Polishing suction cup mounting jig

Abstract

The utility model provides a polishing suction cup installation jig which comprises a base and an installation piece, and the base is used for limiting the installation piece so that the installation piece can only rotate on the horizontal plane and is prevented from inclining. The mounting part is used for being meshed with the fixing screw and screwing the fixing screw, and therefore the polishing suction cup is mounted on the base. According to the polishing suction cup installation jig, the polishing suction cup installation process can be standardized, it is guaranteed that a fastening screw is fully locked and cannot be broken due to the fact that the fastening screw is stressed excessively in the process that an operator tightens the fixing screw, and therefore work efficiency is improved, operation errors are reduced, and product quality is improved. And the production cost is obviously saved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing equipment, and specifically relates to a polishing suction cup installation fixture. Background Art

[0002] In the process of semiconductor device manufacturing, it is generally necessary to polish the edge of the wafer to remove defects at the edge (such as scratches) from the previous process, reduce the edge defect rate of the wafer, and maintain the wafer diameter within a stable range to meet customer specifications; at the same time, it provides guarantees for the edge particle cleaning of the wafer after cleaning and the edge defect rate of the epitaxial process.

[0003] In the current edge polishing process, a combination of chemical polishing and mechanical polishing is used. In order to ensure the stability of the process, the machine needs to replace the polishing suction cup regularly. In the prior art, the tools used to remove and install the polishing suction cup are relatively simple, and the replacement process mainly depends on the personal skills and experience of the operator. Therefore, there is a lack of quantitative standards in the operation process, and there are risks in personnel operation. Specifically, in actual operation, it is often difficult for operators to accurately judge the tightness of the locking screws. If the screws are not sufficiently tightened, it may cause the machine to malfunction; and if the force applied is too large, the fastening screws may be broken. Therefore, this type of operation that relies on personal judgment has certain risks, and corresponding measures need to be taken to reduce the impact of human factors on process stability. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the utility model provides a polishing suction cup installation jig, including a base and a mounting piece. The base is used to limit the mounting piece so that the mounting piece can only rotate on a horizontal plane to prevent the mounting piece from tilting; the mounting piece is used to engage with a fixing screw and tighten the fixing screw, thereby installing the polishing suction cup on the base. The polishing suction cup installation jig provided by the utility model can standardize the process of installing the polishing suction cup, so that the operator can ensure that the fastening screw is fully locked during the process of tightening the fixing screw, and at the same time ensure that the fastening screw will not be broken due to excessive force, thereby improving work efficiency, reducing operating errors, and significantly saving production costs.

[0005] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a polishing suction cup installation fixture, comprising:

[0006] A base, the base having a top surface, a side wall and a bottom surface, the top end of the side wall is connected to the top surface, the bottom end of the side wall is connected to the bottom surface, the side wall is perpendicular to the top surface and the bottom surface, the center of the top surface has a through hole, the side wall and the top surface form a cavity structure, and the bottom surface extends outward from the bottom end of the side wall;

[0007] A mounting piece passes through the through hole, one end of the mounting piece is located above the top surface, and the other end is located in the cavity structure, and a protrusion is provided on the bottom surface of the mounting piece.

[0008] Optionally, the mounting member includes a handle and a rotating joint that are fixedly connected, the handle is located above the top surface, and the rotating joint passes through the through hole.

[0009] Optionally, the handle and the rotary joint are fixedly connected by screws.

[0010] Optionally, the rotary joint includes a first part and a second part, and the first part and the second part are both cylindrical structures, wherein the first part passes through the through hole and is fixedly connected to the handle; the second part is located at the bottom of the first part, and the protrusion is located on the bottom surface of the second part.

[0011] Optionally, the first part is connected to the through hole via threads.

[0012] Optionally, a marking line is provided on the side wall of the first part, and a distance between the marking line and the top surface of the first part is between 5.5 mm and 6.5 mm.

[0013] Optionally, the cavity structure is cylindrical, and a diameter of the cavity structure is greater than a diameter of the second part.

[0014] Optionally, the diameter of the cavity structure is between 29 mm and 31 mm.

[0015] Optionally, the diameter of the second part is between 27.5 mm and 28.5 mm.

[0016] The polishing suction cup installation fixture provided by the utility model has at least the following beneficial effects:

[0017] The polishing suction cup installation fixture provided by the utility model can standardize the process of installing the polishing suction cup, so that the operator can ensure that the fastening screws are fully locked during the process of tightening the fixing screws, and at the same time ensure that the fastening screws will not be broken due to excessive force, thereby improving work efficiency, reducing operating errors, and significantly saving production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Shown is a schematic structural diagram of a polishing suction cup mounting fixture provided in an embodiment.

