Czochralski method crystal growth furnace

Abstract

The utility model discloses a Czochralski method crystal growing furnace which comprises a fixed seat, a lower hearth is installed at the top of the fixed seat, a supporting plate is fixedly connected to the top of the fixed seat, and an upper hearth slides in the supporting plate through a lifting assembly. Mounting mechanisms are arranged on the two sides of the upper hearth and used for achieving mounting operation of the upper hearth, each mounting mechanism comprises a mounting assembly, each mounting assembly comprises a containing plate arranged in the corresponding supporting plate in a sliding mode and connecting bases mounted on the two sides of the upper hearth, and a sliding plate is connected to the interior of each containing plate in a sliding mode. According to the Czochralski-method crystal growing furnace, when crystals with different sizes are processed, the upper hearth can be replaced in time, so that the height required by growth is met, the growth size is increased, the mounting mechanism is arranged, the mounting and dismounting processes of the upper hearth are more convenient, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth, in particular to a Czochralski crystal growth furnace. Background Art

[0002] The reference patent name is: A crystal growth furnace using a pulling method (patent publication number: CN215713518U, patent publication date: 2022.02.01), comprising a lower furnace and an upper furnace that are overlapped, the bottom of the lower furnace is arranged on the furnace chassis, the furnace chassis is arranged on the furnace body bracket, and a furnace cover is arranged on the top of the upper furnace, and an installation platform is also arranged above the furnace cover, and the installation platform is arranged on the gantry, and two guide columns are arranged between the installation platform and the furnace body bracket. A pulling power device and two lifting assemblies are arranged on the installation platform, and the two guide columns and the two lifting assemblies are arranged in pairs. Lifting sleeves are sleeved on the two guide columns, and the lifting sleeves are connected to the lifting rods of the corresponding lifting assemblies. The two lifting sleeves are respectively connected to the furnace cover and the upper furnace through adapters, and the pulling power device is connected to the lifting rod.

[0003] However, when implementing the above technical scheme, there are the following problems: the above technical scheme can effectively utilize the internal space of the pulling furnace and is suitable for the growth of large and small-sized crystals. However, the upper furnace chamber in the above technical scheme is installed by means of an adapter and a plurality of sets of bolts. In the subsequent disassembly and replacement process, tools are still needed. The replacement process of the upper furnace chamber is relatively cumbersome and easily affects work efficiency. For this reason, the utility model provides a pulling method crystal growth furnace. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a Czochralski crystal growing furnace, which solves the problem that the upper furnace chamber in the existing Czochralski crystal growing furnace is installed by means of an adapter and a plurality of sets of bolts, and tools are needed during the subsequent disassembly and replacement process, making the replacement process of the upper furnace chamber rather cumbersome and easily affecting work efficiency.

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: a Czochralski crystal growth furnace, comprising a fixed seat, a lower furnace is installed on the top of the fixed seat, a support plate is fixedly connected to the top of the fixed seat, the interior of the support plate allows the upper furnace to slide through a lifting assembly, and installation mechanisms are provided on both sides of the upper furnace for implementing the installation operation of the upper furnace, and the installation mechanism includes:

[0006] The mounting assembly comprises a placement plate slidably arranged inside the support plate and a connecting seat installed on both sides of the upper furnace, wherein the interior of the placement plate is slidably connected to a sliding plate, a plurality of groups of tooth grooves are provided at the bottom of the sliding plate, a mounting block is fixedly connected to the top of the sliding plate via a connecting rod, and a surface of the mounting block is slidably connected to the interior of the connecting seat;

[0007] A control component is arranged inside the placement plate and is used to drive the installation block to slide;

[0008] The clamping assembly is arranged inside the connecting seat and is used to realize the fixing operation of the mounting block.

[0009] Preferably, the control assembly comprises a control rod rotatably mounted inside the placement plate, a control gear is fixedly connected to the surface of the control rod, and the surface of the control gear is meshed with the inner surface of the tooth groove.

