Polishing device

Abstract

The utility model discloses a polishing device which comprises a jig assembly used for containing a substrate slice, a driving assembly and a polishing assembly, the polishing assembly is arranged above the jig assembly and comprises a polishing wheel and a plurality of polishing pads, a plurality of grooves arranged in a winding mode are formed in the side face of the periphery of the polishing wheel, and the polishing pads are arranged in the grooves. The grooves penetrate through the two ends of the polishing wheel, the multiple grooves are formed around the axis of the polishing wheel at intervals, the adjacent grooves are separated through bosses, the polishing pads are arranged on the corresponding bosses, and the driving assembly is connected with the polishing wheel so as to drive the polishing pads to polish the substrate slices. According to the utility model, the plurality of grooves are arranged in a winding manner, so that the polishing liquid is more uniformly dispersed and guided to the surface of the substrate slice.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, in particular to a polishing device. Background Art

[0002] In the current field of microelectronics technology and precision manufacturing, high-precision surface treatment technology is essential to ensure the performance of semiconductor devices, optical components and various high-precision parts. Polishing is an indispensable processing step in these fields, and its quality is directly related to the performance and yield of the final product. Existing polishing devices often find it difficult to achieve uniform coating of polishing liquid on the substrate surface, especially on large-area substrates. Excessive or insufficient local polishing liquid will lead to uneven polishing rate, which in turn affects the precise control of the polishing endpoint and the flatness of the entire surface. Utility Model Content

[0003] The technical problem to be solved by the utility model is that it is often difficult for the existing polishing device to achieve uniform coating of the polishing liquid on the surface of the substrate.

[0004] In order to solve the above technical problems, the utility model provides a polishing device, including a jig assembly for placing a substrate sheet, a driving assembly and a polishing assembly, wherein the polishing assembly is arranged above the jig assembly, and the polishing assembly includes a polishing wheel and a plurality of polishing pads, and the outer peripheral side of the polishing wheel is provided with a plurality of winding grooves, wherein the grooves are arranged through both ends of the polishing wheel, and the plurality of grooves are arranged at intervals around the axis of the polishing wheel, and adjacent grooves are separated by bosses, and the polishing pad is arranged on the corresponding bosses, and the driving assembly is connected to the polishing wheel to drive the polishing pad to polish the substrate sheet.

[0005] In some embodiments, the groove includes a first groove wall and a second groove wall that are oppositely disposed, the first groove wall and the second groove wall jointly define a groove opening, and the width of the groove opening gradually increases upward from the groove bottom wall of the groove.

[0006] In some embodiments, an extension line of the first groove wall and an extension line of the second groove wall form a first angle, and the angle of the first angle is 12°-16°.

[0007] In some embodiments, it also includes a mounting frame, a pressing assembly and a limiting rod, one end of the pressing assembly is connected to the mounting frame and suspended above the driving assembly, the other end of the pressing assembly is used to abut against the driving assembly to control the pressure of the polishing pad abutting against the substrate sheet, one end of the limiting rod is rotatably connected to the mounting frame, and the other end of the limiting rod moves back and forth between a first position and a second position to control the lifting or lowering of the polishing assembly.

[0008] In some embodiments, the limiting rod includes a rotating portion and a limiting portion, the rotating portion is connected to the mounting frame, the rotating portion is connected to the limiting portion, and an angle is formed between the two;

[0009] When the limiting portion is located at the first position, the limiting portion is clamped under the driving assembly to lift the polishing assembly.

[0010] In some embodiments, the driving assembly includes a support seat, a rotating rod, a first swing rod, a second swing rod and a driving structure, the rotating rod passes through the support seat, and two ends of the rotating rod are respectively connected to one end of the first swing rod and one end of the second swing rod, the other end of the first swing rod and the other end of the second swing rod are respectively connected to two ends of the polishing wheel, and the driving structure is installed on the first swing rod and connected to the polishing wheel;

[0011] When the limiting portion is at the first position, the limiting portion is clamped under the first swing rod to lift the first swing rod; when the limiting portion is at the second position, the limiting rod is disconnected from the first swing rod, and the first swing rod moves down to contact the substrate sheet.

[0012] In some embodiments, the driving structure includes a first driving member, a driving wheel, a driven wheel and a transmission belt. The first driving member is installed on the first rocker arm, and the output shaft of the first driving member is connected to the driving wheel. The driven wheel is installed at one end of the polishing wheel, and the driving wheel and the driven wheel are synchronously linked through a belt.

