Cavity clamp

Abstract

A cavity clamp includes a base. The cavity clamp further comprises a mounting guide seat, a lifting frame, a pressing guide pin and a power lifter. The mounting guide seat is fixed below the base, and the mounting guide seat is used for being detachably fixed on a cavity mounting plate; the lifting frame is mounted on the base, and the height of the lifting frame is adjustable; the pressing guide pin is fixed to the lifting frame and extends from the lifting frame to the base. The power elevator is arranged on the base and is opposite to the pressing guide pin; the power elevator is used for being started to abut against the lower surface of the flange when the installation guide seat is fixed to the cavity installation plate and the installation pressing guide pin is adjusted through the lifting frame until the distance between the power elevator and the pressing guide pin is larger than the thickness of the flange of the cavity when the power elevator does not work. Therefore, the power elevator is matched with the pressing guide pin to clamp the flange of the cavity. Therefore, the device can adapt to cavities with different height specifications; when the multiple cavity clamps clamp the flange of the cavity, the clamping force is consistent.

Description

Technical Field

[0001] The present disclosure relates to the semiconductor vacuum industry, and more particularly to a cavity fixture. Background Art

[0002] Figure 1 It is a stereoscopic diagram of a cavity fixture of known technology. The cavity fixture 100' comprises a base 1', a bracket 2', a bolt 3' and a support column 4'. The base 1' is provided with a threaded hole 11' for mounting the base 1' on the cavity mounting plate 200 by means of a screw (not shown). The bracket 2' has a vertical portion 21' and a horizontal portion 22', the vertical portion 21' is provided on the base 1', the bolt 3' can be tightened and loosened and is threadedly penetrated through the horizontal portion 22', and the support column 4' is provided on the base 1' and is opposite to the bolt 3' in the vertical direction.

[0003] Figure 2 Is adopted Figure 1 A three-dimensional diagram of a cavity fixture 100' clamping a cavity 300. Figure 2 In the embodiment, the cavity 300 is manually tightened and clamped. This manual tightening method requires manual tightening of the bolts 3' and because multiple cavity clamps 100' are distributed around the cavity 300, a single operator cannot tighten the bolts 3' of multiple cavity clamps 100' at the same time. A single operator is required to tighten them one by one manually. When installing a cavity 300 with high clamping requirements, multiple people are required to tighten the bolts 3' of multiple cavity clamps 100' at the same time. However, due to manual operation, the synchronization of tightening cannot be guaranteed.

[0004] In the cavity fixture 100 ′, although the bolt 3 ′ can be adjusted, it cannot adapt to cavities 300 of different height specifications due to the limitation of the vertical portion 21 ′ and the non-adjustable length of the bolt bracket 2 ′ in the vertical direction.

[0005] In the cavity clamp 100', the flange 300a of the cavity 300 is clamped by the support column 4' abutting against the lower surface of the flange 300a and the bolt 3' abutting against the upper surface of the flange 300a. The support column 4' is a non-powered method, while the bolt 3' is a pressure applied by manual operation. This results in inconsistent clamping forces of multiple cavity clamps 100' on the flange 300a of the cavity 300, making it difficult to adapt to the cavity 300 with high installation requirements. Utility Model Content

[0006] In view of the problems existing in the background technology, an object of the present disclosure is to provide a cavity clamp that can adapt to cavities of different height specifications.

[0007] Another object of the present disclosure is to provide a cavity clamp, which can make the clamping force applied by multiple cavity clamps consistent when the multiple cavity clamps clamp the cavity.

[0008] Another object of the present disclosure is to provide a cavity clamp, which can achieve synchronization of clamping the cavity by multiple cavity clamps when the multiple cavity clamps clamp the cavity.

[0009] Another object of the present disclosure is to provide a cavity clamp, which can improve the automation rate of cavity clamping.

[0010] Thus, a cavity clamp includes a base. The cavity clamp also includes an installation guide seat, a lifting frame, a clamping guide pin and a power lifter; the installation guide seat is fixed below the base, and the installation guide seat is used to be detachably fixed on the cavity mounting plate; the lifting frame is installed on the base, and the height of the lifting frame is adjustable; the clamping guide pin is fixed to the lifting frame and extends from the lifting frame toward the base; the power lifter is arranged on the base and opposite to the clamping guide pin, and the power lifter is used to start after the installation guide seat is fixed on the cavity mounting plate and the installation clamping guide pin is adjusted by the lifting frame to the point that the distance between the power lifter and the clamping guide pin is greater than the thickness of the flange of the cavity when the power lifter is not working, so as to abut against the lower surface of the flange, so that the power lifter cooperates with the clamping guide pin to clamp the flange of the cavity.

[0011] The beneficial effects of the present disclosure are as follows.

[0012] In the cavity clamp according to the present disclosure, the cavity with different height specifications can be adapted by means of a height-adjustable lifting frame.

