Core material synthesis equipment

Abstract

A touch screen master controller is arranged on the front side of a reaction box, a heat exchange aluminum plate is arranged in the reaction box, a micro-fluidic chip is arranged on the heat exchange aluminum plate through an inserting frame mechanism, a heat exchange coil pipe is embedded below the heat exchange aluminum plate, a heat exchange energy storage water tank is arranged on the rear side of the reaction box, and a temperature sensor and a pressure sensor are arranged in the reaction box. An intelligent control injection mechanism is arranged above the reaction box; according to the utility model, a micro-fluidic technology is used as a reaction control technology, so that the material mixing uniformity, the heat conduction efficiency, the synthesis efficiency and the product quality can be effectively improved, waste heat generated in the synthesis process can be effectively recovered and reused by arranging the heat exchange structure, and the production cost is reduced. And the flexibility and adaptability of production are improved through cooperation of multi-group independent control of the material injection mechanism and detachable modularization of all the structures, so that the synthesis requirements of different types of core materials are met.

Description

Technical Field

[0001] The utility model relates to the technical field of equipment, in particular to a core material synthesis equipment. Background Art

[0002] In the semiconductor chip manufacturing industry, the synthesis of core materials is a key step that affects the performance of the final product. Currently, the industry generally adopts batch or continuous flow synthesis processes based on chemical vapor deposition (CVD), physical vapor deposition (PVD) and other methods.

[0003] Although these methods have been widely used, they have the following major disadvantages: the batch synthesis method is limited by the size of the reactor and the reaction conditions, resulting in prolonged reaction time and low production efficiency; although the continuous flow method has been improved, it still has limitations for fast and efficient synthesis; the inaccurate control of parameters such as temperature, pressure, and gas flow rate will lead to fluctuations in the quality of synthetic materials, affecting the consistency and reliability of the products; the energy utilization efficiency in the traditional synthesis process is not ideal, especially under high temperature conditions, a large amount of thermal energy is not effectively utilized, resulting in energy waste; for different synthesis needs, existing equipment often needs to undergo complex adjustments or replacement of specific parts to adapt, which increases production costs and reduces production flexibility; the potential dangers of the chemical reaction process have not been fully addressed, such as the operation risks under high temperature and high pressure, etc., which poses a safety hazard. Therefore, the utility model proposes a core material synthesis device to solve the problems existing in the prior art. Summary of the invention

[0004] In view of the above problems, the purpose of the utility model is to propose a core material synthesis equipment, which utilizes microfluidic technology as a reaction control technology to effectively improve the uniformity of material mixing and improve the heat conduction efficiency, thereby improving the synthesis efficiency and product quality. By setting a heat exchange structure, the waste heat generated in the synthesis process can be effectively recovered and reused. The multi-group independent control of the injection mechanism and the detachable modularization between the structures improve the flexibility and adaptability of production to meet the synthesis needs of different types of core materials.

[0005] To achieve the purpose of the utility model, the utility model is implemented through the following technical solutions: a core material synthesis equipment, including a reaction box, a touch screen main controller, a heat exchange aluminum plate, a rack mechanism, a microfluidic chip, a heat exchange coil, a heat exchange energy storage water tank, a temperature sensor, a pressure sensor and an intelligent control injection mechanism, the touch screen main controller is arranged on the front side of the reaction box, a heat exchange aluminum plate is fixedly arranged in the reaction box, a microfluidic chip is arranged on the heat exchange aluminum plate through the rack mechanism, the lower side of the microfluidic chip is in contact with the heat exchange aluminum plate, a heat exchange coil is embedded under the heat exchange aluminum plate, a heat exchange energy storage water tank is arranged on the rear side of the reaction box, a temperature sensor and a pressure sensor are arranged in the reaction box to monitor the temperature and pressure in the reaction box, and an intelligent control injection mechanism is arranged above the reaction box.

[0006] A further improvement is that a pressure regulating pump is provided on one side wall of the reaction box and is connected to the inside of the reaction box, a pressure relief valve is provided on the other side wall of the reaction box for pressure relief treatment, and the heat exchange coil is connected to the pump suction pipe of the heat exchange energy storage tank.