[0013] In some embodiments, the pressing assembly includes a second driving member, a connecting rod and a pressing head for abutting the driving assembly, the second driving member is mounted on the mounting frame, the output end of the second driving member is connected to the connecting rod, and the connecting rod is connected to the pressing head.

[0014] In some embodiments, the pressing assembly further includes a pressure sensor for detecting the pressing pressure of the pressing head, and the pressure sensor is disposed between the pressing head and the connecting rod.

[0015] In some embodiments, the jig assembly includes a jig, a third driving member, a base, a vacuum suction member and a fourth driving member. The third driving member is mounted on the base, and the output shaft of the third driving member is connected to the jig. The jig has a suction port. The vacuum suction member is arranged in the jig and is connected to the suction port. The side of the base facing away from the third driving member is connected to the fourth driving member so that the base can be controlled to slide back and forth along the first direction through the fourth driving member.

[0016] Compared with the prior art, the polishing device of the utility model has the following beneficial effects:

[0017] The embodiment of the utility model forms a vortex effect during rotation through multiple winding grooves, which promotes the uniform spraying of the polishing liquid along the circumference of the polishing wheel, helps the polishing liquid to be more evenly dispersed and directed to the surface of the substrate, and reduces the phenomenon of local accumulation or lack of polishing liquid. In addition, by installing the polishing pad on the boss, it is ensured that the polishing pad can stably contact the surface of the substrate to perform effective polishing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a polishing device provided by an embodiment of the utility model;

[0019] Figure 2 It is a structural schematic diagram of a polishing assembly, a driving assembly and a pressing assembly provided by an embodiment of the utility model;

[0020] Figure 3 It is a structural schematic diagram of a polishing assembly and a driving assembly provided in an embodiment of the utility model;

[0021] Figure 4 It is a structural schematic diagram of a pressing assembly provided by an embodiment of the utility model;

[0022] Figure 5 It is a structural schematic diagram of a limit rod provided in an embodiment of the utility model;

[0023] Figure 6 It is a structural schematic diagram of a fixture assembly provided by an embodiment of the utility model;

[0024] Figure 7 It is a structural schematic diagram of a polishing assembly provided in an embodiment of the utility model;

[0025] Figure 8 It is a side view of the polishing assembly provided by the embodiment of the utility model;

[0026] In the figure, 1, substrate sheet; 2, fixture assembly; 21, fixture; 22, third driving member; 23, base; 24, fourth driving member; 3, driving assembly; 31, support seat; 32, rotating rod; 33, first swing rod; 34, second swing rod; 35, driving structure; 351, first driving member; 352, driving wheel; 353, driven wheel; 354, transmission belt; 4, polishing assembly; 41, polishing wheel; 411, groove; 4111, first groove wall; 4112, second groove wall; 4113, notch; 412, boss; 42, polishing pad; 5, mounting frame; 6, pressing assembly; 61, second driving member; 62, connecting rod; 63, pressure head; 64, pressure sensor; 7, limiting rod; 71, rotating part; 72, limiting part; R1, first angle. DETAILED DESCRIPTION

[0027] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0028] like Figure 1 , Figure 3 and Figure 7 As shown, the utility model provides a polishing device, including a jig assembly 2 for placing a substrate sheet 1, a driving assembly 3 and a polishing assembly 4, the polishing assembly 4 is arranged above the jig assembly 2, the polishing assembly 4 includes a polishing wheel 41 and a plurality of polishing pads 42, the outer peripheral side of the polishing wheel 41 is provided with a plurality of winding grooves 411, the grooves 411 are arranged through both ends of the polishing wheel 41, and the plurality of grooves 411 are arranged at intervals around the axis of the polishing wheel 41, and adjacent grooves 411 are separated by bosses 412, the polishing pads 42 are arranged on the corresponding bosses 412, the driving assembly 3 is connected to the polishing wheel 41 to drive the polishing pad 42 to polish the substrate sheet 1.

[0029] Based on the above structure, the embodiment forms a vortex effect during rotation through a plurality of meandering grooves 411, promoting the uniform spraying of the polishing liquid along the circumference of the polishing wheel 41, helping the polishing liquid to be more evenly dispersed and directed to the surface of the substrate sheet 1, and reducing the phenomenon of local accumulation or lack of polishing liquid. In addition, by installing the polishing pad 42 on the boss 412, it is ensured that the polishing pad 42 can stably contact the surface of the substrate sheet 1 for effective polishing.

