Silicon carbide crystal growth furnace

Abstract

The utility model discloses a silicon carbide crystal growth furnace and relates to the field of silicon carbide production equipment. The silicon carbide crystal growth furnace comprises a furnace body, a furnace cover and a locking assembly, the furnace cover covers the furnace body, the locking assembly comprises a locking driving piece and a clamping jaw, the locking driving piece is arranged on the furnace cover, and the clamping jaw is connected with the locking driving piece and used for clamping the furnace body or releasing clamping of the furnace body under driving of the locking driving piece. According to the silicon carbide crystal growth furnace provided by the utility model, the cover opening and closing operation can be conveniently and quickly completed, and time and labor are saved.

Description

Technical Field

[0001] The utility model relates to the field of silicon carbide production equipment, in particular to a silicon carbide crystal growth furnace. Background Art

[0002] At present, the silicon carbide crystal growth furnace on the market includes a furnace cover and a furnace body. After the furnace cover is closed on the furnace body, it is necessary to lock the furnace cover and the furnace body through a combination of multiple bolts and nuts distributed around the periphery, which makes the opening and closing operations cumbersome, complicated, time-consuming and labor-intensive. Utility Model Content

[0003] The utility model aims to provide a silicon carbide crystal growth furnace, which can conveniently and quickly complete the cover opening and closing operations, saving time and labor.

[0004] The embodiment of the utility model provides a technical solution:

[0005] A silicon carbide crystal growth furnace comprises a furnace body, a furnace cover and a locking assembly, wherein the furnace cover is covered on the furnace body, and the locking assembly comprises a locking drive and a claw, wherein the locking drive is arranged on the furnace cover, and the claw is connected to the locking drive and is used to clamp the furnace body or release the clamping of the furnace body under the drive of the locking drive.

[0006] In an optional embodiment, the top peripheral edge of the furnace body is folded outward to form a holding skirt, the locking drive is arranged on the upper surface of the furnace cover, one end of the claw is connected to the locking drive, and the other end extends downward from the outer edge of the furnace cover to the bottom of the holding skirt, and the locking drive is used to drive the claw to move in the radial direction of the furnace body to selectively hold the holding skirt.

[0007] In an optional embodiment, the claw includes a connecting section and a holding section, one end of the connecting section is connected to the locking drive member, and the other end extends vertically downward to the bottom of the holding skirt and connected to one end of the holding section, and the other end of the holding section extends horizontally in a direction close to the furnace body.

[0008] In an optional embodiment, the silicon carbide crystal growth furnace further includes a flip cover assembly, which is disposed on the furnace body and connected to the furnace cover, and is used to drive the furnace cover to flip in a vertical plane to open or cover the furnace body.

[0009] In an optional embodiment, the flip cover assembly includes a flip cover drive and a flip cover arm, wherein the flip cover drive is disposed on the furnace body and is transmission-connected to one end of the flip cover arm, and the other end of the flip cover arm is connected to the furnace cover, and the flip cover arm is used to drive the furnace cover to flip under the drive of the flip cover drive.

[0010] In an optional embodiment, the flip cover driving member is a rotary motor, the flip cover assembly further comprises a phase-changing coupling, the rotating shaft of the rotary motor extends in a vertical direction, and the rotating shaft of the rotary motor is connected to the flip cover arm via the phase-changing coupling.

[0011] In an optional embodiment, the silicon carbide crystal growth furnace also includes a controller, which is electrically connected to the locking drive component and the flip cover drive component respectively, and the controller is used to control the locking drive component to drive the claw to release the grip of the furnace body according to user instructions, and then control the flip cover drive component to drive the flip cover arm to drive the furnace cover to flip over to open the furnace body.

[0012] In an optional embodiment, there are multiple locking assemblies, and the multiple locking assemblies are evenly distributed around the periphery of the furnace cover.

[0013] In an optional embodiment, the locking drive member is a linear motor for driving the claw to move in the radial direction of the furnace body.