[0007] Further improvements are: the rack mechanism includes a sealed plug interface, a plug frame, a clamping spring, a positioning splint and a roller; a sealed plug interface is opened on the front side of the reaction box; a plug frame is arranged above the heat exchange aluminum plate inserted into the sealed plug interface; positioning splints are symmetrically arranged on both sides of the plug frame through clamping springs; the clamping springs are symmetrically fixed between the outer side of the positioning splint and the inner side of the plug frame; rollers are embedded below both sides of the plug frame.

[0008] Further improvements are: guide grooves are set on the front and rear sides of the plug-in frame, sliding plates are fixedly set at both ends of the positioning clamp, the sliding plates are slidably adapted to the guide grooves, and a sealing panel is set between the front side of the plug-in frame and the sealing plug interface.

[0009] Further improvements are: the intelligent control injection mechanism includes an upper frame, a microfluidic pressure pump, a barrel mechanism, a quick-release head, an injection head tube and a metering valve; the upper frame is symmetrically fixed above the reaction box, a microfluidic pressure pump is installed below the upper frame, a barrel mechanism is provided on the reaction box between the upper frames, a quick-release head is provided at the input port of the microfluidic pressure pump, an injection head tube is symmetrically fixed through the reaction box, the injection head tube is located at the injection position above the microfluidic chip, a metering valve is provided on the injection head tube for precise metering control of the added material, and the upper end of the injection head tube is connected to the output port of the microfluidic pressure pump.

[0010] Further improvement is that: the barrel mechanism includes a positioning and placement groove, a material storage barrel, a sealing cover and a material extraction pipe, the reaction box is symmetrically provided with a positioning and placement groove, a material storage barrel is arranged in the positioning and placement groove, a sealing cover is sealedly installed above the material storage barrel, a material extraction pipe is sealed and inserted on the sealing cover and extends into the interior of the material storage barrel, and the upper end of the material extraction pipe is connected to a quick-release head.

[0011] The beneficial effects of the utility model are as follows: the utility model utilizes microfluidic technology as a reaction control technology, which can effectively improve the uniformity of material mixing and the heat conduction efficiency, thereby improving the synthesis efficiency and product quality. By setting a heat exchange structure, the waste heat generated in the synthesis process can be effectively recovered and reused. The multi-group independent control of the injection mechanism and the detachable modularization between the structures improve the flexibility and adaptability of production to meet the synthesis needs of different types of core materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is the front view of the utility model.

[0013] Figure 2 It is a front sectional view of the utility model.

[0014] Figure 3 It is a side sectional view of the utility model.

[0015] Among them: 1. Reaction box; 2. Touch screen main controller; 3. Heat exchange aluminum plate; 4. Microfluidic chip; 5. Heat exchange coil; 6. Heat exchange energy storage tank; 7. Temperature sensor; 8. Pressure sensor; 9. Pressure regulating pump; 10. Pressure relief valve port; 11. Sealing plug interface; 12. Plug-in frame; 13. Clamping spring; 14. Positioning splint; 15. Roller; 16. Guide slide; 17. Sliding plug plate; 18. Sealing panel; 19. Upper frame; 20. Microfluidic pressure pump; 21. Quick release head; 22. Injection head tube; 23. Metering valve; 24. Positioning placement slot; 25. Storage barrel; 26. Sealing cover; 27. Extraction pipe. DETAILED DESCRIPTION

[0016] In order to deepen the understanding of the present invention, the present invention will be further described in detail below in conjunction with an embodiment. The embodiment is only used to explain the present invention and does not constitute a limitation on the protection scope of the present invention.

[0017] according to Figure 1 , Figure 2 and Figure 3As shown, this embodiment provides a core material synthesis device, including a reaction box 1, a touch screen main controller 2, a heat exchange aluminum plate 3, a rack mechanism, a microfluidic chip 4, a heat exchange coil 5, a heat exchange energy storage water tank 6, a temperature sensor 7, a pressure sensor 8 and an intelligent control injection mechanism. The touch screen main controller 2 is arranged on the front side of the reaction box 1, and a heat exchange aluminum plate 3 is fixedly arranged in the reaction box 1. The microfluidic chip 4 is arranged on the heat exchange aluminum plate 3 through the rack mechanism. The lower side of the microfluidic chip is in contact with the heat exchange aluminum plate. A heat exchange coil 5 is embedded under the heat exchange aluminum plate 3. A heat exchange energy storage water tank 6 is arranged on the rear side of the reaction box 1 to recycle the heat generated during the reaction process and significantly reduce energy consumption. A temperature sensor 7 and a pressure sensor 8 are arranged in the reaction box 1 to monitor the temperature and pressure in the reaction box. An intelligent control injection mechanism is arranged above the reaction box 1.

