Vacuum chuck of wafer calibrator

Abstract

The utility model discloses a vacuum chuck of a wafer calibrator, which comprises a chuck body, the chuck body is provided with an air groove and at least one air inlet hole, the air inlet hole is communicated with the air groove, and the air inlet hole can be closed to be communicated with the atmosphere to keep negative air pressure when the negative air pressure of the air groove is formed. And when the negative pressure of the air groove is released, communication with the atmosphere can be opened to quickly recover the air pressure. According to the utility model, the duration of air pressure recovery is effectively shortened, the wafer can be moved as soon as possible after the calibration work is finished, and the working efficiency of the wafer calibrator is improved.

Description

Technical Field

[0001] The utility model relates to a suction cup, in particular to a vacuum suction cup of a wafer calibrator. Background Art

[0002] Wafer calibrator is a necessary equipment before wafer inspection and processing. During the calibration process, the wafer needs to be adsorbed on the suction cup, and a wafer adsorption suction cup is needed at this time. The existing wafer calibrator suction cup is mainly a simple integrated component with a ventilation duct underneath, and an additional fixing device is required between the rubber tube. The air flow is led to the suction cup surface through the ventilation duct, so that the groove on the suction cup surface is filled with negative pressure to achieve wafer adsorption. However, after the above-mentioned suction cup is working, a certain negative pressure will be maintained inside, and it will take 5-10 seconds for the internal negative pressure to balance with the external atmosphere, affecting work efficiency. Utility Model Content

[0003] The utility model aims at the technical problems existing in the prior art and provides a vacuum suction cup for a wafer calibrator.

[0004] The technical solution adopted by the utility model to solve its technical problems is: a wafer calibrator vacuum suction cup, including a suction cup body, the suction cup body is provided with an air groove and at least one air inlet hole, the air inlet hole is connected to the air groove, the air inlet hole can close the connection with the atmosphere to maintain the negative air pressure when the negative air pressure in the air groove is formed, and can open the connection with the atmosphere to quickly restore the air pressure when the negative pressure in the air groove is released.

[0005] Furthermore, the suction cup body includes a suction cup surface and a base connected to the lower end of the suction cup surface, and each of the air inlet holes includes an upper half hole and a lower half hole, which are respectively arranged on the suction cup surface and the base, and are spliced ​​together up and down.

[0006] Furthermore, it also includes an elastic member and a movable baffle, wherein the elastic member is inserted through each of the air inlets, and the top end of the elastic member is connected to the movable baffle, and the bottom end of the elastic member is connected to the base; the connection between the air inlet and the atmosphere is opened or closed by moving the movable baffle.

[0007] Furthermore, the suction cup surface is provided with a first boss, and a first air vent is provided in the middle of the first boss; the base is provided with a second boss, a second air vent is provided in the middle of the second boss, and a connecting channel is provided on the outer periphery of the second boss, and the connecting channel connects the second air vent and the air inlet; the first boss is coaxially embedded in the second boss so that the second air vent coincides with the first air hole, and the first air hole, the second air hole and the connecting channel constitute the air groove to be connected with the air inlet.

[0008] Furthermore, one of the suction cup surface and the base is provided with at least one clamping portion, and the other is provided with at least one clamping groove, and the clamping portion and the clamping groove are clamped and matched with each other.

[0009] Furthermore, the suction cup surface is provided with at least one group of clamping parts, each group includes two relatively arranged clamping parts, the clamping parts are convexly arranged at the bottom end of the suction cup surface, and correspondingly, the base is provided with at least one clamping groove, which is recessed at the top end of the base; the lower half hole is arranged in the clamping groove, and correspondingly, the upper half hole is arranged between the two relatively arranged clamping parts.

[0010] Furthermore, one of the base and the suction cup surface is provided with at least one positioning column, and the other is provided with a corresponding positioning hole, and the positioning column and the positioning hole are plugged into each other.

[0011] Furthermore, the base is provided with at least one third boss, a hollow groove is provided in the third boss, a sensor is installed in the hollow groove, and the sensor includes a vibration sensor and a pressure sensor.

[0012] Furthermore, a plurality of interconnected vacuum grooves and connecting grooves are provided on the top of the suction cup surface, and the connecting grooves and vacuum grooves are connected to the first vent hole.

[0013] Furthermore, the vacuum groove is annular and arranged on the outer periphery of the second vent hole, the connecting groove extends radially and connects the vacuum groove and the second vent hole, and the cross-sections of the connecting groove and the vacuum groove are inverted trapezoidal.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] 1. In the utility model, the suction cup body is provided with an air groove and an air inlet hole, which is connected to the air groove. When the negative air pressure in the air groove is formed, the air inlet hole can be closed to maintain the negative air pressure to realize the adsorption function, and when the negative pressure in the air groove is released, the air inlet hole can be opened to quickly restore the air pressure, which effectively shortens the time for restoring the air pressure, ensures that the wafer can be moved as soon as possible after the calibration work is completed, and improves the working efficiency of the wafer calibrator.