[0014] Compared with the prior art, the silicon carbide crystal growth furnace provided by the utility model, after the furnace cover is closed on the furnace body, the locking drive member provided on the furnace body drives the claws to clamp the furnace body, thereby automatically completing the locking of the furnace cover on the furnace body. When the cover needs to be opened, the locking drive member drives the claws to release the clamping of the furnace body, thereby releasing the lock on the furnace cover, and the furnace cover can be opened smoothly. It can be seen that the locking and unlocking of the furnace cover and the furnace body are automatically completed, and there is no need for manual tightening of multiple bolts. Therefore, the beneficial effects of the silicon carbide crystal growth furnace provided by the utility model include: the operation of opening and closing the cover can be completed conveniently and quickly, saving time and effort. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the utility model and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative work.

[0016] Figure 1 A schematic structural diagram of a silicon carbide crystal growth furnace provided in an embodiment of the utility model at a first viewing angle;

[0017] Figure 2 A schematic structural diagram of a silicon carbide crystal growth furnace provided in an embodiment of the utility model at a second viewing angle;

[0018] Figure 3 A schematic structural diagram of a silicon carbide crystal growth furnace provided in an embodiment of the utility model from a third viewing angle.

[0019] Icons: 100-silicon carbide crystal growth furnace; 110-furnace body; 111-clamping skirt; 120-furnace cover; 130-locking assembly; 131-locking drive; 132-claw; 1321-connecting section; 1322-clamping section; 140-flip cover assembly; 141-flip cover drive; 142-flip cover arm; 143-disguised coupling. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0023] In the description of the present utility model, it should be understood that the terms "upper", "lower", "inside", "outside", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are directions or positional relationships in which the utility model product is usually placed when in use, or are directions or positional relationships that are usually understood by those skilled in the art. These directions or positional relationships are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present utility model.

[0024] Furthermore, the terms “first”, “second”, etc. are merely used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0025] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms such as "setting" and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] The specific implementation of the utility model is described in detail below in conjunction with the accompanying drawings.

[0027] Example

[0028] Please refer to Figure 1 , Figure 2 and Figure 3 , Figure 1 FIG. 1 is a schematic structural diagram of a silicon carbide crystal growth furnace 100 provided in this embodiment at a first viewing angle. Figure 2 FIG. 1 is a schematic structural diagram of the silicon carbide crystal growth furnace 100 at a second viewing angle. Figure 3 Shown is a schematic structural diagram of the silicon carbide crystal growth furnace 100 at a third viewing angle.

[0029] The silicon carbide crystal growth furnace 100 provided in this embodiment includes a furnace body 110, a furnace cover 120 and a locking assembly 130. The furnace cover 120 covers the furnace body 110. The locking assembly 130 includes a locking drive 131 and a claw 132. The locking drive 131 is arranged on the furnace cover 120. The claw 132 is connected to the locking drive 131, and is used for clamping the furnace body 110 or releasing the clamping of the furnace body 110 under the drive of the locking drive 131.

[0030] In actual application, when the furnace cover 120 is closed on the furnace body 110, the locking driving member 131 drives the claw 132 to move to engage with the furnace body 110, thereby completing the locking of the furnace cover 120 on the furnace body 110. When the cover is opened, the locking driving member 131 drives the claw 132 to move to release the engagement with the furnace body 110, thereby completing the unlocking of the furnace cover 120 on the furnace body 110, and the furnace cover 120 can be opened smoothly.

[0031] The top periphery of the furnace body 110 is folded outward to form a holding skirt 111. The locking drive 131 is arranged on the upper surface of the furnace cover 120. One end of the claw 132 is connected to the locking drive 131, and the other end extends downward from the outer edge of the furnace cover 120 to the bottom of the holding skirt 111. The locking drive 131 is used to drive the claw 132 to move in the radial direction of the furnace body 110 to selectively hold the holding skirt 111.

[0032] It is understandable that after the furnace cover 120 is covered on the furnace body 110 and before the locking drive 131 is activated, the claw 132 is outside the holding skirt 111. When the locking drive 131 is activated, the claw 132 is driven by the locking drive 131 to gradually move closer to the furnace body 110 in the radial direction of the furnace body 110. After the claw 132 moves to hold the lower side wall of the holding skirt 111, the locking drive 131 stops, and the furnace cover 120 and the furnace body 110 are locked.

[0033] When the cover needs to be opened, the locking drive member 131 is started, and the driving claw 132 is gradually moved away from the furnace body 110 in the radial direction of the furnace body 110 until the clamping of the clamping skirt 111 is released. It can be understood that in the unlocked state, the clamping claw 132 is outside the clamping skirt 111 in the radial direction of the furnace body 110.

