffle plate; 104, mesh plate; 105, convergence layer; 106, cleaning gap;

[0027] 200, reflux groove; 201, first reflux port; 202, second reflux port; 203, first reflux pipeline; 204, second reflux pipeline; 205, branch pipe body; 206, pump body; 207, reflux liquid inlet; 208, reflux liquid outlet. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] Embodiment 1, as Figure 1-5As shown, a circulating liquid supply system of this embodiment includes: a plurality of groups of cleaning tanks 100, each group of the cleaning tanks 100 includes a plurality of cleaning tanks 100, and each group of the cleaning tanks 100 is stacked, the side walls of the cleaning tanks 100 are provided with a cleaning liquid outlet 101, and the bottom of the cleaning tank 100 is provided with a cleaning liquid inlet 102; a plurality of reflux tanks 200, the reflux tanks 200 are respectively placed under each group of the cleaning tanks 100, the side walls of the reflux tanks 200 are provided with a first reflux port 201, the top of the reflux tank 200 is provided with a second reflux port 202, and the first reflux port 201 is connected to a first reflux pipeline 203, and the first reflux pipeline 203 is respectively connected to the first reflux port 201 of the group. The cleaning liquid outlet 101 is connected; the second reflux port 202 is connected to a second reflux pipeline 204, and the second reflux pipeline 204 is respectively connected to the cleaning liquid inlet 102 of the group; in short, the dry cleaning tanks 100 are stacked into a group, and multiple groups of cleaning tanks 100 are integrated in the equipment, which can improve the cleaning efficiency; further, by arranging a reflux tank 200 under each group of stacked cleaning tanks 100, one reflux tank 200 can supply multiple cleaning tanks 100, saving space; further, the first reflux port 201 is connected to the cleaning liquid outlet 101 to complete the reflux of the medium in the cleaning tank 100, and the second reflux port 202 is connected to the cleaning liquid inlet to complete the replenishment of the medium in the cleaning tank 100.

[0030] The first reflux pipeline 203 is vertically arranged, and a plurality of branch pipe bodies 205 are arranged on the first reflux pipe, and the branch pipe bodies 205 on the first reflux pipeline 203 are respectively connected to the cleaning outlet 101 and the first reflux port 201 of the group; in short, the first reflux pipeline 203 is installed on the inner wall of the equipment, and the branch pipe body 205 is connected by a tee or a right-angle two-way to complete the connection with the cleaning outlet 101 and the first reflux port 201.

[0031] The second reflux pipeline 204 is vertically arranged, and a plurality of branch pipe bodies 205 are arranged on the second reflux pipeline 204. The branch pipe bodies 205 on the second reflux pipeline 204 are respectively connected to the cleaning liquid inlet 102 and the second reflux port 202 of the group; in short, a vertical bracket is arranged in the equipment, and the second reflux pipeline 204 is arranged on the bracket. The branch pipe bodies 205 are also connected through a tee and a right-angle two-way to complete the connection between the cleaning liquid inlet 102 and the first reflux port 201. The structure is simple and reliable.

[0032] A pump body 206 is provided on the second reflux pipeline 204 , and the body is provided at the front end of the connection of the lowest branch pipe body 205 ; in short, through the provision of the pump body 206 , the medium in the reflux tank 200 can be pumped into the cleaning tank 100 .

[0033] The side wall of the reflux groove 200 is provided with a reflux liquid inlet 207, and the bottom of the reflux groove 200 is provided with a reflux liquid outlet 208; in short, the reflux groove 200 can be replenished with liquid through the reflux liquid inlet 207, and the reflux liquid outlet 208 can be used to discharge waste liquid from the reflux groove 200.

[0034] A pair of baffles 103 are provided in the cleaning tank 100, and the height of the baffles 103 is lower than the height of the cleaning tank 100. A mesh plate 104 is provided on the bottom wall of the area outside the baffles 103, and a convergence partition 105 is integrally provided at the bottom of the cleaning tank 100, and the mesh plate 104 is provided in the convergence partition 105, and the cleaning liquid outlet 101 is connected to the convergence partition 105. In short, through the provision of the baffles 103, excess medium in the cleaning tank 100 can overflow to the outside of the baffles 103, and flow to the convergence partition 105, thereby flowing to the reflux tank 200.

[0035] The side wall of the cleaning tank 100 is provided with a penetrating cleaning gap 106 ; in short, by providing the cleaning gap 106 , materials can be fed into and discharged from the cleaning tank 100 .

[0036] All devices (parts without specific structure) selected in this application are universal standard parts or parts known to those skilled in the art, and their structures and principles can be known by those skilled in the art through technical manuals or conventional experimental methods. In addition, the software programs involved in this application are all prior art, and this application does not involve any improvement to the software programs.

[0037] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0039] In addition, each functional unit in each embodiment of the present utility model may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0040] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A circulating liquid supply system, characterized in that: include: A plurality of groups of cleaning tanks, each group of cleaning tanks comprising a plurality of cleaning tanks, and each group of cleaning tanks are stacked, the side walls of the cleaning tanks are provided with cleaning liquid outlets, and the bottoms of the cleaning tanks are provided with cleaning liquid inlets; A plurality of reflux grooves, each of which is placed below each group of the cleaning grooves, a first reflux port is disposed on the side wall of the reflux groove, a second reflux port is disposed on the top of the reflux groove, and The first reflux port is connected to a first reflux pipeline, and the first reflux pipeline is respectively connected to the cleaning liquid outlet of the group; The second reflux port is connected to a second reflux pipeline, and the second reflux pipeline is respectively communicated with the cleaning liquid inlet of the group.

2. The circulating liquid supply system according to claim 1, characterized in that: The first reflux pipeline is vertically arranged, and a plurality of branch pipe bodies are arranged on the first reflux pipe. The branch pipe bodies on the first reflux pipeline are respectively connected to the cleaning liquid outlet and the first reflux port of the group.

3. The circulating liquid supply system according to claim 2, characterized in that: The second reflux pipeline is vertically arranged, and a plurality of branch pipe bodies are arranged on the second reflux pipeline. The branch pipe bodies on the second reflux pipeline are respectively connected to the cleaning liquid inlet and the second reflux port of the group.

4. The circulating liquid supply system according to claim 3, characterized in that: A pump body is arranged on the second return pipeline, and the main body is arranged at the front end of the connection of the lowermost branch pipe main body.

5. The circulating liquid supply system according to claim 4, characterized in that: The side wall of the reflux groove is provided with a reflux liquid inlet, and the bottom of the reflux groove is provided with a reflux liquid outlet.

6. The circulating liquid supply system according to claim 5, characterized in that: A pair of baffles are provided in the cleaning tank, the height of the baffles is lower than the height of the cleaning tank, and a mesh plate is provided on the bottom wall of the area outside the baffles, and The bottom of the cleaning tank is integrally provided with a convergence partition, and the mesh plate is arranged in the convergence partition, and the cleaning liquid outlet is communicated with the convergence partition.

7. The circulating liquid supply system according to claim 6, characterized in that: The side wall of the cleaning tank is provided with a penetrating cleaning notch.

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