[0016] 2. The utility model includes an elastic member and a movable baffle. The elastic member is inserted into each air inlet, and the top of the elastic member is connected to the movable baffle. The bottom of the elastic member is connected to the base to drive the movable baffle to open the air inlet. The gas pressure difference is used to drive the movable baffle to move and close the air inlet to maintain negative pressure. The structural design is ingenious.

[0017] 3. In the utility model, the suction cup body includes a suction cup surface and a base connected to the lower end of the suction cup surface, the suction cup surface is provided with a clamping portion, the base is provided with a clamping groove, the clamping portion and the clamping groove are clamped and matched with each other; in addition, the base is provided with a positioning column, the suction cup surface is provided with a positioning hole, the positioning column and the positioning hole are plugged into each other, so that the suction cup body can be quickly assembled, so that suction cup surfaces of different sizes can be replaced to adapt to wafers of different sizes, thereby improving the work efficiency of replacing the suction cup body.

[0018] 4. In the utility model, the base is provided with two third bosses, and an empty groove is provided in the third boss. A vibration sensor and a pressure sensor are installed in the empty groove, which can detect the vibration and air pressure conditions of the suction cup body during operation to ensure a stable working state. When a fault is understood, the fault condition can be read through the sensor information.

[0019] The utility model is further described in detail below in conjunction with the accompanying drawings and embodiments; however, the vacuum chuck of a wafer aligner of the utility model is not limited to the embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional diagram of the utility model;

[0021] Figure 2 This is the front view of the utility model (after hiding the movable stopper);

[0022] Figure 3 It is a cross-sectional view of the utility model;

[0023] Figure 4 It is an exploded schematic diagram of the utility model;

[0024] Figure 5 It is a three-dimensional diagram of the suction cup surface of the utility model;

[0025] In the figure:

[0026] 1. Suction cup surface; 11. First boss; 12. First vent hole; 13. Clamping portion; 14. Positioning hole; 15. Vacuum groove; 16. Connecting groove;

[0027] 2. base; 21. second boss; 22. second vent hole; 23. connecting channel; 24. snap-fit ​​groove; 25. positioning column;

[0028] 26. third boss; 27. empty slot;

[0029] 3. Air inlet; 31. Upper half hole; 32. Lower half hole;

[0030] 4. Elastic parts;

[0031] 5. Movable baffle. DETAILED DESCRIPTION

[0032] In the present utility model, the terms "first", "second", "third", etc. are only used to distinguish similar objects, rather than to describe a specific order or sequence, and cannot be understood as indicating or implying relative importance. In the description, the orientation or position relationship indicated by "upper", "lower", "top / bottom", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present utility model, rather than indicating or implying that the device referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present utility model. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0033] See also Figures 1 to 5 As shown, the utility model is a wafer calibrator vacuum suction cup, including a suction cup body, the suction cup body is provided with an air groove and at least one air inlet hole 3, the air inlet hole 3 is connected with the air groove, and when the negative air pressure of the air groove is formed, the air inlet hole 3 can close the connection with the atmosphere to maintain the negative air pressure to realize the adsorption function, and when the negative pressure of the air groove is released, the connection with the atmosphere can be opened to quickly restore the air pressure, which effectively shortens the time for restoring the air pressure, ensures that the wafer can be moved as soon as possible after the calibration work is completed, and improves the working efficiency of the wafer calibrator.

[0034] See also Figure 1 and Figure 2 As shown, the suction cup body includes a suction cup surface 1 and a base 2 connected to the lower end of the suction cup surface 1. The suction cup surface 1 and the base 2 can be quickly assembled, which is convenient for replacing suction cup surfaces 1 of different sizes to adapt to wafers of different sizes, thereby improving the work efficiency of replacing the suction cup body. The number of air inlet holes 3 can be one, two, or even three, etc., and can be set according to the size of the base 2 or the air groove. The multiple air inlet holes 3 can be symmetrically distributed or circumferentially distributed. In the present embodiment, taking the suction cup body symmetrically provided with two air inlet holes 3 as an example, each air inlet hole 3 includes an upper half hole 31 and a lower half hole 32, and the upper half hole 31 and the lower half hole 32 are respectively provided on the suction cup surface 1 and the base 2, and spliced ​​together from top to bottom.