[0034] In fact, the claw 132 in this embodiment is L-shaped, including a connecting section 1321 and a holding section 1322. One end of the connecting section 1321 is connected to the locking drive member 131, and the other end extends vertically downward to the bottom of the holding skirt 111 and connected to one end of the holding section 1322. The other end of the holding section 1322 extends horizontally in the direction close to the furnace body 110.

[0035] It can be understood that, regardless of the locked state or the unlocked state, the clamping section 1322 is always located below the clamping skirt 111 in the vertical direction. In the unlocked state, the clamping section 1322 and the locking skirt are misaligned in the vertical direction. During the locking process, the locking drive 131 pulls the connecting section 1321 to drive the clamping section 1322 to gradually approach the furnace body 110 along the radial direction of the furnace body 110 until at least part of the clamping section 1322 is aligned with the clamping skirt 111 in the vertical direction.

[0036] In fact, there are multiple locking assemblies 130 in this embodiment, and the multiple locking assemblies 130 are evenly distributed around the periphery of the furnace cover 120. The multiple locking assemblies 130 together play a role in locking the furnace cover 120 on the furnace body 110, ensuring that the locking structure is stable and reliable.

[0037] In this embodiment, the locking drive member 131 is a linear motor, which is used to drive the claw 132 to move in the radial direction of the furnace body 110. The telescopic end of the linear motor extends in the radial direction of the furnace cover 120 to the outside of the periphery of the furnace cover 120 and is connected to the end of the connecting section 1321 of the claw 132 away from the clamping section 1322. The telescopic ends of the locking drive members 131 corresponding to the multiple locking assemblies 130 all point to the center of the furnace cover 120 in the radial direction of the furnace cover 120. In other embodiments, according to actual application conditions, other locking drive members 131 with linear driving capabilities can also be selected, such as cylinders, oil cylinders, etc.

[0038] Moreover, in this embodiment, each locking assembly 130 is a combination of a locking drive 131 and a claw 132. In other embodiments, in order to improve the consistency of locking and unlocking actions and save costs, only one locking assembly 130 may be configured, and the locking assembly 130 may be a combination of a locking drive 131 and a plurality of claws 132, and the plurality of claws 132 are evenly distributed on the periphery of the furnace cover 120. The locking drive 131 is in transmission connection with the plurality of claws 132, and can drive the plurality of claws 132 to move synchronously, so as to complete the synchronous locking and unlocking of the furnace cover 120 at a plurality of positions on the furnace body 110.

[0039] In order to facilitate opening of the furnace cover 120, the silicon carbide crystal growth furnace 100 provided in this embodiment further includes a flip cover assembly 140, which is disposed on the furnace body 110 and connected to the furnace cover 120, and is used to drive the furnace cover 120 to flip in a vertical plane to open or cover the furnace body 110. In actual application, after the multiple locking assemblies 130 complete unlocking of the furnace cover 120, the flip cover assembly 140 drives the furnace cover 120 to flip in a vertical plane to open the furnace body 110, and the operator can directly take out the crucible from the open furnace body 110.

[0040] In this embodiment, the flip cover assembly 140 includes a flip cover drive 141 and a flip cover arm 142. The flip cover drive 141 is arranged on the furnace body 110 and is transmission-connected to one end of the flip cover arm 142. The other end of the flip cover arm 142 is connected to the furnace cover 120. The flip cover arm 142 is used to drive the furnace cover 120 to flip under the drive of the flip cover drive 141.

[0041] Specifically, the flip cover driving member 141 is a rotary motor, and the flip cover assembly 140 further includes a phase-changing coupling 143 . The rotating shaft of the rotary motor extends in the vertical direction, and the rotating shaft of the rotary motor is connected to the flip cover arm 142 through the phase-changing coupling 143 .

[0042] In fact, the rotary motor is arranged on the furnace body 110 below the holding skirt 111, and the rotary shaft of the rotary motor extends vertically upward from the outside of the holding skirt 111 to the top of the holding skirt 111 and is connected to the phase-changing coupling 143. When the rotary motor is running, its rotary shaft rotates in the horizontal direction, which is converted into a force on the flip cover arm 142 in the vertical plane through the phase-changing coupling 143, so that the flip cover arm 142 can rotate in the vertical plane with the phase-changing coupling 143 as the center line, driving the furnace cover 120 to move relative to the furnace body 110, thereby switching between the box cover and the open cover state.