[0030] like Figure 8 As shown, the groove 411 includes a first groove wall 4111 and a second groove wall 4112 that are relatively arranged. The first groove wall 4111 and the second groove wall 4112 jointly define a groove opening 4113. The width of the groove opening 4113 gradually increases from the groove bottom wall of the groove 411 upward, and is used to guide the polishing liquid to flow from the groove bottom to the polishing interface, so as to maintain a stable supply of polishing liquid during the polishing process, prevent insufficient or excessive polishing liquid from occurring in local areas, and thus improve the uniformity and efficiency of polishing.

[0031] It should be noted that the extension line of the first groove wall 4111 and the extension line of the second groove wall 4112 form a first angle R1, and the angle of the first angle R1 is 12°-16°, so as to better guide the polishing liquid to flow upward along the groove wall and effectively disperse at the polishing interface. When the polishing wheel 41 rotates, it is conducive to forming a vortex effect, which promotes the polishing liquid to be more evenly distributed in the contact area between the polishing pad 42 and the substrate sheet 1, thereby improving the uniformity and efficiency of polishing.

[0032] In some embodiments, it also includes a mounting frame 5, a pressing assembly 6 and a limiting rod 7. One end of the pressing assembly 6 is connected to the mounting frame 5 and suspended above the driving assembly 3. The other end of the pressing assembly 6 is used to abut against the driving assembly 3, and transmits force to the driving assembly 3, thereby acting on the polishing assembly 4 to control the pressure of the polishing pad 42 abutting against the substrate sheet 1. One end of the limiting rod 7 is rotatably connected to the mounting frame 5, and the other end of the limiting rod 7 moves back and forth between a first position and a second position to control the lifting or lowering of the polishing assembly 4.

[0033] In this embodiment, the pressure of the polishing pad 42 on the substrate 1 is adjusted by the pressing assembly 6. When one end of the pressing assembly 6 moves downward and abuts against the driving assembly 3, the polishing pad 42 is forced to press the substrate 1 downward to ensure sufficient pressure for effective polishing. In addition, when the limit rod 7 is in the first position, it is connected to the polishing assembly 4 to lift the polishing assembly 4 to facilitate loading or unloading of the substrate 1; when it moves to the second position, the pressing assembly 6 is pressed downward, so that the polishing pad 42 is pressed against the substrate 1 with the required pressure and starts polishing.

[0034] like Figure 5 As shown, the limiting rod 7 includes a rotating part 71 and a limiting part 72, the rotating part 71 is connected to the mounting frame 5, and the rotating part 71 is connected to the limiting part 72, and an angle is formed between the two; when the limiting part 72 is in the first position, the limiting part 72 is clamped under the driving assembly 3 to lift the polishing assembly 4.

[0035] It can be understood that the rotating part 71 and the limiting part 72 of the present embodiment are both plate-like structures, and the two are connected to form an L-shaped structure, so that when the limiting part 72 is rotated to the first position, it can be clamped under the driving component 3 to limit the downward movement of the driving component 3, thereby realizing the lifting operation of the polishing component 4; when the limiting part 72 is rotated to the second position, it is disengaged from the bottom of the driving component 3, so that there is no structural restriction under the driving component 3, and the pressing component 6 can control the downward movement degree of the driving component 3 to realize different pressure polishing of the substrate sheet 1.

[0036] Read also Figure 2 and Figure 3 The driving assembly 3 includes a support seat 31, a rotating rod 32, a first swing rod 33, a second swing rod 34 and a driving structure 35. The rotating rod 32 passes through the support seat 31, and the two ends of the rotating rod 32 are respectively connected to one end of the first swing rod 33 and one end of the second swing rod 34, serving as the main axis of power transmission; the other end of the first swing rod 33 and the other end of the second swing rod 34 are respectively connected to the two ends of the polishing wheel 41 to form a swing mechanism, which can convert the rotational motion of the rotating rod 32 into the up and down swinging of the first swing rod 33 and the second swing rod 34. The driving structure 35 is installed on the first swing rod 33 and is connected to the polishing wheel 41 to drive the polishing wheel 41 to rotate.