[0035] See also Figure 3 As shown, it also includes an elastic member 4 and a movable baffle 5. The elastic member 4 is penetrated through each air inlet 3, and the top of the elastic member 4 is connected to the movable baffle 5, and the bottom of the elastic member 4 is connected to the base 2. The elastic force of the elastic member 4 is used to drive the movable baffle 5 to be in a state of opening the air inlet 3. At this time, the pressure of the air groove is the same as the external atmospheric pressure; one side of the movable baffle 5 faces the air groove, and the other side of the movable baffle 5 faces the atmosphere. When the air groove generates negative pressure, the movable baffle 5 overcomes the elastic force of the elastic member 4 under the action of the pressure difference on both sides, moves to close the connection between the air inlet 3 and the atmosphere, thereby maintaining the negative pressure in the air groove. The elastic member 4 adopts a spring or a spring sheet, and the structural design is ingenious.

[0036] See also Figure 4 As shown, the base 2 is provided with a second boss 21, a second air vent 22 is provided in the middle of the second boss 21, a connecting channel 23 is provided on the periphery of the second boss 21, and the connecting channel 23 connects the second air vent 22 and the air inlet 3; a mounting groove is provided at the periphery of the second boss 21 relative to the air inlet 3, the groove direction of the mounting groove is consistent with the hole direction of the air inlet 3, and the bottom end of the elastic member 4 is connected to the mounting groove; the base 2 is provided with at least one third boss 26, an empty groove 27 is provided in the third boss 26, a sensor is installed in the empty groove 27, the sensor includes a vibration sensor and a pressure sensor, but is not limited to this, therefore, the vibration and air pressure conditions of the suction cup body during operation can be detected to ensure the stability of the working state, and the fault condition can be read through the sensor information when the fault is understood, so as to facilitate the subsequent optimization of movement and detection.

[0037] Furthermore, the third boss 26 is located at the outer periphery of the second boss 21, and there is a gap between the third boss 26 and the second boss 21, and a connecting channel 23 is formed. At least one third boss 26 is distributed around the second boss 21 in a circumferential direction, and the air inlet 3 can be set at the opposite ends of two adjacent third bosses 26. The number of the third bosses 26 can be set according to the number of the air inlet holes 3. For example, if there are two air inlet holes 3 in the figure, two third bosses 26 are set.

[0038] See also Figure 4 and Figure 5 As shown, the suction cup surface 1 is provided with a first boss 11, and a first vent hole 12 is provided in the middle of the first boss 11; a plurality of interconnected vacuum grooves 15 and connecting grooves 16 are provided at the top of the suction cup surface 1, and the connecting grooves 16 and the vacuum grooves 15 are connected with the first vent hole 12; the vacuum grooves 15 are annular and arranged on the periphery of the first vent hole 12, and the connecting grooves 16 extend radially and are connected between the vacuum grooves 15 and the first vent hole 12, and the cross-sections of the connecting grooves 16 and the vacuum grooves 15 are inverted trapezoidal, so that when the suction cup body adsorbs the wafer, it will not cause excessive pressure on the wafer, and at the same time, such a structure is easy to clean and will not accumulate dust. The first boss 11 is coaxially embedded in the second boss 21 so that the first vent hole 12 coincides with the second vent hole 22, and the first vent hole 12, the second vent hole 22, and the connecting channel 23 constitute an air groove to communicate with the air inlet 3.

[0039] See also Figure 4 and Figure 5As shown, one of the suction cup surface 1 and the base 2 is provided with at least one clamping portion 13, and the other is provided with at least one clamping groove 24, and the clamping portion 13 and the clamping groove 24 are clamped and matched with each other. In addition, one of the base 2 and the suction cup surface 1 is provided with at least one positioning column 25, and the other is provided with a corresponding positioning hole 14, and the positioning column 25 and the positioning hole 14 are plugged into each other. In this embodiment, the suction cup surface 1 is provided with two groups of clamping portions 13, each group includes two oppositely arranged clamping portions 13, and the clamping portions 13 are convexly arranged at the bottom end of the suction cup surface 1, and correspondingly, the base 2 is provided with two clamping grooves 24, and the clamping grooves 24 are concavely arranged at the top end of the base 2 and are located between the two third bosses 26; the lower half hole 32 is provided in the clamping groove 24, and correspondingly, the upper half hole 31 is provided between the two oppositely arranged clamping portions 13. In this embodiment, the base 2 is provided with positioning posts 25, the number of which is ten and distributed at the top of the third boss 26. Correspondingly, the suction cup surface 1 is provided with positioning holes 14, the number of which is ten and distributed at the bottom of the suction cup surface 1. Therefore, the suction cup surface 1 and the base 2 can remain fixed during operation, and when disassembly is required, the suction cup surface 1 only needs to be vertically pulled out for replacement.

