MPCVD equipment

Abstract

The utility model relates to the technical field of plasma chemical vapor deposition, and discloses MPCVD equipment which comprises a waveguide device, a cavity, a microwave antenna, a lock sleeve and a connecting piece, the waveguide device is connected to the top of the cavity, a baffle is arranged in the cavity, one end of the microwave antenna penetrates through the waveguide device to form a sealed cavity with the baffle in the cavity, and the other end of the microwave antenna penetrates through the lock sleeve. The microwave antenna is sleeved with the lock sleeve in a sliding mode, the lock sleeve is movably connected to the top of the waveguide device through a connecting piece, and the lock sleeve can horizontally move along the plane where the top of the waveguide device is located and drives the microwave antenna to horizontally move in the cavity so as to change the position of the central axis of the microwave antenna in the sealed cavity. The microwave antenna is driven to move through the lock sleeve, the shape and the position of the generated ion ball can be adjusted, the ion ball is located at the optimal position and state, and then the deposition speed and the deposition quality of vapor deposition are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma chemical vapor deposition, in particular to an MPCVD device. Background Art

[0002] MPCVD is a microwave plasma chemical vapor deposition technology. It uses a microwave antenna through a waveguide to form an ion field in the cavity, also known as an ion sphere. This technology is widely used in the diamond crystal and diamond film industries. The microwave antenna, as the carrier of microwaves in MPCVD equipment, directly affects the microwave conversion rate, feed density, and distribution of the resonant ion field, and has a great impact on the deposition efficiency and deposition quality of the MPCVD equipment. Due to processing and assembly deviations and other reasons, the position and shape of the ion sphere often deviate from expectations. At this time, the sphere needs to be adjusted, but due to the structural form of the quartz ring, it is often impossible to adjust or the airtightness is poor after adjustment, which ultimately leads to low deposition efficiency and poor deposition quality.

[0003] In the prior art, the utility model patent (CN217709670U) discloses a metal sealing device for an MPCVD cavity, which relates to the technical field of metal sealing devices. The metal sealing device for the MPCVD cavity includes a tightening sleeve, a water-cooled antenna is fixedly connected to the inside of the tightening sleeve, a cavity cover is arranged on the top of the water-cooled antenna, a metal sealing ring is fixedly connected to the bottom of the water-cooled antenna and the bottom of the cavity assembly, and two springs are fixedly connected to the inside of the metal sealing ring. The device cannot adjust the position and shape of the ion ball.

[0004] Based on this, the technical problem to be solved by the present invention is: how to provide an MPCVD device for adjusting the position and shape of an ion ball. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides an MPCVD device.

[0006] The technical solution of the utility model is:

[0007] An MPCVD device comprises a waveguide device, a cavity, a microwave antenna, a locking sleeve and a connecting piece. The waveguide device is connected to the top of the cavity. A baffle is arranged in the cavity. One end of the microwave antenna passes through the waveguide device and forms a sealed chamber with the baffle in the cavity. The locking sleeve is slidably sleeved on the outside of the microwave antenna. The locking sleeve is movably connected to the top of the waveguide device through the connecting piece. The locking sleeve can move horizontally along the plane where the top of the waveguide device is located, and drive the microwave antenna to move horizontally in the cavity, so as to change the position of the central axis of the microwave antenna in the sealed chamber.

[0008] A technical solution in the utility model has at least one of the following advantages or beneficial effects:

[0009] The utility model drives the microwave antenna to move through the lock sleeve, and can adjust the shape and position of the generated ion ball, so that the ion ball is in the best position and state, thereby improving the deposition speed and quality of vapor deposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a three-dimensional diagram of embodiment 1 of the utility model;

[0011] Figure 2 It is a cross-sectional view of Example 1 of the utility model;

[0012] Figure 3 It is a cross-sectional view of Example 2 of the utility model;

[0013] Figure 4 This is a cross-sectional view of Example 3 of the present utility model. DETAILED DESCRIPTION

[0014] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0015] Example 1

[0016] See also Figures 1-2 An MPCVD device comprises a waveguide device 1, a cavity 2, a microwave antenna 3, a locking sleeve 4, and a connecting piece 5. The waveguide device 1 is connected to the top of the cavity 2. A baffle 21 is provided in the cavity 2. One end of the microwave antenna 3 passes through the waveguide device 1 and forms a sealed chamber 12 with the baffle 21 in the cavity 2. The locking sleeve 4 is slidably sleeved on the outside of the microwave antenna 3. The locking sleeve 4 is movably connected to the top of the waveguide device 1 through the connecting piece 5. The locking sleeve 4 can move horizontally along the plane where the top of the waveguide device 1 is located, and drive the microwave antenna 3 to move horizontally in the cavity 2 to change the position of the central axis of the microwave antenna 3 in the sealed chamber 12.

