Combined device for buffering and conveying waste liquid of semiconductor equipment

Abstract

The utility model discloses a combined device for buffering and conveying waste liquid of semiconductor equipment, which is applied to the field of product manufacturing in the semiconductor industry and is used for blocking the waste liquid through a fixed disc, so that the waste liquid flows into a channel between a mounting cover and the fixed disc through a through hole; after impurities in the waste liquid are filtered through the filtering cotton sleeve, the mounting cover is opened, and no shielding object is arranged on the periphery of the filtering cotton sleeve, so that the impurities are relatively convenient to scrape, the impurities in the pipeline are convenient to clean, and the practicability is improved; when waste liquid flows on the surfaces of the first spiral disc and the second spiral disc, the first spiral disc and the second spiral disc block the waste liquid, so that the flowing directions of the waste liquid are opposite, the flowing speed of the waste liquid is buffered, damage to a pipeline is reduced, and the service life of the pipeline is prolonged.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor industry product manufacturing, and particularly relates to a combined device for buffering and transmitting waste liquid of semiconductor equipment. Background Art

[0002] In the semiconductor industry, the processing of electronic components usually produces a large amount of waste liquid, which contains a large amount of impurities and needs to be treated before it can meet emission standards.

[0003] At present, the Chinese utility model with the publication number: CN216152238U discloses a pipeline connection device for conveying industrial waste liquid, including a pair of first support plates, the pair of the first support plates are fixedly connected by a connecting plate, the opposite sides of the pair of the first support plates are slidably connected with a slide plate, a second support plate is arranged between the two slide plates, a plurality of clamping blocks are evenly distributed on the opposite sides of the two second support plates, a plurality of limit rods are arranged between the two slide plates, a cylinder is arranged between the slide plate and the second support plate adjacent to it, and a moving mechanism is arranged under one of the slide plates. The application is provided with a first support plate, a connecting plate, a drive motor, a support leg, a roller, a slide plate, a bar-shaped protrusion, a limit rod, a second support plate, a clamping block, teeth, a gear, a cylinder and a slide groove structure, and the application can fix and move the pipeline during the installation process, so as to facilitate the construction personnel to dock and calibrate the pipeline.

[0004] Although the existing semiconductor waste liquid transmission pipeline can filter out other impurities such as metal particles inside, the filter will become clogged after long-term use, and the filter is arranged inside the pipeline, so it is not convenient to remove the filter to clean the impurities accumulated by filtering, and the actual use effect is not good; and because the waste liquid flows at a fast speed inside the pipeline, the impact force on the pipeline is strong. The existing semiconductor waste liquid transmission pipeline lacks a structure that can buffer the waste liquid. Therefore, the pipeline is easily cracked by the impact of high-speed flowing waste liquid for a long time, causing waste liquid leakage. Utility Model Content

[0005] The utility model aims to provide a combined device for buffering and transmitting waste liquid of semiconductor equipment, which has the advantages of being convenient for cleaning impurities filtered out of pipelines and buffering the flow rate of waste liquid.

[0006] The above technical purpose of the utility model is achieved through the following technical solutions: a combined device for buffering and transmitting waste liquid from semiconductor equipment, including a conveying pipeline, wherein both ends of the conveying pipeline are respectively threadedly connected with a connecting elbow and a U-shaped tube, the central end of the conveying pipeline is fixedly connected with a fixed disk, both sides of the fixed disk are symmetrically provided with through holes opened on the surface of the conveying pipeline, both sides of the surface of the fixed disk are provided with mounting covers slidably connected to the conveying pipeline, and a filter cotton sleeve sleeve mounted on the surface of the conveying pipeline is installed on the side of the fixed disk close to the U-shaped tube.