[0037] In this embodiment, when the limiting portion 72 is at the first position, the limiting portion 72 is clamped under the first swing rod 33 to lift the first swing rod 33; when the limiting portion 72 is at the second position, the limiting portion 72 and the first swing rod 33 are disconnected, and the first swing rod 33 moves down to contact the substrate sheet 1.

[0038] This embodiment, through the combination of the rotating rod 32 and the rocker arm structure and the linkage between the pressing assembly 6 and the limiting rod 7, not only ensures the smooth rotation and up and down swing of the polishing wheel 41, thereby controlling the size of the polishing pressure during the polishing process, but also facilitates preparation and cleaning before and after the operation, thereby improving work efficiency and polishing quality.

[0039] In some embodiments, the driving structure 35 includes a first driving member 351, a driving wheel 352, a driven wheel 353 and a transmission belt 354. The first driving member 351 is installed on the first swing rod 33, and the output shaft of the first driving member 351 is connected to the driving wheel 352. The driving wheel 352 is used to receive power from the first driving member 351. The driven wheel 353 is installed on one end of the polishing wheel 41. The driven wheel 353 is used to receive power from the driving wheel 352 and drive the polishing wheel 41 to rotate. The driving wheel 352 and the driven wheel 353 are synchronously linked through a belt to achieve synchronization of force transmission and motion. The first driving member 351 of this embodiment is a rotating motor.

[0040] like Figure 4 As shown, the pressing assembly 6 includes a second driving member 61, a connecting rod 62, and a pressing head 63 for contacting the driving assembly 3. The second driving member 61 is installed on the mounting frame 5. The output end of the second driving member 61 is connected to the connecting rod 62, and the connecting rod 62 is connected to the pressing head 63. The pressing head 63 of this embodiment is used to convert the driving force transmitted by the connecting rod 62 into pressure on the polishing assembly 4, ensuring that the polishing pad 42 can be evenly and forcefully pressed on the substrate 1 for polishing. The second driving member 61 of this embodiment is a cylinder.

[0041] In some embodiments, the pressing assembly 6 further includes a pressure sensor 64 for detecting the pressing pressure of the pressing head 63, and the pressure sensor 64 is disposed between the pressing head 63 and the connecting rod 62. This embodiment monitors and measures the pressure applied by the pressing head 63 to the polishing assembly 4 in real time to ensure that the pressure during the polishing process is maintained within an ideal range to achieve the best polishing effect.

[0042] like Figure 6As shown, the jig assembly 2 includes a jig 21, a third driving member 22, a base 23, a vacuum adsorption member and a fourth driving member 24. The third driving member 22 is mounted on the base 23, and the output shaft of the third driving member 22 is connected to the jig 21. The jig 21 has an adsorption port. The vacuum adsorption member is arranged in the jig 21 and communicated with the adsorption port to achieve adsorption of the substrate sheet 1. The side of the base 23 away from the third driving member 22 is connected to the fourth driving member 24, so that the base 23 is controlled to slide back and forth along the first direction through the fourth driving member 24. In this embodiment, the third driving member 22 controls the rotation of the substrate sheet 1, so that different surfaces of the substrate sheet 1 can be exposed to the polishing pad 42 in turn, so as to achieve continuous or alternating processing of multiple surfaces of the substrate sheet 1, and the coordinated work of the fourth driving member 24 realizes the horizontal movement of the jig 21, thereby improving the flexibility and automation level of the polishing operation.

[0043] The third driving member 22 of this embodiment is a rotary motor, the fourth driving member 24 of this embodiment is a linear motor, and the second direction is the length direction of the linear motor.

[0044] The specific working process is as follows:

[0045] The substrate sheet 1 is mounted on the fixture 21, and the vacuum Schiff base provides vacuum adsorption to fix the substrate sheet 1; the limit rod 7 is pushed to the right so that the limit rod 7 is located in the second position, and the polishing wheel 41 is lowered to contact the substrate sheet 1. The second driving member 61 is pressed down, through the connecting rod 62, the pressure sensor 64, and the pressure head 63 to the first rocker arm 33 and the second rocker arm 34, and the pressure sensor 64 detects the downward pressure in real time; the first driving member 351 rotates, and the rotational motion is transmitted to the polishing wheel 41 through the driving wheel 352, the synchronous belt, and the driven wheel 353; finally, through the movement of the third driving member 22 and the fourth driving member 24, the substrate sheet 1 is rotated and reciprocated to perform the polishing operation.

