Crystal furnace observation window assembly

Abstract

The utility model discloses a crystal furnace observation window assembly, and relates to the field of artificial crystal growth, the crystal furnace observation window assembly comprises a first observation window assembly and a second observation window assembly, the front lower part of the first observation window assembly is provided with an inner layer first observation hole, and the rear upper part of the first observation window assembly is provided with an inner layer second observation hole; the front upper end of the second observation window assembly is provided with an outer-layer first observation hole, and the top end is provided with an outer-layer second observation hole; the observation hole is through to form an obliquely upward observation channel for an operator to observe the page state of the seed crystal and the melt; a first window mirror is arranged in the outer-layer second observation hole, and a second window mirror is arranged at the coupling position of the outer-layer first observation hole and the inner-layer second observation hole, so that the external environment temperature is prevented from influencing the temperature in the crystal furnace. According to the utility model, an operator can observe the states of seed crystals and melt liquid level in an upper observation mode when performing inoculation operation, the inoculation operation is convenient, and the influence on the temperature in the furnace chamber of the crystal furnace is small.

Description

Technical Field

[0001] The utility model relates to the field of artificial crystal growth, in particular to a crystal furnace observation window component. Background Art

[0002] The Czochralski crystal growth method using medium frequency induction heating during inoculation is a key technical process. During the inoculation operation, the staff needs to carefully observe the molten state of the seed crystal and the raw material through the observation window to adjust the appropriate inoculation temperature.

[0003] There are two ways to observe the growth of crystals by the Czochralski method, one is the top observation method and the other is the side observation method. The observation window of the top observation method has a relatively small effect on the overall temperature field of crystal growth and can better maintain the stability of the temperature field. However, the top observation method is not easy to observe the state of the seed crystal and the melt surface, which is inconvenient when performing inoculation operations and has high requirements for operators; the side observation method can be observed more conveniently, and the operator can observe the state of the seed crystal and the melt surface when performing inoculation operations. However, the current side observation method has a relatively large effect on the overall temperature field of crystal growth, which is not conducive to the growth of artificial crystals.

[0004] For this purpose, we propose a crystal furnace observation window. Utility Model Content

[0005] In view of this, the utility model provides a crystal furnace observation window assembly, which is used to solve the problem in the prior art that the upper observation method is difficult to operate and the side observation method observation window has a great influence on the furnace chamber temperature. By providing a new type of observation window assembly, the operator can observe the state of the seed crystal and the melt liquid level when performing the inoculation operation, the inoculation operation is convenient, and at the same time, the impact on the temperature in the crystal furnace chamber is small.

[0006] The application concept of the utility model is: an upward oblique observation channel is arranged in a crystal furnace observation window assembly, and a heat-insulating window mirror is arranged in the observation hole of the observation window to reduce the influence of the ambient temperature on the temperature in the crystal furnace cavity.

[0007] According to the general inventive concept, the utility model achieves the above-mentioned purpose through the following technical solutions:

[0008] A crystal furnace observation window assembly comprises:

[0009] A first observation window assembly, wherein the first observation window assembly is in the shape of a "convex" character, with a curved surface on the front side and a protrusion on the rear side;

[0010] A second observation window assembly, the second observation window assembly is in the shape of a Chinese character "concave", and the front side of the second observation window assembly is a groove corresponding to the protrusion of the first observation window assembly;

[0011] An inner first observation hole, the inner first observation hole being arranged at the lower end of the arc surface of the first observation window assembly;

[0012] An inner second observation hole, the inner second observation hole being arranged at the upper end of the protrusion of the first observation window assembly;

[0013] An outer first observation hole, the outer first observation hole is arranged at the upper end of the groove of the second observation window assembly;

[0014] An outer second observation hole, the outer second observation hole is arranged at the top of the second observation window assembly;

[0015] The first inner layer observation hole is connected to the second inner layer observation hole; the first outer layer observation hole is connected to the second outer layer observation hole; the second inner layer observation hole is arranged corresponding to the first outer layer observation hole;

[0016] The first viewing window assembly is coupled to the second viewing window assembly.