[0010] Preferably, the snap-in assembly includes a snap-in rod slidably arranged inside the connecting seat, the top of the snap-in rod is fixedly connected to a snap-in plate, the inside of the snap-in plate is slidably connected to a limiting rod, the bottom end of the limiting rod is fixedly connected to the top of the connecting seat, the bottom of the snap-in plate is fixedly connected to a snap-in spring, and one end of the snap-in spring is fixedly connected to the top of the connecting seat.

[0011] Preferably, an inclined surface is provided on the top of the mounting block, a mounting hole is fixedly connected to the top of the mounting block, and an inner surface of the mounting hole is clamped with the bottom end of the clamping rod.

[0012] Preferably, a sealing groove is provided at the top of the lower furnace, and a sealing gasket is installed at the bottom of the upper furnace, and the surface of the sealing gasket is in contact with the inner surface of the sealing groove.

[0013] Preferably, the lifting assembly includes a lifting motor installed on the top of the support plate, one end of the output shaft of the lifting motor is fixedly connected to a screw rod through a coupling, the surface of the screw rod is rotatably connected to the inside of the support plate, the surface of the screw rod is threadedly connected to a lifting block, the surface of the lifting block is slidably connected to the inside of the support plate, and one side of the lifting block is fixedly connected to one side of the placement plate.

[0014] Beneficial Effects

[0015] The utility model provides a Czochralski crystal growth furnace. Compared with the prior art, it has the following beneficial effects:

[0016] (1) When processing crystals of different sizes, the upper furnace can be replaced in time by the Czochralski crystal growth furnace to meet the height required for growth and increase the growth size. By providing a mounting mechanism, the installation and disassembly process of the upper furnace is more convenient, thereby improving work efficiency.

[0017] (2) The Czochralski crystal growth furnace is provided with a clamping assembly to improve the stability of the upper furnace after installation, thereby preventing the upper furnace from shaking during the lifting process, affecting the sealing between the upper furnace and the lower furnace, and thus affecting the subsequent crystal growth quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic diagram of the external structure of the utility model;

[0019] Figure 2 It is a three-dimensional schematic diagram of the installation assembly of the utility model;

[0020] Figure 3 It is a three-dimensional schematic diagram of the control component of the utility model.

[0021] In the figure: 1-fixed seat, 2-lower furnace, 3-support plate, 4-lifting assembly, 41-lifting motor, 42-lifting block, 5-upper furnace, 6-installation mechanism, 61-installation assembly, 611-placing plate, 612-connecting seat, 613-sliding plate, 614-tooth groove, 615-installation block, 62-control assembly, 621-control rod, 622-control gear, 63-clamping assembly, 631-clamping rod, 632-clamping plate, 633-limiting rod, 634-clamping spring, 7-installation hole, 8-sealing groove, 9-sealing gasket. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-3 , the utility model provides two technical solutions:

[0024] Embodiment 1

[0025] A crystal growth furnace using a Czochralski method comprises a fixed seat 1, a lower furnace 2 is installed on the top of the fixed seat 1, a heater, a heat insulating layer and a crucible are installed inside the lower furnace 2, a support plate 3 is fixedly connected to the top of the fixed seat 1, a pulling power device is installed on the top of the support plate 3, a pulling rod is connected inside the pulling power device, the pulling power device is used to drive the lifting and rotation of the lifting rod, and can also weigh it, a seed crystal rod is installed at the bottom end of the lifting rod, the seed crystal rod is used for crystal growth, slide grooves are provided on both sides of the support plate 3, a lifting block 42 slides on the inner surface of the slide groove, an upper furnace 5 slides inside the support plate 3 through a lifting assembly 4, and mounting mechanisms 6 are provided on both sides of the upper furnace 5 for realizing the installation operation of the upper furnace 5, and the mounting mechanism 6 comprises:

[0026] The mounting assembly 61 includes a placement plate 611 slidably disposed inside the support plate 3 and a connection seat 612 installed on both sides of the upper furnace 5. The placement plate 611 is slidably connected to a sliding plate 613 inside. The bottom of the sliding plate 613 is provided with a plurality of tooth grooves 614. The top of the sliding plate 613 is fixedly connected to a mounting block 615 through a connecting rod. The top of the mounting block 615 is provided with an inclined surface. The surface of the mounting block 615 is slidably connected to the inside of the connection seat 612.