[0007] By adopting the above technical scheme, the waste liquid is blocked by the fixed disk, so that the waste liquid flows out through the through hole into the channel between the installation cover and the fixed disk, so that the impurities inside the waste liquid are filtered through the filter cotton sleeve, and then the installation cover is opened. Since there is no obstruction around the filter cotton sleeve, the impurities are scraped off more conveniently, thereby facilitating the cleaning of impurities inside the pipeline and improving practicality; when the waste liquid flows on the surface of the first spiral disk and the second spiral disk, the first spiral disk and the second spiral disk block the waste liquid, so that the flow direction of the waste liquid is opposite, thereby buffering the flow speed of the waste liquid, thereby reducing damage to the pipeline and increasing the service life of the pipeline.

[0008] The utility model is further configured as follows: both sides of the interior of the delivery pipeline are fixedly connected with a cross bracket, the interior of the delivery pipeline is fixedly connected with a fixing rod through the cross bracket, both sides of the surface of the fixing rod are fixedly sleeved with a first spiral disk and a second spiral disk, and the spiral directions of the first spiral disk and the second spiral disk are opposite.

[0009] By adopting the above technical solution, the flow of waste liquid is blocked by the first spiral disk and the second spiral disk, so that the flow direction of the waste liquid is opposite, thereby buffering the flow speed of the waste liquid, thereby reducing damage to the pipeline and increasing the service life of the pipeline.

[0010] The utility model is further configured as follows: a fastening bolt is threadedly connected on one side of the two installation covers close to each other.

[0011] The above technical solution is used to fix the two installation covers together.

[0012] The utility model is further configured as follows: a sealing sleeve which is in sliding connection with the surface of the conveying pipeline is fixedly installed on one side of the two installation covers which are away from each other.

[0013] The above technical solution is adopted to improve the sealing performance and prevent the leakage of waste liquid.

[0014] The utility model is further configured as follows: an embedding groove for clamping with the filter cotton sleeve is provided between the side of the fixing plate close to the U-shaped tube and the installation cover.

[0015] The above technical solution is adopted to facilitate the fixing of the filter cotton sleeve and avoid displacement of the filter cotton sleeve.

[0016] The utility model is further configured as follows: the connecting elbow and the U-shaped pipe are fixedly connected with a connecting flange at one end away from the conveying pipeline.

[0017] The above technical solution is adopted to facilitate the sealed connection with the waste liquid outlet pipeline and the input end of the pump.

[0018] The utility model is further configured as follows: an end of the cross bracket away from the conveying pipeline is fixedly connected with an arc head.

[0019] By adopting the above technical solution, the waste liquid can be dispersed to both sides, reducing the impact force on the cross support.

[0020] The utility model is further configured as follows: water holes are opened inside the first spiral disk and the second spiral disk.

[0021] By adopting the above technical solution, part of the waste liquid can flow inside the first spiral disk and the second spiral disk, thereby reducing the impact force and improving the buffering effect.

[0022] In summary, the utility model has the following beneficial effects:

[0023] 1. The waste liquid is blocked by the fixed plate, so that the waste liquid flows out through the through hole into the channel between the installation cover and the fixed plate, so that the impurities inside the waste liquid are filtered through the filter cotton sleeve, and then the installation cover is opened. Since there is no obstruction around the filter cotton sleeve, it is more convenient to scrape off the impurities, thereby facilitating the cleaning of impurities inside the pipeline and improving practicality;

[0024] 2. When the waste liquid flows on the surfaces of the first spiral disk and the second spiral disk, the first spiral disk and the second spiral disk block the waste liquid, making the flow direction of the waste liquid opposite, thereby buffering the flow speed of the waste liquid, thereby reducing damage to the pipeline and increasing the service life of the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the utility model;

[0026] Figure 2 It is a cross-sectional view of the structure of the utility model;

[0027] Figure 3 This utility model Figure 2 Enlarged view of point A in .