[0018] A pressure regulating pump 9 is provided on one side wall of the reaction box 1 and is connected to the inside of the reaction box 1. A pressure relief valve port 10 is provided on the other side wall of the reaction box 1 for pressure relief treatment. Together with the temperature sensor and the pressure sensor, it can ensure that the synthesis process is carried out in a safe environment. The heat exchange coil 5 is connected to the pump suction pipe of the heat exchange energy storage water tank 6.

[0019] The plug-in rack mechanism includes a sealed plug-in interface 11, a plug-in frame 12, a clamping spring 13, a positioning clamping plate 14 and a roller 15. A sealed plug-in interface 11 is opened on the front side of the reaction box 1. A plug-in frame 12 is arranged above the heat exchange aluminum plate 3 inserted into the sealed plug-in interface 11. Positioning clamping plates 14 are symmetrically arranged on both sides of the plug-in frame 12 through clamping springs 13. The clamping springs are symmetrically fixed between the outer side of the positioning clamping plate and the inner side of the plug-in frame. Rollers 15 are embedded below both sides of the plug-in frame 12 to play a supporting and guiding role, making the insertion smoother, and at the same time limiting the bottom surface of the microfluidic chip after clamping.

[0020] Guide grooves 16 are arranged on the front and rear sides of the plug-in frame 12, sliding plates 17 are fixedly arranged at both ends of the positioning clamp 14, the sliding plates 17 are slidingly guided and adapted to the guide grooves 16, and a sealing panel 18 is arranged between the front side of the plug-in frame 12 and the sealing plug-in interface 11, which plays the role of sealing installation and avoids pressure changes inside the reaction box.

[0021] The intelligent control injection mechanism includes an upper frame 19, a microfluidic pressure pump 20, a barrel mechanism, a quick-release head 21, an injection head tube 22 and a metering valve 23. The upper frame 19 is symmetrically fixed above the reaction box 1, and the microfluidic pressure pump 20 is installed below the upper frame 19. The reaction box 1 between the upper frames 19 is provided with a barrel mechanism, and the input port of the microfluidic pressure pump 20 is provided with a quick-release head 21. The reaction box 1 is symmetrically and fixedly provided with an injection head tube 22. The injection head tube 22 is located at the injection position above the microfluidic chip 4. The injection head tube 22 is provided with a metering valve 23 for precise metering control of the added material. The upper end of the injection head tube 22 is connected to the output port of the microfluidic pressure pump 20.

[0022] The microfluidic technology that uses a microfluidic pressure pump in conjunction with a microfluidic chip can improve the uniformity of material mixing and heat exchange efficiency, thereby improving reaction efficiency and product consistency.

[0023] The barrel mechanism includes a positioning and placement groove 24, a material storage barrel 25, a sealing cover 26 and a material extraction pipe 27. The positioning and placement groove 24 is symmetrically arranged on the reaction box 1, and the material storage barrel 25 is arranged in the positioning and placement groove 24. A sealing cover 26 is sealed and installed above the material storage barrel 25. A material extraction pipe 27 is sealed and inserted on the sealing cover 26 and extends into the interior of the material storage barrel 25. The upper end of the material extraction pipe 27 is connected to the quick-release head 21 for extracting and injecting materials.

[0024] The temperature sensor, pressure sensor, pressure regulating pump, pressure relief valve port, microfluidic pressure pump and metering valve are all electrically connected to the touch screen main controller, which uniformly monitors, processes and controls the operation, thus achieving real-time monitoring and precise adjustment of key parameters (such as temperature, pressure and material ratio) in the synthesis process.