[0027] The control assembly 62 is disposed inside the placement plate 611 and is used to drive the mounting block 615 to slide;

[0028] The clamping assembly 63 is arranged inside the connecting seat 612, and is used to realize the fixing operation of the mounting block 615. The control assembly 62 includes a control rod 621 rotatably installed inside the placing plate 611. The surface of the control rod 621 is fixedly connected with a control gear 622. The surface of the control gear 622 is meshed with the inner surface of the tooth groove 614. When processing crystals of different sizes, the upper furnace 5 can be replaced in time to meet the height required for growth and increase the growth size. By providing the mounting mechanism 6, the process of installing and disassembling the upper furnace 5 is also more convenient, thereby improving work efficiency.

[0029] Embodiment 2

[0030] The main difference from the first embodiment is:

[0031] A crystal growth furnace using a Czochralski method, wherein a clamping assembly 63 includes a clamping rod 631 slidably arranged inside a connecting seat 612, a clamping plate 632 is fixedly connected to the top of the clamping rod 631, a limiting rod 633 is slidably connected to the inside of the clamping plate 632, a bottom end of the limiting rod 633 is fixedly connected to the top of the connecting seat 612, a clamping spring 634 is fixedly connected to the bottom of the clamping plate 632, and the clamping spring 634 ensures that the bottom end of the clamping rod 632 is always clamped to the inner surface of a mounting block 7 without being affected by external forces, one end of the clamping spring 634 is fixedly connected to the top of the connecting seat 612, an inclined surface is provided on the top of the mounting block 615, a mounting hole 7 is fixedly connected to the top of the mounting block 615, the inner surface of the mounting hole 7 is clamped to the bottom end of the clamping rod 631, a sealing groove 8 is provided on the top of the lower furnace 2, a sealing gasket 9 is installed on the bottom of the upper furnace 5, and the surface of the sealing gasket 9 is connected to the sealing groove 8 The inner surface of the lifting assembly 4 is in contact with the lifting plate 3. The lifting assembly 4 includes a lifting motor 41 installed on the top of the support plate 3. The lifting assembly 4 is provided with two groups. The lifting motor 41 is a three-phase asynchronous motor. The lifting motor 41 is connected to the external circuit through wires. One end of the output shaft of the lifting motor 41 is fixedly connected to a screw through a coupling. The surface of the screw is rotatably connected to the inside of the support plate 3. The surface of the screw is threadedly connected to a lifting block 42. The surface of the lifting block 42 is slidably connected to the inside of the support plate 3. One side of the lifting block 42 is fixedly connected to one side of the placement plate 611. By providing a clamping assembly 63, the stability of the upper furnace chamber 5 after installation is improved, thereby avoiding shaking of the upper furnace chamber 5 during the lifting process, affecting the sealing between the upper furnace chamber 5 and the lower furnace chamber 2, thereby affecting the subsequent crystal growth quality. At the same time, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0032] Before work, when producing crystals of different sizes, it is necessary to install the upper furnace 5, by placing the connecting seats 612 on both sides of the upper furnace 5 on the surface of the placement plate 611, and then rotating the control rod 621 to drive the control gear 622 to rotate, and the rotation of the control gear 622 causes the sliding plate 613 to slide inside the placement plate 611, so that the connecting rod and the mounting block 615 slide synchronously, and the mounting block 615 slides to the inside of the connecting seat 612. At this time, the bottom end of the clamping rod 631 slides with the inclined surface at the top of the mounting block 615, and slides to the inside of the mounting hole 7 to achieve clamping, so as to achieve the upper furnace For the quick installation of the furnace 5, when the upper furnace 5 needs to be disassembled, it is only necessary to pull the clamping plate 632 to separate the clamping rod 631 from the mounting hole 7, and rotate the control rod 621 in the opposite direction to make the mounting block 615 slide out of the connecting seat 612. During operation, by starting the lifting motor 41 and rotating the screw rod, the lifting blocks 42 on both sides slide inside the support plate 3, thereby driving the placement plate 611, the connecting seat 612 and the upper furnace 5 to slide downward, so that the sealing gasket 9 slides to the inner surface of the sealing groove 8, so that the upper furnace 5 and the lower furnace 2 are fully fitted and kept sealed, thereby facilitating subsequent crystal growth operations.