[0017] In actual use, since the ion ball 13 is formed in the sealed chamber 12 after the microwave antenna 3 passes through the waveguide device 1, that is, the position and shape of the ion ball 13 are closely related to the microwave antenna 3, after the ion ball 13 is generated, by observing the position and shape of the ion ball 13, the staff can horizontally move the microwave antenna 3 through the locking sleeve 4, thereby adjusting the position and shape of the ion ball 13, and the position and shape of the ion ball 13 affects the deposition speed and quality of vapor deposition. Specifically, the locking sleeve 4 can maintain the sealing of the sealed chamber 12 when moving the microwave antenna 3, so that the microwave antenna 3 can be moved during operation, which is conducive to adjusting the ion ball 13 according to actual conditions. That is to say, even if the ion ball 13 has begun to be generated, the position and shape of the ion ball 13 can be directly adjusted, which is more convenient for the staff to operate and is conducive to improving the deposition speed and quality of vapor deposition.

[0018] Preferably, the connecting member 5 includes a plurality of screws 51 and gaskets 52, and a plurality of through slots 41 are provided on the locking sleeve 4. The number of the screws 51, the gaskets 52 and the through slots 41 match. The locking sleeve 4 is slidably connected to the top of the waveguide device 1 through the cooperation of the screws 51 and the gaskets 52, and the inner diameter of the through slot 41 is greater than the outer diameter of the screws 51.

[0019] Through the above design, the screws 51 and the gaskets 52 can connect the locking sleeve 4 and the waveguide device 1 together to maintain the sealing, that is, improve the quality of the ion ball 13, and through the through groove 41 and the screws 51, the microwave antenna 3 can make a horizontal translation movement within the range of the through groove 41 while maintaining the sealing, that is, it is beneficial to the translation movement of the microwave antenna 3.

[0020] Furthermore, the MPCVD device also includes a fixed block 6, a screw 7, and a nut 8. The fixed block 6 is fixedly connected to the top of the microwave antenna 3. The fixed block 6 is connected to the top of the locking sleeve 4 through the cooperation of the screw 7 and the nut 8. The screw 7 and the nut 8 are used to adjust the up and down directions of the microwave antenna 3.

[0021] In this embodiment, the microwave antenna 3 can be fixed at a certain height by the fixing block 6, the screw 7 and the nut 8, and the up and down movement of the microwave antenna 3 can also be adjusted by the screw 7 and the nut 8. By adjusting the up and down movement of the microwave antenna 3, the staff can adjust the downward pressure of the microwave antenna 3, thereby effectively avoiding cracks in the baffle 21 caused by excessive pressure of the microwave antenna 3 on the baffle 21, resulting in failure of the sealing of the sealed chamber 12.

[0022] Furthermore, the MPCVD device also includes a plurality of butterfly washers 9 , which are connected to the screw rod 7 and are located between the nut 8 and the fixing block 6 .

[0023] In this embodiment, the butterfly gasket 9 can increase the buffer to prevent the microwave antenna 3 from causing abnormality of the lock sleeve 4 due to excessive downward pressure, specifically affecting the sealing and movement of the microwave antenna 3, resulting in the inability to generate the ion ball 13 normally or the inability to adjust the position and shape of the ion ball 13.

[0024] Furthermore, the number of the screw rods 7 is two or more, and the number of the nuts 8 matches the number of the screw rods 7 .

[0025] Specifically, the number of screws 7 is related to the size of the microwave antenna 3 . The larger the number of screws 7 is, the more force it can bear and the more effectively it can protect the microwave antenna 3 and the locking sleeve 4 .

[0026] Preferably, the MPCVD device further includes a first sealing ring 10 and a second sealing ring 11 , wherein the first sealing ring 10 is connected between the microwave antenna 3 and the baffle 21 , and the second sealing ring 11 is connected between the baffle 21 and the cavity 2 .

[0027] Through the above design, the first sealing ring 10 can ensure the sealing between the microwave antenna 3 and the baffle 21, and when the microwave antenna 3 is moved, the microwave antenna 3 and the first sealing ring 10 will move synchronously to maintain the sealing during movement; the second sealing ring 11 maintains the sealing between the baffle 21 and the cavity 2, that is, improves the sealing of the sealed chamber 12.

[0028] Preferably, a loading platform 22 is provided in the cavity 2 , and the loading platform 22 is provided in the sealed chamber 12 , and the loading platform 22 is provided below the microwave antenna 3 .

[0029] In the above design, the ion ball 13 generated by the microwave antenna 3 and the waveguide device 1 will be generated on the loading platform 22, so that the staff can more conveniently observe the position and shape of the ion ball 13, and thus move the microwave antenna 3 to make appropriate adjustments to the ion ball 13.