[0046] In summary, the embodiment of the utility model provides a polishing device, which forms a vortex effect during rotation through a plurality of winding grooves 411, promotes the uniform spraying of the polishing liquid along the circumference of the polishing wheel 41, helps the polishing liquid to be more evenly dispersed and directed to the surface of the substrate sheet 1, and reduces the phenomenon of local accumulation or lack of polishing liquid. In addition, by installing the polishing pad 42 on the boss 412, it is ensured that the polishing pad 42 can stably contact the surface of the substrate sheet 1 for effective polishing.

[0047] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A polishing device, characterized in that: The invention comprises a jig assembly for placing a substrate sheet, a driving assembly and a polishing assembly, wherein the polishing assembly is arranged above the jig assembly, and the polishing assembly comprises a polishing wheel and a plurality of polishing pads, wherein the outer peripheral side surface of the polishing wheel is provided with a plurality of winding grooves, wherein the grooves are arranged through both ends of the polishing wheel, and the plurality of grooves are arranged at intervals around the axis of the polishing wheel, and adjacent grooves are separated by bosses, and the polishing pad is arranged on the corresponding bosses, and the driving assembly is connected to the polishing wheel to drive the polishing pad to polish the substrate sheet.

2. The polishing device according to claim 1, characterized in that: The groove comprises a first groove wall and a second groove wall which are arranged opposite to each other. The first groove wall and the second groove wall jointly define a groove opening. The width of the groove opening gradually increases upward from the groove bottom wall of the groove.

3. The polishing device according to claim 2, characterized in that: An extension line of the first groove wall and an extension line of the second groove wall form a first angle, and the angle of the first angle is 12°-16°.

4. The polishing device according to any one of claims 1 to 3, characterized in that: It also includes a mounting frame, a pressing assembly and a limiting rod, one end of the pressing assembly is connected to the mounting frame and suspended above the driving assembly, the other end of the pressing assembly is used to abut against the driving assembly to control the pressure of the polishing pad abutting against the substrate sheet, one end of the limiting rod is rotatably connected to the mounting frame, and the other end of the limiting rod moves back and forth between a first position and a second position to control the lifting or lowering of the polishing assembly.

5. The polishing device according to claim 4, characterized in that: The limiting rod includes a rotating part and a limiting part, the rotating part is connected to the mounting frame, the rotating part is connected to the limiting part, and an angle is formed between the two; When the limiting portion is located at the first position, the limiting portion is clamped under the driving assembly to lift the polishing assembly.

6. The polishing device according to claim 5, characterized in that: The driving assembly comprises a support seat, a rotating rod, a first swing rod, a second swing rod and a driving structure, the rotating rod passes through the support seat, and two ends of the rotating rod are respectively connected to one end of the first swing rod and one end of the second swing rod, the other end of the first swing rod and the other end of the second swing rod are respectively connected to two ends of the polishing wheel, and the driving structure is installed on the first swing rod and connected to the polishing wheel; When the limiting portion is at the first position, the limiting portion is clamped under the first swing rod to lift the first swing rod; when the limiting portion is at the second position, the limiting rod is disconnected from the first swing rod, and the first swing rod moves down to contact the substrate sheet.

7. The polishing device according to claim 6, characterized in that: The driving structure includes a first driving member, a driving wheel, a driven wheel and a transmission belt. The first driving member is installed on the first rocker arm, and the output shaft of the first driving member is connected to the driving wheel. The driven wheel is installed on one end of the polishing wheel, and the driving wheel and the driven wheel are synchronously linked through a belt.

8. The polishing device according to claim 4, characterized in that: The pressing assembly includes a second driving member, a connecting rod and a pressing head for abutting against the driving assembly. The second driving member is installed on the mounting frame, and the output end of the second driving member is connected to the connecting rod, and the connecting rod is connected to the pressing head.

9. The polishing device according to claim 8, characterized in that: The pressing assembly further includes a pressure sensor for detecting the pressing pressure of the pressing head, and the pressure sensor is arranged between the pressing head and the connecting rod.

10. The polishing device according to claim 1, characterized in that: The jig assembly includes a jig, a third driving member, a base, a vacuum suction member and a fourth driving member. The third driving member is installed on the base, and the output shaft of the third driving member is connected to the jig. The jig has a suction port. The vacuum suction member is arranged in the jig and is connected to the suction port. The side of the base facing away from the third driving member is connected to the fourth driving member so that the base can be controlled to slide back and forth along the first direction through the fourth driving member.

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