[0019] Figure 2 Shown is a schematic diagram of the use of the polishing suction cup mounting fixture provided in the embodiment.

[0020] Component number description

[0021] 1 Base

[0022] 11 Top

[0023] 12 Sidewall

[0024] 13 Bottom

[0025] 100 Cavity Structure

[0026] 2 Mounting parts

[0027] 21 Handle

[0028] 22 Rotary joint

[0029] 23 Screws

[0030] 221 Rotary Joint Part 1

[0031] 222 Rotary Joint Part 2

[0032] 200 Raised part

[0033] 3 Polishing Suction Cup

[0034] 4 Base

[0035] 5 Fixing screws

[0036] 500 Mounting groove DETAILED DESCRIPTION

[0037] The following is an explanation of the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0038] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the utility model in a schematic manner. Although the illustrations only show components related to the utility model rather than being drawn according to the number, shape and size of components in actual implementation, the form, quantity, positional relationship and proportion of each component in actual implementation can be changed at will under the premise of realizing the technical solution of this party, and the component layout form may also be more complicated.

[0039] Example

[0040] This embodiment provides a polishing suction cup installation fixture, such as Figure 1 As shown, it includes a base 1 and a mounting member 2 , wherein the mounting member 2 is located at the center of the base 1 and passes through the base 1 .

[0041] like Figure 1As shown, the base has a top surface 11, a side wall 12 and a bottom surface 13. The top end of the side wall 12 is connected to the top surface 11, the bottom end of the side wall 12 is connected to the bottom surface 13, the bottom surface 13 extends outward from the bottom end of the side wall 12, and the side wall 12 is perpendicular to the top surface 11 and the bottom surface 13.

[0042] As an example, the top surface 11 has a through hole at its center, and the inner wall of the through hole has threads for connecting the mounting member 2 .

[0043] As an example, the side wall 12 and the top surface 11 form a cavity structure 100 , and the cavity structure 100 is cylindrical, and its inner diameter is between 29 mm and 31 mm, preferably 30 mm.

[0044] like Figure 1 As shown, the mounting member 2 passes through the through hole at the center of the top surface 11, one end of which is located above the top surface 11, and the other end is located in the cavity structure 100. In this embodiment, the mounting member 2 includes a handle 21 and a rotary joint 22, which are fixedly connected by a screw 23, wherein the handle 21 is located above the top surface 11, and the rotary joint 22 passes through the through hole. During use, the operator drives the rotary joint 22 to rotate around its axis by twisting the handle 21. In other optional embodiments, the handle 21 and the rotary joint 22 can also be made into an integrated structure.

[0045] like Figure 1 As shown, the rotary joint 22 includes a first portion 221 and a second portion 222 , and both the first portion 221 and the second portion 222 are cylindrical structures.

[0046] As an example, the first part 221 passes through the through hole in the center of the top surface 11 and is fixedly connected to the handle 21 by a screw 23; the side wall of the first part 221 has a thread so that it can be threadedly connected to the through hole. When the operator turns the handle 21, the mounting member 2 can move in the vertical direction in the through hole.

[0047] As an example, there is an identification line on the side wall of the first part 221 (not shown in the figure). When installing the polishing suction cup, the handle 21 is turned to move the mounting part 2 downward. When the identification line is flush with the top surface 11, the turning is stopped to prevent the parts from breaking due to excessive pressure. The position of the identification line should be determined according to the installation requirements of the polishing suction cup. In this embodiment, the distance between the identification line and the top surface of the first part 221 is between 5.5 mm and 6.5 mm, preferably 6 mm.

[0048] As an example, the second part 222 is located at the bottom of the first part 221, and the diameter of the second part 222 is smaller than the inner diameter of the cavity structure 100, so that the cavity structure 100 can accommodate the second part 222 to rotate on the horizontal plane; in this embodiment, the diameter of the second part 222 is between 27.5mm and 28.5mm, preferably 28mm.

[0049] As an example, the bottom surface of the second part 222 has a protrusion 200. When installing the polishing suction cup, the protrusion 200 cooperates with the installation groove on the surface of the fixing screw to enable the mounting member 2 to engage with the fixing screw.

[0050] The method of using the polishing suction cup installation fixture provided in this embodiment is as follows:

[0051] like Figure 2 As shown, the base 4 has a groove in the center, and the polishing suction cup 3 has a stepped through hole in the center. The polishing suction cup 3 is placed on the base 4 so that the groove and the stepped through hole are coaxially arranged; then, the fixing screw 5 is placed so that the fixing screw 5 passes through the stepped through hole of the polishing suction cup 3 and the groove of the base 4, and the surface of the fixing screw 5 has an installation groove 500.