[0043] In addition, the silicon carbide crystal growth furnace 100 provided in this embodiment also includes a controller, which is electrically connected to the locking drive component 131 and the flip cover drive component 141 respectively. The controller is used to control the locking drive component 131 to drive the claw 132 to release the clamping of the furnace body 110 according to user instructions, and then control the flip cover drive component 141 to drive the flip cover arm 142 to drive the furnace cover 120 to flip over to open the furnace body 110.

[0044] It can be seen that in this embodiment, the locking and unlocking actions of the furnace cover 120 and the closing and opening actions of the furnace cover 120 are all automated processes controlled by the controller. The entire process does not require human participation, saves time and effort, and can significantly improve the production efficiency of silicon carbide crystals.

[0045] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A silicon carbide crystal growth furnace, characterized in that: The invention comprises a furnace body (110), a furnace cover (120) and a locking assembly (130), wherein the furnace cover (120) covers the furnace body (110), and the locking assembly (130) comprises a locking driving member (131) and a clamping claw (132), wherein the locking driving member (131) is arranged on the furnace cover (120), and the clamping claw (132) is connected to the locking driving member (131) and is used for clamping the furnace body (110) or releasing the clamping of the furnace body (110) under the drive of the locking driving member (131).

2. The silicon carbide crystal growth furnace according to claim 1, characterized in that: The top periphery of the furnace body (110) is folded outward to form a holding skirt (111); the locking drive member (131) is arranged on the upper surface of the furnace cover (120); one end of the clamping claw (132) is connected to the locking drive member (131), and the other end extends downward from the outer edge of the furnace cover (120) to the bottom of the holding skirt (111); the locking drive member (131) is used to drive the clamping claw (132) to move in the radial direction of the furnace body (110) to selectively hold the holding skirt (111).

3. The silicon carbide crystal growth furnace according to claim 2, characterized in that: The clamping claw (132) comprises a connecting section (1321) and a holding section (1322); one end of the connecting section (1321) is connected to the locking drive member (131), and the other end extends vertically downward to the bottom of the holding skirt (111) and is connected to one end of the holding section (1322); the other end of the holding section (1322) extends horizontally in a direction close to the furnace body (110).

4. The silicon carbide crystal growth furnace according to claim 1, characterized in that: The silicon carbide crystal growth furnace (100) further comprises a flip cover assembly (140), which is arranged on the furnace body (110) and connected to the furnace cover (120) and is used to drive the furnace cover (120) to flip in a vertical plane to open or cover the furnace body (110).

5. The silicon carbide crystal growth furnace according to claim 4, characterized in that: The flip cover assembly (140) comprises a flip cover driving member (141) and a flip cover arm (142); the flip cover driving member (141) is arranged on the furnace body (110) and is drivingly connected to one end of the flip cover arm (142); the other end of the flip cover arm (142) is connected to the furnace cover (120); the flip cover arm (142) is used to drive the furnace cover (120) to flip under the drive of the flip cover driving member (141).

6. The silicon carbide crystal growth furnace according to claim 5, characterized in that: The flip cover driving member (141) is a rotating motor, and the flip cover assembly (140) further comprises a phase-changing coupling (143). The rotating shaft of the rotating motor extends in a vertical direction, and the rotating shaft of the rotating motor is connected to the flip cover arm (142) via the phase-changing coupling (143).

7. The silicon carbide crystal growth furnace according to claim 5, characterized in that: The silicon carbide crystal growth furnace (100) also includes a controller, which is electrically connected to the locking drive member (131) and the flip cover drive member (141) respectively. The controller is used to control the locking drive member (131) to drive the claw (132) to release the grip on the furnace body (110) according to user instructions, and then control the flip cover drive member (141) to drive the flip cover arm (142) to drive the furnace cover (120) to flip over so as to open the furnace body (110).

8. The silicon carbide crystal growth furnace according to claim 1, characterized in that: There are multiple locking assemblies (130), and the multiple locking assemblies (130) are evenly distributed around the periphery of the furnace cover (120).

9. The silicon carbide crystal growth furnace according to claim 1, characterized in that: The locking drive member (131) is a linear motor, used for driving the claw (132) to move in the radial direction of the furnace body (110).

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