[0025] When the core material synthesis equipment is used, the rack mechanism is first pulled out, and the microfluidic chip is plugged into the plug-in frame according to the synthesis requirements. The rack mechanism is then inserted into the reaction box and sealed and locked. Then, according to the reaction requirements, the required number of storage barrels are placed in the positioning placement slots in sequence, and the sealing cover is covered to connect the upper end of the extraction tube to the quick-release head. Then, the synthesis data is set and started through the touch screen main controller. After the synthesis is completed, the plug-in frame is pulled out, the microfluidic chip is taken out, and the core material is taken out from the microfluidic chip, and then the next round of synthesis operation is carried out.

[0026] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A core material synthesis device, characterized in that: The invention comprises a reaction box (1), a touch screen main controller (2), a heat exchange aluminum plate (3), a rack mechanism, a microfluidic chip (4), a heat exchange coil (5), a heat exchange energy storage water tank (6), a temperature sensor (7), a pressure sensor (8) and an intelligent control injection mechanism, wherein the front side of the reaction box (1) is provided with a touch screen main controller (2), the reaction box (1) is provided with a heat exchange aluminum plate (3), the heat exchange aluminum plate (3) is provided with a microfluidic chip (4) via the rack mechanism, the heat exchange coil (5) is embedded below the heat exchange aluminum plate (3), the rear side of the reaction box (1) is provided with a heat exchange energy storage water tank (6), the reaction box (1) is provided with a temperature sensor (7) and a pressure sensor (8), and the top of the reaction box (1) is provided with an intelligent control injection mechanism; The intelligent control injection mechanism comprises an upper frame (19), a microfluidic pressure pump (20), a material barrel mechanism, a quick-release head (21), an injection head tube (22) and a metering valve (23); the upper frame (19) is symmetrically arranged above the reaction box (1); the microfluidic pressure pump (20) is arranged inside and below the upper frame (19); the reaction box (1) between the upper frames (19) is provided with a material barrel mechanism; the input port of the microfluidic pressure pump (20) is provided with a quick-release head (21); the reaction box (1) is symmetrically provided with an injection head tube (22); the injection head tube (22) is located at an injection position above the microfluidic chip (4); the injection head tube (22) is provided with a metering valve (23); and the upper end of the injection head tube (22) is connected to the output port of the microfluidic pressure pump (20).

2. A core material synthesis device according to claim 1, characterized in that: A pressure regulating pump (9) is provided on one side wall of the reaction box (1) and is in communication with the interior of the reaction box (1); a pressure relief valve port (10) is provided on the other side wall of the reaction box (1); and the heat exchange coil (5) is connected to a pump suction pipe of a heat exchange energy storage water tank (6).

3. The core material synthesis equipment according to claim 1, characterized in that: The plug-in frame mechanism comprises a sealed plug-in interface (11), a plug-in frame (12), a clamping spring (13), a positioning clamping plate (14) and a roller (15); the reaction box (1) is provided with a sealed plug-in interface (11) on the front side; a plug-in frame (12) is provided above the sealed plug-in interface (11) for inserting a heat exchange aluminum plate (3); positioning clamping plates (14) are symmetrically provided on both sides of the plug-in frame (12) through the clamping spring (13); and rollers (15) are embedded below both sides of the plug-in frame (12).

4. A core material synthesis device according to claim 3, characterized in that: The front and rear sides of the plug-in frame (12) are provided with guide grooves (16), and both ends of the positioning clamp (14) are provided with sliding plates (17). The sliding plates (17) are slidably matched with the guide grooves (16), and a sealing panel (18) is provided between the front side of the plug-in frame (12) and the sealing plug interface (11).

5. The core material synthesis equipment according to claim 1, characterized in that: The material barrel mechanism comprises a positioning placement groove (24), a material storage barrel (25), a sealing cover (26) and a material extraction pipe (27); the reaction box (1) is symmetrically provided with a positioning placement groove (24); a material storage barrel (25) is provided in the positioning placement groove (24); a sealing cover (26) is provided above the material storage barrel (25); a material extraction pipe (27) is provided on the sealing cover (26) and extends into the material storage barrel (25); the upper end of the material extraction pipe (27) is connected to the quick-release head (21).

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