[0013] In the cavity clamp according to the present disclosure, when the power lift cooperates with the clamping guide pin to clamp the flange of the cavity, the force applied by the power lift can avoid manual inaccuracy better than the manual tightening of bolts in the background technology, so that when multiple cavity clamps clamp the flange of the cavity, the clamping force of the multiple cavity clamps on the flange of the cavity is consistent, which can adapt to cavities with high installation requirements. In particular, when the power lifts of multiple cavity clamps are connected to the control system through communication, the synchronization of the power lifts of multiple cavity clamps and the clamping guide pins to clamp the flange of the cavity can be achieved. The use of power lifts is conducive to improving the automation rate of cavity clamping. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a stereoscopic view of a cavity fixture of known technology.

[0015] Figure 2 Is adopted Figure 1 A three-dimensional diagram of a cavity fixture clamping a cavity.

[0016] Figure 3 is a perspective view of a cavity fixture according to the present disclosure.

[0017] Figure 4 Is adopted Figure 3 A three-dimensional diagram of a cavity fixture clamping a cavity.

[0018] Figure 5 It is a three-dimensional view of the cavity mounting plate.

[0019] The reference numerals are described as follows:

[0020] 100' cavity fixture 31 threaded support rod

[0021] 1' base 32 clamping bracket

[0022] 11' threaded hole 321 vertical part

[0023] 2' bracket 322 horizontal part

[0024] 21' vertical part 4 pressing guide pin

[0025] 22' Transverse 5 Power Lift

[0026] 3' bolt 51 cylinder block

[0027] 4' support column 52 piston

[0028] 100 cavity fixture 200 cavity mounting plate

[0029] 1 Base 200a installation fixing thread hole

[0030] 11 threaded holes 200b fixture mounting holes

[0031] 2 Install the guide seat 300 cavity

[0032] 3 Lifting frame 300a flange DETAILED DESCRIPTION

[0033] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0034] Reference Figures 3 to 5 According to the present disclosure, the cavity clamp 100 includes a base 1, a mounting guide seat 2, a lifting frame 3, a pressing guide pin 4 and a power lift 5.

[0035] The installation guide seat 2 is fixed below the base 1, and the installation guide seat 2 is used to be detachably fixed on the cavity mounting plate 200. The lifting frame 3 is installed on the base 1, and the height of the lifting frame 3 is adjustable. The clamping guide pin 4 is fixed to the lifting frame 3 and extends from the lifting frame 3 toward the base 1. The power lift 5 is arranged on the base 1 and is opposite to the clamping guide pin 4. The power lift 5 is used to start after the installation guide seat 2 is fixed on the cavity mounting plate 200 and the installation clamping guide pin 4 is adjusted by the lifting frame 3 to the point that the distance between the power lift 5 and the clamping guide pin 4 is greater than the thickness of the flange 300a of the cavity 300 when the power lift 5 is not working, so as to abut against the lower surface of the flange 300a, so that the power lift 5 cooperates with the clamping guide pin 4 to clamp the flange 300a of the cavity 300.

[0036] In the cavity fixture 100 according to the present disclosure, the height-adjustable lifting frame 3 can adapt to cavities 300 of different height specifications.

[0037] In the cavity clamp 100 according to the present disclosure, when the power lift 5 cooperates with the pressing guide pin 4 to clamp the flange 300a of the cavity 300, the force applied by the power lift 5 can better avoid the manual inaccuracy than the manual tightening of the bolt 3' in the background technology, so that when multiple cavity clamps 100 clamp the flange 300a of the cavity 300, the clamping force of the multiple cavity clamps 100 on the flange 300a of the cavity 300 is consistent, which can adapt to the cavity 300 with high installation requirements. In particular, when the power lifts 5 of multiple cavity clamps 100 are connected to the control system (not shown) through communication, the synchronization of the power lifts 5 of multiple cavity clamps 100 and the pressing guide pin 4 to clamp the flange 300a of the cavity 300 can be achieved. The use of the power lift 5 is conducive to improving the automation rate of the clamping of the cavity 300.

[0038] Similarly, refer to Figure 4 and Figure 5 The base 1 is provided with a threaded hole 11, and a screw (not shown) passes through the threaded hole 11 and the mounting and fixing threaded hole 200a to further fix the base 1 to the cavity mounting plate 200.