[0017] a first window mirror, the first window mirror being coupled to the outer second observation hole;

[0018] A second window mirror, wherein the second window mirror is arranged at the coupling position between the first observation window assembly and the second observation window assembly.

[0019] Furthermore, the first observation window assembly and the second observation window assembly are made of heat-insulating materials.

[0020] Furthermore, the first window mirror is a sapphire lens.

[0021] Furthermore, the protrusion of the first observation window assembly is inserted into the corresponding groove of the second observation window assembly for coupling.

[0022] Furthermore, the crystal furnace observation window assembly is finally fixed on the crystal furnace by a molybdenum wire or a tungsten wire.

[0023] The crystal furnace observation window assembly proposed by the utility model can bring the following positive and progressive effects:

[0024] 1. It can maintain the stability of the temperature gradient of the crystal growth temperature field, which is conducive to the growth of high-quality crystals.

[0025] 2. Effectively improve the inconvenience of inoculation operation caused by the above observation method, make the inoculation operation simpler and more convenient, reduce the time cost of crystal growth, and improve the efficiency of crystal growth.

[0026] 3. Choose appropriate observation window materials. The observation window structure is not prone to cracking during the crystal growth process and can be used repeatedly.

[0027] 4. Effectively reduce the overall impact of the existing side observation method on the crystal growth temperature field. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0029] In the attached picture:

[0030] Figure 1 It is a three-dimensional schematic diagram of a crystal furnace observation window assembly of the utility model;

[0031] Figure 2 It is a three-dimensional schematic diagram of a second observation window assembly of a crystal furnace observation window assembly of the utility model;

[0032] Figure 3 It is a right front view of a stereoscopic view of a first observation window assembly of a crystal furnace observation window assembly of the utility model;

[0033] Figure 4 It is a right rear view of a stereoscopic diagram of a first observation window assembly of a crystal furnace observation window assembly of the utility model;

[0034] Figure 5 This is a schematic diagram of a first window mirror of a crystal furnace observation window assembly of the utility model;

[0035] Figure 6 This is a schematic diagram of a second window mirror of a crystal furnace observation window assembly of the utility model;

[0036] The corresponding component names of each figure mark in the accompanying drawings are: 1. first observation window assembly; 2. second observation window assembly; 3. first window mirror; 4. second window mirror; 11. inner layer first observation hole; 12. inner layer second observation hole; 21. outer layer second observation hole; 22. outer layer first observation hole. DETAILED DESCRIPTION

[0037] In order to more clearly explain the overall concept of the utility model, the following is a detailed description in the form of examples in conjunction with the drawings of the specification. In the description of the utility model, it should be understood that the terms, "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "right front", "right back" and the like indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features, unless otherwise clearly and specifically defined.

[0039] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly specified and limited, the first feature "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. In the description of this specification, the description of reference terms "one scheme", "some schemes", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the scheme or example are included in at least one scheme or example of the present utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same scheme or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more schemes or examples.

[0041] like Figure 1 to Figure 5 As shown, the crystal furnace observation window assembly includes a first observation window assembly 1 and a second observation window assembly 2 that are fixedly connected. A protrusion is set at the rear end of the first observation window assembly 1, and a groove is set at the front end of the second observation window assembly 2 corresponding to the protrusion of the first observation window assembly 1. The protrusion of the first observation window assembly 1 is inserted into the groove of the second observation window assembly 2.

[0042] The front end of the first observation window assembly 1 is arranged in an arc shape so as to allow the observation window assembly to fit tightly with the furnace of crystal growth.

[0043] An inner first observation hole 11 is arranged at the lower arc-shaped end of the front end of the first observation window assembly 1, and an inner second observation hole 12 is arranged at the convex upper end of the first observation window assembly 1. The inner first observation hole 11 and the inner second observation hole 12 are connected to form an inner observation channel.