[0028] Figure numerals: 1. conveying pipeline; 2. connecting elbow; 3. U-shaped tube; 4. mounting cover; 5. fixing plate; 6. through hole; 7. filter cotton sleeve; 8. cross bracket; 9. fixing rod; 10. first spiral plate; 11. second spiral plate; 12. fastening bolt; 13. sealing sleeve; 14. connecting flange; 15. arc head; 16. water hole; 17. embedded groove. DETAILED DESCRIPTION

[0029] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0030] Embodiment 1:

[0031] refer to Figure 1 , Figure 2 , Figure 3 , a combined device for buffering and transmitting waste liquid of semiconductor equipment, comprising a conveying pipeline 1, wherein both ends of the conveying pipeline 1 are respectively threadedly connected with a connecting elbow 2 and a U-shaped tube 3, a central end of the conveying pipeline 1 is fixedly connected with a fixing plate 5, both sides of the fixing plate 5 are symmetrically provided with through holes 6 opened on the surface of the conveying pipeline 1, both sides of the surface of the fixing plate 5 are provided with mounting covers 4 slidably connected with the conveying pipeline 1, and a filter cotton sleeve 7 sleeved on the surface of the conveying pipeline 1 is installed on one side of the fixing plate 5 close to the U-shaped tube 3; the waste liquid is blocked by the fixing plate 5, so that the waste liquid flows out through the through hole 6 to the channel between the mounting cover 4 and the fixing plate 5, so that the impurities inside the waste liquid are filtered through the filter cotton sleeve 7, and then the mounting cover 4 is opened. Since there is no obstruction around the filter cotton sleeve 7, it is more convenient to scrape off the impurities, thereby facilitating the cleaning of impurities inside the pipeline and improving practicality.

[0032] refer to Figure 1 , Figure 2 A fastening bolt 12 is threadedly connected to one side of the two mounting covers 4 that are close to each other, and is used to fix the two mounting covers 4 together.

[0033] refer to Figure 2 , Figure 3 The two mounting covers 4 are fixedly mounted with sealing sleeves 13 that are slidably connected to the surface of the conveying pipeline 1 on the sides away from each other, so as to improve the sealing performance and prevent the waste liquid from leaking out.

[0034] refer to Figure 3 A fixing groove 17 for engaging with the filter cotton sleeve 7 is provided between the side of the fixing plate 5 close to the U-shaped tube 3 and the mounting cover 4, so as to facilitate the fixing of the filter cotton sleeve 7 and prevent the filter cotton sleeve 7 from displacement.

[0035] Brief description of the use process: by connecting the connecting elbow 2 to the waste liquid outlet pipe, and connecting the U-shaped tube 3 to the input end of the pump, the waste liquid is allowed to flow inside the conveying pipeline 1, and the waste liquid is blocked by the fixed disk 5, so that the waste liquid flows out through the through hole 6 to the channel between the installation cover 4 and the fixed disk 5, so that the impurities inside the waste liquid are filtered through the filter cotton sleeve 7, and then output to the U-shaped tube 3 for discharge, and then by opening the installation cover 4, since there is no obstruction around the filter cotton sleeve 7, it is relatively convenient to scrape off the impurities, thereby facilitating the cleaning of the impurities inside the pipeline.

[0036] Embodiment 2:

[0037] refer to Figure 1 , Figure 2 , Figure 3 A combined device for buffering and transmitting waste liquid of semiconductor equipment, wherein a cross bracket 8 is fixedly connected to both sides of the inside of a conveying pipeline 1, a fixing rod 9 is fixedly connected to the inside of the conveying pipeline 1 through the cross bracket 8, a first spiral disk 10 and a second spiral disk 11 are fixedly sleeved on both sides of the surface of the fixing rod 9, and the spiral directions of the first spiral disk 10 and the second spiral disk 11 are opposite; when the waste liquid flows on the surface of the first spiral disk 10 and the second spiral disk 11, the first spiral disk 10 and the second spiral disk 11 block the waste liquid, making the flow direction of the waste liquid opposite, thereby buffering the flow speed of the waste liquid, thereby reducing damage to the pipeline and improving the service life of the pipeline.