[0033] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0034] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A Czochralski crystal growth furnace, comprising a fixed base (1), characterized in that: A lower furnace (2) is installed on the top of the fixing seat (1), a support plate (3) is fixedly connected to the top of the fixing seat (1), the interior of the support plate (3) enables the upper furnace (5) to slide via a lifting assembly (4), and mounting mechanisms (6) are provided on both sides of the upper furnace (5) for implementing the mounting operation of the upper furnace (5), and the mounting mechanisms (6) include: The mounting assembly (61) comprises a placement plate (611) slidably arranged inside the support plate (3) and a connecting seat (612) installed on both sides of the upper furnace (5); the placement plate (611) is slidably connected to a sliding plate (613) inside, a plurality of groups of tooth grooves (614) are provided at the bottom of the sliding plate (613), a mounting block (615) is fixedly connected to the top of the sliding plate (613) via a connecting rod, and a surface of the mounting block (615) is slidably connected to the inside of the connecting seat (612); A control assembly (62) is disposed inside the placement plate (611) and is used to drive the installation block (615) to slide; The clamping assembly (63) is arranged inside the connecting seat (612) and is used to implement the fixing operation of the mounting block (615).

2. The Czochralski crystal growth furnace according to claim 1, characterized in that: The control assembly (62) includes a control rod (621) rotatably mounted inside the placement plate (611), the surface of the control rod (621) is fixedly connected to a control gear (622), and the surface of the control gear (622) is meshed with the inner surface of the tooth groove (614).

3. The Czochralski crystal growth furnace according to claim 1, characterized in that: The snap-in assembly (63) includes a snap-in rod (631) slidably arranged inside the connecting seat (612); the top end of the snap-in rod (631) is fixedly connected to a snap-in plate (632); the inside of the snap-in plate (632) is slidably connected to a limiting rod (633); the bottom end of the limiting rod (633) is fixedly connected to the top of the connecting seat (612); the bottom of the snap-in plate (632) is fixedly connected to a snap-in spring (634); one end of the snap-in spring (634) is fixedly connected to the top of the connecting seat (612).

4. The Czochralski crystal growth furnace according to claim 3, characterized in that: The top of the mounting block (615) is provided with an inclined surface, and the top of the mounting block (615) is fixedly connected with a mounting hole (7), and the inner surface of the mounting hole (7) is clamped with the bottom end of the clamping rod (631).

5. The Czochralski crystal growth furnace according to claim 1, characterized in that: A sealing groove (8) is provided at the top of the lower furnace (2), and a sealing gasket (9) is installed at the bottom of the upper furnace (5), and the surface of the sealing gasket (9) is in contact with the inner surface of the sealing groove (8).

6. The Czochralski crystal growth furnace according to claim 1, characterized in that: The lifting assembly (4) comprises a lifting motor (41) installed on the top of the support plate (3); one end of the output shaft of the lifting motor (41) is fixedly connected to a screw rod via a coupling; the surface of the screw rod is rotationally connected to the inside of the support plate (3); the surface of the screw rod is threadedly connected to a lifting block (42); the surface of the lifting block (42) is slidably connected to the inside of the support plate (3); and one side of the lifting block (42) is fixedly connected to one side of the placement plate (611).

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