[0039] like Figure 2As shown, in one example, the lifting frame 3 is a manual lifting frame. Specifically, the lifting frame 3 includes a threaded support rod 31 and a clamping bracket 32. The threaded support rod 31 is installed on the base 1 and extends upward from the base 1, and the threaded support rod 31 has an external thread. The clamping bracket 32 ​​has a vertical portion 321 and a horizontal portion 322, and the vertical portion 321 has an internal thread, which is used to cooperate with the external thread of the threaded support rod 31 to adjust the height of the clamping bracket 32. The clamping guide pin 4 is fixed to the horizontal portion 322 and extends downward from the horizontal portion 322. The power lifter 5 is used to start to abut against the lower surface of the flange 300a when the distance between the power lifter 5 and the pressing guide pin 4 is greater than the thickness of the flange 300a of the cavity 300 when the power lifter 5 is not working, after the installation guide seat 2 is fixed in the fixture installation hole 200b of the cavity installation plate 200 and the installation pressing guide pin 4 is adjusted through the threaded cooperation of the external thread of the threaded support rod 31 and the internal thread of the vertical portion 321 of the pressing bracket 32, so that the power lifter 5 and the pressing guide pin 4 cooperate to clamp the flange 300a of the cavity 300. Because the length of the vertical portion 321 of the lifting frame 3 is much greater than the thickness of the horizontal portion 322, the size of the lifting frame 3 in the up and down direction can be adjusted in a wide range.

[0040] The power lift 5 can be any suitable device. In one example, the power lift 5 is a pneumatic device. Figure 3 The pneumatic device is a cylinder, which includes a cylinder body 51 and a piston 52. The piston 52 can be inserted into and out of the cylinder body 51. The piston 52 is used to cooperate with the clamping guide pin 4 to clamp the flange 300a of the cavity 300. In an alternative example not shown, the power lifter 5 is a cylinder spring clamping mechanism. Specifically, the cylinder spring clamping mechanism includes a cylinder and a clamping spring. The cylinder is used to push the clamping spring during operation. The clamping spring is used to cooperate with the clamping guide pin 4 to clamp the flange 300a of the cavity 300.

[0041] In addition, in order to facilitate positioning, the upper surface of the flange 300 a of the cavity 300 can be provided with a positioning slot hole that cooperates with the pressing guide pin 4 .

[0042] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A cavity fixture, comprising a base (1), characterized in that: The cavity clamp (100) further comprises a mounting guide seat (2), a lifting frame (3), a pressing guide pin (4) and a power lift (5); The installation guide seat (2) is fixed below the base (1), and the installation guide seat (2) is used to be detachably fixed on the cavity installation plate (200); The lifting frame (3) is installed on the base (1), and the height of the lifting frame (3) is adjustable; The pressing guide pin (4) is fixed to the lifting frame (3) and extends from the lifting frame (3) toward the base (1); The power lift (5) is arranged on the base (1) and is opposite to the clamping guide pin (4). The power lift (5) is used to start to abut against the lower surface of the flange (300a) when the installation guide seat (2) is fixed on the cavity installation plate (200) and the installation clamping guide pin (4) is adjusted by the lifting frame (3) to a distance between the power lift (5) and the clamping guide pin (4) when the power lift (5) is not working, so that the power lift (5) and the clamping guide pin (4) cooperate to clamp the flange (300a) of the cavity (300).

2. The cavity fixture according to claim 1, characterized in that: The lifting frame (3) is a manual lifting frame.

3. The cavity fixture according to claim 1, characterized in that: The lifting frame (3) comprises a threaded support rod (31) and a pressing support (32); The threaded support rod (31) is mounted on the base (1) and extends upward from the base (1), and the threaded support rod (31) has an external thread; The clamping bracket (32) comprises a vertical portion (321) and a horizontal portion (322), wherein the vertical portion (321) comprises an internal thread, and the internal thread is used to cooperate with the external thread of the threaded support rod (31) to adjust the height of the clamping bracket (32); The pressing guide pin (4) is fixed to the transverse portion (322) and extends downward from the transverse portion (322); The power lift (5) is used to start abutting against the lower surface of the flange (300a) when the power lift (5) and the clamping guide pin (4) are adjusted through the threaded fit of the external thread of the threaded support rod (31) and the internal thread of the vertical portion (321) of the clamping bracket (32) to abut against the lower surface of the flange (300a) of the cavity (300) when the power lift (5) is not working, after the installation guide seat (2) is fixed in the clamp installation hole of the cavity installation plate (200). The power lift (5) and the clamping guide pin (4) are installed to clamp the flange (300a) of the cavity (300) by adjusting the threaded fit of the external thread of the threaded support rod (31) and the internal thread of the vertical portion (321) of the clamping bracket (32).

4. The cavity fixture according to claim 1, characterized in that: The power lift (5) is a pneumatic device.

5. The cavity fixture according to claim 4, characterized in that: The pneumatic device is a cylinder, which includes a cylinder body (51) and a piston (52). The piston (52) can enter and exit the cylinder body (51). The piston (52) is used to cooperate with the clamping guide pin (4) to clamp the flange (300a) of the cavity (300).

6. The cavity fixture according to claim 1, characterized in that: The power lifter (5) is a cylinder spring pressing mechanism.

7. The cavity fixture according to claim 6, characterized in that: The cylinder spring clamping mechanism comprises a cylinder and a clamping spring. The cylinder is used to push the clamping spring during operation. The clamping spring is used to cooperate with a clamping guide pin (4) to clamp the flange (300a) of the cavity (300).

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