[0038] refer to Figure 1 , Figure 2 The ends of the connecting elbow 2 and the U-shaped pipe 3 away from the conveying pipeline 1 are fixedly connected with a connecting flange 14, which is convenient for sealing connection with the waste liquid outlet pipeline and the input end of the pump.

[0039] refer to Figure 2 One end of the cross bracket 8 away from the conveying pipeline 1 is fixedly connected with an arc head 15, which can disperse the waste liquid to both sides and reduce the impact force on the cross bracket 8.

[0040] refer to Figure 3 Water holes 16 are opened inside the first spiral disk 10 and the second spiral disk 11, so that part of the waste liquid can flow inside the first spiral disk 10 and the second spiral disk 11, thereby reducing the impact force and improving the buffering effect.

[0041] Brief description of the usage process: the first spiral disk 10 and the second spiral disk 11 control the flow direction of the waste liquid during the flow of the waste liquid in the conveying pipeline 1. When the waste liquid is on the surface of the first spiral disk 10, it will flow in the spiral direction of the first spiral disk 10. However, when passing through the surface of the second spiral disk 11, the spiral direction of the second spiral disk 11 is opposite, so the waste liquid will be blocked and flow in the opposite direction, and circulate back and forth in the conveying pipeline 1, thereby buffering the flow speed of the waste liquid.

[0042] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A combined device for buffering and transferring waste liquid from semiconductor equipment, comprising a transfer pipeline (1), characterized in that: The two ends of the delivery pipeline (1) are respectively connected by threads with a connecting elbow (2) and a U-shaped pipe (3); the central end of the delivery pipeline (1) is fixedly connected to a fixing plate (5); through holes (6) opened on the surface of the delivery pipeline (1) are symmetrically arranged on both sides of the fixing plate (5); mounting covers (4) slidably connected to the delivery pipeline (1) are arranged on both sides of the surface of the fixing plate (5); and a filter cotton sleeve (7) sleeved on the surface of the delivery pipeline (1) is installed on the side of the fixing plate (5) close to the U-shaped pipe (3).

2. The combined device for buffering and transferring waste liquid from semiconductor equipment according to claim 1, characterized in that: A cross bracket (8) is fixedly connected to both sides of the conveying pipeline (1), a fixing rod (9) is fixedly connected to the inside of the conveying pipeline (1) via the cross bracket (8), a first spiral disk (10) and a second spiral disk (11) are fixedly sleeved on both sides of the surface of the fixing rod (9), and the spiral directions of the first spiral disk (10) and the second spiral disk (11) are opposite.

3. The combined device for buffering and transferring waste liquid from semiconductor equipment according to claim 1, characterized in that: A fastening bolt (12) is threadedly connected to one side of the two mounting covers (4) that are close to each other.

4. The combined device for buffering and transferring waste liquid from semiconductor equipment according to claim 1, characterized in that: A sealing sleeve (13) which is slidably connected to the surface of the conveying pipeline (1) is fixedly mounted on the side of the two mounting covers (4) which are away from each other.

5. The combined device for buffering and transferring waste liquid from semiconductor equipment according to claim 1, characterized in that: An embedding groove (17) for clamping with the filter cotton sleeve (7) is provided between the side of the fixing plate (5) close to the U-shaped tube (3) and the installation cover (4).

6. The combined device for buffering and transferring waste liquid from semiconductor equipment according to claim 1, characterized in that: The connecting elbow (2) and the U-shaped pipe (3) are fixedly connected with a connecting flange (14) at one end away from the conveying pipeline (1).

7. The combined device for buffering and transferring waste liquid from semiconductor equipment according to claim 2, characterized in that: An arc-shaped head (15) is fixedly connected to one end of the cross bracket (8) away from the conveying pipeline (1).

8. The combined device for buffering and transferring waste liquid from semiconductor equipment according to claim 2, characterized in that: The first spiral disk (10) and the second spiral disk (11) are both provided with water holes (16) therein.

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