[0040] The working principle of this embodiment is as follows: the air groove in the suction cup body is evacuated through the air pump connected to the air pipe. Since the movable baffle 5 blocks the air flow channel and the surrounding area is small, the gas flow rate in the air groove is fast, so a certain negative pressure can be quickly formed in the air groove. Due to the pressure difference between the inside and outside of the suction cup body, under the action of atmospheric pressure, the movable baffle 5 is pressed to the position of the air inlet 3, that is, the air inlet 3 is closed, the gas flow is blocked, and the internal negative pressure is ensured to be stable. During the working process, since the air inlet 3 is closed, a stable air pressure can be achieved.

[0041] After the work is finished, control the air pump to stop working. The air pipe under the suction cup body is connected to the atmosphere, and the internal air pressure begins to rise. In this embodiment, it takes about 1 second for the air pressure in the suction cup body to rise to a certain level. After 1 second, due to the elastic force of the elastic member 4, the movable baffle 5 is pushed open, and air can quickly enter and enter under the wafer through the rectangular snap-in groove 24, completing the unification of the internal and external air pressures in a short time. After the air pressure is balanced, the suction cup body can be directly removed. This process takes about 1.5 seconds in total, while the traditional wafer vacuum suction cup takes 5-10 seconds. Therefore, this embodiment improves the working efficiency of the wafer calibrator.

[0042] The utility model provides a wafer aligner vacuum suction cup, and the uninvolved parts are the same as those in the prior art or can be implemented by using the prior art.

[0043] The above embodiments are only used to further illustrate a wafer aligner vacuum chuck of the utility model, but the utility model is not limited to the embodiments. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the utility model fall within the protection scope of the technical solution of the utility model.

Claims

1. A wafer aligner vacuum chuck, characterized in that: The suction cup body is provided with an air groove and at least one air inlet hole, which is connected to the air groove. When negative air pressure in the air groove is formed, the air inlet hole can close the connection with the atmosphere to maintain the negative air pressure, and when the negative pressure in the air groove is released, the connection with the atmosphere can be opened to quickly restore the air pressure.

2. The vacuum suction cup according to claim 1, characterized in that: The suction cup body includes a suction cup surface and a base connected to the lower end of the suction cup surface. Each of the air inlet holes includes an upper half hole and a lower half hole. The upper half hole and the lower half hole are respectively arranged on the suction cup surface and the base, and are spliced ​​together from top to bottom.

3. The vacuum suction cup according to claim 2, characterized in that: It also includes an elastic member and a movable baffle, wherein the elastic member is inserted through each of the air inlets, the top end of the elastic member is connected to the movable baffle, and the bottom end of the elastic member is connected to the base; the movable baffle is moved to open or close the connection between the air inlet and the atmosphere.

4. The vacuum suction cup according to claim 3, characterized in that: The suction cup surface is provided with a first boss, and a first air vent is provided in the middle of the first boss; the base is provided with a second boss, and a second air vent is provided in the middle of the second boss. A connecting channel is provided on the outer periphery of the second boss, and the connecting channel connects the second air vent and the air inlet; the first boss is coaxially embedded in the second boss so that the second air hole coincides with the first air hole, and the first air hole, the second air hole and the connecting channel constitute the air groove to be connected with the air inlet.

5. The vacuum suction cup according to claim 2, characterized in that: One of the suction cup surface and the base is provided with at least one clamping portion, and the other is provided with at least one clamping groove, and the clamping portion and the clamping groove are clamped and matched with each other.

6. The vacuum suction cup according to claim 5, characterized in that: The suction cup surface is provided with at least one group of clamping parts, each group includes two relatively arranged clamping parts, the clamping parts are convexly arranged at the bottom end of the suction cup surface, and correspondingly, the base is provided with at least one clamping groove, which is recessed at the top end of the base; the lower half hole is arranged in the clamping groove, and correspondingly, the upper half hole is arranged between the two relatively arranged clamping parts.

7. The vacuum suction cup according to claim 2, characterized in that: One of the base and the suction cup surface is provided with at least one positioning column, and the other is provided with a corresponding positioning hole, and the positioning column and the positioning hole are plugged into each other.

8. The vacuum suction cup according to claim 2, characterized in that: The base is provided with at least one third boss, an empty slot is provided in the third boss, and a sensor is installed in the empty slot. The sensor includes a vibration sensor and a pressure sensor.

9. The vacuum suction cup according to claim 4, characterized in that: A plurality of mutually connected vacuum grooves and connecting grooves are provided on the top of the suction cup surface, and the connecting grooves and vacuum grooves are connected to the first vent hole.

10. The vacuum suction cup according to claim 9, characterized in that: The vacuum groove is annular and arranged on the outer periphery of the second vent hole. The connecting groove extends radially and connects the vacuum groove and the second vent hole. The cross-sections of the connecting groove and the vacuum groove are inverted trapezoidal.

Images