[0044] An outer first observation hole 22 is arranged at the upper end of the front end groove of the second observation window assembly 2, and an outer second observation hole 21 is arranged at the upper end of the second observation window assembly 2. The outer first observation hole 22 and the outer second observation hole 21 are connected to form an outer observation channel.

[0045] The inner second observation hole 12 and the outer first observation hole 22 are arranged correspondingly, and the inner observation channel and the outer observation channel are connected and connected.

[0046] A first window mirror 3 is arranged in the outer second observation hole 21, and the first window mirror 3 is coupled with the outer second observation hole 21; a second window mirror 4 is arranged at the coupling point between the outer second observation hole 21 and the inner second observation hole 12, and both the first window mirror 3 and the second window mirror 4 are high-transmittance, high-temperature resistant sapphire lenses.

[0047] The first observation window assembly 1 and the second observation window assembly 2 are made of the same material, and are both made of thermal insulation materials such as alumina thermal insulation materials, alumina ball thermal insulation materials, mullite, zirconia thermal insulation materials, and zirconia thermal insulation materials.

[0048] The crystal furnace observation window assembly is finally fixed to the crystal furnace as a whole through a molybdenum wire or a tungsten wire.

[0049] like Figure 5 As shown, the first window mirror 3 is in a right-angle trapezoidal shape, and its size is just the same as the outer second observation hole 21. The first window mirror 3 is arranged in the second outer observation hole to prevent the temperature of the external environment from being transmitted to the inside of the furnace cavity through the observation channel, thereby affecting the crystal growth environment temperature in the crystal furnace cavity.

[0050] Working principle: Through the observation channel formed by the inner first observation hole 11, the inner second observation hole 12, the outer first observation hole 22, and the outer second observation hole 21, the state of the seed crystal and the raw material melt can be observed in this way, so that the operator can complete the inoculation step conveniently and quickly, reduce the time cost of crystal growth, and improve the crystal growth efficiency.

[0051] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0052] The above description is only an embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention shall be included in the scope of the claims of the present invention.

Claims

1. A crystal furnace observation window assembly, characterized in that: The crystal furnace observation window assembly comprises: A first observation window assembly (1), the first observation window assembly (1) being in the shape of a "convex" character, with a curved surface on the front side and a protrusion on the rear side; A second observation window assembly (2), the second observation window assembly (2) being in the shape of a Chinese character "concave", the front side of which is a concave groove arranged corresponding to the protrusion of the first observation window assembly (1); An inner first observation hole (11), the inner first observation hole (11) being arranged at the lower end of the arc surface of the first observation window assembly (1); An inner second observation hole (12), the inner second observation hole (12) being arranged at the raised upper end of the first observation window assembly (1); An outer first observation hole (22), the outer first observation hole (22) being arranged at an upper end of the groove of the second observation window assembly (2); An outer second observation hole (21), wherein the outer second observation hole (21) is arranged at the top end of the second observation window assembly (2); The inner layer first observation hole (11) is connected to the inner layer second observation hole (12); the outer layer first observation hole (22) is connected to the outer layer second observation hole (21); the inner layer second observation hole (12) is arranged corresponding to the outer layer first observation hole (22); The first observation window assembly (1) is coupled to the second observation window assembly (2); A first window mirror (3), the first window mirror (3) being coupled to the outer second observation hole (21); A second window mirror (4), wherein the second window mirror (4) is arranged at a coupling point between the first observation window assembly (1) and the second observation window assembly (2).

2. A crystal furnace observation window assembly according to claim 1, characterized in that The first observation window assembly (1) and the second observation window assembly (2) are made of heat-insulating material.

3. A crystal furnace observation window assembly according to claim 1, characterized in that The first window mirror (3) and the second window mirror (4) are sapphire lenses.

4. A crystal furnace observation window assembly according to claim 1, characterized in that The protrusion of the first observation window component (1) is inserted into a corresponding groove of the second observation window component (2) for coupling.

5. A crystal furnace observation window assembly according to claim 1, characterized in that The crystal furnace observation window assembly is finally fixed on the crystal furnace by a molybdenum wire or a tungsten wire.

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