[0052] Next, the polishing suction cup mounting fixture provided in this embodiment is placed on the surface of the polishing suction cup 3. Specifically, the bottom surface 13 of the base 1 is located on the surface of the polishing suction cup 3. The base 1 limits the rotation of the mounting member 2, so that the mounting member 2 can only rotate around its axis in the horizontal plane without tilting; the second part 222 of the rotary joint is located in the stepped through hole in the center of the polishing suction cup 3, so that the raised portion 200 on the bottom surface of the mounting member 2 is engaged with the mounting groove 500 on the surface of the fixing screw 5.

[0053] Next, the handle 21 is turned to rotate the rotary joint 22 around its axis. Since the protrusion 200 on the bottom surface of the mounting member 2 is engaged with the mounting groove 500 on the surface of the fixing screw 5, the fixing screw 5 is also rotated around its axis under the drive of the mounting member 2, thereby tightening the polishing suction cup 3 and the base 4. During the tightening process, the base 1 is fixed, and the mounting member 2 moves downward under the limit of the base 1. When the marking line on the side wall of the first part 221 of the rotary joint is flush with the top surface 11, the twisting is stopped, thereby preventing the fixing screw 5 from being broken due to excessive pressure. As an example, the position of the marking line should be determined according to the installation requirements of the polishing suction cup 3. Specifically, after the polishing suction cup 3 is fixedly connected to the base 4, and the tightness of the fixing screw 5 is within a reasonable range, that is, it is neither too tight nor too loose, the distance d between the upper surface of the fixing screw 5 and the upper surface of the polishing suction cup 3 is measured. The distance between the marking line and the top surface of the first part 221 should be equal to the above-mentioned distance d. In this embodiment, the distance between the marking line and the top surface of the first part 221 is between 5.5 mm and 6.5 mm, preferably 6 mm.

[0054] The polishing suction cup installation fixture provided in this embodiment includes a base and a mounting piece. The base is used to limit the mounting piece so that the mounting piece can only rotate on a horizontal plane to prevent the mounting piece from tilting. The mounting piece is used to engage with a fixing screw and tighten the fixing screw, thereby installing the polishing suction cup on the base. The polishing suction cup installation fixture provided in this embodiment can standardize the process of installing the polishing suction cup, so that the operator can ensure that the fastening screw is fully locked and that the fastening screw will not be broken due to excessive force during the process of tightening the fixing screw, thereby improving work efficiency, reducing operating errors, and significantly saving production costs.

[0055] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A polishing suction cup installation fixture, characterized in that: include: A base, the base having a top surface, a side wall and a bottom surface, the top end of the side wall is connected to the top surface, the bottom end of the side wall is connected to the bottom surface, the side wall is perpendicular to the top surface and the bottom surface, the center of the top surface has a through hole, the side wall and the top surface form a cavity structure, and the bottom surface extends outward from the bottom end of the side wall; A mounting piece passes through the through hole, one end of the mounting piece is located above the top surface, and the other end is located in the cavity structure, and a protrusion is provided on the bottom surface of the mounting piece.

2. The polishing suction cup installation fixture according to claim 1, characterized in that: The mounting member comprises a handle and a rotating joint which are fixedly connected, the handle is located above the top surface, and the rotating joint passes through the through hole.

3. The polishing suction cup installation fixture according to claim 2, characterized in that: The handle and the rotary joint are fixedly connected by screws.

4. The polishing suction cup installation fixture according to claim 2, characterized in that: The rotary joint includes a first part and a second part, both of which are cylindrical structures, wherein the first part passes through the through hole and is fixedly connected to the handle; the second part is located at the bottom of the first part, and the protrusion is located on the bottom surface of the second part.

5. The polishing suction cup installation fixture according to claim 4, characterized in that: The first portion is connected to the through hole via threads.

6. The polishing suction cup installation fixture according to claim 4, characterized in that: A marking line is provided on the side wall of the first part, and the distance between the marking line and the top surface of the first part is between 5.5 mm and 6.5 mm.

7. The polishing suction cup installation fixture according to claim 4, characterized in that: The cavity structure is cylindrical, and a diameter of the cavity structure is greater than a diameter of the second portion.

8. The polishing suction cup installation fixture according to claim 7, characterized in that: The diameter of the cavity structure is between 29 mm and 31 mm.

9. The polishing suction cup installation fixture according to claim 7, characterized in that: The diameter of the second portion is between 27.5 mm and 28.5 mm.

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