[0030] Furthermore, an exhaust port 23 is provided in the cavity 2 . The exhaust port 23 is provided on one side of the loading platform 22 and is located in the sealed chamber 12 .

[0031] Through the above design, the exhaust port 23 can be used to introduce the required gas and exhaust the gas generated after the ion ball 13 is generated.

[0032] Preferably, the baffle 21 is a baffle 21 made of quartz material.

[0033] The baffle 21 made of quartz material can improve the sealing performance of the sealed chamber 12 and is more wear-resistant.

[0034] Example 2

[0035] See also Figure 3, a MPCVD device.

[0036] In this embodiment, a partition 14 is further provided in the cavity 2, and the microwave antenna 3, the baffle 21, and the partition 14 form a sealed chamber 12. The position of the baffle 21 in the cavity 2 is different. The baffle 21 in this embodiment is connected to the baffle 14 and is parallel to the bottom of the microwave antenna 3. One end of the baffle 21 is connected to the microwave antenna 3, and the other end is located in the middle of the cavity 2. This method can increase the volume of the sealed chamber 12 and accommodate more gas introduced through the exhaust port 23 and gas generated after the ion ball 13 is generated.

[0037] Example 3

[0038] See also Figure 4 , a MPCVD device.

[0039] In this embodiment, the position of the baffle 21 in the cavity 2 is different, and the positions of the screw 7, the nut 8 and the butterfly washer 9 are different. The baffle 21 in this embodiment is in a vertical relationship with the bottom of the microwave antenna 3, one end of the baffle 21 is connected to the top of the microwave antenna 3, and the other end is connected to the top of the cavity 2. This method can greatly increase the volume of the sealed chamber 12, and can accommodate more gas introduced through the exhaust port 23 and the gas generated after the ion ball 13 is generated.

[0040] The screw 7, nut 8 and butterfly washer 9 are located between the fixed block 6 and the locking sleeve 4. Designed in this way, the baffle 21 in the cavity 2 can be effectively pre-tightened to prevent the baffle 21 from cracking due to excessive pressure, resulting in failure of the sealing in the sealed chamber 12.

[0041] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An MPCVD device, comprising a waveguide device, a cavity, a microwave antenna, a locking sleeve, and a connector, wherein the waveguide device is connected to the top of the cavity, a baffle is provided in the cavity, and one end of the microwave antenna passes through the waveguide device and forms a sealed chamber with the baffle in the cavity, characterized in that: The locking sleeve is slidably mounted on the outside of the microwave antenna, and the locking sleeve is movably connected to the top of the waveguide device through a connecting piece; The locking sleeve can move horizontally along the plane where the top of the waveguide device is located, and drive the microwave antenna to move horizontally in the cavity to change the position of the central axis of the microwave antenna in the sealed chamber.

2. The MPCVD device according to claim 1, characterized in that: The connecting piece includes a plurality of screws and washers, and a plurality of through slots are provided on the locking sleeve. The numbers of the screws, washers and through slots match, and the locking sleeve is slidably connected to the top of the waveguide device through the cooperation of the screws and washers, and the inner diameter of the through slot is larger than the outer diameter of the screw.

3. The MPCVD device according to claim 2, characterized in that: The MPCVD equipment also includes a fixed block, a screw and a nut. The fixed block is fixedly connected to the top of the microwave antenna. The fixed block is connected to the top of the locking sleeve through the cooperation of the screw and the nut. The screw and the nut are used to adjust the uplink and downlink of the microwave antenna.

4. The MPCVD device according to claim 3, characterized in that: The MPCVD device also includes a plurality of butterfly washers, which are connected to the screw rod and located between the nut and the fixing block.

5. The MPCVD device according to claim 4, characterized in that: The number of the screw rods is two or more, and the number of the nuts matches the number of the screw rods.

6. The MPCVD device according to claim 1, characterized in that: The MPCVD device further includes a first sealing ring and a second sealing ring, wherein the first sealing ring is connected between the microwave antenna and the baffle, and the second sealing ring is connected between the baffle and the cavity.

7. The MPCVD device according to claim 1, characterized in that: A loading platform is provided in the cavity, the loading platform is provided in the sealed cavity, and the loading platform is provided below the microwave antenna.

8. The MPCVD device according to claim 7, characterized in that: The cavity is also provided with an exhaust port, which is arranged on one side of the loading platform and is located in the sealed cavity.

9. The MPCVD device according to claim 1, characterized in that: The baffle is made of quartz material.

10. The MPCVD device according to claim 1, characterized in that: A partition is also provided in the cavity, and the microwave antenna, the baffle and the partition form a sealed chamber.

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